USD924824S1 - Ion shield plate base for semiconductor manufacturing apparatus - Google Patents

Ion shield plate base for semiconductor manufacturing apparatus Download PDF

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Publication number
USD924824S1
USD924824S1 US29/677,728 US201929677728F USD924824S US D924824 S1 USD924824 S1 US D924824S1 US 201929677728 F US201929677728 F US 201929677728F US D924824 S USD924824 S US D924824S
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manufacturing apparatus
semiconductor manufacturing
shield plate
plate base
ion shield
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US29/677,728
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English (en)
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Yutaka Kouzuma
Kazuyuki Hirozane
Michiaki Kobayashi
Yoshifumi Ogawa
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Hitachi High Tech Corp
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Hitachi High Tech Corp
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Assigned to HITACHI HIGH-TECHNOLOGIES CORPORATION reassignment HITACHI HIGH-TECHNOLOGIES CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: HIROZANE, KAZUYUKI, KOBAYASHI, MICHIAKI, KOUZUMA, YUTAKA, OGAWA, YOSHIFUMI
Assigned to HITACHI HIGH-TECH CORPORATION reassignment HITACHI HIGH-TECH CORPORATION CHANGE OF NAME (SEE DOCUMENT FOR DETAILS). Assignors: HITACHI HIGH-TECHNOLOGIES CORPORATION
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US29/677,728 2018-07-24 2019-01-23 Ion shield plate base for semiconductor manufacturing apparatus Active USD924824S1 (en)

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JP2018-016189 2018-07-24
JPD2018-16189F JP1624793S (enrdf_load_stackoverflow) 2018-07-24 2018-07-24

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JP (1) JP1624793S (enrdf_load_stackoverflow)
TW (1) TWD202287S (enrdf_load_stackoverflow)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD950825S1 (en) * 2020-06-23 2022-05-03 Mitsubishi Electric Corporation Reflector for downlight
USD952453S1 (en) * 2020-03-16 2022-05-24 Dongguan Shichang Metals Factory Ltd. Connecting sleeve for height adjustable table
USD958401S1 (en) * 2020-05-27 2022-07-19 Hitachi High-Tech Corporation Ion shield plate for plasma processing device
USD1005245S1 (en) * 2021-04-19 2023-11-21 Hitachi High-Tech Corporation Electrode cover for a plasma processing apparatus
USD1008967S1 (en) * 2022-05-16 2023-12-26 Japan Aviation Electronics Industry, Limited Collar for connector
USD1008986S1 (en) * 2021-04-26 2023-12-26 Hitachi High-Tech Corporation Ion shield plate for plasma processing apparatus
USD1038874S1 (en) * 2023-02-06 2024-08-13 Schill GmbH & Co. KG Power supply unit

