WO1992008946A3 - Device for measuring linear dimensions on a structured surface of an object - Google Patents

Device for measuring linear dimensions on a structured surface of an object Download PDF

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Publication number
WO1992008946A3
WO1992008946A3 PCT/EP1991/002088 EP9102088W WO9208946A3 WO 1992008946 A3 WO1992008946 A3 WO 1992008946A3 EP 9102088 W EP9102088 W EP 9102088W WO 9208946 A3 WO9208946 A3 WO 9208946A3
Authority
WO
Grant status
Application
Patent type
Prior art keywords
resonator
surface
object
connected
circuit
Prior art date
Application number
PCT/EP1991/002088
Other languages
German (de)
French (fr)
Other versions
WO1992008946A2 (en )
Inventor
Karlheinz Bartzke
Rolf Thiemer
Erhard Mende
Manfred Ziesemann
Ludwig Fritzsch
Eberhard Seydel
Joachim Heim
Manfred Weihnacht
Burkhard Hoffmann
Original Assignee
Jenoptik Jena Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/08Probe characteristics
    • G01Q70/14Particular materials
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic means
    • G01B7/28Measuring arrangements characterised by the use of electric or magnetic means for measuring contours or curvatures
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic means
    • G01B7/34Measuring arrangements characterised by the use of electric or magnetic means for measuring roughness or irregularity of surfaces
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/32AC mode
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38Probes, their manufacture, or their related instrumentation, e.g. holders

Abstract

Proposed is a device designed to measure linear dimensions on the structured surface (6) of an object (7), a pointed sensor tip (5) touching the surface (6) being fixed to a resonator (4) which is moved parallel to the surface (6) and whose position is determined using ordinary distance-measuring systems. In addition, the resonator (4) is connected to a processing circuit designed to detect resonance changes and to a subsequent control circuit (10) which is connected to position-control elements (2, 3) acting on the resonator (4) in a direction perpendicular to the surface (6). A phase-measurement circuit (9) is used as the processing circuit, the inputs to this circuit being connected to electrodes which are attached to the resonator (4).
PCT/EP1991/002088 1990-11-05 1991-11-05 Device for measuring linear dimensions on a structured surface of an object WO1992008946A3 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE19904035076 DE4035076A1 (en) 1990-11-05 1990-11-05 Arrangement for measuring linear dimensions on a structured surface of a measurement object
DEP4035076.2 1990-11-05

Publications (2)

Publication Number Publication Date
WO1992008946A2 true WO1992008946A2 (en) 1992-05-29
WO1992008946A3 true true WO1992008946A3 (en) 1992-07-23

Family

ID=6417637

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP1991/002088 WO1992008946A3 (en) 1990-11-05 1991-11-05 Device for measuring linear dimensions on a structured surface of an object

Country Status (3)

Country Link
EP (1) EP0509078A1 (en)
DE (1) DE4035076A1 (en)
WO (1) WO1992008946A3 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10345993B4 (en) * 2003-10-02 2008-07-24 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method and apparatus for measuring and fine points of a tool in a tool holder and method for measuring a working force

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0290647A1 (en) * 1987-05-12 1988-11-17 International Business Machines Corporation Oscillating quartz atomic force microscope
WO1989000672A1 (en) * 1987-07-20 1989-01-26 Krautkrämer Gmbh & Co. Process for detecting a nearly pinpoint, essentially force-free contact of small area between a probe and a solid object, and contact detector
EP0338083A1 (en) * 1987-10-09 1989-10-25 Hitachi, Ltd. Scanning tunneling microscope with means for correcting surface data

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US33387A (en) * 1861-10-01 Improvement in printing-presses
GB1318701A (en) * 1970-01-30 1973-05-31 Rank Organisation Ltd Methods of waveform analysis and apparatus therefor
DE3532654C2 (en) * 1985-09-13 1988-10-06 Thyssen Industrie Ag, 4300 Essen, De

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0290647A1 (en) * 1987-05-12 1988-11-17 International Business Machines Corporation Oscillating quartz atomic force microscope
WO1989000672A1 (en) * 1987-07-20 1989-01-26 Krautkrämer Gmbh & Co. Process for detecting a nearly pinpoint, essentially force-free contact of small area between a probe and a solid object, and contact detector
EP0338083A1 (en) * 1987-10-09 1989-10-25 Hitachi, Ltd. Scanning tunneling microscope with means for correcting surface data

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
APPLIED PHYSICS LETTERS. Band 55, Nr. 22, 27. November 1989, (New York, US) P.C.D. Hobbs et al.: "Magnetic force microscopy with 25nm resolution", Seiten 2357-2359, siehe Seite 2357, linke Spalte, Abschnitt 2 - Seite 2358, rechte Spalte, Abschnitt 1; Figur 1 *
IBM TECHNICAL DISCLOSURE BULLETIN, Band 32, Nr. 88, 1. Januar 1990 (New York, US) "Combined scanning tunneling and capacitance microscope", Seiten 266-267 *
INTERNATIONAL JOURNAL OF ELECTRONICS, Band 68, Nr. 1, 1. Januar 1990 (London, GB) M. Ahmad: "Measurement of power system frequency deviation using a microprocessor", Seiten 161-164, siehe Abschnitt 2; Figur 1 *

Also Published As

Publication number Publication date Type
EP0509078A1 (en) 1992-10-21 application
WO1992008946A2 (en) 1992-05-29 application
DE4035076A1 (en) 1992-05-07 application

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