US8716784B2 - Semiconductor device and associated fabrication method - Google Patents
Semiconductor device and associated fabrication method Download PDFInfo
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- US8716784B2 US8716784B2 US13/278,463 US201113278463A US8716784B2 US 8716784 B2 US8716784 B2 US 8716784B2 US 201113278463 A US201113278463 A US 201113278463A US 8716784 B2 US8716784 B2 US 8716784B2
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 78
- 238000000034 method Methods 0.000 title abstract description 26
- 238000004519 manufacturing process Methods 0.000 title description 7
- 238000002955 isolation Methods 0.000 claims abstract description 28
- 239000002184 metal Substances 0.000 claims abstract description 13
- 208000012868 Overgrowth Diseases 0.000 claims abstract description 9
- 239000000758 substrate Substances 0.000 claims description 15
- 239000012774 insulation material Substances 0.000 claims description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 4
- 230000005669 field effect Effects 0.000 claims description 2
- 229910044991 metal oxide Inorganic materials 0.000 claims description 2
- 150000004706 metal oxides Chemical class 0.000 claims description 2
- 238000009792 diffusion process Methods 0.000 abstract description 4
- 238000000407 epitaxy Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 230000003071 parasitic effect Effects 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7813—Vertical DMOS transistors, i.e. VDMOS transistors with trench gate electrode, e.g. UMOS transistors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/0611—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region
- H01L27/0617—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region comprising components of the field-effect type
- H01L27/0629—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region comprising components of the field-effect type in combination with diodes, or resistors, or capacitors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0642—Isolation within the component, i.e. internal isolation
- H01L29/0649—Dielectric regions, e.g. SiO2 regions, air gaps
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0642—Isolation within the component, i.e. internal isolation
- H01L29/0649—Dielectric regions, e.g. SiO2 regions, air gaps
- H01L29/0653—Dielectric regions, e.g. SiO2 regions, air gaps adjoining the input or output region of a field-effect device, e.g. the source or drain region
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1095—Body region, i.e. base region, of DMOS transistors or IGBTs
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66674—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/66712—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/66734—Vertical DMOS transistors, i.e. VDMOS transistors with a step of recessing the gate electrode, e.g. to form a trench gate electrode
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7803—Vertical DMOS transistors, i.e. VDMOS transistors structurally associated with at least one other device
- H01L29/7806—Vertical DMOS transistors, i.e. VDMOS transistors structurally associated with at least one other device the other device being a Schottky barrier diode
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/76224—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0684—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape, relative sizes or dispositions of the semiconductor regions or junctions between the regions
- H01L29/0692—Surface layout
- H01L29/0696—Surface layout of cellular field-effect devices, e.g. multicellular DMOS transistors or IGBTs
Definitions
- the disclosed invention relates to semiconductor device and associated fabrication method, and more particular relates to semiconductor device and associated fabrication method which integrates trench metal-oxide semiconductor field effect transistor (MOSFET) and Schottky diode.
- MOSFET trench metal-oxide semiconductor field effect transistor
- DC/DC converters are widely utilized to satisfy the power supply requirements of electronic applications.
- DC/DC converters generally utilize the trench MOSFET as a high efficiency switch.
- Schottky diode Compared with PN diode, Schottky diode has a smaller forward voltage drop because of the metal-semiconductor contact structure. Also Schottky diode is a type of majority-carrier device, so it has better backward recovery performance. With these advantages, Schottky diode is integrated into MOSFET and parallel-coupled with the PN parasitic diode, configured to achieve lower power consumption and higher switching speed.
- a trench MOSFET integrating Schottky diode has such a structure that a completely diffused p-type well or an extra deeper p-type well beside Schottky diode area pinches off this area under low drain voltage.
- a completely diffused p-type well a large area of die may be taken up for the big size p-type well due to its deep junction.
- additional masks and process steps may be added.
- both of these devices have low die size utilization rates. Thus, an improved device is desired.
- One embodiment of the present invention discloses a semiconductor device comprising a trench MOSFET, a Schottky diode and a trench isolation structure.
- the trench MOSFET may be formed on a semiconductor initial layer and the trench MOSFET comprise a well region, wherein the semiconductor initial layer has a first conductivity type and wherein the well region has a second conductivity type.
- the integrated Schottky diode may comprise an anode metal layer contacting the semiconductor initial layer.
- the trench isolation structure is coupled between the trench MOSFET and integrated Schottky diode, configured to resist part of the well region from laterally diffusing.
- the well region comprises an overgrowth part which laterally diffuses under the trench isolation structure and extends over the trench isolation structure.
- the drawings are ideal schematic diagram for illustrating the embodiments of the present invention.
- the rectangle-shaped diffusion area in the illustrated drawings may practically have a curving edge and/or a doping gradient rather than an abruption on the interface. Meanwhile, remnant injection may be left in the area between surface and the buried layer. Accordingly, the area sharps shown in the drawings are illustrative and not intended to limit the range of the present invention. It should also be understood that the drawings are not scale-depicted. The layer and area depicted in the drawings may be magnified for clear illustration purpose.
