USD944661S1 - Calibrator for wafer handling robots - Google Patents

Calibrator for wafer handling robots Download PDF

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Publication number
USD944661S1
USD944661S1 US29/716,452 US201929716452F USD944661S US D944661 S1 USD944661 S1 US D944661S1 US 201929716452 F US201929716452 F US 201929716452F US D944661 S USD944661 S US D944661S
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Prior art keywords
calibrator
wafer handling
handling robots
robots
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US29/716,452
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English (en)
Inventor
Makoto Sambu
Norihito Shitaka
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Kokusai Electric Corp
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Kokusai Electric Corp
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Assigned to Kokusai Electric Corporation reassignment Kokusai Electric Corporation ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: SAMBU, MAKOTO, SHITAKA, NORIHITO
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US29/716,452 2019-07-17 2019-12-10 Calibrator for wafer handling robots Active USD944661S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019-015964 2019-07-17
JPD2019-15964F JP1651622S (enrdf_load_stackoverflow) 2019-07-17 2019-07-17

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USD944661S1 true USD944661S1 (en) 2022-03-01

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US (1) USD944661S1 (enrdf_load_stackoverflow)
JP (1) JP1651622S (enrdf_load_stackoverflow)
TW (1) TWD207741S (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD964443S1 (en) * 2020-08-18 2022-09-20 Kokusai Electric Corporation Gas inlet attachment for wafer processing apparatus

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD232262S (zh) 2023-01-18 2024-07-11 日商信越聚合物股份有限公司 (日本) 儲存及運送晶圓之容器
TWD232261S (zh) 2023-01-18 2024-07-11 日商信越聚合物股份有限公司 (日本) 儲存及運送晶圓之容器

Citations (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD251196S (en) * 1977-05-10 1979-02-27 Keuffel & Esser Company Portable numerical stereo compiler or the like
USD725054S1 (en) * 2013-07-31 2015-03-24 Tower Manufacturing Corporation Ground fault circuit interrupter (GFCI) printed circuit board package
US9672184B1 (en) * 2013-06-24 2017-06-06 Redwood Robotics, Inc. Methods and systems for rapid configuration, calibration, and deployment of a modular robot workcell
USD826743S1 (en) * 2016-11-24 2018-08-28 Delta Electronics, Inc. Industrial robot calibration apparatus
US20180272535A1 (en) * 2017-03-22 2018-09-27 Kabushiki Kaisha Toshiba Object handling device and calibration method thereof
USD875058S1 (en) * 2017-01-05 2020-02-11 Rohm Co., Ltd. Power semiconductor module
USD877706S1 (en) * 2017-01-18 2020-03-10 Kokusai Electric Corporation Cassette displacement prevention jig of semiconductor manufacturing apparatus
US20200262080A1 (en) * 2019-02-14 2020-08-20 InTune Products LLC Comprehensive model-based method for gantry robot calibration via a dual camera vision system
USD894766S1 (en) * 2018-06-30 2020-09-01 Kokusai Keisokuki Kabushiki Kaisha Testing instrument
USD901564S1 (en) * 2019-01-28 2020-11-10 Kokusai Electric Corporation Gas inlet attachment for wafer processing apparatus
US20210086365A1 (en) * 2018-06-04 2021-03-25 Keylex Corporation Multi-joint robot teaching data generation method and teaching data calibration coordinate system detector
USD919223S1 (en) * 2018-05-18 2021-05-11 Kokusai Electric Corporation Dolly for replacing reactor tubes
US20210162584A1 (en) * 2019-12-03 2021-06-03 Delta Electronics, Inc. Three-dimensional measuring device and robotic arm calibration method thereof
US11031270B2 (en) * 2016-02-10 2021-06-08 Kokusai Electric Corporation Substrate processing apparatus, substrate holder and mounting tool
USD923591S1 (en) * 2019-03-15 2021-06-29 Tamura Corporation Semiconductor driving circuit module
USD924953S1 (en) * 2018-07-19 2021-07-13 Kokusai Electric Corporation Gas inlet attachment for substrate processing apparatus
USD927437S1 (en) * 2019-08-29 2021-08-10 Rohm Co., Ltd. Power semiconductor module

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007043267A1 (ja) 2005-10-13 2007-04-19 Lintec Corporation シート剥離装置及び剥離方法

Patent Citations (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD251196S (en) * 1977-05-10 1979-02-27 Keuffel & Esser Company Portable numerical stereo compiler or the like
US9672184B1 (en) * 2013-06-24 2017-06-06 Redwood Robotics, Inc. Methods and systems for rapid configuration, calibration, and deployment of a modular robot workcell
USD725054S1 (en) * 2013-07-31 2015-03-24 Tower Manufacturing Corporation Ground fault circuit interrupter (GFCI) printed circuit board package
US11031270B2 (en) * 2016-02-10 2021-06-08 Kokusai Electric Corporation Substrate processing apparatus, substrate holder and mounting tool
USD826743S1 (en) * 2016-11-24 2018-08-28 Delta Electronics, Inc. Industrial robot calibration apparatus
USD875058S1 (en) * 2017-01-05 2020-02-11 Rohm Co., Ltd. Power semiconductor module
USD877706S1 (en) * 2017-01-18 2020-03-10 Kokusai Electric Corporation Cassette displacement prevention jig of semiconductor manufacturing apparatus
US20180272535A1 (en) * 2017-03-22 2018-09-27 Kabushiki Kaisha Toshiba Object handling device and calibration method thereof
USD919223S1 (en) * 2018-05-18 2021-05-11 Kokusai Electric Corporation Dolly for replacing reactor tubes
US20210086365A1 (en) * 2018-06-04 2021-03-25 Keylex Corporation Multi-joint robot teaching data generation method and teaching data calibration coordinate system detector
USD894766S1 (en) * 2018-06-30 2020-09-01 Kokusai Keisokuki Kabushiki Kaisha Testing instrument
USD924953S1 (en) * 2018-07-19 2021-07-13 Kokusai Electric Corporation Gas inlet attachment for substrate processing apparatus
USD901564S1 (en) * 2019-01-28 2020-11-10 Kokusai Electric Corporation Gas inlet attachment for wafer processing apparatus
US20200262080A1 (en) * 2019-02-14 2020-08-20 InTune Products LLC Comprehensive model-based method for gantry robot calibration via a dual camera vision system
USD923591S1 (en) * 2019-03-15 2021-06-29 Tamura Corporation Semiconductor driving circuit module
USD927437S1 (en) * 2019-08-29 2021-08-10 Rohm Co., Ltd. Power semiconductor module
US20210162584A1 (en) * 2019-12-03 2021-06-03 Delta Electronics, Inc. Three-dimensional measuring device and robotic arm calibration method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD964443S1 (en) * 2020-08-18 2022-09-20 Kokusai Electric Corporation Gas inlet attachment for wafer processing apparatus

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Publication number Publication date
TWD207741S (zh) 2020-10-11
JP1651622S (enrdf_load_stackoverflow) 2020-01-27

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