US7588962B2 - Method of making semiconductor device - Google Patents
Method of making semiconductor device Download PDFInfo
- Publication number
- US7588962B2 US7588962B2 US12/204,502 US20450208A US7588962B2 US 7588962 B2 US7588962 B2 US 7588962B2 US 20450208 A US20450208 A US 20450208A US 7588962 B2 US7588962 B2 US 7588962B2
- Authority
- US
- United States
- Prior art keywords
- package
- housing
- polyamide
- semiconductor device
- thermoplastic resin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
- H01L23/293—Organic, e.g. plastic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3135—Double encapsulation or coating and encapsulation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3142—Sealing arrangements between parts, e.g. adhesion promotors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Definitions
- the present invention relates to the sealing of semiconductor device in which a semiconductor package and a housing containing the semiconductor package are formed of different synthetic resins. More particularly, the present invention relates to a semiconductor device in which a housing is formed of thermoplastic resin (a first synthetic resin) and a semiconductor package is formed of thermosetting epoxy resin (a second synthetic resin), and a method of making the same.
- thermosetting epoxy resin which is a raw material of the semiconductor package
- thermoplastic resin which is a raw material of the housing
- FIG. 3A a housing 51 having a connector terminal 50 is provided.
- the connector terminal 50 is preformed by injection molding in a predetermined position of the housing 51 .
- a surface of the package 52 that abuts against the housing 51 has an adhesive agent applied thereon.
- the connecting portion 52 a of the package 52 is placed in contact with the connector terminal 50 , the package 52 is fixed to the housing 51 .
- a space 53 in the housing 51 is filled with a sealant 54 such as liquid epoxy and silicone to seal the package 52 .
- the above-mentioned manufacturing method in which the package 52 is sealed with the sealant 54 , requires more steps (three) compared to the manufacturing method by using insert molding: a step of making the housing 51 having the connector terminal 50 , a step of adhering the package 52 to the housing 51 , and a step of filling the housing 51 with the sealant 54 . This complicates the manufacturing process as well as increases the manufacturing costs of the semiconductor device.
- An object of the present invention is to provide a semiconductor device that is easy to manufacture and has excellent moisture resistance.
- Another object of the present invention is to provide a semiconductor device that holds downs its manufacturing costs.
- the semiconductor device includes a housing and a semiconductor package.
- the housing is formed of a first synthetic resin that is a thermoplastic resin.
- the semiconductor package is formed of a second synthetic resin that is a thermosetting resin.
- the package is sealed in the housing.
- the package has a modified face that has adhesive properties to the first synthetic resin. The modified face is formed on a surface of the package by UV-irradiating the surface before the sealing of the package in the housing.
- the present invention also provides a method of making a semiconductor device.
- the method includes steps of: UV-irradiating a semiconductor package formed of thermosetting epoxy resin to modify its surface to be adhesive to polyamide; placing the package in a die; and filling a space in the die with melted polyamide or a melted thermoplastic resin including polyamide to seal the package by insert molding.
- FIG. 1A is a schematic plan view of a semiconductor device.
- FIG. 1B is a schematic cross-sectional view of the semiconductor device of FIG. 1A taken along the line B-B.
- FIG. 2 is a schematic cross-sectional view showing insert molding during the manufacturing process of the semiconductor device.
- FIG. 3A is a schematic cross-sectional view showing a prior art manufacturing process before the sealant is applied.
- FIG. 3B is a schematic cross-sectional view showing a prior art manufacturing process after the sealant is applied.
- FIGS. 1 and 2 An embodiment of the present invention is described with reference to FIGS. 1 and 2 hereinafter.
- a semiconductor device 11 includes a housing 12 .
- the housing is generally rectangular solid in shape and is formed of thermoplastic resin.
- the housing 12 is formed of polyamide (PA).
- PA polyamide
- a semiconductor package 13 is sealed in the housing 12 .
- the package 13 is generally also rectangular solid in shape and is formed of thermosetting epoxy resin.
- the surface 13 a of the package 13 is modified by ultraviolet (UV) irradiation. Specifically, the modified face 13 a of the package 13 has adhesive properties to the polyamide.
- a plurality (two in this embodiment) of connector terminals 14 extends from the package 13 in parallel. Each terminal 14 extends out of the housing 12 with one end of each terminal being sealed in the housing 12 together with the package 13 .
- a manufacturing process of the above-mentioned semiconductor device 11 is described with reference to FIG. 2 .
- the package 13 is formed of thermosetting epoxy resin by a conventional method.
- the overall surface of the package 13 is irradiated by ultraviolet light. This irradiation modifies the surface of the package 13 to make it adhesive to polyamide.
- the package 13 is then placed into a die 20 .
- the die 20 includes an upper die 20 a and a lower die 20 b .