- FIG. 1 illustrates a schematic cross-sectional view of a semiconductor device 100 integrating trench MOSFET and Schottky diode according to an embodiment of the present invention.
- FIG. 2 illustrates a schematic top-view of the semiconductor device 100 integrating trench MOSFET and Schottky diode according to an embodiment of the present invention.
- FIG. 3A-3F illustrates a partially schematic cross-sectional view of a semiconductor substrate undergoing a process for forming a semiconductor device integrating trench MOSFET and Schottky diode according to an embodiment of the present invention.
- FIG. 4 illustrates a partially schematic cross-sectional view of a semiconductor substrate undergoing another process to replace the process shown in FIG. 3A for forming a semiconductor device integrating trench MOSFET and Schottky diode according to another embodiment of the present invention.
- FIG. 5 illustrates a partially schematic cross-sectional view of a semiconductor substrate undergoing yet another process to replace the process shown in FIG. 3A for forming a semiconductor device integrating trench MOSFET and Schottky diode according to yet another embodiment of the present invention.
- N+ or N ⁇ may also be described as N-type doping area alternatively.
- FIG. 1 illustrates a schematic cross-sectional view of a semiconductor device 100 integrating trench MOSFET and Schottky diode according to an embodiment of the present invention.
- FIG. 2 illustrates a schematic top-view of the semiconductor device 100 integrating trench MOSFET and Schottky diode. Seen in FIG. 2 , the parts formed on the surface of semiconductor substrate are omitted for clearly illustrating the distribution of the semiconductor devices at each area of the semiconductor substrates.
- a semiconductor device 100 may at least comprise a trench MOSFET 10 , a Schottky diode 20 and a trench isolation structure 206 between them.
- an N-type semiconductor initial layer may comprise an N+ substrate 101 and an N ⁇ epitaxy 102 formed on N+ substrate 101 .
- N-type semiconductor initial layer may only comprise an N-type semiconductor substrate.
- a P ⁇ well region 103 is formed on N ⁇ epitaxy 102 .
- An N+ layer 105 is further formed on the upper surface of P ⁇ well region 103 .
- N+ layer 105 may be utilized as the source region of trench MOSFET 10 and the N-type semiconductor initial layer may be utilized as the drain region of trench MOSFET 10 .
- a first trench 104 stretch through source region 105 and P ⁇ well region 103 into the N-type substrate or N ⁇ epitaxy 102 .
- the side wall of first trench 104 may be covered with gate insulation material layer 106 .
- gate insulation material may comprise silicon oxide.
- a gate structure G of the trench MOSFET 10 may be formed on first trench 104 and made of poly-silicon.
- a source electrode 108 is contacted to source region 105 .
- source electrode 108 may formed on the surface of source region 105 .
- source electrode 108 may stretch through source region and into P ⁇ well region 103 .
- a P+ region 107 may be formed around the end part of source electrode 108 . Therefore the resistance of P ⁇ well 103 at this area is reduced and the unclamped inductive switching (UIS) ability of the device is improved.
- Schottky diode 20 is located next to trench MOSFET 10 and isolated from it by trench isolation structure 206 .
- Schottky diode 20 comprises an N-type semiconductor initial layer part 201 and an anode metal layer 202 formed on the N-type semiconductor initial layer part 201 . Therefore a semiconductor-metal contact interface is formed.
- N-type semiconductor part 201 may be a part of N ⁇ epitaxy 102 which is between two adjacent trench isolation structures 206 and the N+ substrate 101 is utilized as cathode of Schottky diode 20 .
- N-type semiconductor initial layer part 201 may be a part of an N-type semiconductor substrate and the N-type semiconductor may also be utilized as cathode of Schottky diode 20 .
- Anode metal layer 202 of Schottky diode 20 may be electrically coupled with source electrode 108 of trench MOSFET 10 .
- Trench isolation structure 206 is coupled between trench MOSFET 10 and Schottky diode 20 .
- trench isolation structure 206 may comprise a gate structure which is consistent with the gate G in first trench 104 .
- Anode metal layer 202 may either contact to the gate structure of trench isolation structure 206 or not.
- trench isolation structure 206 may be totally filled with insulation material such as silicon oxide.
- the first trench 104 and the trench isolation structure 206 may be formed simultaneously or separately depending on the specific design of trench isolation structure 206 . The methods for forming such structures will be described in further detail with respect to the following text.
- trench isolation structure 206 may be shallower than the bottom surface of P ⁇ Well region 103 .
- trench isolation structure 206 may resist part of lateral diffusion from P ⁇ well region 103 configured to form trench MOSFET 10 with a relative small P ⁇ well region 103 . This feature may save die area cost to obtain a compact layout.
- P ⁇ well region 103 may laterally diffuse toward Schottky diode 20 .
- P ⁇ well region 103 may excess to the side wall of trench isolation structure 206 to form an overgrowth part 1031 in N-type semiconductor part 201 .
- the overgrowth part 1031 may benefit to pinch off Schottky diode area with a relative low drain voltage and improve the breakdown voltage of Schottky diode 20 .
