USD962881S1 - Semiconductor wafer processing apparatus - Google Patents

Semiconductor wafer processing apparatus Download PDF

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Publication number
USD962881S1
USD962881S1 US29/690,192 US201929690192F USD962881S US D962881 S1 USD962881 S1 US D962881S1 US 201929690192 F US201929690192 F US 201929690192F US D962881 S USD962881 S US D962881S
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Prior art keywords
semiconductor wafer
processing apparatus
wafer processing
view
design
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US29/690,192
Inventor
Eller Y. Juco
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Lam Research Corp
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Lam Research Corp
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Priority to US29/690,192 priority Critical patent/USD962881S1/en
Assigned to LAM RESEARCH CORPORATION reassignment LAM RESEARCH CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: JUCO, ELLER Y.
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FIG. 1 is a perspective view depicting the overall shape of the semiconductor wafer processing apparatus, showing my new design;
FIG. 2 is a front view thereof;
FIG. 3 is a rear view thereof;
FIG. 4 is a left side view thereof;
FIG. 5 is a right side view thereof;
FIG. 6 is a top plan view thereof; and,
FIG. 7 is a bottom plan view thereof.
The broken line showings of portions of the semiconductor wafer processing apparatus and portions of the semiconductor wafer processing tool illustrate environmental structure, and the broken lines form no part of the claimed design.
The shape of the semiconductor wafer processing apparatus is the feature of the design creation content.

Claims (1)

    CLAIM
  1. The ornamental design for a semiconductor wafer processing apparatus, as shown and described.
US29/690,192 2019-05-06 2019-05-06 Semiconductor wafer processing apparatus Active USD962881S1 (en)

Priority Applications (1)

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US29/690,192 USD962881S1 (en) 2019-05-06 2019-05-06 Semiconductor wafer processing apparatus

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US29/690,192 USD962881S1 (en) 2019-05-06 2019-05-06 Semiconductor wafer processing apparatus

Publications (1)

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USD962881S1 true USD962881S1 (en) 2022-09-06

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Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD571739S1 (en) * 2005-08-12 2008-06-24 Tokyo Electron Limited Semiconductor wafer delivery apparatus
USD730849S1 (en) * 2012-10-05 2015-06-02 Tower Mfg Corp Universal ground fault circuit interrupter (GFCI) printed circuit board package
USD748595S1 (en) * 2015-02-03 2016-02-02 Infineon Technologies Ag Power semiconductor module
USD753735S1 (en) * 2014-03-28 2016-04-12 Mitsubishi Electric Corporation Electric discharge machine
USD761746S1 (en) * 2014-11-04 2016-07-19 Sumitomo Electric Industries, Ltd. Semiconductor module for power conversion
USD851611S1 (en) * 2015-04-01 2019-06-18 Infineon Technologies Ag Semiconductor module
USD900892S1 (en) * 2018-04-03 2020-11-03 Revotek Co., Ltd Device for synthesizing bio-ink
USD923591S1 (en) * 2019-03-15 2021-06-29 Tamura Corporation Semiconductor driving circuit module
USD923669S1 (en) * 2016-10-13 2021-06-29 Chetocorporation, S.A. Machine tool for drilling deep holes
USD928722S1 (en) * 2019-10-02 2021-08-24 Johann Kok Electrical circuit component
USD929475S1 (en) * 2016-10-13 2021-08-31 Chetocorporation, S.A. Machine tool for drilling deep holes
USD930054S1 (en) * 2018-12-31 2021-09-07 Tata Consultancy Services Limited Apparatus for handling goods

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD571739S1 (en) * 2005-08-12 2008-06-24 Tokyo Electron Limited Semiconductor wafer delivery apparatus
USD730849S1 (en) * 2012-10-05 2015-06-02 Tower Mfg Corp Universal ground fault circuit interrupter (GFCI) printed circuit board package
USD753735S1 (en) * 2014-03-28 2016-04-12 Mitsubishi Electric Corporation Electric discharge machine
USD761746S1 (en) * 2014-11-04 2016-07-19 Sumitomo Electric Industries, Ltd. Semiconductor module for power conversion
USD748595S1 (en) * 2015-02-03 2016-02-02 Infineon Technologies Ag Power semiconductor module
USD851611S1 (en) * 2015-04-01 2019-06-18 Infineon Technologies Ag Semiconductor module
USD923669S1 (en) * 2016-10-13 2021-06-29 Chetocorporation, S.A. Machine tool for drilling deep holes
USD929475S1 (en) * 2016-10-13 2021-08-31 Chetocorporation, S.A. Machine tool for drilling deep holes
USD900892S1 (en) * 2018-04-03 2020-11-03 Revotek Co., Ltd Device for synthesizing bio-ink
USD928854S1 (en) * 2018-04-03 2021-08-24 Revotek Co., Ltd Device for synthesizing bio-ink
USD930054S1 (en) * 2018-12-31 2021-09-07 Tata Consultancy Services Limited Apparatus for handling goods
USD923591S1 (en) * 2019-03-15 2021-06-29 Tamura Corporation Semiconductor driving circuit module
USD928722S1 (en) * 2019-10-02 2021-08-24 Johann Kok Electrical circuit component

Non-Patent Citations (10)

* Cited by examiner, † Cited by third party
Title
"Single Wafer vs Batch Wafer Processing." 2-21-2018. Mems star. https://memsstar.com/single-wafer-vs-batch-wafer-processing/ *
"Single Wafer vs. Batch Wafer Processing in MEMS manufacturing." 8-02-2016. CMM International. http://www.cmmmagazine.com/mems/single-wafer-vs-batch-wafer-processing-in-mems-manufacturing/ *
"Chinese Application Serial No. 201930607750.9, First Notice of Correction dated Feb. 27, 2020", w/ English Machine Translation, 2 pgs.
"Chinese Application Serial No. 201930607750.9, Response filed Apr. 26, 2020 to First Correction Notice dated Feb. 27, 2020", w/ English Machine Translation, 34 pgs.
"Korean Application Serial No. 30-2019-0034114, Notice of Preliminary Rejection dated Mar. 17, 2020", w/o English Translation, 5 pgs.
"Single Wafer vs Batch Wafer Processing." Feb. 21, 2018. Mems star, https://memsstar.com/single-wafer-vs-batch-wafer-processing/. *
"Single Wafer vs. Batch Wafer Processing in MEMS manufacturing." Aug. 2, 2016. CMM International, http://www.cmmmagazine.com/mems/single-wafer-vs-batch-wafer-processing-in-mems-manufacturing/. *
https://www.researchgate.net/publication/35950411_Nonlinear_control_of_a_planar_magnetic_levitation_system_microformLevis, MIchel. "Nonlinear Control of a Planar Magnetic Lefitation System." 2003. University of Toronto. *
Semiconductor Wafer Apparatus. (Design -©Questel) orbit.com. [Online PDF compilation of references selected by examiner] 59 pgs. Print Dates Range 7-16-2019 - 6-02-2000 [Retrieved 9-13-2021] *
Semiconductor Wafer Apparatus. (Design—© Questel) orbit.com. [Online PDF compilation of references] 59 pgs. Print Dates Range Jul. 16, 2019-Jun. 2, 2000 [Retrieved Sep. 13, 2021]. *

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