USD724551S1 - Inner tube for process tube for manufacturing semiconductor wafers - Google Patents

Inner tube for process tube for manufacturing semiconductor wafers Download PDF

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Publication number
USD724551S1
USD724551S1 US29/420,539 US201229420539F USD724551S US D724551 S1 USD724551 S1 US D724551S1 US 201229420539 F US201229420539 F US 201229420539F US D724551 S USD724551 S US D724551S
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US
United States
Prior art keywords
tube
semiconductor wafers
manufacturing semiconductor
inner tube
process tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/420,539
Inventor
Hirofumi Kaneko
Atsushi Endo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Assigned to TOKYO ELECTRON LIMITED reassignment TOKYO ELECTRON LIMITED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KANEKO, HIROFUMI, ENDO, ATSUSHI
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Publication of USD724551S1 publication Critical patent/USD724551S1/en
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Anticipated expiration legal-status Critical

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FIG. 1 is a perspective view of an inner tube for process tube for manufacturing semiconductor wafers showing our new design;
FIG. 2 is a front view thereof;
FIG. 3 is a rear view thereof;
FIG. 4 is a right side thereof;
FIG. 5 is a left side view thereof;
FIG. 6 is a top plan view thereof;
FIG. 7 is a bottom plan view thereof;
FIG. 8 is an enlarged cross-sectional view taken along line 8-8 of FIG. 2; and,
FIG. 9 is another front view thereof, shown in a used condition.
The broken lines shown in the drawings represent portions of the inner tube for process tube for manufacturing semiconductor wafers that form no part of the claimed design.

Claims (1)

    CLAIM
  1. The ornamental design for an inner tube for process tube for manufacturing semiconductor wafers, as shown and described.
US29/420,539 2011-11-18 2012-05-10 Inner tube for process tube for manufacturing semiconductor wafers Active USD724551S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011-026687 2011-02-10
JP2011026687 2011-11-18

Publications (1)

Publication Number Publication Date
USD724551S1 true USD724551S1 (en) 2015-03-17

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ID=52632693

Family Applications (1)

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US29/420,539 Active USD724551S1 (en) 2011-11-18 2012-05-10 Inner tube for process tube for manufacturing semiconductor wafers

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD740895S1 (en) * 2014-09-02 2015-10-13 Timothy John Slowey Fitness training device with connection ports
USD812595S1 (en) * 2015-11-30 2018-03-13 Kmw Inc. Antenna
USD842824S1 (en) * 2017-08-09 2019-03-12 Kokusai Electric Corporation Reaction tube
USD842823S1 (en) * 2017-08-10 2019-03-12 Kokusai Electric Corporation Reaction tube
USD853979S1 (en) * 2017-12-27 2019-07-16 Kokusai Electric Corporation Reaction tube
USD901406S1 (en) * 2019-03-20 2020-11-10 Kokusai Electric Corporation Inner tube of reactor for semiconductor fabrication
USD1019583S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment
USD1019581S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment
USD1019582S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD740895S1 (en) * 2014-09-02 2015-10-13 Timothy John Slowey Fitness training device with connection ports
USD812595S1 (en) * 2015-11-30 2018-03-13 Kmw Inc. Antenna
USD842824S1 (en) * 2017-08-09 2019-03-12 Kokusai Electric Corporation Reaction tube
USD842823S1 (en) * 2017-08-10 2019-03-12 Kokusai Electric Corporation Reaction tube
USD853979S1 (en) * 2017-12-27 2019-07-16 Kokusai Electric Corporation Reaction tube
USD901406S1 (en) * 2019-03-20 2020-11-10 Kokusai Electric Corporation Inner tube of reactor for semiconductor fabrication
USD1019583S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment
USD1019581S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment
USD1019582S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment

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