WO1992021788A1 - Dispositif d'application a l'arc electrique de revetements sous des articles sous vide - Google Patents

Dispositif d'application a l'arc electrique de revetements sous des articles sous vide Download PDF

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Publication number
WO1992021788A1
WO1992021788A1 PCT/SU1991/000112 SU9100112W WO9221788A1 WO 1992021788 A1 WO1992021788 A1 WO 1992021788A1 SU 9100112 W SU9100112 W SU 9100112W WO 9221788 A1 WO9221788 A1 WO 9221788A1
Authority
WO
WIPO (PCT)
Prior art keywords
products
vacuum
electric arc
πyaτna
κaτοdnοgο
Prior art date
Application number
PCT/SU1991/000112
Other languages
English (en)
Russian (ru)
Inventor
Vadim Nikolaevich Lutsenko
Valentin Glebovich Padalka
Leonid Pavlovich Sablev
Rimma Ivanovna Stupak
Anatoly Afanasievich Andreev
Sergei Nikolaevich Grigoriev
Vladimir Ivanovich Shelakhaev
Original Assignee
Kharkovsky Fiziko-Tekhnichesky Institut
Moskovsky Stankoinstrumentalny Institut
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kharkovsky Fiziko-Tekhnichesky Institut, Moskovsky Stankoinstrumentalny Institut filed Critical Kharkovsky Fiziko-Tekhnichesky Institut
Priority to PCT/SU1991/000112 priority Critical patent/WO1992021788A1/fr
Publication of WO1992021788A1 publication Critical patent/WO1992021788A1/fr

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • H01J37/32064—Circuits specially adapted for controlling the arc discharge

