WO1980000896A1 - Dispositif de stabilisation de la pression d'un gaz enferme - Google Patents

Dispositif de stabilisation de la pression d'un gaz enferme Download PDF

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Publication number
WO1980000896A1
WO1980000896A1 PCT/JP1979/000258 JP7900258W WO8000896A1 WO 1980000896 A1 WO1980000896 A1 WO 1980000896A1 JP 7900258 W JP7900258 W JP 7900258W WO 8000896 A1 WO8000896 A1 WO 8000896A1
Authority
WO
WIPO (PCT)
Prior art keywords
gas
pipe
gas pressure
pressure
tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP1979/000258
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
S Tsunekawa
T Moriwaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to NLAANVRAGE7920081,A priority Critical patent/NL182437C/xx
Priority to DE792953247T priority patent/DE2953247A1/de
Publication of WO1980000896A1 publication Critical patent/WO1980000896A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/38Exhausting, degassing, filling, or cleaning vessels
    • H01J9/395Filling vessels

Definitions

  • the present invention relates to an apparatus for stabilizing the pressure of a gas to be sealed in a tube such as a fluorescent lamp so as to be always constant.
  • a sealed gas such as an argon is sealed in a tube at a predetermined pressure.
  • a gas of the same type as the filling gas is sent as a cleaning gas from one end of the valve, so that impurities such as air and nitrogen in the valve are removed.
  • There is a so-called flow exhaust method that exhausts the gas and replaces it with a sealed gas to seal the exhaust pipe.
  • the internal pressure of the bulb due to the cleaning gas in the flow exhaust causes a variation of, for example, 5 to 2 torr due to the variation of the exhaust pipe diameter.
  • the gas is filled as a filling gas, the pressure of the gas varies too much.
  • the inside of the bulb is depressurized to, for example, about 0.5 torr, and then the sealed gas is filled to a pressure of, for example, about 2.5 torr, and then the exhaust pipe is sealed.
  • the gas pressure in the tube For example, it takes about 30 seconds to reduce the internal pressure of a 5 torr tube to 0.5 torr.
  • the work efficiency was poor in mass production.
  • this method has a drawback that the process is complicated because the gas is refilled after the pressure in the tube is reduced.
  • an object of the present invention is to provide a sealed gas pressure stabilizing apparatus capable of constantly and stably adjusting a gas pressure in a tube to a desired pressure in a simple and short time. Disclosure of the invention
  • the sealed gas pressure stabilizing device comprises a first type of a conductance C.i, a second type of a conductance C2 and a ing encompasses a hollow body having a third i-flop duct motor down scan C s also Ru Nodea.
  • the co-down duct data down vinegar C i said co-down da-click data down the scan C 2 and C have small also Ri either by the a.
  • the first type is connected to a gas source of the same kind as the desired gas to be sealed in the bulb, the second type is connected to a vacuum system, and the third type is connected to the type. ing.
  • the gas pressure in the third pipes in a state in which the gas' source or these gases are flow constantly into the first i-flop or we second Lee-flop Is set to be equal to or less than the desired gas pressure in the tube '.
  • FIG. 1 is a schematic view of the entire gas filling system incorporating the gas pressure stabilizing device according to the present invention
  • FIG. 2 is a cross-sectional view of the gas pressure stabilizing device according to the present invention.
  • FIG. 1 schematically shows a gas filling system incorporating the filled gas pressure stabilizer 3 of the present invention.
  • FIG. 1 schematically shows a gas filling system incorporating the filled gas pressure stabilizer 3 of the present invention.
  • J ⁇ is a fluorescent lamp sphere, and at one end of the tube 2, an exhaust pipe 2 communicating with it is provided.
  • the exhaust pipe 2 is airtightly held by a head 4 fixed to a slider 3 of an exhaust machine (not shown).
  • a connection pipe 5 communicating with the exhaust pipe 2 is installed at the head 4 and the other end of the connection pipe 5 is a disc-shaped rubbed 11 "roll called a center-pulp. It is connected to one valve element a of the valve 6.
  • the other pipe element ff b of the rotary valve S is connected to the disconnect pipe 7.
  • the communication pipe 7 and the connection pipe 5 are connected to the valve element 6a. , 6b communicate with each other via a communication passage in the valve body at a predetermined position during the rotation when they slide relative to each other.
  • an enclosed gas pressure stabilizing device S At the other end of the communication pipe 7, an enclosed gas pressure stabilizing device S according to the invention ′ is installed.
  • the sealed gas pressure stabilizing device 9 includes a hollow body J 0, for example, a cylindrical hollow body. One end of this hollow body;
  • the conductances C i, C 2 and c 3 satisfy the relationship of c t, c 2 and c 3 , and the conductances 0 and C 2 are In the state where if is constantly flowing from the gas source J? 5 to the second input J2 from the first input 2J, the third input
  • the gas pressure is equal to or lower than the desired gas pressure to be achieved in the bulb J (preferably equal to or near)
  • the diameter of the pipe 1 J (K3 BS, the diameter of the pipe J 2 is made larger than this, and the lengths ⁇ i and 2 of these pipes i J, Jf 2 are O gd s of pie J 3 is set to be sufficiently larger than d 2 , so that the condtags of ip 11, 12, 13
  • the lens satisfies the relationship between C i and C 2 and C S.
  • the pressure from the gas source 5 is P 0
  • the pressure in the hollow body J 0 is P
  • the pulsation pressure in the hollow body J0 is obtained from the fluid resistance at both ends of the hollow body 20.
  • the inner diameter and d 2 are set to be equal to or lower than the desired gas pressure to be achieved within 1 (that is, the conductances C i and C 2 To set). You may have more than one pipe each.
  • hollow body desired gas pressure substantially matches the gas pressure which intends Yo achieved in the bulb occurs If the inside of Jf ⁇ > is communicated with the inside of the tube ⁇ ⁇ , the pressure in tube 2 also matches the pressure in the hollow body J ⁇ . Thus, the desired gas pressure is achieved in the tube 2.
  • the same type of gas as the sealed gas for example, an inert gas such as argon, is sent into the tube J by the above-described flow exhaust method to discharge air from the tube ⁇ .
  • is replaced with a Le Gore emission gas
  • the connecting pipe 5 and the communication pipe 7 are made different from each other in the rotary valve 6, so that the inside of the bulb J and the inside of the hollow body J 0 of the sealed gas pressure stabilizing device S are formed. And are communicated.
  • the inside of the hollow body J is momentarily kept at a pressure of 2.5 torr, for example, because the atmosphere of the argon gas flow is maintained.
  • the discharge of argon gas in the tube is started via type J3 of the
  • the gas pressure in the tube J decreases to the gas pressure in the hollow body 0, for example, 2.5 torr, and becomes stable at this pressure value.
  • the time required for the gas pressure to stabilize was about 8 seconds.
  • the exhaust pipe is air-tightly burned and sealed by an exhaust pipe burning device, and the gas filling process is completed.
  • the gas pressure in the hollow body J is a desired value (for example,
  • the gas pressure in the tube J is not affected.
  • the pressure can be maintained at a precise predetermined pressure.
  • the configuration of the gas pressure stabilizer 9 is extremely simple, it is easy to manufacture and inexpensive. It is possible to maintain stable performance without any risk of failure.
  • the present invention is not limited to the flow exhaust method, and can be applied, for example, to the case where gas is sealed after evacuation in a tube as in the past, and in general, low-pressure gas is generally used. It can also be used as a gas-filled shell for sealed tubes.

