US8436991B2 - Device for analysing materials by plasma spectroscopy - Google Patents

Device for analysing materials by plasma spectroscopy Download PDF

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Publication number
US8436991B2
US8436991B2 US13/131,461 US200913131461A US8436991B2 US 8436991 B2 US8436991 B2 US 8436991B2 US 200913131461 A US200913131461 A US 200913131461A US 8436991 B2 US8436991 B2 US 8436991B2
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laser
light
plasma
parabolic mirror
housing
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US20120044488A1 (en
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Stéphane Senac
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Bertin Technologies SAS
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Bertin Technologies SAS
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/443—Emission spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0272—Handheld
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
    • G01N21/718—Laser microanalysis, i.e. with formation of sample plasma
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/02—Mechanical
    • G01N2201/022—Casings
    • G01N2201/0221—Portable; cableless; compact; hand-held

Definitions

  • the invention relates to a device for analyzing materials by plasma spectroscopy.
  • Determining or verifying the chemical compositions of various materials and articles in particular because of the increasing complexity of the materials that are used in industry and because of a desire to be environmentally friendly (recycling, health inspections, . . . ), has led to inspection and measurement techniques being developed that are usable on site and in real time and that avoid taking away samples and sending the samples to analysis laboratories.
  • spark spectroscopy X-ray fluorescence spectroscopy
  • laser-induced plasma spectroscopy The techniques that are presently available comprise spark spectroscopy, X-ray fluorescence spectroscopy, and laser-induced plasma spectroscopy.
  • spark spectroscopy devices which generate a plasma by means of an electric arc between the material to be analyzed and an anode through which an electric pulse is caused to pass, suffer from the essential drawbacks of not being portable, of requiring samples of the materials to be prepared, of operating only with materials that conduct electricity, and of requiring contact with the material being analyzed, thus making the use of that technique difficult or even impossible on moving articles, articles at high temperature, or articles located in an environment that is contaminated, difficult, or dangerous.
  • X-ray fluorescence devices are portable, but they are suitable for measuring only those elements that are lighter than silicon. They need to be put into contact with the materials of the articles to be analyzed and they are the subject of safety constraints and regulations.
  • LBS laser-induced breakdown spectroscopy
  • the laser generator is often connected to a measurement probe by an optical fiber, which means that it is not possible to convey high levels of laser energy at wavelengths shorter than 532 nanometers (nm) and that it is not possible to take measurements on plastics materials or on organic compounds for which it is preferable to use an ultraviolet laser beam having a wavelength of 266 nm.
  • the optical fiber degrades the radiance of the laser beam (where radiance is its energy divided by the product of the emission area and the emission solid angle), such that it is more difficult to focus the beam on the material or the article to be analyzed and it becomes necessary to take measurements in contact with the article or to increase the size of the optical components used, thereby giving rise to an increase in their bulk and their cost.
  • a particular object of the present invention is to provide a solution to these problems that is simple, effective, and inexpensive.
  • the invention provides a laser-induced plasma spectroscopy device (or LIBS device) that is portable and independent, that is highly sensitive and very accurate and that can be used with any type of material, whether on site or in line on a system for processing materials or articles.
  • LIBS device laser-induced plasma spectroscopy device
  • the invention provides a device for analyzing materials by plasma spectroscopy, the device comprising a laser generator, laser pulse focusing means for focusing laser pulses produced by the generator onto a material to be analyzed, plasma light pick-up means for picking up light from the plasma produced by the laser pulses at the surface of the material, and transmission means for transmitting said light to a spectrometer associated with photodetectors having outputs connected to data processor means, the device being characterized in that the laser pulse focusing means and the plasma light pick-up means are constituted by an optical system mounted with the laser generator and laser generator control cards in a housing that is portable and suitable for handling in one hand, the optical system being mounted in the housing between the laser generator and an outlet window and comprising a first parabolic mirror for focusing the laser beam on the material to be analyzed and for picking up the light from the plasma, and two plane mirrors arranged relative to the first parabolic mirror to reflect to said mirror the laser pulses emitted by the generator and to reflect the light from the plasma as received from the first