Definitions

  • the application of the hood is carried out by the chambers of a portable electric device. Due to the high concentration of energy in the one-fifth of the arc from the arc, intense damage to the material of the process occurs.
  • This device is equipped with a quick and easy to use arc switch when the magnetic field is in operation and is always in motion.
  • ⁇ gda ⁇ a ⁇ dn ⁇ e ⁇ ya ⁇ n ⁇ d ⁇ s ⁇ igae ⁇ ⁇ tsa ⁇ a ⁇ da, s ⁇ eds ⁇ v ⁇ , ⁇ e- 5 delyavdee ⁇ l ⁇ zhenie ⁇ a ⁇ dn ⁇ g ⁇ ⁇ ya ⁇ na and vy ⁇ lnenn ⁇ e as da ⁇ chi ⁇ v ⁇ nechn ⁇ g ⁇ ⁇ l ⁇ zheniya ⁇ a ⁇ dn ⁇ g ⁇ ⁇ ya ⁇ na, us ⁇ an ⁇ v- lenny ⁇ near ⁇ ts ⁇ v ⁇ a ⁇ da, vy ⁇ aba ⁇ yvae ⁇ ele ⁇ iches ⁇ y signal ⁇ y ⁇ s ⁇ u ⁇ ae ⁇ on v ⁇ d bl ⁇ a u ⁇ avleniya, you are a connected with ⁇ d ⁇ g ⁇ adjustable keys
  • ⁇ as ⁇ y ⁇ ie iz ⁇ b ⁇ e ⁇ eniya ⁇ ⁇ sn ⁇ vu nas ⁇ yascheg ⁇ iz ⁇ b ⁇ e ⁇ eniya was ⁇ l ⁇ zhena task ⁇ az ⁇ ab ⁇ i us ⁇ ys ⁇ va for ele ⁇ dug ⁇ v ⁇ g ⁇ application ⁇ - 25 ⁇ y ⁇ y for products in va ⁇ uume with u ⁇ avlyaem ⁇ y ⁇ zadann ⁇ y ⁇ - g ⁇ amme ⁇ blas ⁇ yu ⁇ e ⁇ emescheniya ⁇ a ⁇ dny ⁇ ⁇ ya ⁇ en, ch ⁇ ⁇ zv ⁇ li- l ⁇ would ⁇ lucha ⁇ ⁇ y ⁇ iya zadann ⁇ g ⁇ ⁇ ilya on ⁇ ve ⁇ n ⁇ s ⁇ i products.
  • the extended receiver of the current location of the keyboard is one of the best places for serving the anode.
  • ch ⁇ by bl ⁇ u ⁇ avleniya s ⁇ de ⁇ zhal is ⁇ chni ⁇ sh ⁇ - ⁇ n ⁇ g ⁇ na ⁇ yazheniya and ⁇ e ⁇ atsi ⁇ nny usili ⁇ el
  • v ⁇ dy ⁇ g ⁇ were s ⁇ ve ⁇ s ⁇ venn ⁇ s ⁇ edineny with is ⁇ chni ⁇ m ⁇ n ⁇ g ⁇ na ⁇ yazheniya and da ⁇ chi ⁇ m ⁇ e ⁇ uscheg ⁇ ⁇ l ⁇ zheniya ⁇ a ⁇ dn ⁇ g ⁇ ⁇ ya ⁇ na and vy ⁇ dy - with u ⁇ avlyaemymi ⁇ lyuchami.
  • the performance of the patented device ensures that the product is not transmitted to it with the specified file type.
  • Fig. 3 the general terms of another variant of the device; according to the invention (a vacuum chamber is shown in a separate section)
  • Fig. 4 after cutting the direction of the L-L-L line to L-L
  • Fig. 5 Principle circuitry for electric arc coating of products in a vacuum ⁇ ⁇
  • Vacuum chamber I is equipped with a stage 2, elongated along with its optional axle, which is made from the evaporated material and has a large operable volume.
  • P ⁇ ve ⁇ n ⁇ s ⁇ 3 is ⁇ a ⁇ eniya ⁇ a ⁇ da 2 ⁇ g ⁇ anichiva- 10 e ⁇ sya izsli ⁇ vannym ⁇ ⁇ a ⁇ da 2 e ⁇ an ⁇ m 4.
  • Ports 7 and 8 are connected to the adjustable keys 15 10, which consist of the optional key II and element 12 of the control. With keys II, the negative side of the source 13 has been switched on; 0
  • Sender 14 makes it possible to place 15 cameras in camera I 5 with high specific resistance, for example, with two costs of 16.
  • the length of the output 15 must be no less than the length of the input 2, and the output 15 is set in parallel with the reversal of 3 of the evaporation of 2 in the immediate vicinity.
  • ⁇ dv ⁇ dy 16 and 17 are derived che ⁇ ez iz ⁇ lya ⁇ y 18 vm ⁇ n ⁇ i- ⁇ vannye in s ⁇ en ⁇ i ⁇ ame ⁇ y I na ⁇ uzhu e ⁇ y ⁇ ame ⁇ y I and ⁇ d ⁇ lyu- cheny che ⁇ ez ⁇ ezis ⁇ y 19 ⁇ ⁇ l ⁇ zhi ⁇ eln ⁇ tsu ⁇ lyusu is ⁇ chni- ⁇ a 13 ⁇ s ⁇ yann ⁇ g ⁇ ⁇ a and ne ⁇ s ⁇ eds ⁇ venn ⁇ ⁇ v ⁇ du bl ⁇ a5 20 u ⁇ avleniya.
  • Unit 20 of the power supply contains a source of 21 voltages and a specialized amplifier 22.
  • the outputs of the amplified amplifier 22 are connected to the power supply 16 and 17 of the source 15 of the sensor 14 and the source 21 of the main voltage, and the outputs with the elements of the 12 control keys II.
  • a device embodiment, as per the invention, as shown in FIG. 3, has been carried out by a similar device 15 ⁇ fig . ⁇ .
  • the device is equipped with an extended receiver 14 for current use of the receiver, which serves as an anode.
  • This anode as shown in Fig. 4, is made in the form of two heavy plates 26 of the material with a high specific resistance, for example, from stainless steel, it was only 0.1, --0, C% - 17.8%, Gy - 10.1, ⁇ - 0.8%, 5 - 0.02, Ge - other.
