WO1989000672A1 - Procede et dispositif de detection d'un contact a surface reduite, pratiquement ponctuel et essentiellement soustrait a l'action de forces, entre une sonde et un objet solide - Google Patents

Procede et dispositif de detection d'un contact a surface reduite, pratiquement ponctuel et essentiellement soustrait a l'action de forces, entre une sonde et un objet solide Download PDF

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Publication number
WO1989000672A1
WO1989000672A1 PCT/DE1988/000388 DE8800388W WO8900672A1 WO 1989000672 A1 WO1989000672 A1 WO 1989000672A1 DE 8800388 W DE8800388 W DE 8800388W WO 8900672 A1 WO8900672 A1 WO 8900672A1
Authority
WO
WIPO (PCT)
Prior art keywords
resonator
probe
amplitude
receiver
rod
Prior art date
Application number
PCT/DE1988/000388
Other languages
German (de)
English (en)
Inventor
Dirk-Michael Rupp
Jürgen KISING
Original Assignee
Krautkrämer Gmbh & Co.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Krautkrämer Gmbh & Co. filed Critical Krautkrämer Gmbh & Co.
Publication of WO1989000672A1 publication Critical patent/WO1989000672A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B3/00—Measuring instruments characterised by the use of mechanical techniques
    • G01B3/002—Details
    • G01B3/008—Arrangements for controlling the measuring force
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H13/00—Measuring resonant frequency
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/40—Investigating hardness or rebound hardness
    • G01N3/405—Investigating hardness or rebound hardness by determining the vibration frequency of a sensing element in contact with the specimen

