US4485759B1 - - Google Patents

Download PDF

Info

Publication number
US4485759B1
US4485759B1 US45890283A US4485759B1 US 4485759 B1 US4485759 B1 US 4485759B1 US 45890283 A US45890283 A US 45890283A US 4485759 B1 US4485759 B1 US 4485759B1
Authority
US
United States
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MULTI-ARC Inc A CORP OF DELAWARE
MULTI-ARC Inc A DELAWARE Corp
Original Assignee
ANDAL CORP A NEW YORK Corp
MULTI-ARC VACUUM SYSTEMS Inc A CORP OF NY
MULTI-ARC VACUUM SYSTEMS Inc A DELAWARE Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Assigned to MULTI-ARC VACUUM SYSTEMS, INC., A CORP. OF N.Y. reassignment MULTI-ARC VACUUM SYSTEMS, INC., A CORP. OF N.Y. ASSIGNMENT OF ASSIGNORS INTEREST. Assignors: BRANDOLF, HENRY E.
Priority to US06/458,902 priority Critical patent/US4485759A/en
Application filed by ANDAL CORP A NEW YORK Corp, MULTI-ARC VACUUM SYSTEMS Inc A CORP OF NY, MULTI-ARC VACUUM SYSTEMS Inc A DELAWARE Corp filed Critical ANDAL CORP A NEW YORK Corp
Priority to IN969/CAL/83A priority patent/IN161075B/en
Priority to GB08401381A priority patent/GB2133764B/en
Priority to JP59007913A priority patent/JPS59190359A/ja
Priority to DE3401815A priority patent/DE3401815C2/de
Application granted granted Critical
Publication of US4485759A publication Critical patent/US4485759A/en
Publication of US4485759B1 publication Critical patent/US4485759B1/en
Assigned to FIRST FIDELITY BANK, NATIONAL ASSOCIATION reassignment FIRST FIDELITY BANK, NATIONAL ASSOCIATION SECURITY INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: MULTI-ARC INC., A DELAWARE CORPORATION
Assigned to MULTI-ARC INC., A DELAWARE CORPORATION reassignment MULTI-ARC INC., A DELAWARE CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: ANDAL CORP. A NEW YORK CORPORATION
Assigned to FIRST UNION NATIONAL BANK reassignment FIRST UNION NATIONAL BANK SECURITY AGREEMENT Assignors: MULTI-ARC, INC.
Assigned to MULTI-ARC VACUUM SYSTEMS, INC., A DELAWARE CORPORATION reassignment MULTI-ARC VACUUM SYSTEMS, INC., A DELAWARE CORPORATION MERGER (SEE DOCUMENT FOR DETAILS). Assignors: MULTI-ARC VACUUM SYSTEMS, INC., A NEW YORK CORPORATION
Assigned to MULTI-ARC INC., A CORP. OF DELAWARE reassignment MULTI-ARC INC., A CORP. OF DELAWARE ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: ANDAL CORP., A CORP. OF NEW YORK
Assigned to ANDAL CORP., A NEW YORK CORPORATION reassignment ANDAL CORP., A NEW YORK CORPORATION MERGER (SEE DOCUMENT FOR DETAILS). Assignors: MULTI-ARC VACUUMSYSTEMS, INC., A DELAWARE CORP.
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
    • B05B13/02—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
    • B05B13/0221—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts
    • B05B13/0242—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts the objects being individually presented to the spray heads by a rotating element, e.g. turntable
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G29/00—Rotary conveyors, e.g. rotating discs, arms, star-wheels or cones
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
US06/458,902 1983-01-19 1983-01-19 Planetary substrate support apparatus for vapor vacuum deposition coating Expired - Fee Related US4485759A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
US06/458,902 US4485759A (en) 1983-01-19 1983-01-19 Planetary substrate support apparatus for vapor vacuum deposition coating
IN969/CAL/83A IN161075B (de) 1983-01-19 1983-08-03
GB08401381A GB2133764B (en) 1983-01-19 1984-01-19 Planetary substrate support apparatus for vapour vacuum depositing coating
JP59007913A JPS59190359A (ja) 1983-01-19 1984-01-19 真空蒸着装置の基体保持装置
DE3401815A DE3401815C2 (de) 1983-01-19 1984-01-19 Vorrichtung zum drehbaren Halten von durch physikalische Dampfabscheidung in einer evakuierten Kammer zu beschichtenden Substraten

