US6517417B2 - Polishing pad with a transparent portion - Google Patents

Polishing pad with a transparent portion Download PDF

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Publication number
US6517417B2
US6517417B2 US09/792,813 US79281301A US6517417B2 US 6517417 B2 US6517417 B2 US 6517417B2 US 79281301 A US79281301 A US 79281301A US 6517417 B2 US6517417 B2 US 6517417B2
Authority
US
United States
Prior art keywords
polishing
index
refraction
transparent portion
polishing pad
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related, expires
Application number
US09/792,813
Other languages
English (en)
Other versions
US20010031610A1 (en
Inventor
William D. Budinger
John V. H. Roberts
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rohm and Haas Electronic Materials CMP Holdings Inc
Original Assignee
Rodel Holdings Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rodel Holdings Inc filed Critical Rodel Holdings Inc
Priority to US09/792,813 priority Critical patent/US6517417B2/en
Assigned to RODEL HOLDINGS, INC. reassignment RODEL HOLDINGS, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: ROBERTS, JOHN V.H., BUDINGER, WILLIAM D.
Publication of US20010031610A1 publication Critical patent/US20010031610A1/en
Application granted granted Critical
Publication of US6517417B2 publication Critical patent/US6517417B2/en
Assigned to ROHM AND HAAS ELECTRONIC MATERIALS CMP HOLDINGS, INC. reassignment ROHM AND HAAS ELECTRONIC MATERIALS CMP HOLDINGS, INC. CHANGE OF NAME (SEE DOCUMENT FOR DETAILS). Assignors: RODEL HOLDINGS, INC.
Adjusted expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/205—Lapping pads for working plane surfaces provided with a window for inspecting the surface of the work being lapped
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/12—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D13/00—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor
    • B24D13/14—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor acting by the front face
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/02—Polishing compositions containing abrasives or grinding agents

Definitions

  • An exemplary liquid urethane is one which reacts with a polyfunctional amine, diamine, triamine or polyfunctional hydroxyl compound or mixed functionality compounds such as hydroxyl/amines dwelling in urethane/urea crosslinked networks to permit the formation of urea links and a cured/crosslinked polymer network.
  • An exemplary the liquid urethane is reacted with 4,4′ methylene-bis(2-chloroaniline) (“MOCA”), which is commercially available as the product CURENE® 442, from Anderson Development Co. of Adrian, Mich.
  • MOCA 4,4′ methylene-bis(2-chloroaniline)

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
US09/792,813 2000-02-25 2001-02-24 Polishing pad with a transparent portion Expired - Fee Related US6517417B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US09/792,813 US6517417B2 (en) 2000-02-25 2001-02-24 Polishing pad with a transparent portion

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US18519700P 2000-02-25 2000-02-25
US09/792,813 US6517417B2 (en) 2000-02-25 2001-02-24 Polishing pad with a transparent portion

Publications (2)

Publication Number Publication Date
US20010031610A1 US20010031610A1 (en) 2001-10-18
US6517417B2 true US6517417B2 (en) 2003-02-11

Family

ID=22680000

Family Applications (1)

Application Number Title Priority Date Filing Date
US09/792,813 Expired - Fee Related US6517417B2 (en) 2000-02-25 2001-02-24 Polishing pad with a transparent portion

Country Status (6)

Country Link
US (1) US6517417B2 (zh)
EP (1) EP1257386A1 (zh)
JP (1) JP2003524300A (zh)
KR (1) KR20020084150A (zh)
TW (1) TW522075B (zh)
WO (1) WO2001062440A1 (zh)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6608283B2 (en) * 2000-02-08 2003-08-19 Emagin Corporation Apparatus and method for solder-sealing an active matrix organic light emitting diode
US20030181139A1 (en) * 2002-02-04 2003-09-25 Kurt Lehman Windows configurable to be coupled to a process tool or to be disposed within an opening in a polishing pad
US20040018809A1 (en) * 2002-03-18 2004-01-29 Angela Petroski Polishing pad for use in chemical/mechanical planarization of semiconductor wafers having a transparent window for end-point determination and method of making
US20040033758A1 (en) * 2001-12-28 2004-02-19 Wiswesser Andreas Norbert Polishing pad with window
US6716085B2 (en) 2001-12-28 2004-04-06 Applied Materials Inc. Polishing pad with transparent window
US6855034B2 (en) * 2001-04-25 2005-02-15 Jsr Corporation Polishing pad for semiconductor wafer and laminated body for polishing of semiconductor wafer equipped with the same as well as method for polishing of semiconductor wafer
US20050060943A1 (en) * 2003-09-19 2005-03-24 Cabot Microelectronics Corporation Polishing pad with recessed window
US20070021045A1 (en) * 2004-10-27 2007-01-25 Ppg Industries Ohio, Inc. Polyurethane Urea Polishing Pad with Window
US20070042682A1 (en) * 2005-08-18 2007-02-22 Saikin Alan H Transparent polishing pad
US20090142989A1 (en) * 2007-11-30 2009-06-04 Innopad, Inc. Chemical-Mechanical Planarization Pad Having End Point Detection Window
US8758659B2 (en) 2010-09-29 2014-06-24 Fns Tech Co., Ltd. Method of grooving a chemical-mechanical planarization pad
US9017140B2 (en) 2010-01-13 2015-04-28 Nexplanar Corporation CMP pad with local area transparency
US9156124B2 (en) 2010-07-08 2015-10-13 Nexplanar Corporation Soft polishing pad for polishing a semiconductor substrate

