WO1992008946A3 - Anordnung zum messen linearer abmessungen auf einer strukturierten oberfläche eines messobjektes - Google Patents

Anordnung zum messen linearer abmessungen auf einer strukturierten oberfläche eines messobjektes Download PDF

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Publication number
WO1992008946A3
WO1992008946A3 PCT/EP1991/002088 EP9102088W WO9208946A3 WO 1992008946 A3 WO1992008946 A3 WO 1992008946A3 EP 9102088 W EP9102088 W EP 9102088W WO 9208946 A3 WO9208946 A3 WO 9208946A3
Authority
WO
WIPO (PCT)
Prior art keywords
resonator
circuit
linear dimensions
structured surface
measuring linear
Prior art date
Application number
PCT/EP1991/002088
Other languages
English (en)
French (fr)
Other versions
WO1992008946A2 (de
Inventor
Karlheinz Bartzke
Rolf Thiemer
Erhard Mende
Manfred Ziesemann
Ludwig Fritzsch
Eberhard Seydel
Joachim Heim
Manfred Weihnacht
Burkhard Hoffmann
Original Assignee
Jenoptik Jena Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jenoptik Jena Gmbh filed Critical Jenoptik Jena Gmbh
Publication of WO1992008946A2 publication Critical patent/WO1992008946A2/de
Publication of WO1992008946A3 publication Critical patent/WO1992008946A3/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/08—Probe characteristics
    • G01Q70/14—Particular materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/28—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/34—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/32—AC mode
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

Bei einer Anordnung zum Messen linearer Abmessungen auf einer strukturierten Oberfläche (6) eines Meßobjektes (7) ist eine die Oberfläche (6) antastende Spitze (5) auf einem Resonator (4) befestigt, der parallel zur Oberfläche (6) geführt wird und dessen Positionsbestimmung durch übliche Wegmeßsysteme erfolgt. Der Resonator (4) ist ferner mit einer Auswerteschaltung zur Erfassung von Resonanzänderungen und mit einer anschließenden Regelschaltung (10) verbunden, die an senkrecht zur Oberfläche (6) auf den Resonator (4) wirkenden Stellelementen (2, 3) angeschlossen ist. Als Auswerteschaltung ist eine Phasenmeßschaltung (9) vorgesehen, deren Eingänge mit Elektroden verbunden sind, die am Resonator (4) befestigt sind.
PCT/EP1991/002088 1990-11-05 1991-11-05 Anordnung zum messen linearer abmessungen auf einer strukturierten oberfläche eines messobjektes WO1992008946A2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DEP4035076.2 1990-11-05
DE4035076A DE4035076A1 (de) 1990-11-05 1990-11-05 Anordnung zum messen linearer abmessungen auf einer strukturierten oberflaeche eines messobjektes

Publications (2)

Publication Number Publication Date
WO1992008946A2 WO1992008946A2 (de) 1992-05-29
WO1992008946A3 true WO1992008946A3 (de) 1992-07-23

Family

ID=6417637

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP1991/002088 WO1992008946A2 (de) 1990-11-05 1991-11-05 Anordnung zum messen linearer abmessungen auf einer strukturierten oberfläche eines messobjektes

Country Status (3)

Country Link
EP (1) EP0509078A1 (de)
DE (1) DE4035076A1 (de)
WO (1) WO1992008946A2 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10345993B4 (de) * 2003-10-02 2008-07-24 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zum Messen und zum Feinstellen eines Werkzeuges in einem Werkzeughalter und Verfahren zum Messen einer Bearbeitungskraft

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH667835A5 (en) * 1985-10-14 1988-11-15 Elektroniktechnologie Get Tactile sensor scanning workpiece surface - uses sensor pin in mechanical oscillation system with driver coil for intermittent contact with scanned surface
EP0290647A1 (de) * 1987-05-12 1988-11-17 International Business Machines Corporation Atomares Kräftemikroskop mit oscillierendem Quarz
WO1989000672A1 (en) * 1987-07-20 1989-01-26 Krautkrämer Gmbh & Co. Process for detecting a nearly pinpoint, essentially force-free contact of small area between a probe and a solid object, and contact detector
EP0338083A1 (de) * 1987-10-09 1989-10-25 Hitachi, Ltd. Rastertunnelmikroskop mit einer Vorrichtung zum Berichtigen von Oberflächendaten

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US33387A (en) * 1861-10-01 Improvement in printing-presses
GB1318701A (en) * 1970-01-30 1973-05-31 Rank Organisation Ltd Methods of waveform analysis and apparatus therefor
DE3532654A1 (de) * 1985-09-13 1987-03-26 Thyssen Industrie Oberflaechenpruefeinrichtung mit konturnachform-fuehrungssystem

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH667835A5 (en) * 1985-10-14 1988-11-15 Elektroniktechnologie Get Tactile sensor scanning workpiece surface - uses sensor pin in mechanical oscillation system with driver coil for intermittent contact with scanned surface
EP0290647A1 (de) * 1987-05-12 1988-11-17 International Business Machines Corporation Atomares Kräftemikroskop mit oscillierendem Quarz
WO1989000672A1 (en) * 1987-07-20 1989-01-26 Krautkrämer Gmbh & Co. Process for detecting a nearly pinpoint, essentially force-free contact of small area between a probe and a solid object, and contact detector
EP0338083A1 (de) * 1987-10-09 1989-10-25 Hitachi, Ltd. Rastertunnelmikroskop mit einer Vorrichtung zum Berichtigen von Oberflächendaten

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
APPLIED PHYSICS LETTERS. Band 55, Nr. 22, 27. November 1989, (New York, US) P.C.D. Hobbs et al.: "Magnetic force microscopy with 25nm resolution", Seiten 2357-2359, siehe Seite 2357, linke Spalte, Abschnitt 2 - Seite 2358, rechte Spalte, Abschnitt 1; Figur 1 *
IBM TECHNICAL DISCLOSURE BULLETIN, Band 32, Nr. 88, 1. Januar 1990 (New York, US) "Combined scanning tunneling and capacitance microscope", Seiten 266-267 *
INTERNATIONAL JOURNAL OF ELECTRONICS, Band 68, Nr. 1, 1. Januar 1990 (London, GB) M. Ahmad: "Measurement of power system frequency deviation using a microprocessor", Seiten 161-164, siehe Abschnitt 2; Figur 1 *

Also Published As

Publication number Publication date
DE4035076A1 (de) 1992-05-07
WO1992008946A2 (de) 1992-05-29
EP0509078A1 (de) 1992-10-21

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