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/458,902 US4485759A (en) 1983-01-19 1983-01-19 Planetary substrate support apparatus for vapor vacuum deposition coating

Publications (2)

Publication Number Publication Date
US4485759A US4485759A (en) 1984-12-04
US4485759B1 true US4485759B1 (de) 1987-02-10

Family

ID=23822551

Family Applications (1)

Application Number Title Priority Date Filing Date
US06/458,902 Expired - Fee Related US4485759A (en) 1983-01-19 1983-01-19 Planetary substrate support apparatus for vapor vacuum deposition coating

Country Status (5)

Country Link
US (1) US4485759A (de)
JP (1) JPS59190359A (de)
DE (1) DE3401815C2 (de)
GB (1) GB2133764B (de)
IN (1) IN161075B (de)

Cited By (54)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4589667A (en) * 1984-10-16 1986-05-20 Hewlett-Packard Company Vacuum compatible colleting spindle
US4620913A (en) * 1985-11-15 1986-11-04 Multi-Arc Vacuum Systems, Inc. Electric arc vapor deposition method and apparatus
US4745297A (en) * 1987-02-17 1988-05-17 Hoechst Celanese Corporation Specimen holder for holding specimen stubs to be coated in an ion-beam sputter coating unit
US4772356A (en) * 1986-07-03 1988-09-20 Emcore, Inc. Gas treatment apparatus and method
US4816133A (en) * 1987-05-14 1989-03-28 Northrop Corporation Apparatus for preparing thin film optical coatings on substrates
US4838983A (en) * 1986-07-03 1989-06-13 Emcore, Inc. Gas treatment apparatus and method
US5026469A (en) * 1989-07-01 1991-06-25 Leybold Aktiengesellschaft Apparatus for holding and turning eyeglass lenses in a high-vacuum vapor deposition or sputtering system
US5106346A (en) * 1990-08-14 1992-04-21 Leybold Aktiengesellschaft Planetary gear system with a set of gears, particularly for devices for coating substrates
US5529809A (en) * 1994-02-07 1996-06-25 Mse, Inc. Method and apparatus for spraying molten materials
US5679159A (en) * 1995-06-07 1997-10-21 Saint-Gobain/Norton Industrial Ceramics Corporation Spinning substrate holder for cutting tool inserts for improved arc-jet diamond deposition
US5762715A (en) * 1995-06-07 1998-06-09 Saint-Gobain/Norton Industrial Ceramics Corporation Segmented substrate for improved ARC-JET diamond deposition
US5855684A (en) * 1995-07-04 1999-01-05 Bergmann; Erich Method for the plasma assisted high vacuum physical vapor coating of parts with wear resistant coatings and equipment for carrying out the method
EP0892081A2 (de) * 1997-07-18 1999-01-20 Leybold Systems GmbH Vakuumbeschichtungsvorrichtung zum allseitigen Beschichten von Substraten durch Rotation der Substrate im Partikelstrom
US5913652A (en) * 1995-04-13 1999-06-22 Zejda; Jaroslav Conveying apparatus
EP0953656A2 (de) * 1998-04-29 1999-11-03 United Technologies Corporation Drehbarer Halter für Schaufelblätter
WO2000039037A1 (en) * 1998-12-23 2000-07-06 Antas S.P.A. Glass forming apparatus with improved carousel mechanism and method for control thereof
US6103074A (en) * 1998-02-14 2000-08-15 Phygen, Inc. Cathode arc vapor deposition method and apparatus
US6139964A (en) 1991-04-22 2000-10-31 Multi-Arc Inc. Plasma enhancement apparatus and method for physical vapor deposition
US6159290A (en) * 1998-10-02 2000-12-12 Shamrock Technology Corp. Apparatus for, and method of, providing controlled depositions on substrates
US6224673B1 (en) 1999-08-11 2001-05-01 General Electric Company Apparatus for masking turbine components during vapor phase diffusion coating
US6419753B1 (en) 2000-04-07 2002-07-16 General Electric Company Apparatus and method for masking multiple turbine components
US6490993B2 (en) * 1997-11-17 2002-12-10 Robert Bosch Gmbh Rotating device for plasma immersion supported treatment of substrates
US20030031792A1 (en) * 2001-07-27 2003-02-13 Applied Materials, Inc. Reduction of electrostatic charge on a substrate during PECVD process
