USD655259S1 - Top plate for reactor for manufacturing semiconductor - Google Patents
Top plate for reactor for manufacturing semiconductor Download PDFInfo
- Publication number
- USD655259S1 USD655259S1 US29/389,563 US201129389563F USD655259S US D655259 S1 USD655259 S1 US D655259S1 US 201129389563 F US201129389563 F US 201129389563F US D655259 S USD655259 S US D655259S
- Authority
- US
- United States
- Prior art keywords
- reactor
- top plate
- manufacturing semiconductor
- view
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Description
Claims (1)
- The ornamental design for top plate for reactor for manufacturing semiconductor, as shown and described.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010-025240 | 2010-10-21 | ||
| JP2010025240 | 2010-10-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| USD655259S1 true USD655259S1 (en) | 2012-03-06 |
Family
ID=45758272
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US29/389,563 Expired - Lifetime USD655259S1 (en) | 2010-10-21 | 2011-04-13 | Top plate for reactor for manufacturing semiconductor |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | USD655259S1 (en) |
| TW (1) | TWD146036S (en) |
Cited By (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD671901S1 (en) * | 2011-04-13 | 2012-12-04 | Novellus Systems, Inc. | Pedestal cover |
| USD689032S1 (en) * | 2011-04-21 | 2013-09-03 | Panasonic Corporation | Electrostatic atomized water particle generating module |
| USD694790S1 (en) | 2011-09-20 | 2013-12-03 | Tokyo Electron Limited | Baffle plate for manufacturing semiconductor |
| USD697038S1 (en) * | 2011-09-20 | 2014-01-07 | Tokyo Electron Limited | Baffle plate |
| USD699200S1 (en) * | 2011-09-30 | 2014-02-11 | Tokyo Electron Limited | Electrode member for a plasma processing apparatus |
| USD699199S1 (en) * | 2011-09-30 | 2014-02-11 | Tokyo Electron Limited | Electrode plate for a plasma processing apparatus |
| USD703162S1 (en) * | 2012-10-17 | 2014-04-22 | Sumitomo Electric Industries, Ltd. | Wafer holder for stepper |
| USD703161S1 (en) * | 2012-10-15 | 2014-04-22 | Sumitomo Electric Industries, Ltd. | Wafer holder for ion implantation |
| USD709537S1 (en) | 2011-09-30 | 2014-07-22 | Tokyo Electron Limited | Focusing ring |
| USD709538S1 (en) | 2011-09-30 | 2014-07-22 | Tokyo Electron Limited | Focusing ring |
| USD709539S1 (en) | 2011-09-30 | 2014-07-22 | Tokyo Electron Limited | Focusing ring |
| USD709536S1 (en) | 2011-09-30 | 2014-07-22 | Tokyo Electron Limited | Focusing ring |
| USD716742S1 (en) * | 2013-09-13 | 2014-11-04 | Asm Ip Holding B.V. | Substrate supporter for semiconductor deposition apparatus |
| USD720309S1 (en) * | 2011-11-18 | 2014-12-30 | Tokyo Electron Limited | Inner tube for process tube for manufacturing semiconductor wafers |
| USD722031S1 (en) * | 2013-12-31 | 2015-02-03 | Celadon Systems, Inc. | Top contact layout board in an electrical system |
| USD724553S1 (en) * | 2013-09-13 | 2015-03-17 | Asm Ip Holding B.V. | Substrate supporter for semiconductor deposition apparatus |
| US20150329964A1 (en) * | 2014-05-16 | 2015-11-19 | Tokyo Electron Limited | Film Forming Apparatus |
| US20160027674A1 (en) * | 2013-03-15 | 2016-01-28 | Kevin Griffin | Carousel Gas Distribution Assembly With Optical Measurements |
| USD766850S1 (en) * | 2014-03-28 | 2016-09-20 | Tokyo Electron Limited | Wafer holder for manufacturing semiconductor |
| US10508340B2 (en) * | 2013-03-15 | 2019-12-17 | Applied Materials, Inc. | Atmospheric lid with rigid plate for carousel processing chambers |
| USD981972S1 (en) * | 2021-03-22 | 2023-03-28 | Kokusai Electric Corporation | Adiabatic plate for substrate processing appratus |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7235139B2 (en) * | 2003-10-28 | 2007-06-26 | Veeco Instruments Inc. | Wafer carrier for growing GaN wafers |
| USD614593S1 (en) * | 2008-07-21 | 2010-04-27 | Asm Genitech Korea Ltd | Substrate support for a semiconductor deposition apparatus |
| USD615937S1 (en) * | 2009-03-06 | 2010-05-18 | Tokyo Electron Limited | Heat radiation fin of heat insulating cylinder for manufacturing semiconductor wafers |
