US9912255B2 - Electrostatic actuator, variable capacitance capacitor, electric switch, and method for driving electrostatic actuator - Google Patents

Electrostatic actuator, variable capacitance capacitor, electric switch, and method for driving electrostatic actuator Download PDF

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Publication number
US9912255B2
US9912255B2 US14/391,433 US201214391433A US9912255B2 US 9912255 B2 US9912255 B2 US 9912255B2 US 201214391433 A US201214391433 A US 201214391433A US 9912255 B2 US9912255 B2 US 9912255B2
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electrode
spacer
movable
fixed
fixed electrode
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US20150116893A1 (en
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Koji Hanihara
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Pioneer Corp
Pioneer Micro Technology Corp
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Pioneer Corp
Pioneer Micro Technology Corp
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0002—Arrangements for avoiding sticking of the flexible or moving parts
    • B81B3/001—Structures having a reduced contact area, e.g. with bumps or with a textured surface
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0221—Variable capacitors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0072—Electrostatic relays; Electro-adhesion relays making use of micromechanics with stoppers or protrusions for maintaining a gap, reducing the contact area or for preventing stiction between the movable and the fixed electrode in the attracted position

Definitions

  • the present invention relates to an electrostatic actuator that has a fixed electrode and a movable electrode facing the fixed electrode and causes the movable electrode to approach and separate from the fixed electrode with an electrostatic force, a variable capacitance capacitor, an electric switch, and a method for driving the electrostatic actuator.
  • a known variable capacitance capacitor has a variable capacitance portion composed of a signal line and an electrode facing the signal line and a pair of actuator portions of a bridge structure in line with both sides of the variable capacitance portion (see Patent Document 1).
  • Each of the actuator portions has a movable-side upper electrode and a fixation-side lower electrode facing the upper electrode. Further, when a voltage is applied between the upper electrode and the lower electrode, a potential difference is caused between the upper electrode and the lower electrode. As a result, an electrostatic force is generated between the upper electrode and the lower electrode, whereby the upper electrode and the lower electrode are caused to approach each other.
  • the lower electrode is covered with an insulating film, and the upper electrode and the lower electrode come in contact with each other via the insulating film over the almost entire areas thereof in an approaching state in which both of the electrodes approach each other.
  • both of the electrodes come in contact with each other via the insulating film over the almost entire surfaces thereof in the approaching state. Therefore, charges are accumulated on the insulating film (charging) when the approaching state goes on for a long time or when the approaching operation is performed multiple times. As a result, the upper electrode and the lower electrode adhere to each other due to the charges accumulated on the insulating film. That is, it gives rise to the problem that stiction (sticking) is caused.
  • the present invention has an object of providing an electrostatic actuator capable of preventing stiction with a simple configuration, a variable capacitance capacitor, an electric switch, and a method for driving the electrostatic actuator.
  • the present invention provides an electrostatic actuator comprising: a fixed electrode that is disposed on a substrate; a movable electrode that is disposed so as to face the fixed electrode and approaches the fixed electrode with an electrostatic force generated between the movable electrode and the fixed electrode; and a spacer that comes in contact with one of the fixed electrode and the movable electrode in an approaching state in which the fixed electrode and the movable electrode approach each other and forms a prescribed air gap between the fixed electrode and the movable electrode, wherein the spacer has a spacer electrode portion that comes in contact with the one electrode via an insulator and has the same potential as the one electrode at least in the approaching state.
  • the spacer electrode portion of the spacer comes in contact with the one electrode via the insulator and generates the prescribed air gap between the fixed electrode and the movable electrode.
  • the spacer electrode portion has the same potential as the one electrode, positive and negative charges are not accumulated (an electric field is not generated) between the one electrode and the spacer electrode portion.
  • charges are not accumulated on the insulator interposed between the one electrode and the spacer electrode portion.
  • charges are not accumulated on the spacer itself as well as both of the electrodes, and thus stiction can be prevented by the simple configuration. Note that the fixed electrode and the spacer electrode portion are caused to become nonconductive by the configuration.
  • the one electrode and the spacer electrode portion are preferably connected to a reference potential point, and the other of the fixed electrode and the movable electrode is preferably connected to an application power supply that applies a prescribed pull-in operating voltage to generate the electrostatic force.