US20040124080A1 (en) * 2002-12-27 2004-07-01 Yasuo Murakami Vacuum arc vapor deposition apparatus
US20040209001A1 (en) * 2003-01-10 2004-10-21 Anderson Curtis Wayne Spray coating apparatus and fixtures
US20040216675A1 (en) * 2003-04-30 2004-11-04 Canon Kabushiki Kaisa Deposited film forming method and apparatus
US20050005852A1 (en) * 2002-10-07 2005-01-13 Burns Steven M. Multiple axis tumbler coating apparatus
US20050238801A1 (en) * 2004-04-27 2005-10-27 Chia-Te Lin Method for fabricating an alignment layer for liquid crystal applications
US20060049044A1 (en) * 2004-08-20 2006-03-09 Jds Uniphase Corporation Substrate holder for a vapour deposition system
US20060081468A1 (en) * 2004-10-19 2006-04-20 Jds Uniphase Corporation Magnetic latch for a vapour deposition system
US20060193365A1 (en) * 2005-02-25 2006-08-31 Honeywell International Spacer for spacing preforms in a furnace and method for spacing preforms in a furnace using same
US20080006529A1 (en) * 2004-08-20 2008-01-10 Jds Uniphase Corporation Substrate Holder Assembly Device
US20090053422A1 (en) * 2007-08-24 2009-02-26 Strock Christopher W Masking fixture for a coating process
US20090162618A1 (en) * 2007-12-19 2009-06-25 Kojima Press Industry Co., Ltd. Sputtering apparatus and method for forming coating film by sputtering
US20090288601A1 (en) * 2000-10-17 2009-11-26 Nanogram Corporation Coating formation by reactive deposition
US20110036711A1 (en) * 2009-08-14 2011-02-17 Hon Hai Precision Industry Co., Ltd. Sputtering device
US20110174611A1 (en) * 2010-01-21 2011-07-21 Hon Hai Precision Industry Co., Ltd. Support device and coating device using same
US20110253523A1 (en) * 2010-04-16 2011-10-20 Hon Hai Precision Industry Co., Ltd. Sputtering apparatus and method
US20110268983A1 (en) * 2007-12-21 2011-11-03 Takeshi Shirato Film-forming treatment jig, plasma cvd apparatus, metal plate and osmium film forming method
US20110305833A1 (en) * 2008-12-15 2011-12-15 Guehring Ohg Apparatus for treating and/or coating the surface of a substrate component
DE102010047496A1 (de) * 2010-10-06 2012-04-12 Von Ardenne Anlagentechnik Gmbh Drehtellervorrichtung für Prozesskammer
US20130037214A1 (en) * 2011-08-11 2013-02-14 Hon Hai Precision Industry Co., Ltd. Curved glass sheet etching device
CN104465447A (zh) * 2013-09-17 2015-03-25 北京北方微电子基地设备工艺研究中心有限责任公司 载台升降装置、反应腔室及等离子体加工设备
US20150136029A1 (en) * 2013-11-18 2015-05-21 Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) Film deposition system
US9109289B2 (en) 2011-06-27 2015-08-18 United Technologies Corporation Manipulator for coating application
US9257319B2 (en) 2011-06-03 2016-02-09 Tel Nexx, Inc. Parallel single substrate processing system with alignment features on a process section frame
US9394605B1 (en) 2010-02-26 2016-07-19 Quantum Innovations, Inc. Vapor deposition system and method
CN104451586B (zh) * 2013-09-18 2017-02-08 北京北方微电子基地设备工艺研究中心有限责任公司 载台升降装置、反应腔室及等离子体加工设备
US20180016674A1 (en) * 2015-01-26 2018-01-18 Mitsubishi Materials Corporation Deposition apparatus and method for manufacturing coated cutting tool
US9947562B2 (en) 2005-08-05 2018-04-17 Applied Materials, Inc. Method and apparatus for processing semiconductor work pieces
US10752997B2 (en) * 2006-10-19 2020-08-25 P&S Global Holdings Llc Methods and apparatus for making coatings using ultrasonic spray deposition
US10808319B1 (en) 2010-02-26 2020-10-20 Quantum Innovations, Inc. System and method for vapor deposition of substrates with circular substrate frame that rotates in a planetary motion and curved lens support arms
US20220162745A1 (en) * 2017-12-22 2022-05-26 Raytheon Technologies Corporation Line-of-sight coating fixture and apparatus
CN115053010A (zh) * 2019-12-19 2022-09-13 欧瑞康表面处理解决方案股份公司普费菲孔 用于在基材表面加工期间保持基材的保持系统