  • the first parabolic mirror has a reflection zone for laser pulses and a reflection zone for light that has been picked up, these two zones being adjacent and separate from each other and including reflective coatings that are adapted to the wavelengths they have to reflect.
  • the first parabolic mirror is movable along the axis of incidence of the laser pulses so as to scan in translation the surface of the material to be analyzed.
  • the first parabolic mirror is mounted on a motor-driven support that is controlled by the control means of the laser generator.
  • a measurement endpiece mounted on the housing in register with the outlet window includes a calibration mirror associated with a calibration sample that is also mounted in the endpiece in such a manner that when the first parabolic mirror reaches one end of its stroke, the laser pulses deflected by the parabolic mirror encounter the calibration mirror and are directed onto the calibration sample.
  • a calibration fitting may also be provided that can be mounted on the measurement endpiece or that may take the place of the measurement endpiece, the fitting including a motor-driven support carrying some number of samples of different materials that are designed to be placed one after another on the axis of laser pulses at the outlet from the device.
  • the spectrometer of the device comprises a housing formed with an inlet slot fitted with a connector for coupling to an optical fiber that conveys the light from the plasma, a diffraction grating arranged in alignment with the slot, a mirror receiving the light from the grating, and at least one linear detector with photodetectors that receive the light reflected by the mirror.
  • the spectrometer has at least two substantially juxtaposed linear detectors covering distinct ranges of the light spectrum, e.g. 200 nanometers (nm) to 240 nm and 300 nm to 340 nm, depending on the types of material to be analyzed.
  • Mounting a single spectrometer in the device of the invention is inexpensive and effective since it avoids sharing the light flux picked up by the device over a plurality of spectrometers.
  • the device also includes means for injecting an inert gas into the plasma formation zone at the surface of the material to be analyzed, said means being easily removable and replaceable and comprising an inert gas cartridge carried by the housing and fitted with an outlet solenoid valve that is connected by a pipe to the measurement endpiece.
  • the device of the invention may also include means for heating the plasma produced at the surface of the material, these heater means advantageously comprising a laser diode emitting a light beam that is focused by the first parabolic mirror onto the plasma.
  • Heating the plasma serves to increase the level of the signal and the sensitivity of the measurement. It is known in the art to perform such heating by using two laser pulses (“a double pulse”) so as to increase the lifetime of the plasma, reduce measurement noise, and increase the stability of the plasma. Nevertheless, producing a double pulse requires the laser generator to be adapted, and the energy in each pulse is halved. It is therefore more advantageous to use a laser diode that can be controlled in power, in energy, and in operating rates. A large amount of energy is thus made available and the plasma may be heated remotely.
  • the above-mentioned portable housing containing the laser generator may be connected to another unit containing the spectrometer, and also containing electrical power supply means, e.g. of the battery type, and a control and computer processor card.
  • the weight of the housing containing the laser generator is about 2 kilograms (kg) while the weight of the unit is about 3 kg to 4 kg.
  • the spectrometer, the electrical power supply means, e.g. of the battery type, and the control and processor card are fitted on and secured to the housing containing the laser generator.
  • a single appliance is then made available that is portable and completely independent, weighing about 3.5 kg.
  • the device may also be used on a production line. It is then advantageously fitted with a system for scanning or deflecting the light beam and it is typically situated at a distance of 10 centimeters (cm) to 100 cm from the products that are to be inspected.
  • FIG. 1 is a diagrammatic perspective view of a first embodiment of the invention
  • FIG. 2 is a fragmentary diagrammatic view in section of the FIG. 1 appliance