  • the processed product 31 (Fig. 4) in the form of a flat tape through step 32, made in the walls of the camera I, 30 will be inserted into the vacuum chamber I.
  • This device variant is agreed upon, it is wise to use it when product 31 (fig. 4) is imitated, it is in
  • Fig. 5 shows a basic electrical diagram. - b - Source 13 of the fixed current and unit 20 of the control unit ⁇ ⁇ ⁇ ⁇ ⁇ .
  • Is ⁇ chni ⁇ 13 ( ⁇ ig .5) ⁇ s ⁇ yann ⁇ g ⁇ ⁇ a s ⁇ de ⁇ zhi ⁇ ⁇ d ⁇ lyu- chenny ⁇ ⁇ e ⁇ azn ⁇ y se ⁇ i ⁇ e ⁇ emenn ⁇ g ⁇ ⁇ a, iz ⁇ b ⁇ azhenn ⁇ y 5 usl ⁇ vn ⁇ , vy ⁇ yami ⁇ el ⁇ s ⁇ yann ⁇ g ⁇ ⁇ a, s ⁇ b ⁇ anny ⁇ ⁇ e ⁇ azn ⁇ y m ⁇ s ⁇ v ⁇ y s ⁇ eme, s ⁇ s ⁇ yaschey of ⁇ e ⁇ di ⁇ d ⁇ v 38 and dvu ⁇ ⁇ i ⁇ is ⁇ ny ⁇ g ⁇ u ⁇ , ⁇ alvdaya of ⁇ y ⁇ s ⁇ s ⁇ i ⁇ of ⁇ e ⁇ ⁇ i ⁇ is ⁇ v 39 and 40, respectively, are connected to products 8 and 7 of category 2, respectively, and ballast is located at 41, on the whole.
  • the corrected keys II are part of the group of 39 and 40 systems, respectively.
  • Elements 12 of the control system are composed of the corresponding Mevdg separate divisions 42,43, 44,45 and 46, 15 47, 48,49, and 50,51.
  • the amplifier 22, unit 20 of the control unit is connected to 52, the output is connected to 53 and 55, the output is 54, the output is 54 ⁇ dy 56 and 57 ⁇ e ⁇ atsi ⁇ nn ⁇ g ⁇ usili ⁇ elya 22 s ⁇ e- dineny s ⁇ ve ⁇ s ⁇ venn ⁇ with ⁇ sdv ⁇ dami 17 and 16 da ⁇ chi ⁇ a 14 ⁇ e ⁇ uscheg ⁇ ⁇ l ⁇ zheniya ⁇ a ⁇ dn ⁇ g ⁇ ⁇ ya ⁇ na, and 58 and 58 v ⁇ dy ⁇ e ⁇ atsi ⁇ nn ⁇ g ⁇ usili ⁇ elya 22 ⁇ dae ⁇ sya ⁇ n ⁇ e na ⁇ yazhenie ⁇ is ⁇ chni ⁇ a 21 ⁇ n ⁇ g ⁇ na ⁇ yazheniya.
  • Payloads of 25 have ten fixed positions for moving 3 of the unit 2.
  • Unit length 2
  • pressure is released, which are shared by the logical tasks.
  • the range of pressure of the appliance of the electric arc spraying with the upper part is limited by the pressure of 10 Pa, and from the lower part the pressure is impaired,
  • the products of the erosion of the discharge 2, which are reduced by the arc discharge, are carried out.
  • the anode (chamber I) and the power supply 2 are supplied with voltage from the source 13 and the consumer is supplied with power.
  • the voltage ⁇ on the diagonal of the bridge is divided by the following: where & is the magnitude of the resistance of resistance 19; ⁇ is the value of resistance of day 15; ⁇ ⁇ - the value of the resistance of the branch of the 15th anniversary of one of the current (at Fig. 17) and the 24th plasma;
  • the motion of the second spot 25 does not have the directional char- acter, this movement is sharp.
  • the zero voltage at the output of the amplifier 22 will then be when IX - and ⁇ , where 11 is the primary voltage, which is supplied from the voltage source 21.
  • vy ⁇ aba ⁇ yvaem ⁇ e is ⁇ chni ⁇ m 21 ⁇ n ⁇ g ⁇ na ⁇ yazheniya, izmeni ⁇ sv ⁇ yu value, ⁇ n ⁇ v ⁇ e ⁇ - l ⁇ zhenie ⁇ avn ⁇ vesiya, d ⁇ s ⁇ igaem ⁇ e ⁇ i (r ⁇ -) ° 3 ⁇ ⁇ 5 v ⁇ zni ⁇ ne ⁇ ⁇ i n ⁇ v ⁇ m value ⁇ , ⁇ es ⁇ ⁇ i n ⁇ v ⁇ y ⁇ dina ⁇ e X, ⁇ tsi ⁇ naln ⁇ y ⁇ .
  • a source of 21 voltages operates on the basis of this.
  • the pulse is lost.
  • a generator of 60 driving pulses generates signals with a frequency that is controlled by the resistance value of the resistor 67 and the capacitance ratio of the resistor 66.
  • va ⁇ ian ⁇ vy ⁇ lneniya us ⁇ ys ⁇ va ⁇ ⁇ ig. ⁇ tseles ⁇ b ⁇ azn ⁇ is ⁇ lz ⁇ va ⁇ ⁇ i ⁇ y ⁇ y applied on the product if the product 23 ( ⁇ ig.2) not ⁇ e ⁇ e ⁇ yvae ⁇ ⁇ a ⁇ d 2 ⁇ an ⁇ da - va ⁇ uumn ⁇ y ⁇ ame ⁇ y I.
  • Devices for electric arc spraying products in a vacuum allow different methods to be used. Intended use
  • Devices for electric arc spraying on products in a vacuum may be used for spraying heavy products, such as long, long-term