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH057238Y2 (de) * 1987-04-23 1993-02-24
JPH0734928Y2 (ja) * 1988-07-19 1995-08-09 日新電機株式会社 処理物保持装置
DE4216311C1 (de) * 1992-05-16 1993-02-11 Vtd-Vakuumtechnik Dresden Gmbh, O-8017 Dresden, De
DE4325011A1 (de) * 1993-07-28 1995-03-02 Herlitz Michael Erweiterung von Entspiegelung wie bei Brillengläsern üblich auf Autoglasscheiben sowie weitere Kraftfahrzeuge und Verkehrsmittel, sowie alle anderen Silikat- und Kunststoffscheiben
US6491755B1 (en) * 2000-09-11 2002-12-10 Adac Plastics, Inc. Painting apparatus with compound rack
CN103266305A (zh) * 2013-06-04 2013-08-28 无锡启晖光电科技有限公司 一种可移位辐射源架及其工作方法
CN105327816B (zh) * 2015-11-30 2017-11-21 重庆明治百通机械制造股份有限公司 新型环保可升降旋转式喷涂房
CN111778490B (zh) * 2020-07-14 2022-10-21 北京北方华创微电子装备有限公司 半导体设备及其下电极组件
CN117646195B (zh) * 2024-01-30 2024-04-26 湖南德智新材料有限公司 支撑机构、支撑装置和薄膜制备设备

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT285998B (de) * 1968-04-01 1970-11-25 Siemens Ag Probenwechsler bei einem Röntgenspektralanalysengerät
GB1337424A (en) * 1970-10-08 1973-11-14 Rohe Scientific Corp Automated centrifuging apparatus
US3858547A (en) * 1973-12-14 1975-01-07 Nils H Bergfelt Coating machine having an adjustable rotation system
US3983838A (en) * 1975-12-31 1976-10-05 International Business Machines Corporation Planetary evaporator
US4108107A (en) * 1976-04-01 1978-08-22 Airco, Inc. Rotatable substrate holder for use in vacuum
GB1532281A (en) * 1977-06-24 1978-11-15 Morgan Fairest Ltd Labelling machines
DE2832778C2 (de) * 1978-07-26 1982-09-09 Jagenberg-Werke AG, 4000 Düsseldorf Träger für Flaschendrehteller in einer Etikettiermaschine
GB2045709A (en) * 1979-02-08 1980-11-05 Malkin & Co Ltd F Conveying articles through decorating apparatus
US4295903A (en) * 1979-05-17 1981-10-20 Phillips Petroleum Company Container spinning apparatus for container manufacturing machine or the like
JPS6059991B2 (ja) * 1981-02-27 1985-12-27 株式会社日立製作所 真空蒸着装置用自公転治具
JPS5853099U (ja) * 1981-10-06 1983-04-11 麒麟麦酒株式会社 物品の回転保持装置