- the dies 20 a , 20 b each have a cavity that face to each other so that a space 15 is defined in the die 20 when the die halves 20 a , 20 b are positioned properly.
- the dies 20 a , 20 b have a semi-cylindrical recess at their opposing end.
- the two recesses form cylindrical holes 20 c .
- the internal diameter of the holes 20 c is designed to be approximately the same as the external diameter of the terminals 14 .
- thermoplastic resin PA in this embodiment
- PA melted thermoplastic resin
- the housing 12 is insert molded.
- the temperature at which the thermoplastic resin melts is lower than or the same as the temperature at which integrated circuit (IC) chips (not shown) in the package 13 show heat resistance.
- the upper and lower dies 20 a , 20 b are opened.
- the housing 12 is formed with the package 13 and a part of the terminals 14 sealed. The semiconductor device 11 is completed.
- the semiconductor device 11 can be manufactured in one step by insert molding.
- the conventionally required steps in the prior art i.e. forming the housing, adhering the semiconductor package to the housing, and filling the housing with the sealant
- the number of manufacturing steps is reduced and the semiconductor device 11 can be easily and inexpensively produced.
- the surface of the package 13 is UV-irradiated and modified to have adhesive properties to polyamide.
- the modified face 13 a ensures the adhesiveness between the housing 12 and the package 13 .
- a single polyamide is used as a thermoplastic resin. This improves the adhesive properties between the package 13 and the housing 12 compared with those when a polymer alloy of polyamide and another resin is used.
- the thermoplastic resin that forms the housing 12 is not limited to single PA.
- a resin of polymer alloy of PA and polyphenylene sulfide (PPS) can be used.
- PPS polyphenylene sulfide
- the combination of PPS with PA improves heat resistance and dimensional stability and provides a low water absorption rate of the semiconductor device 11 compared with single PA, while keeping the adhesive properties between the package 13 and the housing 12 .
- a resin of polymer alloy of PA and polybutylene telephthalate (PBT) may also be used.
- PBT polybutylene telephthalate
- the combination of PBT with PA provides a lower water absorption rate and abrasion resistance compared with single PA.
- the terminal 14 may be a male connector.
- the number of terminals 14 is not limited to two but may be one or more than two.
- the shape of the housing 12 and the package 13 is not limited to generally rectangular solid buy may be varied in any suitable form.
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Injection Moulding Of Plastics Or The Like (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
Abstract
Description
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/204,502 US7588962B2 (en) | 2001-09-20 | 2008-09-04 | Method of making semiconductor device |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001287076A JP4620303B2 (en) | 2001-09-20 | 2001-09-20 | Semiconductor device and manufacturing method thereof |
JP2001-287076 | 2001-09-20 | ||
US10/246,126 US20030052396A1 (en) | 2001-09-20 | 2002-09-18 | Semiconductor device and method of making the same |
US12/204,502 US7588962B2 (en) | 2001-09-20 | 2008-09-04 | Method of making semiconductor device |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/246,126 Division US20030052396A1 (en) | 2001-09-20 | 2002-09-18 | Semiconductor device and method of making the same |
Publications (2)
Publication Number | Publication Date |
---|---|
US20090023253A1 US20090023253A1 (en) | 2009-01-22 |
US7588962B2 true US7588962B2 (en) | 2009-09-15 |
Family
ID=19109943
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/246,126 Abandoned US20030052396A1 (en) | 2001-09-20 | 2002-09-18 | Semiconductor device and method of making the same |
US12/204,502 Expired - Fee Related US7588962B2 (en) | 2001-09-20 | 2008-09-04 | Method of making semiconductor device |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/246,126 Abandoned US20030052396A1 (en) | 2001-09-20 | 2002-09-18 | Semiconductor device and method of making the same |
Country Status (3)
Country | Link |
---|---|
US (2) | US20030052396A1 (en) |
EP (1) | EP1296371A3 (en) |
JP (1) | JP4620303B2 (en) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4620303B2 (en) | 2001-09-20 | 2011-01-26 | 株式会社東海理化電機製作所 | Semiconductor device and manufacturing method thereof |