  • FIGS. 3 and 4 are fragmentary diagrammatic views in section showing the operation of the appliance
  • FIG. 5 is a diagram showing the spectrometer of the appliance of the invention.
  • FIG. 6 is a diagram showing a calibration fitting
  • FIGS. 7 , 8 , and 9 are diagrammatic views of variant embodiments of the invention.
  • FIGS. 1 to 5 show a first embodiment of the invention, in which a housing 10 fitted with a handle 12 is connected by a cable 14 to a unit 16 that contains in particular a spectrometer and electrical power supply means, of the battery type.
  • the housing 10 contains ( FIG. 2 ) a laser generator 18 having its outlet pointing axially towards the front of the housing 10 and it includes two silica lenses 20 through which pulses emitted by the generator 18 pass.
  • the front end of the housing 10 caries a measurement endpiece 22 for applying against the material or the article that is to be analyzed, with its end including two movable safety contacts 24 enabling the device to operate when they are pushed in to an operating position by pressing the endpiece 22 against the material or the article that is to be analyzed.
  • the endpiece 22 is tubular and includes an axial orifice 26 for delivering laser pulses and for picking up light.
  • the front end of the housing 10 on which the endpiece 22 is mounted also includes a window 28 , e.g. of cast silica, through which laser pulses are delivered and light is picked up.
  • a window 28 e.g. of cast silica, through which laser pulses are delivered and light is picked up.
  • the front portion of the housing 10 contains an optical system for guiding laser pulses and for collecting light, which system essentially comprises a plane mirror 30 inclined at 45° relative to the optical axis of the generator so as to reflect laser pulses vertically downwards onto a first zone of a first parabolic mirror 32 , which reflects the laser pulses towards the window 28 and focuses them at the front end of the measurement endpiece 22 that is to be put into contact with the material or the article that is to be analyzed, as shown in FIG. 3 where the path followed by the laser pulses is given reference 34 .
  • the first parabolic mirror 32 is carried by a support 36 that is movable in vertical translation by means of a motor-driven wormscrew system 38 having a nut 40 carried by the support 36 engaged thereon, rotation of the screw 38 serving to move the first parabolic mirror 32 in translation along the axis of incidence of the laser pulses so that the point 44 on which the pulses are focused is scanned through a distance, e.g. of centimeter order, over the surface of the material or the article that is to be analyzed.
  • a distance e.g. of centimeter order
  • the invention When the first parabolic mirror is at the end of its stroke, e.g. in its top position as shown in FIG. 4 , the invention provides for it to send laser pulses onto a plane mirror 46 mounted on the inside surface of the measurement endpiece 22 and orient it in such a manner as to reflect the laser pulses towards a sample 50 carried by a support 48 mounted in stationary manner within the endpiece 22 , e.g. in vertical alignment with the mirror 46 , as shown in the drawing.
  • the optical system mounted inside the housing 10 also includes means for picking up the light emitted by the plasma that is generated by the laser pulses focused on the surface of the material or the article that is to be analyzed.
  • This light is picked up through the window 28 and reflected by a second zone of the first parabolic mirror 32 towards a second plane mirror 52 placed beside the first plane mirror 30 and on the same support, in order to reflect the light that has been picked up towards a second parabolic mirror 54 that focuses the picked-up light on the end of an optical fiber 56 mounted by a connector 58 in an orifice of the housing 10 , the optical fiber 56 conveying the picked-up light to a spectrometer mounted in the unit 16 .
  • the two plane mirrors 30 , 52 are located vertically relative to the first parabolic mirror 32 and horizontally relative to the second parabolic mirror 54 .
  • the second parabolic mirror 54 is off the optical axis of the laser generator 18 and is oriented perpendicularly to the first parabolic mirror 32 .
  • the path of the light that is picked up is given reference 60 in the drawings, where it can be seen that the reflection of light on the first parabolic mirror 32 , on the second plane mirror, and on the second parabolic mirror 54 takes place at 90°.
  • the optical fiber 56 passes through the trigger guard of the handle 12 and goes to the spectrometer that is shown diagrammatically in FIG. 5 , which spectrometer essentially comprises, inside a housing 62 : an inlet slot 64 aligned with a diffraction grating 66 having a plane mirror 68 mounted to face it and reflect the diffracted light onto two detectors 70 such as two linear strips of charge-coupled device (CCD) type photodetectors or the like, for example, the two detectors 70 being substantially juxtaposed and covering two different ranges of the light spectrum.
