US4295808A - Apparatus for the production of high-purity metal powder by means of electron beam heating - Google Patents

Apparatus for the production of high-purity metal powder by means of electron beam heating Download PDF

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Publication number
US4295808A
US4295808A US06/085,155 US8515579A US4295808A US 4295808 A US4295808 A US 4295808A US 8515579 A US8515579 A US 8515579A US 4295808 A US4295808 A US 4295808A
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Prior art keywords
plate
spinning plate
spinning
electron beam
starting material
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US06/085,155
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English (en)
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Herbert Stephan
Hans Aichert
Joseph Heimerl
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Balzers und Leybold Deutschland Holding AG
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Leybold Heraeus GmbH
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00—Making metallic powder or suspensions thereof
    • B22F9/02—Making metallic powder or suspensions thereof using physical processes
    • B22F9/14—Making metallic powder or suspensions thereof using physical processes using electric discharge
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00—Making metallic powder or suspensions thereof
    • B22F9/02—Making metallic powder or suspensions thereof using physical processes
    • B22F9/06—Making metallic powder or suspensions thereof using physical processes starting from liquid material
    • B22F9/08—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying
    • B22F9/10—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying using centrifugal force
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00—Making metallic powder or suspensions thereof
    • B22F9/02—Making metallic powder or suspensions thereof using physical processes
    • B22F9/06—Making metallic powder or suspensions thereof using physical processes starting from liquid material
    • B22F9/08—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying
    • B22F9/082—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying atomising using a fluid
    • B22F2009/084—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying atomising using a fluid combination of methods

Definitions

  • the invention relates to an apparatus for producing high-purity metal powder by the electron beam melting of bars of material in a vacuum, momentarily catching the molten material on a plate spinning at high speed from which particles of the material are flung and then solidified by the removal of heat.
  • Metal powders are required for a number of purposes, of which only sintered metal products and surface coatings will be mentioned here by way of example.
  • a number of superalloys can be produced with satisfactory material characteristics only if they are made from powdered metals.
  • the metal powder that is produced In order to achieve optimum properties in the finished product it is necessary that the metal powder that is produced have a very precise particle size spectrum.
  • the metal powder must be produced in a very pure state and must contain no products of reaction with atmospheric oxygen or other reactive gases when it enters the sintering process. Hollow spheres and foreign substances in and between the particles are to be avoided. In particular the powder particles must be free of oxide coatings.
  • the electron beam heating system must be provided with the high vacuum of 10 -4 bar and less that is needed for the unhampered flight of the electrons.
  • German "Auslegeschrift” No. 1,291,842 discloses a method of producing metal powder by means of electron beams, in which the rod which is to be made into powder is itself rotated at high speed. The end of the rod is bombarded with electron beams such that molten particles are flung outwardly by centrifugal force. On account of the relationship between the diameter of the rod and the flight path or cooling rate of the particles, and hence the volume of the vacuum chamber, the spinning rod can have only a limited diameter. For a specific amount of the powder, therefore, the apparatus has to be fed either with a rod of sufficient length or with a number of short rods.
  • German Pat. No. 1,280,501 and German “Auslegeschrift” 1,565,047 furthermore disclose methods for the production of metal powder by electron bombardment, in which the molten metal drops onto the vibrating surface of a receiver vibrating at high or ultrasonic frequency.
  • the production capacity of such an installation is very limited, since the vibrating receiver can be fed only a very small amount of molten metal per unit of time.
  • metal powders having a broad particle size distribution are produced. Above all, however, the vibrating receiver propagates the metal particles in uncontrolled directions, so that the receiver must be located substantially in the center of the vacuum chamber which must be dimensioned accordingly.
  • the flight paths of the metal particles in all directions again determine the size and shape of the vacuum chamber. Premature collision between the still hot metal particles results in a caking or sintering of the particles.
  • German "Auslegeschrift” No. 1,783,089 discloses a process of the initially described kind, in which the molten metal impinges upon a plate which is spinning at a high speed.