DE102007051870A1 (en) * | 2007-10-30 | 2009-05-07 | Robert Bosch Gmbh | Module housing and method for producing a module housing |
JP5038273B2 (en) * | 2008-09-17 | 2012-10-03 | 三菱電機株式会社 | Resin molded semiconductor sensor and manufacturing method |
JP2010071724A (en) * | 2008-09-17 | 2010-04-02 | Mitsubishi Electric Corp | Resin molded semiconductor sensor and method of manufacturing the same |
DE112013003548T5 (en) * | 2012-07-16 | 2015-04-02 | Denso Corporation | Electronic device and method of manufacturing the same |
JP5983700B2 (en) | 2013-12-09 | 2016-09-06 | 株式会社デンソー | Semiconductor device, method for manufacturing the same, and composite molded body |
US10395947B2 (en) | 2014-02-27 | 2019-08-27 | Denso Corporation | Manufacturing method of a resin molded article |
Citations (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3689311A (en) | 1970-11-06 | 1972-09-05 | Ler Son Co Inc | Method for external coating of cylindrical objects |
US4788583A (en) | 1986-07-25 | 1988-11-29 | Fujitsu Limited | Semiconductor device and method of producing semiconductor device |
EP0407585A1 (en) | 1988-07-15 | 1991-01-16 | Dow Corning Toray Silicone Co., Ltd. | Semiconductor device sealed with resin and a method of producing the same |
JPH07196898A (en) | 1993-12-28 | 1995-08-01 | Kanebo Ltd | Thermoplastic resin composition |
JPH0878582A (en) | 1994-08-31 | 1996-03-22 | Toshiba Corp | Semiconductor device and manufacture of semiconductor |
US5519177A (en) | 1993-05-19 | 1996-05-21 | Ibiden Co., Ltd. | Adhesives, adhesive layers for electroless plating and printed circuit boards |
US5641997A (en) | 1993-09-14 | 1997-06-24 | Kabushiki Kaisha Toshiba | Plastic-encapsulated semiconductor device |
US5786626A (en) | 1996-03-25 | 1998-07-28 | Ibm Corporation | Thin radio frequency transponder with leadframe antenna structure |
JPH1135915A (en) | 1997-07-15 | 1999-02-09 | Toray Ind Inc | Resin-sealed semiconductor device |
US5874784A (en) | 1995-10-25 | 1999-02-23 | Sharp Kabushiki Kaisha | Semiconductor device having external connection terminals provided on an interconnection plate and fabrication process therefor |
US20010033722A1 (en) | 2000-04-19 | 2001-10-25 | Takeshi Okada | Optoelectronic module |
US20020024439A1 (en) | 2000-06-21 | 2002-02-28 | Wakahiro Kawai | Coin-shaped IC tag and method of manufacturing the same |
US20020030258A1 (en) | 1996-07-12 | 2002-03-14 | Fujitsu Limited | Method and mold for manufacturing semiconductor device, semiconductor device, and method for mounting the device |
US20020037143A1 (en) | 2000-08-07 | 2002-03-28 | Yoshiki Kuhara | Optical communication device |
US6420204B2 (en) * | 1999-06-03 | 2002-07-16 | Amkor Technology, Inc. | Method of making a plastic package for an optical integrated circuit device |
US20020195744A1 (en) | 1999-12-06 | 2002-12-26 | Yusuke Otsuki | Mold release film for sealing semiconductor element and sealing method for semiconductor element using it |
EP1296371A2 (en) | 2001-09-20 | 2003-03-26 | Kabushiki Kaisha Tokai Rika Denki Seisakusho | Semiconductor device and method of making the same |
US6605343B1 (en) | 1999-02-22 | 2003-08-12 | Sekisui Chemical Co., Ltd. | Composite material and synthetic sleeper using the composite material |
US6607825B1 (en) | 1995-12-26 | 2003-08-19 | Ibiden Co., Ltd. | Metal film bonded body, bonding agent layer and bonding agent |
US6643919B1 (en) * | 2000-05-19 | 2003-11-11 | Siliconware Precision Industries Co., Ltd. | Method of fabricating a semiconductor device package having a core-hollowed portion without causing resin flash on lead frame |
US7537964B2 (en) * | 2000-11-28 | 2009-05-26 | Knowles Electronics, Llc | Method of fabricating a miniature silicon condenser microphone |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63102246U (en) * | 1986-12-22 | 1988-07-02 | ||
JP2701045B2 (en) * | 1988-07-15 | 1998-01-21 | 東レ・ダウコーニング・シリコーン株式会社 | Resin-sealed semiconductor device and method of manufacturing the same |
JP2701072B2 (en) * | 1989-06-20 | 1998-01-21 | 東レ・ダウコーニング・シリコーン株式会社 | Resin-sealed optical coupling semiconductor device and method of manufacturing the same |
JPH10212365A (en) * | 1996-11-29 | 1998-08-11 | Mitsui Chem Inc | Resin molding and its production |
JPH11254477A (en) * | 1998-03-13 | 1999-09-21 | Mitsubishi Eng Plast Corp | Production of resin-sealed molded product of electric/ electronic part |
