US4762417A - Fringe scanning point diffraction interferometer by polarization - Google Patents

Fringe scanning point diffraction interferometer by polarization Download PDF

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Publication number
US4762417A
US4762417A US06/879,000 US87900086A US4762417A US 4762417 A US4762417 A US 4762417A US 87900086 A US87900086 A US 87900086A US 4762417 A US4762417 A US 4762417A
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US
United States
Prior art keywords
polarization
interferometer
pinhole
wavefront
under test
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
US06/879,000
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English (en)
Inventor
Shudong Wu
Xiangzhen Chen
Xiou Tao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Institute of Optics and Fine Mechanics of CAS
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Shanghai Institute of Optics and Fine Mechanics of CAS
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Assigned to SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS, ACADEMIA SINICA, reassignment SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS, ACADEMIA SINICA, ASSIGNMENT OF ASSIGNORS INTEREST. Assignors: CHEN, XIANGZHEN, TAO, XIOU, WU, SHUDONG
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Publication of US4762417A publication Critical patent/US4762417A/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/0271—Testing optical properties by measuring geometrical properties or aberrations by using interferometric methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/005—Testing of reflective surfaces, e.g. mirrors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G01J2009/0261—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods polarised
US06/879,000 1985-08-06 1986-06-26 Fringe scanning point diffraction interferometer by polarization Expired - Fee Related US4762417A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN85106007 1985-08-06
CN85106007A CN85106007B (zh) 1985-08-06 1985-08-06 偏振条纹扫描数字干涉仪

Publications (1)

Publication Number Publication Date
US4762417A true US4762417A (en) 1988-08-09

Family

ID=4794826

Family Applications (1)

Application Number Title Priority Date Filing Date
US06/879,000 Expired - Fee Related US4762417A (en) 1985-08-06 1986-06-26 Fringe scanning point diffraction interferometer by polarization

Country Status (3)

Country Link
US (1) US4762417A (de)
CN (1) CN85106007B (de)
DE (2) DE3622431A1 (de)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4975717A (en) * 1988-08-22 1990-12-04 Dainippon Screen Mfg. Co., Ltd. Apparatus for recording image
US5379105A (en) * 1991-10-24 1995-01-03 Asahi Kogaku Kogyo Kabushiki Kaisha Roof surface measuring apparatus
US6320665B1 (en) * 1998-12-29 2001-11-20 Bryan Kok Ann Ngoi Acousto optic scanning laser vibrometer for determining the dynamic properties of an object
US20040114150A1 (en) * 2002-07-29 2004-06-17 Carl Zeiss Smt Ag Method and apparatus for determining the influencing of the state of polarization by an optical system; and an analyser
US20050046863A1 (en) * 2003-08-29 2005-03-03 Millerd James E. Common optical-path testing of high-numerical-aperture wavefronts
US6958817B1 (en) 2004-08-13 2005-10-25 Nanyang Technological University Method of interferometry with modulated optical path-length difference and interferometer
US7006234B1 (en) * 2002-01-09 2006-02-28 Interphase Technologies, Inc. Common-path point-diffraction phase-shifting interferometer incorporating a birefringent polymer membrane
US7106456B1 (en) * 2002-01-09 2006-09-12 Interphase Technologies, Inc. Common-path point-diffraction phase-shifting interferometer
US10825163B1 (en) * 2019-06-13 2020-11-03 Viavi Solutions Inc. Automatically executing a test to inspect an end face of an optical fiber when an image is in focus

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100570296C (zh) * 2007-10-19 2009-12-16 中国科学院上海光学精密机械研究所 偏振移相双剪切干涉波面测量仪及其检测方法
CN108955579A (zh) * 2018-08-06 2018-12-07 深圳精创视觉科技有限公司 一种高精度光学膜吸收轴测量装置
CN111562000B (zh) * 2020-04-21 2021-06-22 中国科学院西安光学精密机械研究所 一种基于相干色散技术的消零干涉光谱仪
CN114322848B (zh) * 2021-12-16 2023-06-27 中国石油大学(华东) 一种球面波前曲率半径测量装置及测量方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4575247A (en) * 1984-07-02 1986-03-11 Rockwell International Corporation Phase-measuring interferometer
US4624569A (en) * 1983-07-18 1986-11-25 Lockheed Missiles & Space Company, Inc. Real-time diffraction interferometer

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4624569A (en) * 1983-07-18 1986-11-25 Lockheed Missiles & Space Company, Inc. Real-time diffraction interferometer
US4575247A (en) * 1984-07-02 1986-03-11 Rockwell International Corporation Phase-measuring interferometer

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4975717A (en) * 1988-08-22 1990-12-04 Dainippon Screen Mfg. Co., Ltd. Apparatus for recording image
US5379105A (en) * 1991-10-24 1995-01-03 Asahi Kogaku Kogyo Kabushiki Kaisha Roof surface measuring apparatus
US6320665B1 (en) * 1998-12-29 2001-11-20 Bryan Kok Ann Ngoi Acousto optic scanning laser vibrometer for determining the dynamic properties of an object
US20060274321A1 (en) * 2002-01-09 2006-12-07 Cottrell William J Common-path point-diffraction phase-shifting interferometer
US7006234B1 (en) * 2002-01-09 2006-02-28 Interphase Technologies, Inc. Common-path point-diffraction phase-shifting interferometer incorporating a birefringent polymer membrane
US7106456B1 (en) * 2002-01-09 2006-09-12 Interphase Technologies, Inc. Common-path point-diffraction phase-shifting interferometer
US7304746B2 (en) * 2002-01-09 2007-12-04 Interphase Technologies, Inc Common-path point-diffraction phase-shifting interferometer
US20040114150A1 (en) * 2002-07-29 2004-06-17 Carl Zeiss Smt Ag Method and apparatus for determining the influencing of the state of polarization by an optical system; and an analyser
US7286245B2 (en) * 2002-07-29 2007-10-23 Carl Zeiss Smt Ag Method and apparatus for determining the influencing of the state of polarization by an optical system; and an analyser
US20080037905A1 (en) * 2002-07-29 2008-02-14 Carl Zeiss Smt Ag Method and apparatus for determining the influencing of the state of polarization by an optical system, and an analyser
US20050046863A1 (en) * 2003-08-29 2005-03-03 Millerd James E. Common optical-path testing of high-numerical-aperture wavefronts
US7057737B2 (en) 2003-08-29 2006-06-06 4D Technology Corporation Common optical-path testing of high-numerical-aperture wavefronts
US6958817B1 (en) 2004-08-13 2005-10-25 Nanyang Technological University Method of interferometry with modulated optical path-length difference and interferometer
US10825163B1 (en) * 2019-06-13 2020-11-03 Viavi Solutions Inc. Automatically executing a test to inspect an end face of an optical fiber when an image is in focus
US11257202B2 (en) * 2019-06-13 2022-02-22 Viavi Solutions Inc. Automatically executing a test to inspect an end face of an optical fiber when an image is in focus

Also Published As

Publication number Publication date
DE3625609A1 (de) 1987-04-16
DE3622431A1 (de) 1987-02-19
CN85106007A (zh) 1987-02-25
CN85106007B (zh) 1988-03-02

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Owner name: SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS, A

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST.;ASSIGNORS:WU, SHUDONG;CHEN, XIANGZHEN;TAO, XIOU;REEL/FRAME:004621/0184

Effective date: 19860614

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LAPS Lapse for failure to pay maintenance fees
FP Lapsed due to failure to pay maintenance fee

Effective date: 19920809

STCH Information on status: patent discontinuation

Free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362