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US2094286A (en) 1936-06-17 1937-09-28 Edgar E Vogt Auxiliary strainer
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USD263776S (en) 1979-09-24 1982-04-13 The Vision Group Perforated drain cover
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USD402354S (en) * 1997-10-09 1998-12-08 Delta Engineering Holdings Limited Flange mask
US5895923A (en) * 1996-02-16 1999-04-20 Eaton Corporation Ion beam shield for implantation systems
USD419652S (en) 1997-09-23 2000-01-25 Imbibitive Technologies Corp. Stand-pipe assembly unit for a containment basin which holds a sorbent material containing cartridge and which can hold a silt-collecting sock over its top tray
US6099712A (en) * 1997-09-30 2000-08-08 Semitool, Inc. Semiconductor plating bowl and method using anode shield
US20030038252A1 (en) * 2001-06-22 2003-02-27 Toyo Tanso Co., Ltd. Shielding assembly for a semiconductor manufacturing apparatus and method of using the same
USD488251S1 (en) * 2003-05-12 2004-04-06 Bazz Inc. Lamp fitting
US20040072510A1 (en) 2000-12-21 2004-04-15 Toshiya Kinoshita Cmp conditioner, method for arranging rigid grains used for cmp conditioner, and method for manufacturing cmp conditioner
US20040093666A1 (en) 2002-11-15 2004-05-20 Zars Leif Alexander Safety swimming pool replacement drain cover apparatus and method
US7066107B2 (en) * 2001-08-28 2006-06-27 Hynix Semiconductor Manufacturing America Inc. Shielding system for plasma chamber
US20060285310A1 (en) 2005-06-15 2006-12-21 Shing-Jy Shyu Ceiling fan light LED assembly device
USD552308S1 (en) 2005-11-30 2007-10-02 Farr Scott B Feeder screen
USD560469S1 (en) * 2006-08-29 2008-01-29 Orion Energy Systems, Ltd Flange for a skylight
USD563529S1 (en) 2006-10-26 2008-03-04 Labonte Top Quality Plumbing I Combination drain cover and strainer
US20080081546A1 (en) 2006-09-29 2008-04-03 3M Innovative Properties Company Dust vacuuming abrasive tool
USD577159S1 (en) 2004-06-08 2008-09-16 Nicholas Steven Hasapoglou Seed catcher for birdfeeders
USD629875S1 (en) 2010-06-16 2010-12-28 Bill Sears Drain cover
US20110069501A1 (en) 2009-09-18 2011-03-24 Meng Hsieh Chou LED recessed light with heat dissipation
USD665902S1 (en) * 2010-06-21 2012-08-21 Saint-Gobain Ceramics & Plastics, Inc. Kiln shoe
US20120223208A1 (en) 2011-03-02 2012-09-06 Michael Tehensky Reservoir coaster
USD670794S1 (en) 2009-10-16 2012-11-13 Frank Antoniello Drain
US20130056142A1 (en) 2011-09-02 2013-03-07 Joseph W. Fiore Decorative decal for recessed light trim
US8424123B2 (en) * 2007-04-04 2013-04-23 Opella, Llc Decorative disposer flange and strainer assembly
US20130152298A1 (en) 2011-12-16 2013-06-20 Mick George LYRISTAKIS Pool or spa drain cover
USD687471S1 (en) 2011-05-25 2013-08-06 Saint-Gobain Abrasives, Inc. Abrasive disc with a distribution of holes
USD694359S1 (en) 2012-07-11 2013-11-26 Hansgrohe Se Overhead shower
USD701249S1 (en) 2012-07-20 2014-03-18 Robert Bosch Gmbh Disc for sanding machine
USD701181S1 (en) 2012-12-03 2014-03-18 Molex Incorporated LED holder
USD706407S1 (en) * 2012-07-02 2014-06-03 Air Cool Industrial Co., Ltd. Ceiling fan motor housing
USD712443S1 (en) 2013-07-02 2014-09-02 3M Innovative Properties Company Abrasive article
USD723153S1 (en) * 2013-03-08 2015-02-24 Olen Borkholder Recess ceiling fan bezel
USD726367S1 (en) 2013-06-07 2015-04-07 Dane Joseph Dukat Hookah cap
USD732644S1 (en) 2014-02-04 2015-06-23 Asm Ip Holding B.V. Top plate
USD746955S1 (en) 2014-11-03 2016-01-05 Micah Corder Drain cover
USD754829S1 (en) 2015-01-09 2016-04-26 Todd Krombein Drain cover
US20160122995A1 (en) 2014-11-03 2016-05-05 Micah Corder Drain cover
USD764205S1 (en) 2015-03-07 2016-08-23 Clean Roots, Llc Platform for plants
USD779045S1 (en) 2014-02-28 2017-02-14 Blucher Metal A/S Grating
USD787023S1 (en) 2010-10-19 2017-05-16 Wcm Industries, Inc. Device for concealing a flange
USD799690S1 (en) * 2014-12-22 2017-10-10 Ebara Corporation Inner cylinder for exhaust gas treatment apparatus
USD808248S1 (en) * 2015-02-27 2018-01-23 Todd Krombein Mounting system components
USD809094S1 (en) 2016-03-31 2018-01-30 Husqvarna Ab Multi sprayhead
USD816132S1 (en) 2016-09-08 2018-04-24 Mirka Ltd Abrasive disc
US10101015B2 (en) * 2016-06-07 2018-10-16 Bazz Inc. Fire proof recessed light fixture
USD830981S1 (en) 2017-04-07 2018-10-16 Asm Ip Holding B.V. Susceptor for semiconductor substrate processing apparatus
USD851224S1 (en) 2017-02-27 2019-06-11 Todd Krombein Riser ring for drain covers
USD851338S1 (en) 2017-05-16 2019-06-11 Joel Brown Adjustable receptacle for pet foods and beverages
USD858192S1 (en) 2018-04-27 2019-09-03 Applied Materials, Inc. Gas distribution plate
USD860498S1 (en) 2016-04-22 2019-09-17 Hubbell Incorporated Bay luminaire
USD861155S1 (en) * 2016-03-08 2019-09-24 Hunter Fan Company Canopy for a ceiling fan
USD861129S1 (en) 2018-05-11 2019-09-24 Waxman Consumer Products Group Inc. Showerhead face
USD861447S1 (en) 2018-01-19 2019-10-01 Onfloor Technologies, L.L.C. Power floor grinding and sanding driver disc
USD868947S1 (en) 2018-10-24 2019-12-03 Ho Yeong Cherng Sink strainer
USD874617S1 (en) 2018-02-12 2020-02-04 Chudun Chen Shower drain strainer
USD874870S1 (en) 2018-10-17 2020-02-11 Larry Parker Trivet
USD881338S1 (en) 2019-02-26 2020-04-14 Ziyong Chen Filter
USD884873S1 (en) 2018-05-09 2020-05-19 Benjamin D. Bortnick Inverted fan enclosure
USD886957S1 (en) 2017-12-07 2020-06-09 As America, Inc. Drain cover
US10692741B2 (en) * 2017-08-08 2020-06-23 Asm Ip Holdings B.V. Radiation shield
USD900760S1 (en) * 2018-07-24 2020-11-03 Hitachi High-Tech Corporation Ion shield plate for semiconductor manufacturing apparatus
USD901407S1 (en) * 2018-07-24 2020-11-10 Hitachi High-Tech Corporation Integrated type ion shield for semiconductor manufacturing apparatus