Definitions

  • the invention relates to a method for detecting a small-area gene, almost punctiform and largely force-free contact between a probe and a solid object, and an apparatus for performing this method (touch detector).
  • the detection of a possible gentle contact between a probe and an object is desirable.
  • the hardness test and the length measurement with a mechanical measuring rod may be mentioned as an example.
  • the surface of the permanent pyramid impression is determined for a given test force.
  • the surface can be calculated using the depth of the impression if the length difference between the almost force-free contact and the penetration depth is known after the test force has been removed.
  • a distinction must therefore be made between the purely elastic part and the permanent part of the deformation under test force. This distinction is also advantageous for other hardness test methods.
  • a defined contact force of the mechanical length measuring rod is a prerequisite for a precise measurement.
  • different elastic and permanent deformations can occur at individual measuring points, as a result of which the measurement result is falsified.
  • a small-area, almost punctiform contact is understood as a touch, in which, for. B. the diagonal of a Vickers pyramid is in the range of one micrometer and below. These are contact surfaces that are mostly not detectable in a light microscope, at most - if at all - in a scanning electron microscope. Subs A largely force-free contact becomes contact forces in the area
  • the difference between the depth of indentation compared to the (undisturbed) surface of the object is not determined directly by contact of the probe with the surface of the object. Rather, in addition to the probe, at least two mounting feet are provided, against which the probe can be moved transversely to the surface.
  • the starting point for the measurement of the penetration depth is the state of the probe, in which the probe tip lies on a straight line passing through the contact points of these feet.
  • the measurement of the (undisturbed) surface carried out in this way is only accurate if the surface to be measured runs in a straight line between the two contact points. All deviations from a straight line connection between the two contact points lead to errors in the measurement of the impression depth.
  • the measure of the pressing force with which the feet are placed on the surface of the object is not constant, so that further measurement errors result from the fact that the feet are more or less pressed into the surface to be measured.
  • This can be counteracted by using relatively large feet, for example a probe foot tube, but this defines a zero line or zero plane, which generally does not have the actual point of impact (first contact) on the surface with rough surfaces to a moving probe coincides with the surface.
  • the object of the invention is to specify a method or a device with which the detection of the first contact of a probe brought up to the surface of a solid object of the probe is possible.
  • a method or a device with which the detection of the first contact of a probe brought up to the surface of a solid object of the probe is possible.
  • successful contact contact of the probe with the surface to be measured should be detected.
  • the probe which is preferably designed as a diamond tip, has a free end region rod-shaped resonator is arranged, which is excited by an electrical frequency generator connected to natural vibrations in its longitudinal direction and is connected to a receiver that monitors the amplitude of these vibrations for changes in amplitude and a touch signal appears when the amplitude approaches the probe to the Object stood for a predetermined value, for example a value of one deciBel drops.
  • the contact of the probe itself with the surface to be measured is detected and displayed directly, which with an indirect measurement, as is known for example from DE-OS 34 24 514, which errors are avoided and do not occur.
  • small surface areas for example flanks of gear wheels, in which the areas are too small for the attachment of two attachment feet, can also be measured.
  • the method according to the invention enables the initial contact and thus the level of the (undisturbed) surface to be determined with the probe, which is also used later for the hardness test (for example Vickers diamond). With length measurements, there is the possibility of obtaining reproducible system forces and in this way measuring the smallest length differences, for example steps.
  • the method can also be used to precisely scan and reproduce a profile of a surface.
  • the method according to the invention is particularly suitable for automatic detection, for example an automatic hardness test or an automatic measurement of an object.
  • An arbitrarily shaped surface for example a workpiece, can thus be scanned point by point, but it is also possible with the method according to the invention to move the probe in the surface itself, that is to say to keep it constantly in contact with the surface, with the contact force is kept constant in that the
  • Vibration amplitude of the rod-shaped resonator is kept within a predetermined range.
  • a touch detector which has a housing in which a rod-shaped resonator is mounted so that it can vibrate is. At its free end area it has a probe which is designed separately or is an integral part of the resonator rod.
  • the resonator rod is connected to a frequency generator, by means of which it is excited to produce longitudinal natural vibrations. It is also connected to a receiver which has a circuit for detecting amplitude changes or for displaying the amplitude of the rod's natural vibrations.
  • the touch detector it is proposed to manufacture the rod-shaped resonator from a piezoelectric material and to attach electrodes which are connected to the frequency generator and to the receiver.
  • the rod-shaped resonator can also be made of a magnetostrictive material, the excitation then taking place via coils, which in turn are connected to the frequency generator or receiver.