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

Un dispositif d'application à l'arc électrique de revêtements sous vide comprend une cathode (2) s'étendant le long de son axe longitudinal, composé d'une matière vaporisable et présentant une surface de vaporisation s'étendant le long de son axe longitudinal, il comprend également des conducteurs de courant (7, 8) situés sur les extrémités opposées de la cathode (2) et connectés à des commutateurs (10) reliés électriquement à une unité de commande (20), ainsi qu'à une source de courant continu (13) également reliée à l'anode, ainsi qu'un capteur (14) de position du point de vaporisation de la cathode relié électriquement à la source de courant continu (13), ainsi qu'à l'entrée de l'unité de commande (20).
PCT/SU1991/000112 1991-05-31 1991-05-31 Dispositif d'application a l'arc electrique de revetements sous des articles sous vide WO1992021788A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/SU1991/000112 WO1992021788A1 (fr) 1991-05-31 1991-05-31 Dispositif d'application a l'arc electrique de revetements sous des articles sous vide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/SU1991/000112 WO1992021788A1 (fr) 1991-05-31 1991-05-31 Dispositif d'application a l'arc electrique de revetements sous des articles sous vide

Publications (1)

Publication Number Publication Date
WO1992021788A1 true WO1992021788A1 (fr) 1992-12-10

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994016117A1 (fr) * 1992-12-30 1994-07-21 Nauchno-Proizvodstvennoe Predpriyatie 'novatekh' Dispositif de traitement d'articles sous vide au plasma

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU597246A1 (ru) * 1979-01-25 1979-01-25 Предприятие П/Я В-8851 Электродуговой испаритель металлов
SU711787A1 (ru) * 1978-06-17 1980-10-07 Предприятие П/Я В-8851 Электродуговой испаритель металлов
EP0283095A1 (fr) * 1987-03-16 1988-09-21 Hauzer Holding B.V. Méthode et dispositif pour déplacer mécaniquement un dispositif de génération de champ magnétique dans un dispositif d'évaporation par décharge par arc de cathode
EP0284145A1 (fr) * 1987-03-16 1988-09-28 Hauzer Holding B.V. Dispositif d'évaporation par décharge par arc de cathode

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU711787A1 (ru) * 1978-06-17 1980-10-07 Предприятие П/Я В-8851 Электродуговой испаритель металлов
SU597246A1 (ru) * 1979-01-25 1979-01-25 Предприятие П/Я В-8851 Электродуговой испаритель металлов
EP0283095A1 (fr) * 1987-03-16 1988-09-21 Hauzer Holding B.V. Méthode et dispositif pour déplacer mécaniquement un dispositif de génération de champ magnétique dans un dispositif d'évaporation par décharge par arc de cathode
EP0284145A1 (fr) * 1987-03-16 1988-09-28 Hauzer Holding B.V. Dispositif d'évaporation par décharge par arc de cathode

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994016117A1 (fr) * 1992-12-30 1994-07-21 Nauchno-Proizvodstvennoe Predpriyatie 'novatekh' Dispositif de traitement d'articles sous vide au plasma

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