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002070200A1 (en) 2001-03-01 2002-09-12 Cabot Microelectronics Corporation Method for manufacturing a polishing pad having a compressed translucent region
US6722249B2 (en) * 2001-11-06 2004-04-20 Rodel Holdings, Inc Method of fabricating a polishing pad having an optical window
US6960120B2 (en) 2003-02-10 2005-11-01 Cabot Microelectronics Corporation CMP pad with composite transparent window
US6832947B2 (en) * 2003-02-10 2004-12-21 Cabot Microelectronics Corporation CMP pad with composite transparent window
EP1594656B1 (en) * 2003-02-18 2007-09-12 Parker-Hannifin Corporation Polishing article for electro-chemical mechanical polishing
US6984163B2 (en) * 2003-11-25 2006-01-10 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Polishing pad with high optical transmission window
US9156125B2 (en) * 2012-04-11 2015-10-13 Cabot Microelectronics Corporation Polishing pad with light-stable light-transmitting region

Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3851093A (en) * 1971-07-12 1974-11-26 D Sunstein Color television display system and method for reducing visibility of geometric pattern of colored-light sources, and method for fabrication thereof
US5018811A (en) 1990-07-18 1991-05-28 Northrop Corporation Asymmetric optical waveguides for minimizing bending losses and techniques for fabricating same
US5106394A (en) * 1990-10-01 1992-04-21 The United States Of America As Represented By The Secretary Of The Navy Fiber optic polishing system
US5136818A (en) * 1990-10-01 1992-08-11 The United States Of America As Represented By The Secretary Of The Navy Method of polishing optical fiber
US5413941A (en) 1994-01-06 1995-05-09 Micron Technology, Inc. Optical end point detection methods in semiconductor planarizing polishing processes
US5489233A (en) 1994-04-08 1996-02-06 Rodel, Inc. Polishing pads and methods for their use
EP0747167A2 (en) 1995-06-09 1996-12-11 Applied Materials, Inc. Apparatus for holding a substrate during polishing
US5605760A (en) 1995-08-21 1997-02-25 Rodel, Inc. Polishing pads
US5609511A (en) 1994-04-14 1997-03-11 Hitachi, Ltd. Polishing method
US5893796A (en) 1995-03-28 1999-04-13 Applied Materials, Inc. Forming a transparent window in a polishing pad for a chemical mechanical polishing apparatus
US5899792A (en) 1996-12-10 1999-05-04 Nikon Corporation Optical polishing apparatus and methods
US6074287A (en) 1996-04-12 2000-06-13 Nikon Corporation Semiconductor wafer polishing apparatus
US6171181B1 (en) 1999-08-17 2001-01-09 Rodel Holdings, Inc. Molded polishing pad having integral window
US6247998B1 (en) * 1999-01-25 2001-06-19 Applied Materials, Inc. Method and apparatus for determining substrate layer thickness during chemical mechanical polishing

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000254860A (ja) * 1999-03-08 2000-09-19 Nikon Corp 研磨装置

Patent Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3851093A (en) * 1971-07-12 1974-11-26 D Sunstein Color television display system and method for reducing visibility of geometric pattern of colored-light sources, and method for fabrication thereof
US5018811A (en) 1990-07-18 1991-05-28 Northrop Corporation Asymmetric optical waveguides for minimizing bending losses and techniques for fabricating same
US5106394A (en) * 1990-10-01 1992-04-21 The United States Of America As Represented By The Secretary Of The Navy Fiber optic polishing system
US5136818A (en) * 1990-10-01 1992-08-11 The United States Of America As Represented By The Secretary Of The Navy Method of polishing optical fiber
US5413941A (en) 1994-01-06 1995-05-09 Micron Technology, Inc. Optical end point detection methods in semiconductor planarizing polishing processes
US5489233A (en) 1994-04-08 1996-02-06 Rodel, Inc. Polishing pads and methods for their use
US5609511A (en) 1994-04-14 1997-03-11 Hitachi, Ltd. Polishing method
US5893796A (en) 1995-03-28 1999-04-13 Applied Materials, Inc. Forming a transparent window in a polishing pad for a chemical mechanical polishing apparatus
EP0747167A2 (en) 1995-06-09 1996-12-11 Applied Materials, Inc. Apparatus for holding a substrate during polishing
US5605760A (en) 1995-08-21 1997-02-25 Rodel, Inc. Polishing pads
US6074287A (en) 1996-04-12 2000-06-13 Nikon Corporation Semiconductor wafer polishing apparatus
US5899792A (en) 1996-12-10 1999-05-04 Nikon Corporation Optical polishing apparatus and methods
US6247998B1 (en) * 1999-01-25 2001-06-19 Applied Materials, Inc. Method and apparatus for determining substrate layer thickness during chemical mechanical polishing
US6171181B1 (en) 1999-08-17 2001-01-09 Rodel Holdings, Inc. Molded polishing pad having integral window