  • the pull-in operating voltage is applied to the one electrode to cause the spacer electrode portion to have the same potential as the one electrode, the pull-in operating voltage is also required to be applied to the spacer electrode portion. This results in the potential control of the electrostatic actuator being complex.
  • the pull-in operating voltage is applied to the other electrode according to the above configuration, the potential of the one electrode does not change and the voltage is not required to be applied to the spacer electrode portion. Accordingly, the potential control can be easily performed.
  • the “prescribed pull-in operating voltage” is a voltage greater than or equal to a voltage (i.e., pull-in voltage) at which the movable electrode is caused to approach (pull in) by the electrostatic force.
  • the spacer is preferably disposed on the substrate and comes in contact with the movable electrode in the approaching state to form the prescribed air gap, and the fixed electrode and the spacer electrode portion are preferably formed to have the same height.
  • the fixed electrode and the spacer electrode portion can be formed in an integrated process when the electrostatic actuator is manufactured by the process technology of MEMS (Micro Electro Mechanical Systems).
  • the fixed electrode and the movable electrode preferably face each other at exposed parts thereof.
  • the present invention provides a variable capacitance capacitor comprising: the above electrostatic actuator; and a variable capacitance element that varies an electrostatic capacitance using the electrostatic actuator as a driving source.
  • variable capacitance capacitor high in safety can be provided by the use of the electrostatic actuator capable of preventing stiction.
  • the present invention provides an electric switch comprising: the above electrostatic actuator; and a switch element that switch-drives using the electrostatic actuator as a driving source.
  • the electric switch high in safety can be provided by the use of the electrostatic actuator capable of preventing stiction.
  • the present invention provides a method for driving an electrostatic actuator, the electrostatic actuator including: a fixed electrode that is disposed on a substrate; a movable electrode that is disposed so as to face the fixed electrode and approaches the fixed electrode with an electrostatic force generated between the movable electrode and the fixed electrode; and a spacer that has a spacer electrode portion that comes in contact with one of the fixed electrode and the movable electrode via an insulator in an approaching state in which the fixed electrode and the movable electrode approach each other and forms a prescribed air gap between the fixed electrode and the movable electrode, wherein the one electrode and the spacer electrode portion are connected to a reference potential point, and a prescribed pull-in operating voltage to generate the electrostatic force is applied to the other of the fixed electrode and the movable electrode.
  • the spacer electrode portion has the same potential as the one electrode when the one electrode and the spacer electrode portion are connected to a reference potential point.
  • positive and negative charges are not accumulated (an electric field is not generated) between the one electrode and the spacer electrode portion.
  • charges are not accumulated on the insulator interposed between the one electrode and the spacer electrode portion.
  • charges are not accumulated on the spacer itself as well as both of the electrodes, and thus stiction can be prevented by the simple configuration.
  • the pull-in operating voltage is applied to the other electrode, the potential of the one electrode does not change and the voltage is not required to be applied to the spacer electrode portion. Accordingly, the potential control can be easily performed.
  • FIGS. 1A and 1B are cross-sectional views of a variable capacitance capacitor according to an embodiment
  • FIG. 2 is a plan view of the variable capacitance capacitor
  • FIG. 3 is a cross-sectional view of an electrostatic actuator
  • FIGS. 4A to 4D are explanatory views showing the approaching and separating operations of both driving electrodes in the electrostatic actuator
  • FIGS. 5A and 5B are cross-sectional views of an electric switch according to a second embodiment
  • FIGS. 6A and 6B and FIGS. 6C and 6D are cross-sectional views of a first modified example of the electrostatic actuator and cross-sectional views of a second modified example thereof, respectively;
  • FIGS. 7A to 7E are a cross-sectional view of a third modified example of the electrostatic actuator, a cross-sectional view of a fourth modified example thereof, a cross-sectional view of a fifth modified example thereof, a cross-sectional view of a sixth modified example thereof, and a cross-sectional view of a seventh modified example thereof, respectively.
  • a first embodiment exemplifies a variable capacitance capacitor using electrostatic actuators.
  • the variable capacitance capacitor is a MEMS (Micro Electro Mechanical Systems) device and configured in such a way that an electronic circuit and a mechanical structure are installed on a silicon substrate (semiconductor substrate) using a semiconductor integrated circuit manufacturing technology.
