JPS6216497B2 - - Google Patents

Info

Publication number
JPS6216497B2
JPS6216497B2 JP53125866A JP12586678A JPS6216497B2 JP S6216497 B2 JPS6216497 B2 JP S6216497B2 JP 53125866 A JP53125866 A JP 53125866A JP 12586678 A JP12586678 A JP 12586678A JP S6216497 B2 JPS6216497 B2 JP S6216497B2
Authority
JP
Japan
Prior art keywords
gas
valve
pressure
hole
conductance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53125866A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5553043A (en
Inventor
Takeshi Moriwaki
Shinichi Tsunekawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP12586678A priority Critical patent/JPS5553043A/ja
Priority to DE792953247T priority patent/DE2953247A1/de
Priority to PCT/JP1979/000258 priority patent/WO1980000896A1/ja
Priority to GB8017627A priority patent/GB2046989B/en
Priority to NLAANVRAGE7920081,A priority patent/NL182437C/xx
Priority to DE2953247A priority patent/DE2953247C1/de
Priority to US06/196,763 priority patent/US4364617A/en
Publication of JPS5553043A publication Critical patent/JPS5553043A/ja
Publication of JPS6216497B2 publication Critical patent/JPS6216497B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/38—Exhausting, degassing, filling, or cleaning vessels
    • H01J9/395—Filling vessels

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
  • Control Of Fluid Pressure (AREA)
  • Discharge Lamp (AREA)
JP12586678A 1978-10-13 1978-10-13 Sealing gas stabilizing device Granted JPS5553043A (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP12586678A JPS5553043A (en) 1978-10-13 1978-10-13 Sealing gas stabilizing device
DE792953247T DE2953247A1 (de) 1978-10-13 1979-10-11 Device for stabilizing sealed gas pressure
PCT/JP1979/000258 WO1980000896A1 (fr) 1978-10-13 1979-10-11 Dispositif de stabilisation de la pression d'un gaz enferme
GB8017627A GB2046989B (en) 1978-10-13 1979-10-11 Device for stabilizing sealed gas pressure
NLAANVRAGE7920081,A NL182437C (nl) 1978-10-13 1979-10-11 Inrichting voor het vullen van een buisvormige ballon met een gas.
DE2953247A DE2953247C1 (de) 1978-10-13 1979-10-11 Vorrichtung zur Stabilisierung des Drucks eines in einer Lampenroehre einzuschliessenden Gases
US06/196,763 US4364617A (en) 1978-10-13 1979-10-11 Method and apparatus for stabilizing the pressure of a gas in a closed body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12586678A JPS5553043A (en) 1978-10-13 1978-10-13 Sealing gas stabilizing device

Publications (2)

Publication Number Publication Date
JPS5553043A JPS5553043A (en) 1980-04-18
JPS6216497B2 true JPS6216497B2 (enExample) 1987-04-13

Family

ID=14920867

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12586678A Granted JPS5553043A (en) 1978-10-13 1978-10-13 Sealing gas stabilizing device

Country Status (6)

Country Link
US (1) US4364617A (enExample)
JP (1) JPS5553043A (enExample)
DE (2) DE2953247A1 (enExample)
GB (1) GB2046989B (enExample)
NL (1) NL182437C (enExample)
WO (1) WO1980000896A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
HU201421B (en) * 1987-01-23 1990-10-28 Tungsram Reszvenytarsasag Method for pumping low-pressure gas-discharge light source
US5496201A (en) * 1994-06-16 1996-03-05 Industrial Technology Research Institute Extendable exhausting assembly for the manufacture of gas discharge lamps
US7063583B2 (en) * 2001-03-23 2006-06-20 Wafermasters, Inc. Multi-spectral uniform light source
JP4584722B2 (ja) * 2005-01-13 2010-11-24 シャープ株式会社 プラズマ処理装置および同装置により製造された半導体素子
JP2007042557A (ja) * 2005-08-05 2007-02-15 Matsushita Electric Ind Co Ltd プラズマディスプレイパネルの製造装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2215100A (en) * 1937-05-22 1940-09-17 Westinghouse Electric & Mfg Co Method and machine for sealing vitreous vessels
US2542636A (en) * 1947-12-08 1951-02-20 Gen Electric Gas charging apparatus with gas pressure reducing valve
US2755005A (en) * 1952-12-31 1956-07-17 Sylvania Electric Prod Method of exhausting and filling electric gaseous discharge devices
US3598518A (en) * 1967-04-11 1971-08-10 Tokyo Shibaura Electric Co Method of providing a container with an oxygen-free gas
US3589790A (en) * 1968-11-13 1971-06-29 Westinghouse Electric Corp Method of dosing a halogen cycle incandescent lamp
US3967871A (en) * 1972-06-23 1976-07-06 Egyesult Izzolampa Es Villamossagi Resvenytarsasag Process for manufacturing tubeless vacuum electric discharge lamps
JPS5157973A (ja) * 1974-11-15 1976-05-20 Hitachi Ltd Teiatsuhodenranpunoseizohoho

Also Published As

Publication number Publication date
GB2046989A (en) 1980-11-19
GB2046989B (en) 1982-12-15
JPS5553043A (en) 1980-04-18
DE2953247A1 (de) 1980-12-18
WO1980000896A1 (fr) 1980-05-01
US4364617A (en) 1982-12-21
DE2953247C1 (de) 1983-08-18
NL182437B (nl) 1987-10-01
NL182437C (nl) 1988-03-01
NL7920081A (nl) 1980-08-29

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