  • Such training enables inexpensive resonator rods, the rod itself can form the probe, so that a separate probe is not necessary.
  • the resonator can also be made of metal, it is then connected to ultrasonic transducers, which in turn are connected to the frequency generator or to the receiver.
  • ultrasonic transducers which in turn are connected to the frequency generator or to the receiver.
  • a preferably slim resonator has larger frequency changes when in contact with an object than thick resonators (seen in relation to the length).
  • this relationship also applies to the change in amplitude.
  • Slim resonators show larger changes in amplitude when in contact with an object than thicker resonators.
  • an amplitude detection and a frequency measurement can be combined favorably on the same resonator.
  • the circuit for detecting an amplitude change or for displaying the amplitudes of the rod natural vibrations in the receiver is in itself arbitrary and can be implemented according to the prior art.
  • the amplitude can be measured digitally or analogously and, if necessary, averaging over a few or more amplitudes can be carried out.
  • a point-by-point scanning of the elongation is also conceivable.
  • Bridge circuits, discriminators, comparators and the like are suitable for detecting an amplitude change.
  • the probe itself or, preferably, the rod-shaped resonator in the region of a vibration node is connected to a length meter, for example a micrometer screw, the mirror of an interferometer, an inductive displacement sensor, a line grid or the like.
  • a length meter for example a micrometer screw, the mirror of an interferometer, an inductive displacement sensor, a line grid or the like.
  • the arrangement of the length meter in the region of an oscillation node of the resonator is advantageous because the dimensions of the touch detector in the region of the probe remain extremely small and the smallest areas can still be measured.
  • the amplitude of the longitudinal vibrations of the resonator are in the nm range, so that they would practically not influence the length measurement anyway.
  • the advantage is achieved that there is no interference with the vibration behavior of the resonator.
  • the resonator must anyway be mechanically clamped in a partial area of its total length s, preferably at s / 4. This clamping can also be used to connect the length measuring device.
  • FIG. 1 is a schematic diagram of the touch detector according to the invention, the housing is indicated by the dashed square, the touch detector includes a separate display device which is connected to the housing via a connecting line,
  • FIG. 2 shows a longitudinal section through a touch detector, which is also designed as a low-load hardness tester,
  • FIG. 3 shows a side view of a rod-shaped resonator which is connected to a length measuring device, which is designed here as a micrometer watch for better illustration, and
  • Fig. 4 is a schematic representation in side view of a device for measuring a surface (a relief).
  • the touch detector according to FIG. 1 has a housing 20 indicated by dashed lines, which according to FIG. 2 is designed as a hand-held device with an essentially stylus shape.
  • a slim, rod-shaped resonator 22 is mounted so that it can vibrate. It is a total of around sixty millimeters long and consists of two cylindrical parts that are connected to one another by a truncated cone. In an upper, approximately thirty millimeter long section, it has a diameter of three millimeters, as a result of which there is just a sufficiently large area for attaching ultrasonic transducers 24, 26 to the metallic rod. In the lower area it has a diameter of two millimeters, this area is about twenty millimeters long. Because of this slim design of the resonator 22 is for the Measurement process takes up little space and only requires limited access. E Inaccessible parts, for example flanks of gear wheels, inner walls of pipes, blind bores and the like can also be measured.
  • a probe 28 is fastened to the resonator 22 at its free end region, which is located outside the housing 20 in accordance with FIG. 2, and is generally designed as a diamond tip, but in a simplified embodiment can also be a metal tip or a tip connected in one piece to the resonator.
  • UCI Ultrasonic Contact I pedance
  • the two other ultrasonic transducers 26 arranged approximately in the longitudinal center of the resonator 22 are connected to a receiver 32.
  • the metallic resonator 22 and the transmitter 30 and receiver 32 are connected to ground.
  • the resonator 22 has an overall length of s and is clamped at s / 4 (arrow 34 in FIG. 1) and is connected to the housing 20 at this point. Because of the clamping described, only the first harmonic of a natural vibration can develop in the longitudinal direction, which is excited by the transmitter 30. The generated vibration is interrogated via the receiver.
  • the receiver 32 has a circuit (not shown here) for detecting the vibration amplitude or for determining a change in the vibration amplitude.
  • a circuit (not shown here) for detecting the vibration amplitude or for determining a change in the vibration amplitude.
  • an oscillograph is connected to the receiver output, with which the oscillation amplitude can be monitored.
  • the receiver 32 has a memory in which the amplitude of the last oscillation (or an average of the amplitudes from a number of past oscillations) is stored in each case. The current value of the amplitude is compared with this stored value, and averaging can also take place here.
  • the receiver 32 If the compared signals deviate from one another by a predetermined threshold value, for example a dB, the receiver 32 emits a touch signal to a control circuit 36 located in the housing 20 is separate from housing 20 and is connected to it via a line 40, is further processed.
  • a predetermined threshold value for example a dB
  • the methods known for this purpose can be used to detect the amplitude of the vibrations detected by receiver 32, for example a peak value detector can be provided, but it is also possible to integrate the surface of the signal curve enclosed with the zero line.