Cited By (84)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4589667A (en) * 1984-10-16 1986-05-20 Hewlett-Packard Company Vacuum compatible colleting spindle
US4620913A (en) * 1985-11-15 1986-11-04 Multi-Arc Vacuum Systems, Inc. Electric arc vapor deposition method and apparatus
US4772356A (en) * 1986-07-03 1988-09-20 Emcore, Inc. Gas treatment apparatus and method
US4838983A (en) * 1986-07-03 1989-06-13 Emcore, Inc. Gas treatment apparatus and method
US4745297A (en) * 1987-02-17 1988-05-17 Hoechst Celanese Corporation Specimen holder for holding specimen stubs to be coated in an ion-beam sputter coating unit
US4816133A (en) * 1987-05-14 1989-03-28 Northrop Corporation Apparatus for preparing thin film optical coatings on substrates
US5026469A (en) * 1989-07-01 1991-06-25 Leybold Aktiengesellschaft Apparatus for holding and turning eyeglass lenses in a high-vacuum vapor deposition or sputtering system
US5106346A (en) * 1990-08-14 1992-04-21 Leybold Aktiengesellschaft Planetary gear system with a set of gears, particularly for devices for coating substrates
US6139964A (en) 1991-04-22 2000-10-31 Multi-Arc Inc. Plasma enhancement apparatus and method for physical vapor deposition
US5529809A (en) * 1994-02-07 1996-06-25 Mse, Inc. Method and apparatus for spraying molten materials
US5913652A (en) * 1995-04-13 1999-06-22 Zejda; Jaroslav Conveying apparatus
US5762715A (en) * 1995-06-07 1998-06-09 Saint-Gobain/Norton Industrial Ceramics Corporation Segmented substrate for improved ARC-JET diamond deposition
US5849228A (en) * 1995-06-07 1998-12-15 Saint-Gobain Norton Industrial Ceramics Corporation Segmented substrate for improved arc-jet diamond deposition
US5679159A (en) * 1995-06-07 1997-10-21 Saint-Gobain/Norton Industrial Ceramics Corporation Spinning substrate holder for cutting tool inserts for improved arc-jet diamond deposition
US5855684A (en) * 1995-07-04 1999-01-05 Bergmann; Erich Method for the plasma assisted high vacuum physical vapor coating of parts with wear resistant coatings and equipment for carrying out the method
EP0892081A2 (de) * 1997-07-18 1999-01-20 Leybold Systems GmbH Vakuumbeschichtungsvorrichtung zum allseitigen Beschichten von Substraten durch Rotation der Substrate im Partikelstrom
EP0892081A3 (de) * 1997-07-18 2002-05-08 Leybold Systems GmbH Vakuumbeschichtungsvorrichtung zum allseitigen Beschichten von Substraten durch Rotation der Substrate im Partikelstrom
US6490993B2 (en) * 1997-11-17 2002-12-10 Robert Bosch Gmbh Rotating device for plasma immersion supported treatment of substrates
US6103074A (en) * 1998-02-14 2000-08-15 Phygen, Inc. Cathode arc vapor deposition method and apparatus
EP0953656A2 (de) * 1998-04-29 1999-11-03 United Technologies Corporation Drehbarer Halter für Schaufelblätter
US5997947A (en) * 1998-04-29 1999-12-07 United Technologies Corporation Rotisserie fixture for coating airfoils
EP0953656A3 (de) * 1998-04-29 2002-05-29 United Technologies Corporation Drehbarer Halter für Schaufelblätter
US6159290A (en) * 1998-10-02 2000-12-12 Shamrock Technology Corp. Apparatus for, and method of, providing controlled depositions on substrates
WO2000039037A1 (en) * 1998-12-23 2000-07-06 Antas S.P.A. Glass forming apparatus with improved carousel mechanism and method for control thereof
US6224673B1 (en) 1999-08-11 2001-05-01 General Electric Company Apparatus for masking turbine components during vapor phase diffusion coating