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
  • Control Of Fluid Pressure (AREA)
  • Discharge Lamp (AREA)
PCT/JP1979/000258 1978-10-13 1979-10-11 Dispositif de stabilisation de la pression d'un gaz enferme Ceased WO1980000896A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
NLAANVRAGE7920081,A NL182437C (nl) 1978-10-13 1979-10-11 Inrichting voor het vullen van een buisvormige ballon met een gas.
DE792953247T DE2953247A1 (de) 1978-10-13 1979-10-11 Device for stabilizing sealed gas pressure

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP78/125866 1978-10-13
JP12586678A JPS5553043A (en) 1978-10-13 1978-10-13 Sealing gas stabilizing device

Publications (1)

Publication Number Publication Date
WO1980000896A1 true WO1980000896A1 (fr) 1980-05-01

Family

ID=14920867

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP1979/000258 Ceased WO1980000896A1 (fr) 1978-10-13 1979-10-11 Dispositif de stabilisation de la pression d'un gaz enferme

Country Status (6)

Country Link
US (1) US4364617A (enExample)
JP (1) JPS5553043A (enExample)
DE (2) DE2953247C1 (enExample)
GB (1) GB2046989B (enExample)
NL (1) NL182437C (enExample)
WO (1) WO1980000896A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
HU201421B (en) * 1987-01-23 1990-10-28 Tungsram Reszvenytarsasag Method for pumping low-pressure gas-discharge light source
US5496201A (en) * 1994-06-16 1996-03-05 Industrial Technology Research Institute Extendable exhausting assembly for the manufacture of gas discharge lamps
US7063583B2 (en) * 2001-03-23 2006-06-20 Wafermasters, Inc. Multi-spectral uniform light source
JP4584722B2 (ja) * 2005-01-13 2010-11-24 シャープ株式会社 プラズマ処理装置および同装置により製造された半導体素子
JP2007042557A (ja) * 2005-08-05 2007-02-15 Matsushita Electric Ind Co Ltd プラズマディスプレイパネルの製造装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2215100A (en) * 1937-05-22 1940-09-17 Westinghouse Electric & Mfg Co Method and machine for sealing vitreous vessels
US2542636A (en) * 1947-12-08 1951-02-20 Gen Electric Gas charging apparatus with gas pressure reducing valve
US2755005A (en) * 1952-12-31 1956-07-17 Sylvania Electric Prod Method of exhausting and filling electric gaseous discharge devices
US3598518A (en) * 1967-04-11 1971-08-10 Tokyo Shibaura Electric Co Method of providing a container with an oxygen-free gas
US3589790A (en) * 1968-11-13 1971-06-29 Westinghouse Electric Corp Method of dosing a halogen cycle incandescent lamp
US3967871A (en) * 1972-06-23 1976-07-06 Egyesult Izzolampa Es Villamossagi Resvenytarsasag Process for manufacturing tubeless vacuum electric discharge lamps
JPS5157973A (ja) * 1974-11-15 1976-05-20 Hitachi Ltd Teiatsuhodenranpunoseizohoho

Also Published As

Publication number Publication date
US4364617A (en) 1982-12-21
DE2953247A1 (de) 1980-12-18
NL182437B (nl) 1987-10-01
JPS6216497B2 (enExample) 1987-04-13
NL7920081A (nl) 1980-08-29
NL182437C (nl) 1988-03-01
GB2046989A (en) 1980-11-19
GB2046989B (en) 1982-12-15
DE2953247C1 (de) 1983-08-18
JPS5553043A (en) 1980-04-18

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