  • Individual parameters of the rod-shaped resonator 22 can be stored in the control circuit 36 in a preferably non-volatile spoke. In this way, the values characteristic of a special resonator 22 are available within the housing 20 designed as a hand-held device, so that the basic device 38 can be connected to different hand-held devices.
  • the parameters of the rod-shaped resonator 22 also include the parameters of the ultrasonic transducers 24, 26 connected to it, the individual design of which has an influence on the vibration behavior of the resonator 22 itself.
  • the specific conditions of the holder in the area of the clamping 34 are also taken into account.
  • FIG. 2 shows a sectional view of a handheld device for micro hard testing under load. Using such a combined device, the advantage of a known UCI measurement by detecting the frequency shift and monitoring the amplitude according to the invention is to be shown:
  • the resonator 22 protrudes with its lower end, which is connected to the probe 28, approximately ten percent of its total length s freely from the lower end of a housing 20 formed as a tubular body.
  • the resonator 22 is surrounded within this tubular body by a guide tube 42. It forms in the lower region a plurality of threads running transversely to its axial direction, i the fixing screws 44 are screwed in, which fix the resonator 22 at the position 34.
  • an O-ring 46 is arranged between the guide tube 42 and the resonator 2.
  • the guide tube 42 is surrounded by two cylindrical-shaped slide bearings 48 handles, one of which is located in the lower end region and the other approximately i in the middle of the tubular body.
  • a compression coil spring 50 is arranged between the threaded connection piece for the fixing screws 44 and the lower ring surface of the upper slide bearing 48, which presses the guide tube 42 and dami 22 against the lower end of the handle-like housing 2.
  • the housing is clamped in a lowerable stand (not shown) and motorized against a surface to be measured.
  • the movement relative to this surface is recorded by means of a length measuring device (not shown). If the probe 28 comes into contact with the surface of the object during the advance, a drop in amplitude is registered in the receiver 32. The display of the length meter reached at this time is recorded and saved. If the housing 20 is pressed increasingly against the surface in continuation of the movement, the resonator 2 and thus its guide tube 42 spring inward against the action of the spring 50.
  • the upper end region of the guide tube 42 is closed, it is assigned a switch 52, the switching part of which is actuated by a certain relative movement between the guide tube 42 and the housing 20. This relative position is set so that it has the desired test pressure.
  • De switch 52 is connected to electronics 54, which is located in the upper inner space of the housing 20 and which includes the receiver 32, the transmitter 30 and the control circuit 36. It is in turn connected to a connector 56, which is arranged in the upper end region of the housing 20.
  • the frequency shift of the resonator frequency is determined and from this the size of the contact area between the probe 28 and the impression made by it on the surface of the object to be measured is determined.
  • the advance of the housing 20 against the surface is not continued in order not to exceed the test force.
  • the frequency shift is measured in a very short period of time, for example in twenty milliseconds.
  • FIG. 3 shows a resonator 22 as used in the device according to FIG. 2. It has at its lower, free end an axial blind bore 58 into which the probe 28, which is not shown in FIG. 3, can be inserted and exchangeably inserted.
  • the resonator 22 according to FIG. 3 has a collar 60 in its clamping region, which in the exemplary embodiment shown has the same diameter as the upper, cylindrical end region of the resonator 22 (three millimeters).
  • the resonator 22 has an oscillation node in the region of the collar 60 used for clamping.
  • a measuring plunger 62 of a micrometer watch 64 bears against the collar 60. It is attached in such a way that the relative movements of the resonator 22 with respect to a reference, for example with respect to a carriage of a tripod guide, can be detected.
  • the resonator 22 is connected to a liftable and lowerable slide (arrow 67) of a stand 68, the micrometer clock 64 itself is connected to the carriage 76 of the stand 68, so that the displacement of the slide 66 in the direction of the arrow 67 can be detected and measured.
  • an object 70 whose surface facing upwards is to be measured, is clamped onto a plate 72.
  • a tripod 68 which has two lateral supports and a guide rail 74 held by them, on which a carriage 76 is slidably guided in the direction of the double arrow 78.
  • the carriage 66 which can be moved in the sense of the double arrow 67, is arranged on it at right angles to the guide rail 74.
  • the course of the surface of the object 70 can be detected either by point-by-point scanning or by continuous scanning.
  • the housing 20, which is clamped to the slide 66, is lifted from the surface of the object 70, a certain amount in the sense of the double arrow 78 (for example one millimeter) is pushed, then the slide 66 is lowered again and the distance is determined until the probe 28 of the housing 20 is again in contact with the surface of the object 70. This is followed step by step.
  • the motors of the carriage 76 on the one hand and the carriage 66 on the other hand are controlled such that the probe 28 always remains in contact with the surface of the object 70.
  • This control takes place by monitoring the oscillation amplitude of the resonator 22 received by the receiver 32.
  • the basic device 38 is connected on the output side to the drive motors (line 80). The drive motors are operated in such a way that the oscillation amplitude received by the receiver 32 remains within a predetermined bandwidth.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