US6579567B1 (en) 1999-08-11 2003-06-17 Nripendra N. Das Process for selectively masking turbine components during vapor phase diffusion coating
US6419753B1 (en) 2000-04-07 2002-07-16 General Electric Company Apparatus and method for masking multiple turbine components
US20020098284A1 (en) * 2000-04-07 2002-07-25 Wheat Gary E. Method for masking multiple turbine components
US6706323B2 (en) 2000-04-07 2004-03-16 General Electric Company Method for masking multiple turbine components
US20090288601A1 (en) * 2000-10-17 2009-11-26 Nanogram Corporation Coating formation by reactive deposition
US9163308B2 (en) * 2000-10-17 2015-10-20 Nanogram Corporation Apparatus for coating formation by light reactive deposition
US20030031792A1 (en) * 2001-07-27 2003-02-13 Applied Materials, Inc. Reduction of electrostatic charge on a substrate during PECVD process
US6827987B2 (en) * 2001-07-27 2004-12-07 Applied Materials, Inc. Method of reducing an electrostatic charge on a substrate during a PECVD process
US7311783B2 (en) * 2002-10-07 2007-12-25 United Technologies Corporation Multiple axis tumbler coating apparatus
US20050005852A1 (en) * 2002-10-07 2005-01-13 Burns Steven M. Multiple axis tumbler coating apparatus
SG108942A1 (en) * 2002-12-27 2005-02-28 Nissin Electric Co Ltd Vacuum arc vapor deposition apparatus
US7060167B2 (en) 2002-12-27 2006-06-13 Nissin Electrci Co., Ltd Vacuum arc vapor deposition apparatus
US20040124080A1 (en) * 2002-12-27 2004-07-01 Yasuo Murakami Vacuum arc vapor deposition apparatus
US20040209001A1 (en) * 2003-01-10 2004-10-21 Anderson Curtis Wayne Spray coating apparatus and fixtures
US7524537B2 (en) * 2003-01-10 2009-04-28 White Electronic Designs Corporation Spray coating apparatus and fixtures
US20040216675A1 (en) * 2003-04-30 2004-11-04 Canon Kabushiki Kaisa Deposited film forming method and apparatus
US20050238801A1 (en) * 2004-04-27 2005-10-27 Chia-Te Lin Method for fabricating an alignment layer for liquid crystal applications
US20080006529A1 (en) * 2004-08-20 2008-01-10 Jds Uniphase Corporation Substrate Holder Assembly Device
US7790004B2 (en) 2004-08-20 2010-09-07 Jds Uniphase Corporation Substrate holder for a vapour deposition system
US7954219B2 (en) 2004-08-20 2011-06-07 Jds Uniphase Corporation Substrate holder assembly device
US20060049044A1 (en) * 2004-08-20 2006-03-09 Jds Uniphase Corporation Substrate holder for a vapour deposition system
US20060081468A1 (en) * 2004-10-19 2006-04-20 Jds Uniphase Corporation Magnetic latch for a vapour deposition system
US7785456B2 (en) * 2004-10-19 2010-08-31 Jds Uniphase Corporation Magnetic latch for a vapour deposition system
US20060193365A1 (en) * 2005-02-25 2006-08-31 Honeywell International Spacer for spacing preforms in a furnace and method for spacing preforms in a furnace using same
US9947562B2 (en) 2005-08-05 2018-04-17 Applied Materials, Inc. Method and apparatus for processing semiconductor work pieces
US10752997B2 (en) * 2006-10-19 2020-08-25 P&S Global Holdings Llc Methods and apparatus for making coatings using ultrasonic spray deposition
US20090053422A1 (en) * 2007-08-24 2009-02-26 Strock Christopher W Masking fixture for a coating process
US8353259B2 (en) 2007-08-24 2013-01-15 United Technologies Corporation Masking fixture for a coating process
US8101055B2 (en) * 2007-12-19 2012-01-24 Kojima Press Industry Co., Ltd. Sputtering apparatus and method for forming coating film by sputtering
US20090162618A1 (en) * 2007-12-19 2009-06-25 Kojima Press Industry Co., Ltd. Sputtering apparatus and method for forming coating film by sputtering