  • CCD charge-coupled device
  • the laser generator 18 is of the Nd:YAG type that emits infrared radiation at a wavelength of 1064 nm.
  • the laser generator is pumped by light-emitting diodes operating in pulse mode and it is fitted with an electro-optical modulator (a Q switch) operating at 20 hertz (Hz), thus enabling 10 millijoule (mJ) laser pulses to be delivered having a half-height duration of 5 ns at a rate of 20 Hz.
  • the laser beam has a Gaussian intensity profile and its diameter is about 1 millimeter (mm) at the outlet from the generator 18 .
  • the frequency of the laser beam may be doubled, tripled, or quadrupled by means of non-linear crystals that are placed on the path of the laser beam in order to change its wavelength from 1064 nm to 532 nm, and then to 266 nm, for example.
  • the two lenses 20 through which the laser pulses pass at the outlet from the generator 18 are respectively a diverging lens and a converging lens so as to increase the laser beam diameter to about 2.5 mm in order to reduce the power density on the first parabolic mirror 32 and on the plane mirrors 30 and 46 , and so as to focus the laser pulses with a smaller diameter on the material or the article to be analyzed.
  • the first plane mirror 30 that reflects the laser pulses towards the first zone of the first parabolic mirror 32 carries a dielectric coating that improves its reflectivity.
  • the zone of the first parabolic mirror 32 that receives the laser pulses carries a dielectric coating of the same type as that on the first mirror 30 in order to increase the reflection of these pulses.
  • the radii of curvature of the first parabolic mirror 32 are about 65 mm. This enables the laser pulses to be focused at a distance of 65 mm, corresponding to the front end face of the measurement endpiece 22 .
  • the diameter of the focused point of the laser pulses on the surface of the material or the article to be analyzed is about 100 micrometers ( ⁇ m). This dimension is adjustable by an appropriate selection of the lenses 20 that are fitted at the outlet from the laser generator 18 .
  • the second zone of the parabolic mirror 32 , the plane mirror 52 , and the second parabolic mirror 54 carry metallic coatings to improve reflection of the light that is picked up, e.g. a film having multiple dielectric layers based on aluminum in order to increase reflectivity in the visible and in the ultraviolet spectrum, e.g. in the range 190 nm to 900 nm.
  • the housing 10 also contains an electronic card 72 mounted under the laser generator 18 to control the generator and the various motors, safety systems, and indicators, and also a video screen 74 such as a computer terminal screen for displaying measurement results, which screen is mounted at the rear end of the housing 10 and is connected to data processor means that are housed in the unit 16 and that receive as input the signals that are output by the detectors 70 .
  • an electronic card 72 mounted under the laser generator 18 to control the generator and the various motors, safety systems, and indicators
  • a video screen 74 such as a computer terminal screen for displaying measurement results, which screen is mounted at the rear end of the housing 10 and is connected to data processor means that are housed in the unit 16 and that receive as input the signals that are output by the detectors 70 .
  • the device operates as follows:
  • the housing 10 weighs about 2 kg and is held in the hand via the handle 12 , while the unit 16 weighs about 3 kg to 4 kg and rests on the ground beside the operator or is fastened on the operator's back by means of a harness.
  • the operator presses the measurement endpiece 22 on the material or the article to be analyzed, so as to activate the safety contacts 24 , and then presses on the trigger 76 in the handle in order to cause the laser generator 18 to operate with the first parabolic mirror 32 in its lowest position.
  • the laser generator 18 emits a series of laser pulses that are focused on a point of the surface of the material or the article to be analyzed, and by way of example the number of emitted pulses lies in the range 50 to 100 per measurement point in the example shown in the drawings. These pulses generate a plasma of vaporized material that emits light, a fraction of which is picked up through the window 28 and reflected by the first parabolic mirror 32 onto the second plane mirror 52 which returns it to the second parabolic mirror 54 in order to focus it on the inlet of the optical fiber 56 leading to the spectrometer mounted in the unit 16 .
  • each of the linear detectors 70 comprises 2048 CCD photodetectors, each having a size of 13 ⁇ m ⁇ 500 ⁇ m and receiving wavelengths in the 200 nm to 240 nm and in the 300 nm to 340 nm bands with spectral resolution of 40 picometers ( ⁇ m). Integration of the electromagnetic radiation on each of the detectors is synchronized with the emission of the laser pulses, e.g. with a delay of 500 ns between laser pulse emission and the beginning of radiation integration.