Selon un procédé de détection d'un contact à surface réduite, aussi ponctuel que possible et essentiellement soustrait à l'action de forces, entre une sonde (28) et un objet solide (70), un résonateur (22) en forme de tige portant une sonde (28) à son extrémité libre est excité à sa fréquence propre dans le sens de sa longueur par un générateur (30) électrique de fréquences. Le résonateur (22) est relié à un récepteur (32) qui contrôle l'amplitude de ces oscillations afin de détecter des changements d'amplitude. Un signal de contact est émis lorsque l'amplitude tombe d'une valeur prédéterminée, par exemple un décibel, au moment où la sonde (28) s'approche de l'objet (70).
PCT/DE1988/000388 1987-07-20 1988-06-28 Procede et dispositif de detection d'un contact a surface reduite, pratiquement ponctuel et essentiellement soustrait a l'action de forces, entre une sonde et un objet solide WO1989000672A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19873723933 DE3723933A1 (de) 1987-07-20 1987-07-20 Verfahren zum erfassen einer kleinflaechigen, nahezu punktfoermigen und weitgehend kraeftefreien beruehrung zwischen einer sonde und einem festen gegenstand, sowie beruehrungsdetektor
DEP3723933.3 1987-07-20

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WO1989000672A1 true WO1989000672A1 (fr) 1989-01-26

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DE (1) DE3723933A1 (fr)
WO (1) WO1989000672A1 (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4035076A1 (de) * 1990-11-05 1992-05-07 Jenoptik Jena Gmbh Anordnung zum messen linearer abmessungen auf einer strukturierten oberflaeche eines messobjektes
DE4035084A1 (de) * 1990-11-05 1992-05-07 Jenoptik Jena Gmbh Anordnung zum messen linearer abmessungen auf einer strukturierten oberflaeche eines messobjektes
WO1995008093A1 (fr) * 1993-09-13 1995-03-23 Carl-Zeiss-Stiftung Handelnd Als Carl Zeiss Appareil de mesure de coordonnees pourvu d'un palpeur se presentant sous forme d'oscillateur monolithique
US5679945A (en) * 1995-03-31 1997-10-21 Cybermark, L.L.C. Intelligent card reader having emulation features
DE10345993B4 (de) * 2003-10-02 2008-07-24 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zum Messen und zum Feinstellen eines Werkzeuges in einem Werkzeughalter und Verfahren zum Messen einer Bearbeitungskraft

Families Citing this family (11)

