USD655259S1 - Top plate for reactor for manufacturing semiconductor - Google Patents

Top plate for reactor for manufacturing semiconductor Download PDF

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Publication number
USD655259S1
USD655259S1 US29/389,563 US201129389563F USD655259S US D655259 S1 USD655259 S1 US D655259S1 US 201129389563 F US201129389563 F US 201129389563F US D655259 S USD655259 S US D655259S
Authority
US
United States
Prior art keywords
reactor
top plate
manufacturing semiconductor
view
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29/389,563
Inventor
Manabu Honma
Katsuyuki Hishiya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Assigned to TOKYO ELECTRON LIMITED reassignment TOKYO ELECTRON LIMITED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: Hishiya, Katsuyuki, HONMA, MANABU
Application granted granted Critical
Publication of USD655259S1 publication Critical patent/USD655259S1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

FIG. 1 is front perspective view of a top plate for reactor for manufacturing semiconductor illustrating our new design;
FIG. 2 is a front view thereof;
FIG. 3 is a rear view thereof;
FIG. 4 is a right side view thereof;
FIG. 5 is a left side view thereof;
FIG. 6 is a top plan view thereof;
FIG. 7 is a bottom view thereof;
FIG. 8 is a reference front view indicating the plane upon which a sectional view is taken; and,
FIG. 9 is a sectional view taken along line 9-9-9 of FIG. 8.

Claims (1)

    CLAIM
  1. The ornamental design for top plate for reactor for manufacturing semiconductor, as shown and described.
US29/389,563 2010-10-21 2011-04-13 Top plate for reactor for manufacturing semiconductor Expired - Lifetime USD655259S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010-025240 2010-10-21
JP2010025240 2010-10-21

Publications (1)

Publication Number Publication Date
USD655259S1 true USD655259S1 (en) 2012-03-06

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ID=45758272

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/389,563 Expired - Lifetime USD655259S1 (en) 2010-10-21 2011-04-13 Top plate for reactor for manufacturing semiconductor

Country Status (2)

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US (1) USD655259S1 (en)
TW (1) TWD146036S (en)

Cited By (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD671901S1 (en) * 2011-04-13 2012-12-04 Novellus Systems, Inc. Pedestal cover
USD689032S1 (en) * 2011-04-21 2013-09-03 Panasonic Corporation Electrostatic atomized water particle generating module
USD694790S1 (en) 2011-09-20 2013-12-03 Tokyo Electron Limited Baffle plate for manufacturing semiconductor
USD697038S1 (en) * 2011-09-20 2014-01-07 Tokyo Electron Limited Baffle plate
USD699200S1 (en) * 2011-09-30 2014-02-11 Tokyo Electron Limited Electrode member for a plasma processing apparatus
USD699199S1 (en) * 2011-09-30 2014-02-11 Tokyo Electron Limited Electrode plate for a plasma processing apparatus
USD703162S1 (en) * 2012-10-17 2014-04-22 Sumitomo Electric Industries, Ltd. Wafer holder for stepper
USD703161S1 (en) * 2012-10-15 2014-04-22 Sumitomo Electric Industries, Ltd. Wafer holder for ion implantation
USD709537S1 (en) 2011-09-30 2014-07-22 Tokyo Electron Limited Focusing ring
USD709538S1 (en) 2011-09-30 2014-07-22 Tokyo Electron Limited Focusing ring
USD709539S1 (en) 2011-09-30 2014-07-22 Tokyo Electron Limited Focusing ring
USD709536S1 (en) 2011-09-30 2014-07-22 Tokyo Electron Limited Focusing ring
USD716742S1 (en) * 2013-09-13 2014-11-04 Asm Ip Holding B.V. Substrate supporter for semiconductor deposition apparatus
USD720309S1 (en) * 2011-11-18 2014-12-30 Tokyo Electron Limited Inner tube for process tube for manufacturing semiconductor wafers
USD722031S1 (en) * 2013-12-31 2015-02-03 Celadon Systems, Inc. Top contact layout board in an electrical system
USD724553S1 (en) * 2013-09-13 2015-03-17 Asm Ip Holding B.V. Substrate supporter for semiconductor deposition apparatus
US20150329964A1 (en) * 2014-05-16 2015-11-19 Tokyo Electron Limited Film Forming Apparatus
US20160027674A1 (en) * 2013-03-15 2016-01-28 Kevin Griffin Carousel Gas Distribution Assembly With Optical Measurements
USD766850S1 (en) * 2014-03-28 2016-09-20 Tokyo Electron Limited Wafer holder for manufacturing semiconductor
US10508340B2 (en) * 2013-03-15 2019-12-17 Applied Materials, Inc. Atmospheric lid with rigid plate for carousel processing chambers
USD981972S1 (en) * 2021-03-22 2023-03-28 Kokusai Electric Corporation Adiabatic plate for substrate processing appratus