  • the metal particles produced by centrifugal force are flung from the entire circumference of the plate.
  • Solidification by removal of heat is accomplished in this case by a cooling jacket surrounding the spinning plate in very close proximity thereto, so that the early impingement of the molten particles upon this cooling jacket results in the production of virtually naught but flake-like granules. Even so, the volume of the vacuum chamber cannot be reduced to the desired extent.
  • the invention is addressed to the object of providing an apparatus whereby metal particles of substantially spherical shape can be produced at a given rate, whose diameter will be within an extremely precise and controllable range of tolerance, and in which the vacuum chamber can be given a minimal volume even though the metal particles are cooled exclusively by radiation losses during free flight.
  • the object of the invention is accomplished in conjunction with the initially described process by bombarding the metal on the spinning plate with an electron beam that is so focussed and periodically deflected that its focal point is many times smaller than the diameter of the spinning plate, and moves back and forth between the rotational center of the spinning plate and the margin thereof so that it scans the spinning plate over an area that is small in relation to the diameter of the plate and extends radially of the axis of rotation of the plate, and the withdrawal of heat to the point of solidification is accomplished substantially by radiation loss.
  • the basis of the invention is the surprising discovery that the metal particles, in the application of the invention, are released from the spinning plate only within a narrow angular range whose position is stable, while the remaining portion of the circumference of the spinning plate does not serve for the release of metal particles.
  • the position and the size of this angular area remain unvaried, i.e., stable, but they can be controlled within certain limits by the location and intensity of the bombardment and by the shape of the spinning plate and its rotatory speed.
  • This discovery was not foreseeable and it is to be attributed to the closely defined area of the spinning plate or of the metal thereon which is bombarded with electron beam energy.
  • the measures and means for the focusing and periodic deflection of an electron beam are state of the art and therefore are not explained in greater detail herein.
  • the focusing for example, is accomplished by means of an electromagnetic lens system.
  • the periodical deflection of the electron beam is made possible, for example, by at least one deflection system consisting of a magnetic core with a winding, in which the winding is energized periodically by different deflection voltages.
  • the precision that can be achieved today in the focusing and deflection of electron beams is so great that the method described, namely the bombardment of the spinning plate within a very closely defined zone, is entirely practicable. Additional details will be given in the description given below.
  • the advantage is achieved that the volume of the vacuum chamber and hence the evacuation time and the size of the pumping system required can be considerably reduced. Since the angle within which the metal particles are flung from the spinning plate is between about 30 degrees and a maximum of 90 degrees, the chamber volume, the pumping system and hence the investment costs connected with the vacuum chamber can be reduced to approximately one-eighth of the original amount. With regard to the smaller chamber volume, the advantage of the savings in construction cost and in weight results especially from the fact that the strength of the chamber walls can be kept sufficiently great in spite of considerable reduction in wall thickness.
  • the additional advantage achieved is that, due to the precise energetic conditions prevailing on the surface of the spinning plate, spherical metal particles are produced whose diameter is comprised within a very precise tolerance range.
  • the average sphere diameter will be in accordance with the following equation: ##EQU1## wherein c is a constant which depends on the surface tension of the material and can be found in tables; n is the rotatory speed of the spinning plate and D is its diameter. From this it can be seen that the average sphere diameter can be influenced by the appropriate choice of the rotatory speed of the spinning plate and its diameter. Common diameters for such a spinning plate are approximately from 70 to 150 mm.
  • the spinning plate is driven at a speed between 3,600 and 15,000 rpm, and if the electron beam is deflected periodically at a frequency between 30 and 100 Hz, and if the focal spot diameter is between one-tenth and one one-hundredth of the diameter of the spinning plate.
  • the relationship between the rotatory speed and the deflection frequency is to be understood to mean that the lower frequency is to be associated with the lower spinning plate speed.
