USD877706S1 - Cassette displacement prevention jig of semiconductor manufacturing apparatus - Google Patents

Cassette displacement prevention jig of semiconductor manufacturing apparatus Download PDF

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Publication number
USD877706S1
USD877706S1 US29/610,851 US201729610851F USD877706S US D877706 S1 USD877706 S1 US D877706S1 US 201729610851 F US201729610851 F US 201729610851F US D877706 S USD877706 S US D877706S
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United States
Prior art keywords
manufacturing apparatus
semiconductor manufacturing
displacement prevention
prevention jig
cassette displacement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
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US29/610,851
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English (en)
Inventor
Tadayoshi Karasawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Electric Corp
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Kokusai Electric Corp
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Publication date
Application filed by Kokusai Electric Corp filed Critical Kokusai Electric Corp
Assigned to HITACHI KOKUSAI ELECTRIC INC. reassignment HITACHI KOKUSAI ELECTRIC INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KARASAWA, TADAYOSHI
Assigned to Kokusai Electric Corporation reassignment Kokusai Electric Corporation ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: HITACHI KOKUSAI ELECTRIC INC.
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US29/610,851 2017-01-18 2017-07-17 Cassette displacement prevention jig of semiconductor manufacturing apparatus Active USD877706S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPD2017-728F JP1584065S (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 2017-01-18 2017-01-18
JP2017-000728 2017-01-18

Publications (1)

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USD877706S1 true USD877706S1 (en) 2020-03-10

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ID=59593465

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US29/610,851 Active USD877706S1 (en) 2017-01-18 2017-07-17 Cassette displacement prevention jig of semiconductor manufacturing apparatus

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US (1) USD877706S1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JP1584065S (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
TW (1) TWD188899S (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD944661S1 (en) * 2019-07-17 2022-03-01 Kokusai Electric Corporation Calibrator for wafer handling robots
USD964294S1 (en) * 2020-08-27 2022-09-20 Sumitomo Wiring Systems, Ltd. Electrical connector holder

Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3534862A (en) * 1968-09-13 1970-10-20 Rca Corp Semiconductor wafer transporting jig
US3766046A (en) * 1972-03-23 1973-10-16 Ind Modular Syst Corp Jig holder for clamping articles in place during treatment thereof
US4762353A (en) * 1987-03-09 1988-08-09 Dexon, Inc. Flexible carrier for semiconductor wafer cassettes
US5827396A (en) * 1995-12-27 1998-10-27 Samsung Electronics Co., Ltd. Device for turning a wafer during a wet etching process
US6270307B1 (en) * 1999-01-25 2001-08-07 Chartered Semiconductor Manufacturing Company Method for aligning wafers in a cassette
US6595841B2 (en) * 2001-12-20 2003-07-22 Taiwan Semiconductor Manufacturing Co., Ltd. Apparatus for holding wafer cassettes in a cassette tub during a chemical mechanical polishing process
USD496339S1 (en) * 2003-01-31 2004-09-21 Glaxo Group Limited Holder, in particular for a microfluidic chip structure
USD665759S1 (en) * 2010-12-14 2012-08-21 Tokyo Electron Limited Substrate transfer holder
US8291858B2 (en) * 2010-06-11 2012-10-23 Shenzhen Trony Science & Technology Development Co., Ltd. Movable jig for silicon-based thin film solar cell
USD674365S1 (en) * 2011-01-20 2013-01-15 Tokyo Electron Limited Arm for wafer transportation for manufacturing semiconductor
USD695240S1 (en) * 2011-10-20 2013-12-10 Tokyo Electron Limited Arm for wafer transportation for manufacturing semiconductor
US8676375B2 (en) * 2012-02-27 2014-03-18 Veeco Instruments Inc. Automated cassette-to-cassette substrate handling system
USD701498S1 (en) * 2011-10-20 2014-03-25 Tokyo Electron Limited Arm for wafer transportation for manufacturing semiconductor
US9643303B2 (en) * 2012-03-12 2017-05-09 Honda Motor Co., Ltd. Jig for supplying semi-circular member
US10249524B2 (en) * 2017-08-09 2019-04-02 Asm Ip Holding B.V. Cassette holder assembly for a substrate cassette and holding member for use in such assembly

Patent Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3534862A (en) * 1968-09-13 1970-10-20 Rca Corp Semiconductor wafer transporting jig
US3766046A (en) * 1972-03-23 1973-10-16 Ind Modular Syst Corp Jig holder for clamping articles in place during treatment thereof
US4762353A (en) * 1987-03-09 1988-08-09 Dexon, Inc. Flexible carrier for semiconductor wafer cassettes
US5827396A (en) * 1995-12-27 1998-10-27 Samsung Electronics Co., Ltd. Device for turning a wafer during a wet etching process
US6270307B1 (en) * 1999-01-25 2001-08-07 Chartered Semiconductor Manufacturing Company Method for aligning wafers in a cassette
US6595841B2 (en) * 2001-12-20 2003-07-22 Taiwan Semiconductor Manufacturing Co., Ltd. Apparatus for holding wafer cassettes in a cassette tub during a chemical mechanical polishing process
USD496339S1 (en) * 2003-01-31 2004-09-21 Glaxo Group Limited Holder, in particular for a microfluidic chip structure
US8291858B2 (en) * 2010-06-11 2012-10-23 Shenzhen Trony Science & Technology Development Co., Ltd. Movable jig for silicon-based thin film solar cell
USD665759S1 (en) * 2010-12-14 2012-08-21 Tokyo Electron Limited Substrate transfer holder
USD674365S1 (en) * 2011-01-20 2013-01-15 Tokyo Electron Limited Arm for wafer transportation for manufacturing semiconductor
USD695240S1 (en) * 2011-10-20 2013-12-10 Tokyo Electron Limited Arm for wafer transportation for manufacturing semiconductor
USD701498S1 (en) * 2011-10-20 2014-03-25 Tokyo Electron Limited Arm for wafer transportation for manufacturing semiconductor
US8676375B2 (en) * 2012-02-27 2014-03-18 Veeco Instruments Inc. Automated cassette-to-cassette substrate handling system
US9643303B2 (en) * 2012-03-12 2017-05-09 Honda Motor Co., Ltd. Jig for supplying semi-circular member
US10249524B2 (en) * 2017-08-09 2019-04-02 Asm Ip Holding B.V. Cassette holder assembly for a substrate cassette and holding member for use in such assembly

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD944661S1 (en) * 2019-07-17 2022-03-01 Kokusai Electric Corporation Calibrator for wafer handling robots
USD964294S1 (en) * 2020-08-27 2022-09-20 Sumitomo Wiring Systems, Ltd. Electrical connector holder

Also Published As

Publication number Publication date
JP1584065S (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 2017-08-21
TWD188899S (zh) 2018-03-01

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