USD877706S1 - Cassette displacement prevention jig of semiconductor manufacturing apparatus - Google Patents

Cassette displacement prevention jig of semiconductor manufacturing apparatus Download PDF

Info

Publication number
USD877706S1
USD877706S1 US29/610,851 US201729610851F USD877706S US D877706 S1 USD877706 S1 US D877706S1 US 201729610851 F US201729610851 F US 201729610851F US D877706 S USD877706 S US D877706S
Authority
US
United States
Prior art keywords
manufacturing apparatus
semiconductor manufacturing
displacement prevention
prevention jig
cassette displacement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/610,851
Inventor
Tadayoshi Karasawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Electric Corp
Original Assignee
Kokusai Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Electric Corp filed Critical Kokusai Electric Corp
Assigned to HITACHI KOKUSAI ELECTRIC INC. reassignment HITACHI KOKUSAI ELECTRIC INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KARASAWA, TADAYOSHI
Assigned to Kokusai Electric Corporation reassignment Kokusai Electric Corporation ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: HITACHI KOKUSAI ELECTRIC INC.
Application granted granted Critical
Publication of USD877706S1 publication Critical patent/USD877706S1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Description

FIG. 1 is a front, top and right side perspective view of a cassette displacement prevention jig of semiconductor manufacturing apparatus showing my new design;
FIG. 2 is a front elevational view thereof;
FIG. 3 is a rear elevational view thereof;
FIG. 4 is a right side elevational view thereof;
FIG. 5 is a left side elevational view thereof;
FIG. 6 is a top plan view thereof;
FIG. 7 is a bottom plan view; and,
FIG. 8 is a cross-sectional view taken along line 8-8 in FIG. 2.
The broken lines in FIG. 1, FIG. 6 and FIG. 7 are intended to illustrate the portions that do not form the claimed design.

Claims (1)

    CLAIM
  1. The ornamental design for a cassette displacement prevention jig of semiconductor manufacturing apparatus, as shown and described.
US29/610,851 2017-01-18 2017-07-17 Cassette displacement prevention jig of semiconductor manufacturing apparatus Active USD877706S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017-000728 2017-01-18
JPD2017-728F JP1584065S (en) 2017-01-18 2017-01-18

Publications (1)

Publication Number Publication Date
USD877706S1 true USD877706S1 (en) 2020-03-10

Family

ID=59593465

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/610,851 Active USD877706S1 (en) 2017-01-18 2017-07-17 Cassette displacement prevention jig of semiconductor manufacturing apparatus

Country Status (3)

Country Link
US (1) USD877706S1 (en)
JP (1) JP1584065S (en)
TW (1) TWD188899S (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD944661S1 (en) * 2019-07-17 2022-03-01 Kokusai Electric Corporation Calibrator for wafer handling robots
USD964294S1 (en) * 2020-08-27 2022-09-20 Sumitomo Wiring Systems, Ltd. Electrical connector holder

Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3534862A (en) * 1968-09-13 1970-10-20 Rca Corp Semiconductor wafer transporting jig
US3766046A (en) * 1972-03-23 1973-10-16 Ind Modular Syst Corp Jig holder for clamping articles in place during treatment thereof
US4762353A (en) * 1987-03-09 1988-08-09 Dexon, Inc. Flexible carrier for semiconductor wafer cassettes
US5827396A (en) * 1995-12-27 1998-10-27 Samsung Electronics Co., Ltd. Device for turning a wafer during a wet etching process
US6270307B1 (en) * 1999-01-25 2001-08-07 Chartered Semiconductor Manufacturing Company Method for aligning wafers in a cassette
US6595841B2 (en) * 2001-12-20 2003-07-22 Taiwan Semiconductor Manufacturing Co., Ltd. Apparatus for holding wafer cassettes in a cassette tub during a chemical mechanical polishing process
USD496339S1 (en) * 2003-01-31 2004-09-21 Glaxo Group Limited Holder, in particular for a microfluidic chip structure
USD665759S1 (en) * 2010-12-14 2012-08-21 Tokyo Electron Limited Substrate transfer holder
US8291858B2 (en) * 2010-06-11 2012-10-23 Shenzhen Trony Science & Technology Development Co., Ltd. Movable jig for silicon-based thin film solar cell
USD674365S1 (en) * 2011-01-20 2013-01-15 Tokyo Electron Limited Arm for wafer transportation for manufacturing semiconductor
USD695240S1 (en) * 2011-10-20 2013-12-10 Tokyo Electron Limited Arm for wafer transportation for manufacturing semiconductor
US8676375B2 (en) * 2012-02-27 2014-03-18 Veeco Instruments Inc. Automated cassette-to-cassette substrate handling system
USD701498S1 (en) * 2011-10-20 2014-03-25 Tokyo Electron Limited Arm for wafer transportation for manufacturing semiconductor
US9643303B2 (en) * 2012-03-12 2017-05-09 Honda Motor Co., Ltd. Jig for supplying semi-circular member
US10249524B2 (en) * 2017-08-09 2019-04-02 Asm Ip Holding B.V. Cassette holder assembly for a substrate cassette and holding member for use in such assembly