  • the variable capacitance capacitor has a structure to prevent stiction in the electrostatic actuators with spacers and potential control.
  • a variable capacitance capacitor 1 has a silicon substrate (substrate) 2 , a variable capacitance element 3 that is disposed on the silicon substrate 2 , and a pair of electrostatic actuators 4 that is disposed on the silicon substrate 2 and coupled to both sides of the variable capacitance element 3 . That is, the variable capacitance capacitor 1 varies the electrostatic capacitance of the variable capacitance element 3 using the pair of electrostatic actuators 4 as a driving source.
  • an insulating layer 5 is formed on the front surface of the silicon substrate 2 , and the variable capacitance element 3 and the pair of electrostatic actuators 4 are disposed on the insulating layer 5 . Note that the embodiment defines a direction, in which the pair of electrostatic actuators 4 is coupled to the variable capacitance element 3 , as an X-axis direction and defines a direction orthogonal to it as a Y-axis direction.
  • the variable capacitance element 3 has a fixation-side fixed capacitance electrode 11 that is laid on the silicon substrate 2 and a movable-side movable capacitance electrode 12 that faces the fixed capacitance electrode 11 from above.
  • both of the capacitance electrodes 11 and 12 have the respective electric contacts (input terminals) of the variable capacitance element 3 , and charges are accumulated on both of the capacitance electrodes 11 and 12 by the application of a voltage.
  • the electrostatic actuators 4 cause the movable capacitance electrode 12 to approach or separate from the fixed capacitance electrode 11 to vary the electrostatic capacitance of the variable capacitance element 3 in two stages.
  • the fixed capacitance electrode 11 is covered with an insulating film 13 , and the fixed capacitance electrode 11 and the movable capacitance electrode 12 come in contact with each other via the insulating film 13 in an approaching state in which both of the capacitance electrodes 11 and 12 approach each other.
  • the embodiment shows a case in which the fixed capacitance electrode 11 and the movable capacitance electrode 12 come in contact with each other via the insulating film 13 in the approaching state in which both of the capacitance electrodes 11 and 12 approach each other, it may be configured such that the fixed capacitance electrode 11 and the movable capacitance electrode 12 face each other via an air gap in the approaching state.
  • each of the electrostatic actuators 4 has a fixation-side fixed driving electrode (fixed electrode) 21 that is laid on the silicon substrate 2 , a movable-side movable driving electrode (movable electrode) 22 that faces the fixed driving electrode 21 from above, a beam 23 that supports one end (side opposite to the side of the variable capacitance element 3 ) of the movable driving electrode 22 in the X-axis direction with elasticity (spring property), an anchor 24 that supports the base end of the beam 23 and is disposed to stand on the silicon substrate 2 , and a pair of spacers 25 that is disposed to stand on the silicon substrate 2 and controls the movable driving electrode 22 to maintain a prescribed air gap (air space) between the fixed driving electrode 21 and the movable driving electrode 22 .
  • the movable driving electrode 22 is supported by the beam 23 and the anchor 24 so as to freely approach and separate from the fixed driving electrode 21 and faces the fixed driving electrode 21 and the pair of spacers 25 . That is, the movable driving electrode 22 has a length enough to cover the fixed driving electrode 21 and the pair of spacers 25 in the X-axis direction.
  • the movable driving electrode 22 is coupled to the movable capacitance electrode 12 via a coupling portion as an insulator at one end thereof in the X-axis direction. That is, the movable capacitance electrode 12 is coupled to the pair of movable driving electrodes 22 of the pair of electrostatic actuators 4 on both sides thereof in the X-axis direction (see FIG. 1 ).
  • the movable capacitance electrode 12 integrally moves with the pair of movable driving electrodes 22 to perform approaching and separating operations.
  • the movable driving electrode 22 is connected to ground (reference potential point) G and has reference potential (zero potential) at all times.
  • the fixed driving electrode 21 is laid on the silicon substrate 2 and faces the movable driving electrode 22 .
  • the fixed driving electrode 21 is connected to an application power supply W that applies a prescribed pull-in operating voltage (prescribed driving voltage) and caused to generate an electrostatic force (electrostatic attraction force) between the fixed driving electrode 21 and the movable driving electrode 22 by the application of the prescribed pull-in operating voltage.
