WO1995002814B1 - Multiple angle spectroscopic analyzer - Google Patents
Multiple angle spectroscopic analyzerInfo
- Publication number
- WO1995002814B1 WO1995002814B1 PCT/US1994/006679 US9406679W WO9502814B1 WO 1995002814 B1 WO1995002814 B1 WO 1995002814B1 US 9406679 W US9406679 W US 9406679W WO 9502814 B1 WO9502814 B1 WO 9502814B1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- recited
- sample
- probe beam
- light source
- incidence
- Prior art date
Links
- 239000000523 sample Substances 0.000 claims abstract 20
- 238000001514 detection method Methods 0.000 claims 10
- 230000000875 corresponding Effects 0.000 claims 3
- 239000006185 dispersion Substances 0.000 abstract 1
- 238000005259 measurement Methods 0.000 abstract 1
- 230000003287 optical Effects 0.000 abstract 1
Abstract
An optical measurement device is disclosed for evaluating the parameters of a sample. The device includes a polychromatic source for generating a probe beam. The probe beam is focused on the sample surface. Individual rays within the reflected probe beam are simultaneously analyzed as a function of the position within the beam to provide information at multiple wavelengths. A filter, dispersion element and a two-dimensional photodetector array may be used so that the beam may be simultaneously analyzed at multiple angles of incidence and at multiple wavelengths. A variable image filter is also disclosed which allows a selection to be made as to the size of the area of the sample to be evaluated.
Claims
AMENDED CLAIMS
[received by the International Bureau on 9 January 1995 (09.01.95); original claims 35 cancelled; new claims 35-42 added; remaining claims unchanged (3 pages)]
31. An apparatus as recited in claim 30 further including a relay lens located in the path of the probe beam after it has interacted with the sample, said relay lens for placing an image of the beam as it exits at the lens means in the plane of said filter means.
32. A detection system as recited in claim 31 wherein the dimensions of the slit are selected so that the dimensions of the image of the transmitted portion of the beam falling on the detector means correspond to the dimensions of a row of detection elements.
33. A detection system as recited in claim 31 wherein the filter means is located such that the slit is aligned with a diameter of the beam.
34. A detection system as recited in claim 31 wherein the polarization of the beam is predominantly S-polarized along one axis and predominantly P-polarized along an orthogonal axis, and wherein said slit is oriented along one of said axes in a manner so that only S or P-polarized light is transmitted.
35. An apparatus for evaluating the characteristics of a sample comprising: first light source means for generating a first probe beam directed to reflect off the sample surface; first detection means for measuring the change in magnitude of the reflected first probe beam and generating a first output signal;
4 6
second light source means for generating a second probe beam directed to reflect off the sample surface; second detection means for analyzing the change in polarization state of the reflected second probe beam and generating a second output signal and wherein one of said light source means is polychromatic and one of said detection means generates output signals corresponding to a plurality of different wavelengths; and processor means for evaluating the first and second output signals to derive information about the characteristics of the sample.
36. An apparatus as recited in claim 35 wherein said first light source means is polychromatic.
37. An apparatus as recited in claim 35 wherein said first probe beam is directed to the sample such that various rays create a spread of angles of incidence and said first detection means generates output signals corresponding to a plurality of angles of incidence.
38. An apparatus as recited in claim 35 wherein said second light source means is polychromatic.
39. An apparatus as recited in claim 35 wherein said second probe beam is directed to the sample such that various rays create a spread of multiple angles of incidence.
4 7
40. An apparatus as recited in claim 39 wherein said second detection means generates output signals corresponding to a plurality of angles of incidence.
41. An apparatus as recited in claim 39 wherein the output signals generated by said second detection means represent an integration of rays having multiple angles of incidence.
42. An apparatus as recited in claim 35 wherein said first and second light source means are defined by a single, polychromatic radiation source.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP94921955A EP0708918B1 (en) | 1993-07-16 | 1994-06-14 | Multiple angle spectroscopic analyzer |
| JP7504543A JPH09504861A (en) | 1993-07-16 | 1994-06-14 | Multi-angle spectroscopic analyzer |
| DE69416838T DE69416838T2 (en) | 1993-07-16 | 1994-06-14 | DEVICE FOR SPECTRAL ANALYSIS UNDER A MULTIPLE ANGLE |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US08/093,178 | 1993-07-16 | ||
| US08/093,178 US5412473A (en) | 1993-07-16 | 1993-07-16 | Multiple angle spectroscopic analyzer utilizing interferometric and ellipsometric devices |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| WO1995002814A1 WO1995002814A1 (en) | 1995-01-26 |
| WO1995002814B1 true WO1995002814B1 (en) | 1995-02-23 |
Family
ID=22237587
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/US1994/006679 WO1995002814A1 (en) | 1993-07-16 | 1994-06-14 | Multiple angle spectroscopic analyzer |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US5412473A (en) |
| EP (2) | EP0882976A1 (en) |
| JP (1) | JPH09504861A (en) |
| DE (1) | DE69416838T2 (en) |
| WO (1) | WO1995002814A1 (en) |
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