US20110268983A1 (en) * 2007-12-21 2011-11-03 Takeshi Shirato Film-forming treatment jig, plasma cvd apparatus, metal plate and osmium film forming method
US9714468B2 (en) 2007-12-21 2017-07-25 Daiwa Techno Systems Co., Ltd. Film-forming method of an osmium film
US20110305833A1 (en) * 2008-12-15 2011-12-15 Guehring Ohg Apparatus for treating and/or coating the surface of a substrate component
US10711349B2 (en) 2008-12-15 2020-07-14 Guehring Kg Apparatus for treating and/or coating the surface of a substrate component
US20110036711A1 (en) * 2009-08-14 2011-02-17 Hon Hai Precision Industry Co., Ltd. Sputtering device
US20110174611A1 (en) * 2010-01-21 2011-07-21 Hon Hai Precision Industry Co., Ltd. Support device and coating device using same
US9580805B2 (en) 2010-02-26 2017-02-28 Quantum Innovations, Inc. Vapor deposition system and method
US11555237B1 (en) 2010-02-26 2023-01-17 Quantum Innovations, Inc. System and method for vapor deposition of substrates with circular substrate frame that rotates in a planetary motion and curved lens support arms
US10808319B1 (en) 2010-02-26 2020-10-20 Quantum Innovations, Inc. System and method for vapor deposition of substrates with circular substrate frame that rotates in a planetary motion and curved lens support arms
US9394605B1 (en) 2010-02-26 2016-07-19 Quantum Innovations, Inc. Vapor deposition system and method
US10550475B2 (en) 2010-02-26 2020-02-04 Quantum Innovations, Inc. Vapor deposition system
US10550474B1 (en) 2010-02-26 2020-02-04 Quantum Innovations, Inc. Vapor deposition system
US20110253523A1 (en) * 2010-04-16 2011-10-20 Hon Hai Precision Industry Co., Ltd. Sputtering apparatus and method
DE102010047496A1 (de) * 2010-10-06 2012-04-12 Von Ardenne Anlagentechnik Gmbh Drehtellervorrichtung für Prozesskammer
DE102010047496B4 (de) * 2010-10-06 2014-04-03 Von Ardenne Gmbh Drehtellervorrichtung für Prozesskammer
US9449862B2 (en) 2011-06-03 2016-09-20 Tel Nexx, Inc. Parallel single substrate processing system
US9508582B2 (en) 2011-06-03 2016-11-29 Tel Nexx, Inc. Parallel single substrate marangoni module
US9257319B2 (en) 2011-06-03 2016-02-09 Tel Nexx, Inc. Parallel single substrate processing system with alignment features on a process section frame
US9293356B2 (en) 2011-06-03 2016-03-22 Tel Nexx, Inc. Parallel single substrate processing system
US9109289B2 (en) 2011-06-27 2015-08-18 United Technologies Corporation Manipulator for coating application
US20130037214A1 (en) * 2011-08-11 2013-02-14 Hon Hai Precision Industry Co., Ltd. Curved glass sheet etching device
CN104465447A (zh) * 2013-09-17 2015-03-25 北京北方微电子基地设备工艺研究中心有限责任公司 载台升降装置、反应腔室及等离子体加工设备
CN104465447B (zh) * 2013-09-17 2017-07-21 北京北方微电子基地设备工艺研究中心有限责任公司 载台升降装置、反应腔室及等离子体加工设备
CN104451586B (zh) * 2013-09-18 2017-02-08 北京北方微电子基地设备工艺研究中心有限责任公司 载台升降装置、反应腔室及等离子体加工设备
US20150136029A1 (en) * 2013-11-18 2015-05-21 Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) Film deposition system
US20180016674A1 (en) * 2015-01-26 2018-01-18 Mitsubishi Materials Corporation Deposition apparatus and method for manufacturing coated cutting tool
US20220162745A1 (en) * 2017-12-22 2022-05-26 Raytheon Technologies Corporation Line-of-sight coating fixture and apparatus
US11702732B2 (en) * 2017-12-22 2023-07-18 Raytheon Technologies Corporation Line-of-sight coating fixture and apparatus
CN115053010A (zh) * 2019-12-19 2022-09-13 欧瑞康表面处理解决方案股份公司普费菲孔 用于在基材表面加工期间保持基材的保持系统