  • the electrostatic force By the electrostatic force, the movable driving electrode 22 is caused to approach the fixed driving electrode 21 .
  • the prescribed pull-in operating voltage is a voltage greater than or equal to a voltage (i.e., pull-in voltage) at which the movable driving electrode 22 is caused to approach (pull in) the fixed driving electrode 21 by the electrostatic force.
  • the pair of spacers 25 is laid on the silicon substrate 2 in a state of being adjacent to the fixed driving electrode 21 and extending in the Y-axis direction and faces the movable driving electrode 22 .
  • the pair of spacers 25 is disposed so as to sandwich the fixed driving electrode 21 therebetween in the X-axis direction and comes in contact with both ends of the movable driving electrode 22 in the X-axis direction to support the same when the movable driving electrode 22 approaches the fixed driving electrode 21 .
  • the pair of spacers 25 forms the prescribed air gap between the fixed driving electrode 21 and the movable driving electrode 22 in the approaching state in which both of the driving electrodes 21 and 22 approach each other.
  • Each of the spacers 25 has a spacer electrode portion 31 that is laid on the silicon substrate 2 and an insulator portion 32 that is formed of an insulator and covers the spacer electrode portion 31 . Further, the spacer electrode portion 31 comes in contact with the movable driving electrode 22 via the insulator portion 32 in the approaching state in which both of the driving electrodes 21 and 22 approach each other. In addition, the spacer electrode portion 31 is connected to the ground G and has reference potential (zero potential) at all times. That is, the spacer electrode portion 31 and the movable driving electrode 22 have the same potential at all times. Note that the spacer electrode portion 31 , the fixed capacitance electrode 11 , and the fixed driving electrode 21 are formed of the same material (e.g., polysilicon or the like) and formed to have the same height.
  • the insulator portion 32 is formed of an insulating film 33 that covers the spacer electrode portion 31 .
  • the insulating film 33 that covers the spacer electrode portion 31 on the side of the variable capacitance element 3 extends on the silicon substrate 2 from the periphery of the spacer electrode portion 31 to the fixed capacitance electrode 11 and is integrally formed with the insulating film 13 that covers the fixed capacitance electrode 11 (see FIGS. 1A and 1B ).
  • the insulating film 33 that covers the spacer electrode portion 31 on a side opposite to the side of the variable capacitance element 3 extends on the silicon substrate 2 from the periphery of the spacer electrode portion 31 to the anchor 24 and is interposed between the anchor 24 and the insulating layer 5 .
  • the anchor 24 is disposed to stand on the silicon substrate 2 via the insulating layer 5 and the insulating film 33 .
  • the insulating film 33 is formed so as to pass over the fixed driving electrode 21 and the fixed driving electrode 21 and the movable driving electrode 22 face each other at the exposed parts thereof (parts exposed to the air gap).
  • FIGS. 4A to 4D show only one of the electrostatic actuators 4 .
  • the approaching operation starts from a steady state in which both of the driving electrodes 21 and 22 separate from each other, and the separating operation starts from a pull-in state in which both of the driving electrodes 21 and 22 approach each other. As shown in FIG.
  • the electrostatic actuator 4 controls the application power supply W to apply the prescribed pull-in operating voltage to the fixed driving electrode 21 .
  • Charges having different positive and negative electrodes are accumulated on the fixed driving electrode 21 and the movable driving electrode 22 by the application of the pull-in operating voltage, and the voltage difference results in the generation of an electrostatic force between both of the driving electrodes 21 and 22 .
  • Due to the electrostatic force thus generated the movable driving electrode 22 descends against the restoration force of the beam 23 and moves from its separating position to approaching position with respect to the fixed driving electrode 21 . That is, the movable driving electrode 22 approaches the fixed driving electrode 21 .
  • the electrostatic actuator 4 shifts from the steady state to the pull-in state.
  • the movable driving electrode 22 comes in contact with the pair of spacers 25 at the approaching position to form a prescribed air gap between the fixed driving electrode 21 and the movable driving electrode 22 .
  • the movable driving electrode 22 and the spacer electrode portion 31 which come in contact with each other via the insulator portion 32 , have the same potential (reference potential), and the fixed driving electrode 21 has prescribed potential according to the pull-in operating voltage since the prescribed pull-in operating voltage is continuously applied to the fixed driving electrode 21 .