Cited By (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6608283B2 (en) * 2000-02-08 2003-08-19 Emagin Corporation Apparatus and method for solder-sealing an active matrix organic light emitting diode
US6855034B2 (en) * 2001-04-25 2005-02-15 Jsr Corporation Polishing pad for semiconductor wafer and laminated body for polishing of semiconductor wafer equipped with the same as well as method for polishing of semiconductor wafer
US20050266771A1 (en) * 2001-12-28 2005-12-01 Applied Materials, Inc., A Delaware Corporation Polishing pad with window
US7198544B2 (en) 2001-12-28 2007-04-03 Applied Materials, Inc. Polishing pad with window
US20040033758A1 (en) * 2001-12-28 2004-02-19 Wiswesser Andreas Norbert Polishing pad with window
US6716085B2 (en) 2001-12-28 2004-04-06 Applied Materials Inc. Polishing pad with transparent window
US6994607B2 (en) 2001-12-28 2006-02-07 Applied Materials, Inc. Polishing pad with window
US20060148383A1 (en) * 2002-02-04 2006-07-06 Kla Tencor Technologies Methods and systems for detecting a presence of blobs on a specimen during a polishing process
US20030181139A1 (en) * 2002-02-04 2003-09-25 Kurt Lehman Windows configurable to be coupled to a process tool or to be disposed within an opening in a polishing pad
US8831767B2 (en) 2002-02-04 2014-09-09 Kla-Tencor Technologies Corp. Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool
US6866559B2 (en) * 2002-02-04 2005-03-15 Kla-Tencor Technologies Windows configurable to be coupled to a process tool or to be disposed within an opening in a polishing pad
US20060131273A1 (en) * 2002-02-04 2006-06-22 Kla-Tencor Technologies Corp. Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool
US8010222B2 (en) 2002-02-04 2011-08-30 Kla-Tencor Technologies Corp. Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool
US7332438B2 (en) 2002-02-04 2008-02-19 Kla-Tencor Technologies Corp. Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool
US20040018809A1 (en) * 2002-03-18 2004-01-29 Angela Petroski Polishing pad for use in chemical/mechanical planarization of semiconductor wafers having a transparent window for end-point determination and method of making
US6875077B2 (en) 2002-03-18 2005-04-05 Raytech Innovative Solutions, Inc. Polishing pad for use in chemical/mechanical planarization of semiconductor wafers having a transparent window for end-point determination and method of making
US7195539B2 (en) 2003-09-19 2007-03-27 Cabot Microelectronics Coporation Polishing pad with recessed window
US20050060943A1 (en) * 2003-09-19 2005-03-24 Cabot Microelectronics Corporation Polishing pad with recessed window
US20070021045A1 (en) * 2004-10-27 2007-01-25 Ppg Industries Ohio, Inc. Polyurethane Urea Polishing Pad with Window
US20070042682A1 (en) * 2005-08-18 2007-02-22 Saikin Alan H Transparent polishing pad
US7273407B2 (en) * 2005-08-18 2007-09-25 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Transparent polishing pad
US20090142989A1 (en) * 2007-11-30 2009-06-04 Innopad, Inc. Chemical-Mechanical Planarization Pad Having End Point Detection Window
US7985121B2 (en) 2007-11-30 2011-07-26 Innopad, Inc. Chemical-mechanical planarization pad having end point detection window
US9017140B2 (en) 2010-01-13 2015-04-28 Nexplanar Corporation CMP pad with local area transparency
US9156124B2 (en) 2010-07-08 2015-10-13 Nexplanar Corporation Soft polishing pad for polishing a semiconductor substrate
US8758659B2 (en) 2010-09-29 2014-06-24 Fns Tech Co., Ltd. Method of grooving a chemical-mechanical planarization pad

Also Published As

Publication number Publication date
EP1257386A1 (en) 2002-11-20
JP2003524300A (ja) 2003-08-12
US20010031610A1 (en) 2001-10-18
KR20020084150A (ko) 2002-11-04
WO2001062440A1 (en) 2001-08-30
TW522075B (en) 2003-03-01

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Legal Events

Date Code Title Description
AS Assignment

Owner name: RODEL HOLDINGS, INC., DELAWARE

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:BUDINGER, WILLIAM D.;ROBERTS, JOHN V.H.;REEL/FRAME:011856/0793;SIGNING DATES FROM 20010412 TO 20010425

AS Assignment

Owner name: ROHM AND HAAS ELECTRONIC MATERIALS CMP HOLDINGS, I

Free format text: CHANGE OF NAME;ASSIGNOR:RODEL HOLDINGS, INC.;REEL/FRAME:014725/0685

Effective date: 20040127

REMI Maintenance fee reminder mailed
LAPS Lapse for failure to pay maintenance fees
STCH Information on status: patent discontinuation

Free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362

FP Lapsed due to failure to pay maintenance fee

Effective date: 20070211