USD877706S1 - Cassette displacement prevention jig of semiconductor manufacturing apparatus - Google Patents
Cassette displacement prevention jig of semiconductor manufacturing apparatus Download PDFInfo
- Publication number
- USD877706S1 USD877706S1 US29/610,851 US201729610851F USD877706S US D877706 S1 USD877706 S1 US D877706S1 US 201729610851 F US201729610851 F US 201729610851F US D877706 S USD877706 S US D877706S
- Authority
- US
- United States
- Prior art keywords
- manufacturing apparatus
- semiconductor manufacturing
- displacement prevention
- prevention jig
- cassette displacement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
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Description
The broken lines in FIG. 1 , FIG. 6 and FIG. 7 are intended to illustrate the portions that do not form the claimed design.
Claims (1)
- The ornamental design for a cassette displacement prevention jig of semiconductor manufacturing apparatus, as shown and described.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017-000728 | 2017-01-18 | ||
JPD2017-728F JP1584065S (en) | 2017-01-18 | 2017-01-18 |
Publications (1)
Publication Number | Publication Date |
---|---|
USD877706S1 true USD877706S1 (en) | 2020-03-10 |
Family
ID=59593465
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US29/610,851 Active USD877706S1 (en) | 2017-01-18 | 2017-07-17 | Cassette displacement prevention jig of semiconductor manufacturing apparatus |
Country Status (3)
Country | Link |
---|---|
US (1) | USD877706S1 (en) |
JP (1) | JP1584065S (en) |
TW (1) | TWD188899S (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD944661S1 (en) * | 2019-07-17 | 2022-03-01 | Kokusai Electric Corporation | Calibrator for wafer handling robots |
USD964294S1 (en) * | 2020-08-27 | 2022-09-20 | Sumitomo Wiring Systems, Ltd. | Electrical connector holder |
Citations (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3534862A (en) * | 1968-09-13 | 1970-10-20 | Rca Corp | Semiconductor wafer transporting jig |
US3766046A (en) * | 1972-03-23 | 1973-10-16 | Ind Modular Syst Corp | Jig holder for clamping articles in place during treatment thereof |
US4762353A (en) * | 1987-03-09 | 1988-08-09 | Dexon, Inc. | Flexible carrier for semiconductor wafer cassettes |
US5827396A (en) * | 1995-12-27 | 1998-10-27 | Samsung Electronics Co., Ltd. | Device for turning a wafer during a wet etching process |
US6270307B1 (en) * | 1999-01-25 | 2001-08-07 | Chartered Semiconductor Manufacturing Company | Method for aligning wafers in a cassette |
US6595841B2 (en) * | 2001-12-20 | 2003-07-22 | Taiwan Semiconductor Manufacturing Co., Ltd. | Apparatus for holding wafer cassettes in a cassette tub during a chemical mechanical polishing process |
USD496339S1 (en) * | 2003-01-31 | 2004-09-21 | Glaxo Group Limited | Holder, in particular for a microfluidic chip structure |
USD665759S1 (en) * | 2010-12-14 | 2012-08-21 | Tokyo Electron Limited | Substrate transfer holder |
US8291858B2 (en) * | 2010-06-11 | 2012-10-23 | Shenzhen Trony Science & Technology Development Co., Ltd. | Movable jig for silicon-based thin film solar cell |
USD674365S1 (en) * | 2011-01-20 | 2013-01-15 | Tokyo Electron Limited | Arm for wafer transportation for manufacturing semiconductor |
USD695240S1 (en) * | 2011-10-20 | 2013-12-10 | Tokyo Electron Limited | Arm for wafer transportation for manufacturing semiconductor |
US8676375B2 (en) * | 2012-02-27 | 2014-03-18 | Veeco Instruments Inc. | Automated cassette-to-cassette substrate handling system |
USD701498S1 (en) * | 2011-10-20 | 2014-03-25 | Tokyo Electron Limited | Arm for wafer transportation for manufacturing semiconductor |
US9643303B2 (en) * | 2012-03-12 | 2017-05-09 | Honda Motor Co., Ltd. | Jig for supplying semi-circular member |
US10249524B2 (en) * | 2017-08-09 | 2019-04-02 | Asm Ip Holding B.V. | Cassette holder assembly for a substrate cassette and holding member for use in such assembly |
-
2017
- 2017-01-18 JP JPD2017-728F patent/JP1584065S/ja active Active
- 2017-07-17 US US29/610,851 patent/USD877706S1/en active Active
- 2017-07-18 TW TW106304100F patent/TWD188899S/en unknown
Patent Citations (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3534862A (en) * | 1968-09-13 | 1970-10-20 | Rca Corp | Semiconductor wafer transporting jig |
US3766046A (en) * | 1972-03-23 | 1973-10-16 | Ind Modular Syst Corp | Jig holder for clamping articles in place during treatment thereof |
US4762353A (en) * | 1987-03-09 | 1988-08-09 | Dexon, Inc. | Flexible carrier for semiconductor wafer cassettes |
US5827396A (en) * | 1995-12-27 | 1998-10-27 | Samsung Electronics Co., Ltd. | Device for turning a wafer during a wet etching process |
US6270307B1 (en) * | 1999-01-25 | 2001-08-07 | Chartered Semiconductor Manufacturing Company | Method for aligning wafers in a cassette |
US6595841B2 (en) * | 2001-12-20 | 2003-07-22 | Taiwan Semiconductor Manufacturing Co., Ltd. | Apparatus for holding wafer cassettes in a cassette tub during a chemical mechanical polishing process |
USD496339S1 (en) * | 2003-01-31 | 2004-09-21 | Glaxo Group Limited | Holder, in particular for a microfluidic chip structure |
US8291858B2 (en) * | 2010-06-11 | 2012-10-23 | Shenzhen Trony Science & Technology Development Co., Ltd. | Movable jig for silicon-based thin film solar cell |
USD665759S1 (en) * | 2010-12-14 | 2012-08-21 | Tokyo Electron Limited | Substrate transfer holder |
USD674365S1 (en) * | 2011-01-20 | 2013-01-15 | Tokyo Electron Limited | Arm for wafer transportation for manufacturing semiconductor |
USD695240S1 (en) * | 2011-10-20 | 2013-12-10 | Tokyo Electron Limited | Arm for wafer transportation for manufacturing semiconductor |
USD701498S1 (en) * | 2011-10-20 | 2014-03-25 | Tokyo Electron Limited | Arm for wafer transportation for manufacturing semiconductor |
US8676375B2 (en) * | 2012-02-27 | 2014-03-18 | Veeco Instruments Inc. | Automated cassette-to-cassette substrate handling system |
US9643303B2 (en) * | 2012-03-12 | 2017-05-09 | Honda Motor Co., Ltd. | Jig for supplying semi-circular member |
US10249524B2 (en) * | 2017-08-09 | 2019-04-02 | Asm Ip Holding B.V. | Cassette holder assembly for a substrate cassette and holding member for use in such assembly |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD944661S1 (en) * | 2019-07-17 | 2022-03-01 | Kokusai Electric Corporation | Calibrator for wafer handling robots |
USD964294S1 (en) * | 2020-08-27 | 2022-09-20 | Sumitomo Wiring Systems, Ltd. | Electrical connector holder |
Also Published As
Publication number | Publication date |
---|---|
TWD188899S (en) | 2018-03-01 |
JP1584065S (en) | 2017-08-21 |
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