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DE3820518C1 (fr) * 1988-06-16 1990-01-11 Wild Leitz Gmbh, 6330 Wetzlar, De
US5212987A (en) * 1988-06-16 1993-05-25 Hommelwerke Gmbh Acoustic screen scan microscope for the examination of an object in the short-range field of a resonant acoustic oscillator
DE9206076U1 (de) * 1992-05-07 1993-09-09 Hermann Gmbh Co Heinrich Etikettiermaschine
JP3336196B2 (ja) * 1996-06-25 2002-10-21 株式会社ミツトヨ 振幅抽出装置
JP2889196B2 (ja) * 1996-10-08 1999-05-10 株式会社ミツトヨ センサ信号の直流レベル変化検知回路
US7828192B2 (en) 2005-01-03 2010-11-09 3M Innovative Properties Company Amplitude adjustment of an ultrasonic horn
US7769551B2 (en) 2005-01-03 2010-08-03 3M Innovative Properties Company Method and system for determining a gap between a vibrational body and fixed point
ATE446156T1 (de) * 2005-01-03 2009-11-15 3M Innovative Properties Co Verfahren und system zur bestimmung eines abstands zwischen einem schwingungskörper und einem fixpunkt durch überwachen der resonanzfrequenz des schwingungskörpers
US7775413B2 (en) 2005-01-03 2010-08-17 3M Innovative Properties Company Cantilevered bar gap adjustment for an ultrasonic welding system
DE102005054551B3 (de) * 2005-11-14 2006-12-28 Carl Von Ossietzky Universität Oldenburg Vorrichtung zum Verlagern von Endeffektoren an Mess- oder Handhabungseinrichtungen sowie Verfahren zur Bestimmung der Kontaktkraft oder der Position eines Endeffektors
DE202008016972U1 (de) 2008-12-22 2009-03-19 Asm Automation Sensorik Messtechnik Gmbh Tasteinheit

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US3153338A (en) * 1961-11-22 1964-10-20 Kleesattel Claus Resonant sensing devices
EP0006022A1 (fr) * 1978-06-06 1979-12-12 Inoue-Japax Research Incorporated Dispositif et procédé pour detecter et mesurer la surface d'un solide
GB2070249A (en) * 1980-02-21 1981-09-03 Rank Organisation Ltd Contact-sensitive probe

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US3153338A (en) * 1961-11-22 1964-10-20 Kleesattel Claus Resonant sensing devices
EP0006022A1 (fr) * 1978-06-06 1979-12-12 Inoue-Japax Research Incorporated Dispositif et procédé pour detecter et mesurer la surface d'un solide
GB2070249A (en) * 1980-02-21 1981-09-03 Rank Organisation Ltd Contact-sensitive probe

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4035076A1 (de) * 1990-11-05 1992-05-07 Jenoptik Jena Gmbh Anordnung zum messen linearer abmessungen auf einer strukturierten oberflaeche eines messobjektes
DE4035084A1 (de) * 1990-11-05 1992-05-07 Jenoptik Jena Gmbh Anordnung zum messen linearer abmessungen auf einer strukturierten oberflaeche eines messobjektes
WO1992008102A1 (fr) * 1990-11-05 1992-05-14 Jenoptik Carl Zeiss Jena Gmbh Dispositif pour la mesure de dimensions lineaires sur une surface structuree d'un objet a mesurer
WO1992008946A2 (fr) * 1990-11-05 1992-05-29 Jenoptik Carl Zeiss Jena Gmbh Dispositif de mesure de dimensions lineaires sur une surface structuree d'un objet
WO1992008946A3 (fr) * 1990-11-05 1992-07-23 Jenoptik Jena Gmbh Dispositif de mesure de dimensions lineaires sur une surface structuree d'un objet
WO1995008093A1 (fr) * 1993-09-13 1995-03-23 Carl-Zeiss-Stiftung Handelnd Als Carl Zeiss Appareil de mesure de coordonnees pourvu d'un palpeur se presentant sous forme d'oscillateur monolithique
US5625957A (en) * 1993-09-13 1997-05-06 Carl-Zeiss-Stiftung Coordinate measuring apparatus having a probe in the form of a solid-state oscillator
US5679945A (en) * 1995-03-31 1997-10-21 Cybermark, L.L.C. Intelligent card reader having emulation features
US6223984B1 (en) 1995-03-31 2001-05-01 Cybermark, Inc. Distinct smart card reader having wiegand, magnetic strip and bar code types emulation output
DE10345993B4 (de) * 2003-10-02 2008-07-24 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zum Messen und zum Feinstellen eines Werkzeuges in einem Werkzeughalter und Verfahren zum Messen einer Bearbeitungskraft

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