US7203010B2 - Catadioptric projection objective - Google Patents

Catadioptric projection objective Download PDF

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Publication number
US7203010B2
US7203010B2 US11/036,155 US3615505A US7203010B2 US 7203010 B2 US7203010 B2 US 7203010B2 US 3615505 A US3615505 A US 3615505A US 7203010 B2 US7203010 B2 US 7203010B2
Authority
US
United States
Prior art keywords
diaphragm
projection objective
concave mirror
objective
catadioptric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related, expires
Application number
US11/036,155
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English (en)
Other versions
US20050207029A1 (en
Inventor
Alexander Epple
Aurelian Dodoc
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
Original Assignee
Carl Zeiss SMT GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss SMT GmbH filed Critical Carl Zeiss SMT GmbH
Priority to US11/036,155 priority Critical patent/US7203010B2/en
Assigned to CARL ZEISS SMT AG reassignment CARL ZEISS SMT AG ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: DODOC, AURELIAN, EPPLE, ALEXANDER
Publication of US20050207029A1 publication Critical patent/US20050207029A1/en
Application granted granted Critical
Publication of US7203010B2 publication Critical patent/US7203010B2/en
Adjusted expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0892—Catadioptric systems specially adapted for the UV
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/005—Diaphragms
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70225—Optical aspects of catadioptric systems, i.e. comprising reflective and refractive elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/7025—Size or form of projection system aperture, e.g. aperture stops, diaphragms or pupil obscuration; Control thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70275—Multiple projection paths, e.g. array of projection systems, microlens projection systems or tandem projection systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/22—Telecentric objectives or lens systems

Definitions

  • Such a system diaphragm also called aperture diaphragm or aperture stop, is fitted in the vicinity of a suitable diaphragm location of the optical axis.
  • Suitable diaphragm locations lie at or in the vicinity of axial positions in which the principal ray of the optical imaging intercepts the optical axis.
  • Imaging systems with an intermediate image have two such diaphragm locations, namely one between object plane and intermediate image and one between the intermediate image and the image plane.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Stereoscopic And Panoramic Photography (AREA)
US11/036,155 2002-07-18 2005-01-18 Catadioptric projection objective Expired - Fee Related US7203010B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US11/036,155 US7203010B2 (en) 2002-07-18 2005-01-18 Catadioptric projection objective

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US39655202P 2002-07-18 2002-07-18
PCT/EP2003/007758 WO2004010164A2 (en) 2002-07-18 2003-07-17 Catadioptric projection objective
US11/036,155 US7203010B2 (en) 2002-07-18 2005-01-18 Catadioptric projection objective

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2003/007758 Continuation WO2004010164A2 (en) 2002-07-18 2003-07-17 Catadioptric projection objective

Publications (2)

Publication Number Publication Date
US20050207029A1 US20050207029A1 (en) 2005-09-22
US7203010B2 true US7203010B2 (en) 2007-04-10

Family

ID=30770919

Family Applications (1)

Application Number Title Priority Date Filing Date
US11/036,155 Expired - Fee Related US7203010B2 (en) 2002-07-18 2005-01-18 Catadioptric projection objective

Country Status (5)

Country Link
US (1) US7203010B2 (ja)
EP (1) EP1523692A2 (ja)
JP (1) JP2005533285A (ja)
AU (1) AU2003258519A1 (ja)
WO (1) WO2004010164A2 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070285767A1 (en) * 2006-03-22 2007-12-13 Carl Zeiss Smt Ag Catadioptric imaging system with beam splitter
US20080212170A1 (en) * 2004-01-14 2008-09-04 Carl Zeiss Smt Ag Catadioptric projection objective
US20090190208A1 (en) * 2004-01-14 2009-07-30 Carl Zeiss Smt Ag Catadioptric projection objective
US8913316B2 (en) 2004-05-17 2014-12-16 Carl Zeiss Smt Gmbh Catadioptric projection objective with intermediate images

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10316428A1 (de) * 2003-04-08 2004-10-21 Carl Zeiss Smt Ag Katadioptrisches Reduktionsobjektiv
DE602005008591D1 (de) 2004-06-10 2008-09-11 Zeiss Carl Smt Ag Projektionsobjektiv für eine mikrolithographische projektionsbelichtungsvorrichtung
US20090115986A1 (en) * 2005-06-02 2009-05-07 Carl Zeiss Smt Ag Microlithography projection objective
EP1746463A2 (de) 2005-07-01 2007-01-24 Carl Zeiss SMT AG Verfahren zum Korrigieren eines lithographischen Projektionsobjektivs und derartiges Projektionsobjektiv
US20080259308A1 (en) * 2007-04-18 2008-10-23 Carl Zeiss Smt Ag Projection objective for microlithography
DE102011003145A1 (de) 2010-02-09 2011-08-11 Carl Zeiss SMT GmbH, 73447 Optisches System mit Blendeneinrichtung

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5052764A (en) 1989-08-31 1991-10-01 Hughes Aircraft Company System and method for forming a holographic exposure with a simulated source
US5742436A (en) 1994-05-19 1998-04-21 Carl-Zeiss-Stiftung Maximum aperture catadioptric reduction objective for microlithography
US5808805A (en) 1994-04-28 1998-09-15 Nikon Corporation Exposure apparatus having catadioptric projection optical system
US5969882A (en) 1997-04-01 1999-10-19 Nikon Corporation Catadioptric optical system
US20020039175A1 (en) 1999-12-29 2002-04-04 Shafer David R. Projection exposure lens with aspheric elements
US6512641B2 (en) * 1998-06-08 2003-01-28 Nikon Corporation Projection exposure apparatus and method
US20030090786A1 (en) * 1998-08-18 2003-05-15 Nikon Corporation Exposure apparatus and method
US20030179356A1 (en) 1999-12-29 2003-09-25 Karl-Heinz Schuster Projection objective having adjacently mounted aspheric lens surfaces
US6707616B1 (en) 1998-04-07 2004-03-16 Nikon Corporation Projection exposure apparatus, projection exposure method and catadioptric optical system
US20060055907A1 (en) * 2003-05-23 2006-03-16 Takashi Kato Projection optical system, exposure apparatus, and device manufacturing method