Patent Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3534862A (en) * 1968-09-13 1970-10-20 Rca Corp Semiconductor wafer transporting jig
US3766046A (en) * 1972-03-23 1973-10-16 Ind Modular Syst Corp Jig holder for clamping articles in place during treatment thereof
US4762353A (en) * 1987-03-09 1988-08-09 Dexon, Inc. Flexible carrier for semiconductor wafer cassettes
US5827396A (en) * 1995-12-27 1998-10-27 Samsung Electronics Co., Ltd. Device for turning a wafer during a wet etching process
US6270307B1 (en) * 1999-01-25 2001-08-07 Chartered Semiconductor Manufacturing Company Method for aligning wafers in a cassette
US6595841B2 (en) * 2001-12-20 2003-07-22 Taiwan Semiconductor Manufacturing Co., Ltd. Apparatus for holding wafer cassettes in a cassette tub during a chemical mechanical polishing process
USD496339S1 (en) * 2003-01-31 2004-09-21 Glaxo Group Limited Holder, in particular for a microfluidic chip structure
US8291858B2 (en) * 2010-06-11 2012-10-23 Shenzhen Trony Science & Technology Development Co., Ltd. Movable jig for silicon-based thin film solar cell
USD665759S1 (en) * 2010-12-14 2012-08-21 Tokyo Electron Limited Substrate transfer holder
USD674365S1 (en) * 2011-01-20 2013-01-15 Tokyo Electron Limited Arm for wafer transportation for manufacturing semiconductor
USD695240S1 (en) * 2011-10-20 2013-12-10 Tokyo Electron Limited Arm for wafer transportation for manufacturing semiconductor
USD701498S1 (en) * 2011-10-20 2014-03-25 Tokyo Electron Limited Arm for wafer transportation for manufacturing semiconductor
US8676375B2 (en) * 2012-02-27 2014-03-18 Veeco Instruments Inc. Automated cassette-to-cassette substrate handling system
US9643303B2 (en) * 2012-03-12 2017-05-09 Honda Motor Co., Ltd. Jig for supplying semi-circular member
US10249524B2 (en) * 2017-08-09 2019-04-02 Asm Ip Holding B.V. Cassette holder assembly for a substrate cassette and holding member for use in such assembly

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD944661S1 (en) * 2019-07-17 2022-03-01 Kokusai Electric Corporation Calibrator for wafer handling robots
USD964294S1 (en) * 2020-08-27 2022-09-20 Sumitomo Wiring Systems, Ltd. Electrical connector holder

Also Published As

Publication number Publication date
TWD188899S (en) 2018-03-01
JP1584065S (en) 2017-08-21

Similar Documents

Publication Publication Date Title
USD941780S1 (en) Contact wafer
USD822081S1 (en) Rotary tool for boat of semiconductor manufacturing apparatus
USD803908S1 (en) Rotary tool for boat of semiconductor manufacturing apparatus
USD813195S1 (en) Headphone
USD798832S1 (en) Power semiconductor device
USD802546S1 (en) Outer wall of reactor for semiconductor manufacturing apparatus
USD798935S1 (en) Camera
USD795941S1 (en) Camera
USD782656S1 (en) Oral irrigator
USD724553S1 (en) Substrate supporter for semiconductor deposition apparatus
USD770106S1 (en) Vacuum cleaner
USD881533S1 (en) Footwear
USD810036S1 (en) Semiconductor module
USD759604S1 (en) Semiconductor device
USD781512S1 (en) Robot
USD812327S1 (en) Vacuum cleaner
USD794106S1 (en) Camera
USD806687S1 (en) Headphones
USD796147S1 (en) Wheel
USD802347S1 (en) Bench
USD782294S1 (en) Bar clamp
USD786826S1 (en) Headset
USD812460S1 (en) Screw
USD878971S1 (en) Moped
USD918352S1 (en) Sink apron