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP1581993S (enrdf_load_stackoverflow) 2016-11-29 2017-07-24

Patent Citations (74)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1009027A (en) 1911-01-14 1911-11-14 Percival Hammer Troutman Orchard-heater.
US1168374A (en) 1915-07-12 1916-01-18 George H Barker Game-counter.
US2094286A (en) 1936-06-17 1937-09-28 Edgar E Vogt Auxiliary strainer
US3778609A (en) 1972-07-19 1973-12-11 M Liberman Recessed lighting fixture
US3915757A (en) * 1972-08-09 1975-10-28 Niels N Engel Ion plating method and product therefrom
USD263776S (en) 1979-09-24 1982-04-13 The Vision Group Perforated drain cover
US4323433A (en) * 1980-09-22 1982-04-06 The Boeing Company Anodizing process employing adjustable shield for suspended cathode
USD299522S (en) 1985-03-06 1989-01-24 Chalberg Philip E Suction assembly for a whirlpool bath
US4655913A (en) 1985-04-22 1987-04-07 Boersma Donald J Adjustable drain cover
US4718975A (en) * 1986-10-06 1988-01-12 Texas Instruments Incorporated Particle shield
USD308419S (en) 1987-06-01 1990-06-05 Casablanca Fan Company, Inc. Cover plate for a ceiling fan
US4910811A (en) 1987-10-22 1990-03-27 Plastic Oddities, Inc. Plastic floor drain
US5202008A (en) * 1990-03-02 1993-04-13 Applied Materials, Inc. Method for preparing a shield to reduce particles in a physical vapor deposition chamber
US5895923A (en) * 1996-02-16 1999-04-20 Eaton Corporation Ion beam shield for implantation systems
USD419652S (en) 1997-09-23 2000-01-25 Imbibitive Technologies Corp. Stand-pipe assembly unit for a containment basin which holds a sorbent material containing cartridge and which can hold a silt-collecting sock over its top tray
US6099712A (en) * 1997-09-30 2000-08-08 Semitool, Inc. Semiconductor plating bowl and method using anode shield
USD402354S (en) * 1997-10-09 1998-12-08 Delta Engineering Holdings Limited Flange mask
US20040072510A1 (en) 2000-12-21 2004-04-15 Toshiya Kinoshita Cmp conditioner, method for arranging rigid grains used for cmp conditioner, and method for manufacturing cmp conditioner
US20030038252A1 (en) * 2001-06-22 2003-02-27 Toyo Tanso Co., Ltd. Shielding assembly for a semiconductor manufacturing apparatus and method of using the same
US7066107B2 (en) * 2001-08-28 2006-06-27 Hynix Semiconductor Manufacturing America Inc. Shielding system for plasma chamber
US20040093666A1 (en) 2002-11-15 2004-05-20 Zars Leif Alexander Safety swimming pool replacement drain cover apparatus and method
USD488251S1 (en) * 2003-05-12 2004-04-06 Bazz Inc. Lamp fitting
USD577159S1 (en) 2004-06-08 2008-09-16 Nicholas Steven Hasapoglou Seed catcher for birdfeeders
US20060285310A1 (en) 2005-06-15 2006-12-21 Shing-Jy Shyu Ceiling fan light LED assembly device
USD552308S1 (en) 2005-11-30 2007-10-02 Farr Scott B Feeder screen
USD560469S1 (en) * 2006-08-29 2008-01-29 Orion Energy Systems, Ltd Flange for a skylight
US20080081546A1 (en) 2006-09-29 2008-04-03 3M Innovative Properties Company Dust vacuuming abrasive tool
USD563529S1 (en) 2006-10-26 2008-03-04 Labonte Top Quality Plumbing I Combination drain cover and strainer
US8424123B2 (en) * 2007-04-04 2013-04-23 Opella, Llc Decorative disposer flange and strainer assembly
US20110069501A1 (en) 2009-09-18 2011-03-24 Meng Hsieh Chou LED recessed light with heat dissipation
USD670794S1 (en) 2009-10-16 2012-11-13 Frank Antoniello Drain
USD629875S1 (en) 2010-06-16 2010-12-28 Bill Sears Drain cover