| USD616393S1 (en) * | 2009-03-06 | 2010-05-25 | Tokyo Electron Limited | Heat radiation fin of heat insulating cylinder for manufacturing semiconductor wafers |
| USD616392S1 (en) * | 2009-03-06 | 2010-05-25 | Tokyo Electron Limited | Heat radiation fin of heat insulating cylinder for manufacturing semiconductor wafers |
| USD639757S1 (en) * | 2010-08-16 | 2011-06-14 | Celadon Systems, Inc. | Top contact layout board in an electrical system |
-
2011
- 2011-04-13 US US29/389,563 patent/USD655259S1/en not_active Expired - Lifetime
- 2011-04-14 TW TW100301725F patent/TWD146036S/en unknown
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7235139B2 (en) * | 2003-10-28 | 2007-06-26 | Veeco Instruments Inc. | Wafer carrier for growing GaN wafers |
| USD614593S1 (en) * | 2008-07-21 | 2010-04-27 | Asm Genitech Korea Ltd | Substrate support for a semiconductor deposition apparatus |
| USD615937S1 (en) * | 2009-03-06 | 2010-05-18 | Tokyo Electron Limited | Heat radiation fin of heat insulating cylinder for manufacturing semiconductor wafers |
| USD616393S1 (en) * | 2009-03-06 | 2010-05-25 | Tokyo Electron Limited | Heat radiation fin of heat insulating cylinder for manufacturing semiconductor wafers |
| USD616392S1 (en) * | 2009-03-06 | 2010-05-25 | Tokyo Electron Limited | Heat radiation fin of heat insulating cylinder for manufacturing semiconductor wafers |
| USD639757S1 (en) * | 2010-08-16 | 2011-06-14 | Celadon Systems, Inc. | Top contact layout board in an electrical system |
Cited By (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD671901S1 (en) * | 2011-04-13 | 2012-12-04 | Novellus Systems, Inc. | Pedestal cover |
| USD689032S1 (en) * | 2011-04-21 | 2013-09-03 | Panasonic Corporation | Electrostatic atomized water particle generating module |
| USD694790S1 (en) | 2011-09-20 | 2013-12-03 | Tokyo Electron Limited | Baffle plate for manufacturing semiconductor |
| USD697038S1 (en) * | 2011-09-20 | 2014-01-07 | Tokyo Electron Limited | Baffle plate |
| USD709539S1 (en) | 2011-09-30 | 2014-07-22 | Tokyo Electron Limited | Focusing ring |
| USD699200S1 (en) * | 2011-09-30 | 2014-02-11 | Tokyo Electron Limited | Electrode member for a plasma processing apparatus |
| USD699199S1 (en) * | 2011-09-30 | 2014-02-11 | Tokyo Electron Limited | Electrode plate for a plasma processing apparatus |
| USD709536S1 (en) | 2011-09-30 | 2014-07-22 | Tokyo Electron Limited | Focusing ring |
| USD709537S1 (en) | 2011-09-30 | 2014-07-22 | Tokyo Electron Limited | Focusing ring |
| USD709538S1 (en) | 2011-09-30 | 2014-07-22 | Tokyo Electron Limited | Focusing ring |
| USD720309S1 (en) * | 2011-11-18 | 2014-12-30 | Tokyo Electron Limited | Inner tube for process tube for manufacturing semiconductor wafers |
| USD703161S1 (en) * | 2012-10-15 | 2014-04-22 | Sumitomo Electric Industries, Ltd. | Wafer holder for ion implantation |
| USD703162S1 (en) * | 2012-10-17 | 2014-04-22 | Sumitomo Electric Industries, Ltd. | Wafer holder for stepper |
| US20160027674A1 (en) * | 2013-03-15 | 2016-01-28 | Kevin Griffin | Carousel Gas Distribution Assembly With Optical Measurements |
| US10508340B2 (en) * | 2013-03-15 | 2019-12-17 | Applied Materials, Inc. | Atmospheric lid with rigid plate for carousel processing chambers |
| USD716742S1 (en) * | 2013-09-13 | 2014-11-04 | Asm Ip Holding B.V. | Substrate supporter for semiconductor deposition apparatus |
| USD724553S1 (en) * | 2013-09-13 | 2015-03-17 | Asm Ip Holding B.V. | Substrate supporter for semiconductor deposition apparatus |
| USD722031S1 (en) * | 2013-12-31 | 2015-02-03 | Celadon Systems, Inc. | Top contact layout board in an electrical system |
| USD766850S1 (en) * | 2014-03-28 | 2016-09-20 | Tokyo Electron Limited | Wafer holder for manufacturing semiconductor |
| US20150329964A1 (en) * | 2014-05-16 | 2015-11-19 | Tokyo Electron Limited | Film Forming Apparatus |
| US10344382B2 (en) * | 2014-05-16 | 2019-07-09 | Tokyo Electron Limited | Film forming apparatus |
| USD981972S1 (en) * | 2021-03-22 | 2023-03-28 | Kokusai Electric Corporation | Adiabatic plate for substrate processing appratus |
Also Published As
| Publication number | Publication date |
|---|---|
| TWD146036S (en) | 2012-03-21 |
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