  • the diffraction grating 66 is an etched concave grating that corrects for chromatic aberration and that has 1200 lines per millimeter, thereby giving dispersion of 2.1 nanometers per millimeter (nm/mm).
  • the signals output by the detectors 70 are processed by the computer means contained in the unit 16 and they are displayed on the screen 74 of the housing 10 , in the form of elements forming part of the composition of the material or the article to be analyzed, together with the concentrations of these elements.
  • the first parabolic mirror 32 automatically calls to move in translation by pressing on the trigger 76 .
  • the first parabolic mirror 32 is moved step by step so as to scan a line that is about 1 cm long on the surface of the material or the article to be analyzed, with one measurement (corresponding to firing 50 to 100 laser pulses) being taken once every millimeter (the first ten laser pulses serving to clean the surface to some extent).
  • the laser pulses are directed to the mirror 46 of the measurement endpiece and reflected onto the sample 50 in order to correct for any spectral drift of the spectrometer and any power drift of the laser generator, e.g. due to temperature.
  • the series of measurements taken on the material or the article to be analyzed serves to avoid local measurements that are falsified as a result of impurities, thereby making it possible to analyze materials that are somewhat heterogeneous, e.g. refractory materials. By using statistical processing, this also makes it possible to improve the performance of analysis.
  • the invention makes provision to mount a calibration lug 77 (see FIG. 6 ) on the measurement endpiece or instead of the measurement endpiece in register with the outlet window from the housing, the fitting including a motor-driven rotary disk 78 that carries about ten samples 50 .
  • the disk 78 is driven in rotation by a motor 79 , e.g. powered by a universal serial bus (USB) cable, for example, with rotation of the disk 78 serving to place the various different samples on succession on the firing axis of the laser pulses.
  • USB universal serial bus
  • FIG. 7 is a diagram showing a variant embodiment of the invention in which the device of FIGS. 1 to 6 has an inert gas cartridge 80 added thereto, e.g. a cartridge containing argon or nitrogen, which cartridge is connected via a solenoid valve 82 and a pipe 84 to the measurement endpiece 22 in order to diffuse the inert gas in the region of the plasma formed on the surface of the material or the article to be analyzed.
  • an inert gas cartridge 80 added thereto, e.g. a cartridge containing argon or nitrogen, which cartridge is connected via a solenoid valve 82 and a pipe 84 to the measurement endpiece 22 in order to diffuse the inert gas in the region of the plasma formed on the surface of the material or the article to be analyzed.
  • the inert gas is preferably not diffused continuously, but rather intermittently, so as to limit the consumption of gas.
  • the laser generator is associated with a laser diode for heating the plasma produced by a first laser pulse delivered by the laser generator 18 .
  • a laser diode is used that emits in the infrared, e.g. at a wavelength of 800 nm.
  • Such a diode may deliver a pulse having a duration of 200 ⁇ s and energy lying in the range 4 mJ to 20 mJ.
  • stamps a plurality of laser diodes
  • Heating the plasma enables material to be reinjected into the plasma and to increase the temperature of the plasma.
  • the level of the signal that is picked up is increased and the sensitivity of the measurement is improved.
  • a single house 10 is used that is both portable and self-contained and that is powered electrically from a battery 86 mounted in the bottom portion of the handle 12 of the device.
  • the housing of the spectrometer connected to the optical fiber 56 may then be mounted on one side of the housing 10 , while the control and processing card 90 is fastened on the other side of the housing 10 .
  • the weight of the complete device of FIG. 8 is about 3.5 kg.
  • the housing 10 of the device of the invention (not fitted with the endpiece 22 ) is mounted above a conveyor 90 in a production line, the conveyor having placed thereon materials or articles that are to be inspected or identified.
  • the distance between the outlet window 28 of the housing and the surface of the conveyor 90 may lie for example in the range 10 cm to 100 cm, the parabolic mirror 32 of the housing being designed to focus laser pulses on the materials or the articles that are being transported by the conveyor.
  • the housing includes a system 92 for scanning or deflecting the light beam, thus making it possible to perform measurements on articles that are not placed centrally on the conveyor.
  • the housing 10 is stationary and it may be fitted with a laser generator that is more powerful.
  • the device of the invention has numerous and varied applications:

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US13/131,461 2008-11-28 2009-11-03 Device for analysing materials by plasma spectroscopy Expired - Fee Related US8436991B2 (en)

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FR08/06712 2008-11-28
FR0806712A FR2939195B1 (fr) 2008-11-28 2008-11-28 Dispositif d'analyse de materiaux par spectroscopie de plasma
FR0806712 2008-11-28
PCT/FR2009/001272 WO2010061069A1 (fr) 2008-11-28 2009-11-03 Dispositif d'analyse de materiaux par spectroscopie de plasma

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US9506869B2 (en) 2013-10-16 2016-11-29 Tsi, Incorporated Handheld laser induced breakdown spectroscopy device
US9651424B2 (en) 2015-02-26 2017-05-16 Sciaps, Inc. LIBS analyzer sample presence detection system and method
US9664565B2 (en) 2015-02-26 2017-05-30 Sciaps, Inc. LIBS analyzer sample presence detection system and method
US9714864B2 (en) 2013-01-21 2017-07-25 Sciaps, Inc. LIBS analysis system
US9874475B2 (en) 2013-01-21 2018-01-23 Sciaps, Inc. Automated multiple location sampling analysis system
US9880056B2 (en) 2014-06-27 2018-01-30 Tdw Delaware, Inc. System and method for non-destructive, in situ, positive material identification of a pipe
US9939383B2 (en) 2016-02-05 2018-04-10 Sciaps, Inc. Analyzer alignment, sample detection, localization, and focusing method and system
US9952100B2 (en) 2013-01-21 2018-04-24 Sciaps, Inc. Handheld LIBS spectrometer
WO2018177070A1 (zh) 2017-03-31 2018-10-04 苏州星帆华镭光电科技有限公司 振动光路组件及具有该组件的激光诱导击穿光谱仪
US10113970B2 (en) 2015-08-20 2018-10-30 National Taiwan University Detection device
US10209196B2 (en) 2015-10-05 2019-02-19 Sciaps, Inc. LIBS analysis system and method for liquids
US20190271652A1 (en) * 2016-11-07 2019-09-05 Academy Of Opto-Electronics Chinese Academy Of Sciences Scanning type laser induced spectrum analysis and detection system

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WO2012127273A1 (en) * 2011-03-21 2012-09-27 University Of Calcutta Apparatus and methods for chirality detection
CN104204782B (zh) * 2011-12-07 2016-08-17 牛津仪器工业产品有限公司 分析装置
WO2013144673A1 (en) 2012-03-29 2013-10-03 University Of Calcutta Chiral determination using half-frequency spectral signatures
US9435742B2 (en) 2013-01-21 2016-09-06 Sciaps, Inc. Automated plasma cleaning system
US9036146B2 (en) * 2013-01-21 2015-05-19 Sciaps, Inc. Micro purge of plasma region
CN103115915B (zh) * 2013-01-30 2015-11-04 中国广州分析测试中心 基于聚集光纤信号传输和双层多ccd检测的油液分析专用装置
FR3002635B1 (fr) * 2013-02-27 2015-04-10 Areva Nc Systeme pour l'analyse, par spectrometrie de plasma induit par laser, de la composition de la couche superficielle d'un materiau et pour le prelevement d'echantillons en vue d'analyses complementaires ou de controles de cette couche superficielle, et procede y relatif
CN104233191A (zh) * 2013-06-08 2014-12-24 北京北方微电子基地设备工艺研究中心有限责任公司 加热腔室及等离子体加工设备
CN104007090B (zh) * 2014-05-27 2016-06-08 四川大学 基于激光诱导击穿光谱技术的便携式元素成分分析装置
FR3024543B1 (fr) * 2014-08-01 2018-05-04 Bertin Technologies Sa Procede et dispositif de detection de materiaux composant une piece
ES2577864B1 (es) * 2015-01-16 2017-04-28 Indra Sistemas, S.A. Equipo para el análisis de residuos de disparos, métodos para la determinación de la presencia de residuos de disparo y método para determinar la distancia de disparo
CN104759753B (zh) * 2015-03-30 2016-08-31 江苏大学 多系统自动化协调工作提高激光诱导空化强化的方法
US9766182B2 (en) * 2015-05-11 2017-09-19 Bwt Property, Inc. Laser induced breakdown spectroscopy (LIBS) apparatus with dual CCD spectrometer
USD763110S1 (en) * 2015-05-15 2016-08-09 Sciaps, Inc. Handheld laser induced breakdown spectroscopy analyzer nose plate
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US9816934B2 (en) * 2016-02-01 2017-11-14 Bwt Property, Inc. Laser induced breakdown spectroscopy (LIBS) apparatus with automatic wavelength calibration
DE102016002365A1 (de) * 2016-02-25 2017-08-31 Mischa Ounanian Ladestation für die Versorgung von handbetriebenen ("Handheld") oder tragbaren ("Portable") Analysegeräten auf Basis von OES (Optical Emission Spectroscopy) oder LIBS (Laser Induced Breakdown Spectroscopy).
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US10300551B2 (en) * 2016-11-14 2019-05-28 Matthew Fagan Metal analyzing plasma CNC cutting machine and associated methods
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CN109297952B (zh) * 2018-11-09 2024-02-06 南京信息工程大学 基于激光诱导击穿光谱技术的宣纸优劣鉴别系统
EP3819611B1 (de) * 2019-11-05 2024-03-27 Hitachi High-Tech Analytical Science GmbH Leicht verstellbares optisches emissionsspektrometer
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CN112834485B (zh) * 2021-02-07 2022-03-29 西南交通大学 激光诱导击穿光谱元素定量分析的一种非定标方法
CN113588640B (zh) * 2021-07-29 2024-01-16 安徽机电职业技术学院 一种多角度便携式现场痕迹检测仪