USD665902S1 (en) * 2010-06-21 2012-08-21 Saint-Gobain Ceramics & Plastics, Inc. Kiln shoe
USD787023S1 (en) 2010-10-19 2017-05-16 Wcm Industries, Inc. Device for concealing a flange
US20120223208A1 (en) 2011-03-02 2012-09-06 Michael Tehensky Reservoir coaster
USD687471S1 (en) 2011-05-25 2013-08-06 Saint-Gobain Abrasives, Inc. Abrasive disc with a distribution of holes
US20130056142A1 (en) 2011-09-02 2013-03-07 Joseph W. Fiore Decorative decal for recessed light trim
US20130152298A1 (en) 2011-12-16 2013-06-20 Mick George LYRISTAKIS Pool or spa drain cover
USD706407S1 (en) * 2012-07-02 2014-06-03 Air Cool Industrial Co., Ltd. Ceiling fan motor housing
USD694359S1 (en) 2012-07-11 2013-11-26 Hansgrohe Se Overhead shower
USD701249S1 (en) 2012-07-20 2014-03-18 Robert Bosch Gmbh Disc for sanding machine
USD701181S1 (en) 2012-12-03 2014-03-18 Molex Incorporated LED holder
USD723153S1 (en) * 2013-03-08 2015-02-24 Olen Borkholder Recess ceiling fan bezel
USD726367S1 (en) 2013-06-07 2015-04-07 Dane Joseph Dukat Hookah cap
USD712443S1 (en) 2013-07-02 2014-09-02 3M Innovative Properties Company Abrasive article
USD732644S1 (en) 2014-02-04 2015-06-23 Asm Ip Holding B.V. Top plate
USD779045S1 (en) 2014-02-28 2017-02-14 Blucher Metal A/S Grating
USD746955S1 (en) 2014-11-03 2016-01-05 Micah Corder Drain cover
US20160122995A1 (en) 2014-11-03 2016-05-05 Micah Corder Drain cover
USD799690S1 (en) * 2014-12-22 2017-10-10 Ebara Corporation Inner cylinder for exhaust gas treatment apparatus
USD754829S1 (en) 2015-01-09 2016-04-26 Todd Krombein Drain cover
USD808248S1 (en) * 2015-02-27 2018-01-23 Todd Krombein Mounting system components
USD812519S1 (en) 2015-03-07 2018-03-13 Clean Roots, Llc Platform for plants
USD764205S1 (en) 2015-03-07 2016-08-23 Clean Roots, Llc Platform for plants
USD861155S1 (en) * 2016-03-08 2019-09-24 Hunter Fan Company Canopy for a ceiling fan
USD809094S1 (en) 2016-03-31 2018-01-30 Husqvarna Ab Multi sprayhead
USD860498S1 (en) 2016-04-22 2019-09-17 Hubbell Incorporated Bay luminaire
US10101015B2 (en) * 2016-06-07 2018-10-16 Bazz Inc. Fire proof recessed light fixture
USD816132S1 (en) 2016-09-08 2018-04-24 Mirka Ltd Abrasive disc
USD851224S1 (en) 2017-02-27 2019-06-11 Todd Krombein Riser ring for drain covers
USD830981S1 (en) 2017-04-07 2018-10-16 Asm Ip Holding B.V. Susceptor for semiconductor substrate processing apparatus
USD851338S1 (en) 2017-05-16 2019-06-11 Joel Brown Adjustable receptacle for pet foods and beverages
US10692741B2 (en) * 2017-08-08 2020-06-23 Asm Ip Holdings B.V. Radiation shield
USD886957S1 (en) 2017-12-07 2020-06-09 As America, Inc. Drain cover
USD861447S1 (en) 2018-01-19 2019-10-01 Onfloor Technologies, L.L.C. Power floor grinding and sanding driver disc
USD874617S1 (en) 2018-02-12 2020-02-04 Chudun Chen Shower drain strainer
USD858192S1 (en) 2018-04-27 2019-09-03 Applied Materials, Inc. Gas distribution plate
USD884873S1 (en) 2018-05-09 2020-05-19 Benjamin D. Bortnick Inverted fan enclosure
USD861129S1 (en) 2018-05-11 2019-09-24 Waxman Consumer Products Group Inc. Showerhead face
USD900760S1 (en) * 2018-07-24 2020-11-03 Hitachi High-Tech Corporation Ion shield plate for semiconductor manufacturing apparatus
USD901407S1 (en) * 2018-07-24 2020-11-10 Hitachi High-Tech Corporation Integrated type ion shield for semiconductor manufacturing apparatus
USD874870S1 (en) 2018-10-17 2020-02-11 Larry Parker Trivet
USD868947S1 (en) 2018-10-24 2019-12-03 Ho Yeong Cherng Sink strainer
USD881338S1 (en) 2019-02-26 2020-04-14 Ziyong Chen Filter