JPH11254476A (en) * | 1998-03-13 | 1999-09-21 | Mitsubishi Eng Plast Corp | Production of resin-sealed molded product of electric/ electronic part |
-
2001
- 2001-09-20 JP JP2001287076A patent/JP4620303B2/en not_active Expired - Fee Related
-
2002
- 2002-09-16 EP EP02020768A patent/EP1296371A3/en not_active Withdrawn
- 2002-09-18 US US10/246,126 patent/US20030052396A1/en not_active Abandoned
-
2008
- 2008-09-04 US US12/204,502 patent/US7588962B2/en not_active Expired - Fee Related
Patent Citations (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3689311A (en) | 1970-11-06 | 1972-09-05 | Ler Son Co Inc | Method for external coating of cylindrical objects |
US4788583A (en) | 1986-07-25 | 1988-11-29 | Fujitsu Limited | Semiconductor device and method of producing semiconductor device |
EP0407585A1 (en) | 1988-07-15 | 1991-01-16 | Dow Corning Toray Silicone Co., Ltd. | Semiconductor device sealed with resin and a method of producing the same |
US5519177A (en) | 1993-05-19 | 1996-05-21 | Ibiden Co., Ltd. | Adhesives, adhesive layers for electroless plating and printed circuit boards |
US5641997A (en) | 1993-09-14 | 1997-06-24 | Kabushiki Kaisha Toshiba | Plastic-encapsulated semiconductor device |
JPH07196898A (en) | 1993-12-28 | 1995-08-01 | Kanebo Ltd | Thermoplastic resin composition |
JPH0878582A (en) | 1994-08-31 | 1996-03-22 | Toshiba Corp | Semiconductor device and manufacture of semiconductor |
US5874784A (en) | 1995-10-25 | 1999-02-23 | Sharp Kabushiki Kaisha | Semiconductor device having external connection terminals provided on an interconnection plate and fabrication process therefor |
US6607825B1 (en) | 1995-12-26 | 2003-08-19 | Ibiden Co., Ltd. | Metal film bonded body, bonding agent layer and bonding agent |
US5786626A (en) | 1996-03-25 | 1998-07-28 | Ibm Corporation | Thin radio frequency transponder with leadframe antenna structure |
US20020030258A1 (en) | 1996-07-12 | 2002-03-14 | Fujitsu Limited | Method and mold for manufacturing semiconductor device, semiconductor device, and method for mounting the device |
JPH1135915A (en) | 1997-07-15 | 1999-02-09 | Toray Ind Inc | Resin-sealed semiconductor device |
US6605343B1 (en) | 1999-02-22 | 2003-08-12 | Sekisui Chemical Co., Ltd. | Composite material and synthetic sleeper using the composite material |
US6420204B2 (en) * | 1999-06-03 | 2002-07-16 | Amkor Technology, Inc. | Method of making a plastic package for an optical integrated circuit device |
US20020195744A1 (en) | 1999-12-06 | 2002-12-26 | Yusuke Otsuki | Mold release film for sealing semiconductor element and sealing method for semiconductor element using it |
US20010033722A1 (en) | 2000-04-19 | 2001-10-25 | Takeshi Okada | Optoelectronic module |
US6643919B1 (en) * | 2000-05-19 | 2003-11-11 | Siliconware Precision Industries Co., Ltd. | Method of fabricating a semiconductor device package having a core-hollowed portion without causing resin flash on lead frame |
US20020024439A1 (en) | 2000-06-21 | 2002-02-28 | Wakahiro Kawai | Coin-shaped IC tag and method of manufacturing the same |
US20020037143A1 (en) | 2000-08-07 | 2002-03-28 | Yoshiki Kuhara | Optical communication device |
US7537964B2 (en) * | 2000-11-28 | 2009-05-26 | Knowles Electronics, Llc | Method of fabricating a miniature silicon condenser microphone |
EP1296371A2 (en) | 2001-09-20 | 2003-03-26 | Kabushiki Kaisha Tokai Rika Denki Seisakusho | Semiconductor device and method of making the same |
Also Published As
Publication number | Publication date |
---|---|
EP1296371A2 (en) | 2003-03-26 |
US20030052396A1 (en) | 2003-03-20 |
US20090023253A1 (en) | 2009-01-22 |
EP1296371A3 (en) | 2006-05-24 |
JP4620303B2 (en) | 2011-01-26 |
JP2003094479A (en) | 2003-04-03 |
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Legal Events
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AS | Assignment |
Owner name: KABUSHIKI KAISHA TOKAI RIKA DENKI SEISAKUSHO, JAPA Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:TAJIMA, MASAYA;KOGISO, KATSUYA;WATANABE, MITSUO;AND OTHERS;REEL/FRAME:021483/0697 Effective date: 20020917 |
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Free format text: PATENT EXPIRED FOR FAILURE TO PAY MAINTENANCE FEES (ORIGINAL EVENT CODE: EXP.); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY |
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Effective date: 20210915 |