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050229698A1 (en) 2004-04-12 2005-10-20 Beecroft Michael T Hand-held spectrometer
US7394537B1 (en) * 2006-12-22 2008-07-01 Oxford Instruments Analytical Oy Practical laser induced breakdown spectroscopy unit

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050229698A1 (en) 2004-04-12 2005-10-20 Beecroft Michael T Hand-held spectrometer
US7394537B1 (en) * 2006-12-22 2008-07-01 Oxford Instruments Analytical Oy Practical laser induced breakdown spectroscopy unit

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
Fichet, P., et al; "Determination of Impurities in Uranium and Plutonium Dioxides by Laser-Induced Breakdown Spectroscopy"; Applied Spectroscopy; 1999; vol. 53; Issue 9, pp. 1111-1117.
International Search Report and Written Opinion for International Application No. PCT/FR2009/001272, mailed Jan. 5, 2010.

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US9714864B2 (en) 2013-01-21 2017-07-25 Sciaps, Inc. LIBS analysis system
US20140204378A1 (en) * 2013-01-21 2014-07-24 Sciaps, Inc. Automated Focusing, Cleaning, and Multiple Location Sampling Spectrometer System
US9568430B2 (en) 2013-01-21 2017-02-14 Sciaps, Inc. Automated focusing, cleaning, and multiple location sampling spectrometer system
US9952100B2 (en) 2013-01-21 2018-04-24 Sciaps, Inc. Handheld LIBS spectrometer
US9719853B2 (en) 2013-01-21 2017-08-01 Sciaps, Inc. LIBS analysis system
US9267842B2 (en) * 2013-01-21 2016-02-23 Sciaps, Inc. Automated focusing, cleaning, and multiple location sampling spectrometer system
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US9506869B2 (en) 2013-10-16 2016-11-29 Tsi, Incorporated Handheld laser induced breakdown spectroscopy device
US10690546B2 (en) 2014-06-27 2020-06-23 Tdw Delaware, Inc. System and method for non-destructive, in-situ, positive material identification of a pipe
US9880056B2 (en) 2014-06-27 2018-01-30 Tdw Delaware, Inc. System and method for non-destructive, in situ, positive material identification of a pipe
US10215638B2 (en) 2014-06-27 2019-02-26 Tdw Delaware, Inc. System and method for non-destructive, in-situ, positive material identification of a pipe
US9664565B2 (en) 2015-02-26 2017-05-30 Sciaps, Inc. LIBS analyzer sample presence detection system and method
US9651424B2 (en) 2015-02-26 2017-05-16 Sciaps, Inc. LIBS analyzer sample presence detection system and method
US9970815B2 (en) 2015-02-26 2018-05-15 Sciaps, Inc. LiBS analyzer sample presence detection system and method
US10113970B2 (en) 2015-08-20 2018-10-30 National Taiwan University Detection device
US10209196B2 (en) 2015-10-05 2019-02-19 Sciaps, Inc. LIBS analysis system and method for liquids
US9939383B2 (en) 2016-02-05 2018-04-10 Sciaps, Inc. Analyzer alignment, sample detection, localization, and focusing method and system
US10697895B2 (en) 2016-02-05 2020-06-30 Sciaps, Inc. Analyzer sample detection method and system
US11079333B2 (en) 2016-02-05 2021-08-03 Sciaps, Inc. Analyzer sample detection method and system
US20190271652A1 (en) * 2016-11-07 2019-09-05 Academy Of Opto-Electronics Chinese Academy Of Sciences Scanning type laser induced spectrum analysis and detection system
US10823679B2 (en) * 2016-11-07 2020-11-03 Academy Of Opto-Electronics Chinese Academy Of Sciences Scanning type laser induced spectrum analysis and detection system
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FR2939195B1 (fr) 2011-01-21
EP2359110B1 (de) 2017-04-26

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