- Schottky diode 20 may have a breakdown voltage the same as trench MOSFET 10 .
- the semiconductor device according to the illustrated embodiment may further have an improved performance.
- Schottky diode 20 may be inserted into two adjacent trench MOSFETs 10 and separated apart from them by two trench isolation structures 206 respectively. Hence the flowing current path of Schottky diode 206 is restricted between two adjacent trench isolation structures 206 .
- Schottky diode 20 may be inserted into any two adjacent trench MOSFETs 10 in die configured to increase the utility ratio of die area.
- the semiconductor device may not comprises all of features described above. In certain embodiments, the semiconductor device may comprise only a part of features.
- FIG. 3A-3F illustrates a cross-sectional view of the semiconductor substrate undergoing a process to form the semiconductor device integrating trench MOSFET and Schottky diode.
- the description in the following text will omit the information about publicly known technology of steps, processes, materials, dopants and etc. And one of ordinary skill in relevant art should understand the process steps are not limited by described embodiment in the following text. In other embodiments, the process steps may be applied with a different sequence.
- a first trench 104 and a second trench 204 are formed on an N-type initial layer.
- the N-type initial layer may comprise an N+ semiconductor 101 and an N ⁇ epitaxy layer 102 formed on it.
- second trench 204 is formed firstly. Then first trench 104 is formed deeper than second trench 204 .
- first trench 104 may be formed firstly. After that, second trench 204 is formed shallower than first trench 104 .
- gate insulation layer 106 and gate G are formed on both first trench 104 and second trench 204 .
- the fabrication process flow may comprise, for example, depositing an insulation material layer and gate material layer in turn firstly. Afterward, the insulation material and the gate material outside trench 104 and 204 are eliminated by etching or polishing.
- second trench 204 may be totally filled with insulation material.
- insulation material e.g. silicon oxide, may be only filled into second trench 204 while first trench 104 is masked.
- first trench 104 and its gate structure may be finished and masked firstly.
- second trench 204 and trench insulation structure 206 are formed, vice versa.
- P ⁇ well region 103 Seen in FIG. 3D , selective ion implantation is applied to form P ⁇ well region 103 .
- the ion is implanted at the initial semiconductor layer region between first trench 104 and adjacent second trench 204 .
- the depth of P ⁇ well region 103 may larger than the depth of second trench 204 but smaller than the depth of first trench 104 .
- a diffusion process is further be utilized. Through this process, P ⁇ well region 103 may laterally diffuse under second trench 204 and extend out of it to form an overgrowth part 1031 .
- FIG. 3E illustrates process of forming N+ source region 105 on the upper surface of P ⁇ well region 103 .
- source electrode 108 is formed on N+ source N+ source region 105 .
- anode metal layer 202 of Schottky diode 20 is formed on part of the N-type semiconductor initial layer which is between two adjacent second trenches 204 .
- Anode metal layer 202 may contact to the gate structure of second trench 204 and be electrically coupled to source electrode 108 .
- source electrode 108 passes through source region 105 and extends into P ⁇ well region 103 .
- source electrode 108 may be positioned in the surface of source region 105 (not shown).
- a P+ region 107 may be formed around the end part of source electrode 108 which is in P ⁇ well region 103 .
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Abstract
Description
Claims (14)
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CN201010528997.6 | 2010-10-22 | ||
CN201010526997 | 2010-10-22 | ||
CN201010526997.6A CN102456690B (en) | 2010-10-22 | 2010-10-22 | Semiconductor device and method for manufacturing the same |
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US20120098058A1 US20120098058A1 (en) | 2012-04-26 |
US8716784B2 true US8716784B2 (en) | 2014-05-06 |
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Publication number | Priority date | Publication date | Assignee | Title |
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US9029974B2 (en) * | 2013-09-11 | 2015-05-12 | Infineon Technologies Ag | Semiconductor device, junction field effect transistor and vertical field effect transistor |
KR102046663B1 (en) * | 2013-11-04 | 2019-11-20 | 매그나칩 반도체 유한회사 | Semiconductor device and manufacturing method thereof |
CN103779416B (en) * | 2014-01-20 | 2016-06-29 | 张家港凯思半导体有限公司 | The power MOSFET device of a kind of low VF and manufacture method thereof |
US10388781B2 (en) * | 2016-05-20 | 2019-08-20 | Alpha And Omega Semiconductor Incorporated | Device structure having inter-digitated back to back MOSFETs |
CN106449419A (en) * | 2016-12-08 | 2017-02-22 | 西安电子科技大学 | Ga2O3-material-based U-shaped grating type MOSFET and preparation method thereof |
CN110148629B (en) * | 2019-03-18 | 2020-11-27 | 电子科技大学 | Groove type silicon carbide MOSFET device and preparation method thereof |
CN111244181B (en) * | 2020-01-19 | 2022-05-17 | 深圳市昭矽微电子科技有限公司 | Metal oxide semiconductor field effect transistor and manufacturing method thereof |
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US20120098058A1 (en) | 2012-04-26 |
CN102456690B (en) | 2014-07-02 |
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