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5052764A (en) 1989-08-31 1991-10-01 Hughes Aircraft Company System and method for forming a holographic exposure with a simulated source
US5808805A (en) 1994-04-28 1998-09-15 Nikon Corporation Exposure apparatus having catadioptric projection optical system
US5999333A (en) 1994-04-28 1999-12-07 Nikon Corporation Exposure apparatus having catadioptric projection optical system
US5742436A (en) 1994-05-19 1998-04-21 Carl-Zeiss-Stiftung Maximum aperture catadioptric reduction objective for microlithography
US5969882A (en) 1997-04-01 1999-10-19 Nikon Corporation Catadioptric optical system
US6707616B1 (en) 1998-04-07 2004-03-16 Nikon Corporation Projection exposure apparatus, projection exposure method and catadioptric optical system
US6512641B2 (en) * 1998-06-08 2003-01-28 Nikon Corporation Projection exposure apparatus and method
US20030090786A1 (en) * 1998-08-18 2003-05-15 Nikon Corporation Exposure apparatus and method
US20020039175A1 (en) 1999-12-29 2002-04-04 Shafer David R. Projection exposure lens with aspheric elements
US20030179356A1 (en) 1999-12-29 2003-09-25 Karl-Heinz Schuster Projection objective having adjacently mounted aspheric lens surfaces
US20060055907A1 (en) * 2003-05-23 2006-03-16 Takashi Kato Projection optical system, exposure apparatus, and device manufacturing method

Cited By (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8339701B2 (en) 2004-01-14 2012-12-25 Carl Zeiss Smt Gmbh Catadioptric projection objective
US7869122B2 (en) 2004-01-14 2011-01-11 Carl Zeiss Smt Ag Catadioptric projection objective
US9772478B2 (en) 2004-01-14 2017-09-26 Carl Zeiss Smt Gmbh Catadioptric projection objective with parallel, offset optical axes
US8416490B2 (en) 2004-01-14 2013-04-09 Carl Zeiss Smt Gmbh Catadioptric projection objective
US8355201B2 (en) 2004-01-14 2013-01-15 Carl Zeiss Smt Gmbh Catadioptric projection objective
US20110235167A1 (en) * 2004-01-14 2011-09-29 Carl Zeiss Smt Gmbh Catadioptric projection objective
US8199400B2 (en) 2004-01-14 2012-06-12 Carl Zeiss Smt Gmbh Catadioptric projection objective
US8208199B2 (en) 2004-01-14 2012-06-26 Carl Zeiss Smt Gmbh Catadioptric projection objective
US8208198B2 (en) 2004-01-14 2012-06-26 Carl Zeiss Smt Gmbh Catadioptric projection objective
US8289619B2 (en) 2004-01-14 2012-10-16 Carl Zeiss Smt Gmbh Catadioptric projection objective
US20090190208A1 (en) * 2004-01-14 2009-07-30 Carl Zeiss Smt Ag Catadioptric projection objective
US20080212170A1 (en) * 2004-01-14 2008-09-04 Carl Zeiss Smt Ag Catadioptric projection objective
US20100014153A1 (en) * 2004-01-14 2010-01-21 Carl Zeiss Smt Ag Catadioptric projection objective
US8730572B2 (en) 2004-01-14 2014-05-20 Carl Zeiss Smt Gmbh Catadioptric projection objective
US8804234B2 (en) 2004-01-14 2014-08-12 Carl Zeiss Smt Gmbh Catadioptric projection objective including an aspherized plate
US8908269B2 (en) 2004-01-14 2014-12-09 Carl Zeiss Smt Gmbh Immersion catadioptric projection objective having two intermediate images
US8913316B2 (en) 2004-05-17 2014-12-16 Carl Zeiss Smt Gmbh Catadioptric projection objective with intermediate images
US9019596B2 (en) 2004-05-17 2015-04-28 Carl Zeiss Smt Gmbh Catadioptric projection objective with intermediate images
US9134618B2 (en) 2004-05-17 2015-09-15 Carl Zeiss Smt Gmbh Catadioptric projection objective with intermediate images
US9726979B2 (en) 2004-05-17 2017-08-08 Carl Zeiss Smt Gmbh Catadioptric projection objective with intermediate images
US20070285767A1 (en) * 2006-03-22 2007-12-13 Carl Zeiss Smt Ag Catadioptric imaging system with beam splitter

Also Published As

Publication number Publication date
JP2005533285A (ja) 2005-11-04
WO2004010164A2 (en) 2004-01-29
AU2003258519A8 (en) 2004-02-09
US20050207029A1 (en) 2005-09-22
WO2004010164A3 (en) 2004-06-03
AU2003258519A1 (en) 2004-02-09
EP1523692A2 (en) 2005-04-20

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Owner name: CARL ZEISS SMT AG, GERMANY

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:EPPLE, ALEXANDER;DODOC, AURELIAN;REEL/FRAME:016514/0578;SIGNING DATES FROM 20050415 TO 20050419

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STCH Information on status: patent discontinuation

Free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362

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Effective date: 20110410