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7235139B2 (en) * 2003-10-28 2007-06-26 Veeco Instruments Inc. Wafer carrier for growing GaN wafers
USD614593S1 (en) * 2008-07-21 2010-04-27 Asm Genitech Korea Ltd Substrate support for a semiconductor deposition apparatus
USD615937S1 (en) * 2009-03-06 2010-05-18 Tokyo Electron Limited Heat radiation fin of heat insulating cylinder for manufacturing semiconductor wafers
USD616393S1 (en) * 2009-03-06 2010-05-25 Tokyo Electron Limited Heat radiation fin of heat insulating cylinder for manufacturing semiconductor wafers
USD616392S1 (en) * 2009-03-06 2010-05-25 Tokyo Electron Limited Heat radiation fin of heat insulating cylinder for manufacturing semiconductor wafers
USD639757S1 (en) * 2010-08-16 2011-06-14 Celadon Systems, Inc. Top contact layout board in an electrical system

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7235139B2 (en) * 2003-10-28 2007-06-26 Veeco Instruments Inc. Wafer carrier for growing GaN wafers
USD614593S1 (en) * 2008-07-21 2010-04-27 Asm Genitech Korea Ltd Substrate support for a semiconductor deposition apparatus
USD615937S1 (en) * 2009-03-06 2010-05-18 Tokyo Electron Limited Heat radiation fin of heat insulating cylinder for manufacturing semiconductor wafers
USD616393S1 (en) * 2009-03-06 2010-05-25 Tokyo Electron Limited Heat radiation fin of heat insulating cylinder for manufacturing semiconductor wafers
USD616392S1 (en) * 2009-03-06 2010-05-25 Tokyo Electron Limited Heat radiation fin of heat insulating cylinder for manufacturing semiconductor wafers
USD639757S1 (en) * 2010-08-16 2011-06-14 Celadon Systems, Inc. Top contact layout board in an electrical system

Cited By (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD671901S1 (en) * 2011-04-13 2012-12-04 Novellus Systems, Inc. Pedestal cover
USD689032S1 (en) * 2011-04-21 2013-09-03 Panasonic Corporation Electrostatic atomized water particle generating module
USD694790S1 (en) 2011-09-20 2013-12-03 Tokyo Electron Limited Baffle plate for manufacturing semiconductor
USD697038S1 (en) * 2011-09-20 2014-01-07 Tokyo Electron Limited Baffle plate
USD709539S1 (en) 2011-09-30 2014-07-22 Tokyo Electron Limited Focusing ring
USD699200S1 (en) * 2011-09-30 2014-02-11 Tokyo Electron Limited Electrode member for a plasma processing apparatus
USD699199S1 (en) * 2011-09-30 2014-02-11 Tokyo Electron Limited Electrode plate for a plasma processing apparatus
USD709536S1 (en) 2011-09-30 2014-07-22 Tokyo Electron Limited Focusing ring
USD709537S1 (en) 2011-09-30 2014-07-22 Tokyo Electron Limited Focusing ring
USD709538S1 (en) 2011-09-30 2014-07-22 Tokyo Electron Limited Focusing ring
USD720309S1 (en) * 2011-11-18 2014-12-30 Tokyo Electron Limited Inner tube for process tube for manufacturing semiconductor wafers
USD703161S1 (en) * 2012-10-15 2014-04-22 Sumitomo Electric Industries, Ltd. Wafer holder for ion implantation
USD703162S1 (en) * 2012-10-17 2014-04-22 Sumitomo Electric Industries, Ltd. Wafer holder for stepper
US20160027674A1 (en) * 2013-03-15 2016-01-28 Kevin Griffin Carousel Gas Distribution Assembly With Optical Measurements
US10508340B2 (en) * 2013-03-15 2019-12-17 Applied Materials, Inc. Atmospheric lid with rigid plate for carousel processing chambers
USD716742S1 (en) * 2013-09-13 2014-11-04 Asm Ip Holding B.V. Substrate supporter for semiconductor deposition apparatus
USD724553S1 (en) * 2013-09-13 2015-03-17 Asm Ip Holding B.V. Substrate supporter for semiconductor deposition apparatus
USD722031S1 (en) * 2013-12-31 2015-02-03 Celadon Systems, Inc. Top contact layout board in an electrical system
USD766850S1 (en) * 2014-03-28 2016-09-20 Tokyo Electron Limited Wafer holder for manufacturing semiconductor
US20150329964A1 (en) * 2014-05-16 2015-11-19 Tokyo Electron Limited Film Forming Apparatus
US10344382B2 (en) * 2014-05-16 2019-07-09 Tokyo Electron Limited Film forming apparatus
USD981972S1 (en) * 2021-03-22 2023-03-28 Kokusai Electric Corporation Adiabatic plate for substrate processing appratus

Also Published As

Publication number Publication date
TWD146036S (en) 2012-03-21

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