  • the electrostatic actuator 4 controls the application power supply W to stop the application of the pull-in operating voltage.
  • the electrostatic force generated between both of the driving electrodes 21 and 22 is released.
  • the movable driving electrode 22 ascends and moves from the approaching position to the separating position with respect to the fixed driving electrode 21 . That is, the movable driving electrode 22 separates from the fixed driving electrode 21 .
  • the electrostatic actuator 4 shifts from the pull-in state to the steady state.
  • zero potential is not necessarily required. That is, it may be configured such that the voltage applied to the fixed driving electrode 21 reduces to a level at which the electrostatic force generated with the application bows to the restoration force of the beam 23 .
  • the second embodiment exemplifies an electric switch 41 using electrostatic actuators 4 .
  • the electric switch 41 is a MEMS device and configured in such a way that an electronic circuit and a mechanical structure are installed on a silicon substrate 2 using a semiconductor integrated circuit manufacturing technology.
  • the electric switch 41 has the silicon substrate 2 , a switch element (switch) 42 that is disposed on the silicon substrate 2 , and the pair of electrostatic actuators 4 that is disposed on the silicon substrate 2 and coupled to both sides of the switch element 42 . That is, the electric switch 41 switch-drives the switch element 42 using the pair of electrostatic actuators 4 as a driving source.
  • the pair of electrostatic actuators 4 has the same configuration as those of the first embodiment and their description will be omitted here.
  • the switch element 42 has a fixation-side fixed switch electrode 43 that is laid on the silicon substrate 2 and a movable-side movable switch electrode 44 that faces the fixed switch electrode 43 from above.
  • both of the switch electrodes 43 and 44 have the respective electric contacts (input terminals) of the switch element 42 , and a current passes when both of the switch electrodes 43 and 44 come in contact with each other.
  • the movable switch electrode 44 is coupled to movable driving electrodes 22 of the pair of electrostatic actuators 4 on both sides thereof in an X-axis direction and approaches and separates from the fixed switch electrode 43 when the pair of movable driving electrodes 22 is driven.
  • the switch-driving of the switch element 42 is performed by the passage and interruption of a current on the switch element 42 .
  • a spacer electrode portion 31 of a spacer 25 has the same potential as the movable driving electrode 22 in a pull-in state, whereby positive and negative charges are not accumulated (an electric field is not generated) between the movable driving electrode 22 and the spacer electrode portion 31 and charges are not accumulated on an insulator portion 32 interposed between the movable driving electrode 22 and the spacer electrode portion 31 .
  • charges are not accumulated on the spacer 25 itself as well as both of the driving electrodes 21 and 22 , and thus stiction can be prevented by the simple configuration.
  • the potential of the movable driving electrode 22 does not change and a voltage is not required to be applied to the spacer electrode portion 31 of the spacer 25 . Accordingly, the potential control can be easily performed.
  • the fixed driving electrode 21 and the spacer electrode portion 31 can be formed in an integrated process.
  • the fixed driving electrode 21 and the movable driving electrode 22 face each other at the exposed parts thereof (parts exposed to an air gap) at which an insulating film 33 is not formed, stiction can be more reliably prevented with the avoidance of the accumulation of charges.
  • each of the above embodiments is configured such that the pair of spacers 25 is disposed so as to sandwich the fixed driving electrode 21 therebetween.
  • each of the above embodiments is not limited to this configuration.
  • it may be configured such that each of the electrostatic actuators 4 has only one spacer 25 .
  • it may be configured such that the two electrostatic actuators 4 share one spacer 25 .
  • the fixed driving electrode 21 and the movable driving electrode 22 face each other at the exposed parts thereof at which the insulating film 33 is not formed and that the fixed driving electrode 21 and the movable driving electrode 22 face each other via only the air gap.
  • the insulating film 33 is also formed on the fixed driving electrode and that the fixed driving electrode 21 and the movable driving electrode 22 face each other via the air gap and the insulating film 33 in the pull-in state.
  • the movable driving electrode 22 and the spacer 25 are connected to the ground G and that the fixed driving electrode 21 is connected to the application power supply W.
  • the fixed driving electrode 21 is connected to the ground G and that the movable driving electrode 22 and the spacer 25 are connected to the application power supply W.
  • each of the above embodiment is configured such that the movable driving electrode 22 and the spacer 25 have the same potential at all times.