Also Published As

Publication number Publication date
IN161075B (de) 1987-10-03
GB8401381D0 (en) 1984-02-22
DE3401815A1 (de) 1984-07-19
GB2133764B (en) 1986-08-28
JPS59190359A (ja) 1984-10-29
US4485759A (en) 1984-12-04
GB2133764A (en) 1984-08-01
DE3401815C2 (de) 1985-10-24

Similar Documents

Publication Publication Date Title
US4485759B1 (de)
BR8407173A (de)
AU1412583A (de)
AU9008182A (de)
AU1299683A (de)
BR6301293U (de)
BG44897A1 (de)
BG44937A1 (de)
BG41847A1 (de)
BG43549A1 (de)
BG44566A1 (de)
BG44569A1 (de)
BG44583A1 (de)
BG44584A1 (de)
BG44586A1 (de)
BG44587A1 (de)
BG44648A1 (de)
BG44651A1 (de)
BG44655A1 (de)
BG44700A1 (de)
BG44760A1 (de)
BG44763A1 (de)
BG45370A1 (de)
BG44882A1 (de)
BG44938A1 (de)

Legal Events

Date Code Title Description
AS Assignment

Owner name: MULTI-ARC VACUUM SYSTEMS, INC., 261 EAST 5TH ST.,

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST.;ASSIGNOR:BRANDOLF, HENRY E.;REEL/FRAME:004086/0106

Effective date: 19830118

RR Request for reexamination filed

Effective date: 19850913

B1 Reexamination certificate first reexamination
FEPP Fee payment procedure

Free format text: PAYOR NUMBER ASSIGNED (ORIGINAL EVENT CODE: ASPN); ENTITY STATUS OF PATENT OWNER: SMALL ENTITY

FPAY Fee payment

Year of fee payment: 4

SULP Surcharge for late payment
REMI Maintenance fee reminder mailed
LAPS Lapse for failure to pay maintenance fees
FP Lapsed due to failure to pay maintenance fee

Effective date: 19921208

AS Assignment

Owner name: MULTI-ARC INC., A DELAWARE CORPORATION, NEW JERSEY

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:ANDAL CORP. A NEW YORK CORPORATION;REEL/FRAME:007197/0671

Effective date: 19940930

Owner name: FIRST FIDELITY BANK, NATIONAL ASSOCIATION, NEW JER

Free format text: SECURITY INTEREST;ASSIGNOR:MULTI-ARC INC., A DELAWARE CORPORATION;REEL/FRAME:007197/0677

Effective date: 19940930

AS Assignment

Owner name: FIRST UNION NATIONAL BANK, NEW JERSEY

Free format text: SECURITY AGREEMENT;ASSIGNOR:MULTI-ARC, INC.;REEL/FRAME:008215/0056

Effective date: 19960827

AS Assignment

Owner name: MULTI-ARC INC., A CORP. OF DELAWARE, NEW JERSEY

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:ANDAL CORP., A CORP. OF NEW YORK;REEL/FRAME:008559/0164

Effective date: 19940930

Owner name: ANDAL CORP., A NEW YORK CORPORATION, NEW YORK

Free format text: MERGER;ASSIGNOR:MULTI-ARC VACUUMSYSTEMS, INC., A DELAWARE CORP.;REEL/FRAME:008559/0153

Effective date: 19860227

Owner name: MULTI-ARC VACUUM SYSTEMS, INC., A DELAWARE CORPORA

Free format text: MERGER;ASSIGNOR:MULTI-ARC VACUUM SYSTEMS, INC., A NEW YORK CORPORATION;REEL/FRAME:008559/0988

Effective date: 19850114

STCH Information on status: patent discontinuation

Free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362