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Title
Notice of Allowance issued in related U.S. Appl. No. 29/677,753, dated Jun. 26, 2020 (11 pages).
Notice of Allowance issued in related U.S. Appl. No. 29/677,764, dated Jun. 26, 2020.
U.S. Appl. No. 29/677,753, filed Jan. 23, 2019.
U.S. Appl. No. 29/677,764, filed Jan. 23, 2019.

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD952453S1 (en) * 2020-03-16 2022-05-24 Dongguan Shichang Metals Factory Ltd. Connecting sleeve for height adjustable table
USD958401S1 (en) * 2020-05-27 2022-07-19 Hitachi High-Tech Corporation Ion shield plate for plasma processing device
USD950825S1 (en) * 2020-06-23 2022-05-03 Mitsubishi Electric Corporation Reflector for downlight
USD1005245S1 (en) * 2021-04-19 2023-11-21 Hitachi High-Tech Corporation Electrode cover for a plasma processing apparatus
USD1008986S1 (en) * 2021-04-26 2023-12-26 Hitachi High-Tech Corporation Ion shield plate for plasma processing apparatus
USD1008967S1 (en) * 2022-05-16 2023-12-26 Japan Aviation Electronics Industry, Limited Collar for connector
USD1038874S1 (en) * 2023-02-06 2024-08-13 Schill GmbH & Co. KG Power supply unit

Also Published As

Publication number Publication date
JP1624793S (enrdf_load_stackoverflow) 2019-02-18
TWD202287S (zh) 2020-01-21

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