  • each of the above embodiments is not limited to this configuration if it is configured such that the movable driving electrode 22 and the spacer 25 have the same potential at least in the pull-in state. That is, it may be configured such that the movable driving electrode 22 and the spacer 25 have different potential in the steady state and at the time of shifting from the steady state to the pull-in state and have the same potential in the pull-in state. For example, it may be configured such that a voltage is applied to the spacer 25 only in the pull-in state when the movable driving electrode 22 and the spacer 25 are connected to the application power supply W.
  • each of the above embodiments it is configured such that the fixed driving electrode 21 is laid on the silicon substrate 2 and that each of the spacers 25 is disposed on the silicon substrate 2 .
  • each of the above embodiments is not limited to this configuration.
  • the insulating layer 5 is interposed between the fixed driving electrode 21 and the spacer electrode portion 31 to bring the fixed driving electrode 21 and the spacer electrode portion 31 out of conduction.
  • each of the spacers 25 is disposed so as to overlap with the fixed driving electrode 21 and interposed between the fixed driving electrode 21 and the movable driving electrode 22 , whereby space in the length or width direction can be reduced.
  • it may be configured such that the insulating layer 5 and the insulating film 33 are formed so as to pass over a part at which both of the driving electrodes 21 and 22 face each other and that both of the driving electrodes 21 and 22 face each other at the exposed parts thereof via an air gap.
  • FIGS. 6A and 6B it may be configured such that the insulating layer 5 and the insulating film 33 are formed so as to pass over a part at which both of the driving electrodes 21 and 22 face each other and that both of the driving electrodes 21 and 22 face each other at the exposed parts thereof via an air gap.
  • the insulating layer 5 and the insulating film 33 are also formed at the part at which both of the driving electrodes 21 and 22 face each other and that both of the driving electrodes 21 and 22 face each other via the insulating layer 5 , the insulating film 33 , and the air gap.
  • the pair of spacers 25 is disposed on the silicon substrate 2 or the fixed driving electrode 21 (on the side of the fixed driving electrode 21 ).
  • the pair of spacers 25 is disposed on the side of the movable driving electrode 22 .
  • the pair of spacers 25 integrally moves with the movable driving electrode 22 and comes in contact with the fixed driving electrode 21 in the pull-in state to form the above prescribed air gap.
  • it may be configured such that one of the pair of spacers 25 is disposed on the silicon substrate 2 or on the side of the fixed driving electrode 21 and that the other thereof is disposed on the side of the movable driving electrode 22 .
  • examples of the configuration in which the spacer 25 is disposed on the side of the movable driving electrode 22 include a configuration in which the spacer 25 is disposed on a part right beneath the movable driving electrode 22 via an insulating portion 61 (see FIG. 7A ), a configuration in which the spacer 25 is coupled to the movable driving electrode 22 via the insulating portions 61 to be disposed (see FIG. 7B ), and a configuration in which the movable driving electrode 22 is supported by a support member 62 and the spacer 25 is disposed on the support member 62 (see FIG. 7C ).
  • the fixed driving electrode 21 is formed to have a length enough to cover the movable driving electrode 22 and the pair of spacers 25 in the X-axis direction.
  • the insulator portion 32 and the spacer electrode portion 31 that comes in contact with one of the driving electrodes 21 and 22 via the insulator portion 32 are integrally disposed on one of the side of the fixed driving electrode 21 and the side of the movable driving electrode 22 .
  • the spacer electrode portion 31 and the insulator portion 32 are separate bodies and disposed on the side of the fixed driving electrode 21 and the side of the movable driving electrode 22 , respectively.
  • FIG. 7D it may be configured such that the spacer electrode portion 31 is disposed on the silicon substrate 2 and that the insulator portion 32 is disposed on a part right beneath the movable driving electrode 22 .
  • each of the spacers 25 is formed of only the spacer electrode portion 31 . That is, it is configured such that each of the spacers 25 (spacer electrode portion 31 ) comes in contact with the facing driving electrode 21 or 22 via the separate insulator portion 32 .

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PCT/JP2012/002466 WO2013153566A1 (ja) 2012-04-09 2012-04-09 静電アクチュエーター、可変容量コンデンサー、電気スイッチおよび静電アクチュエーターの駆動方法

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