  • the timing of the deflection voltage which determines the location of the focal spot and the time for which it dwells on a particular location, is to be selected on the basis of bombarding the spinning plate with the same thermal power per unit of surface area.
  • Particularly simple conditions, and conditions which are easy to achieve as regards the system of electrical control can be created by controlling the beam deflection by increasing the deflection voltage in steps such that the briefly dwelling focal spots will be arrayed radially of the axis of rotation of the spinning plate, and if the relative dwell time increases with the distance of the spot from the axis of rotation.
  • An especially advantageous further development of the method of the invention is characterized in that the metal melted from the rod-like starting material is fed to the spinning plate through an electron beam heated intermediate reservoir.
  • This intermediate reservoir creates the possibility of compensating the various rates at which the starting material drips from the rod by providing a storage reservoir, superheating the molten metal at least locally, and increasing the refining action through longer residence times.
  • the intermediate reservoir thus also permits better control of the process as well as the settling out of unfusible impurities.
  • An additional advantage is achieved if the solidified metal powder is fed to a powder container by means of a transport system operating on the principle of the jogging conveyor.
  • a conveyor of the type known as the spiral conveyor has proven especially suitable for this purpose.
  • the jogging conveyor can not only contribute to a more rapid cooling of the powder by drawing heat from it to the surroundings, but also it can more reliably prevent any sintering together of the surfaces by imparting a vibratory movement to the powder.
  • the rod-like starting material is fed downwardly, to obtain the special advantage of being able to rotate the rod at a low rotatory speed during the melting thereof, namely at speeds between about 5 and 20 revolutions per minute.
  • This brings about not only a more uniform melting away of the starting material, which constitutes a fusing electrode, but also makes it possible by means of a single electron gun to melt rods having a considerably greater diameter than the spinning plate. Due to the constant rotation of the rod, an apex is formed on the latter, which, if the spinning plate and rod are in coaxial alignment, will be located directly over the center of the spinning plate.
  • the molten droplets will at first run down the conical lower surface of the rod to the tip or apex of the cone, from which they will then fall in the form of drops or a thin stream.
  • the use of a starting material in the form of rods of large diameter has the advantage that the powder producing apparatus will have to be charged less frequently.
  • An apparatus for the performance of the conventional process is described, for example, in German "Auslegeschrift” No. 1,783,089. It consists of a vacuum chamber, a system for holding and feeding the starting material in rod form, at least one electron beam generator, a spinning plate disposed in the path of the falling molten metal, a drive for the spinning plate, and a powder collecting container.
  • An apparatus of this kind for the performance of the process of the invention is characterized, in accordance with the further invention, in that the spinning plate is disposed eccentrically in the vacuum chamber, that the vacuum chamber is in the form of a lateral pocket adjoining the space about the spinning plate, the dimensions and shape of the pocket being adapted to the flight paths of the metal particles until the latter solidify, and that a deflection control unit is associated with the electron beam generator, whereby the spinning plate is scanned by the beam in such a spatial relationship to the pocket that the flight paths of the metal particles all run within the pocket.
  • the lateral pocket will have a shape corresponding approximately to that of a slice of pie, the spinning plate being located at the tip of the slice. It is in this manner that the extremely great reduction is achieved in the bulk and investment cost of such an installation.
  • the area scanned on the spinning plate can be controlled by varying the deflection voltage--or voltages in the case of composite deflection systems--and by simple trial and error.
  • FIG. 1 is a vertical cross-sectional view taken along the axes of the starting material and spinning plate through a diagrammatically represented complete apparatus, on the line I--I of FIG. 2,
  • FIG. 2 is a horizontal cross-sectional view taken along line II--II of FIG. 1,
  • FIG. 3 is a vertical cross-sectional view like FIG. 1 but of an apparatus which is equipped with an intermediate reservoir between the starting material and the spinning plate, and also with a system for the transport of the metal powder,
  • FIG. 4 is a vertical cross-sectional view taken through the axis of rotation of a spinning plate along line IV--IV in FIG. 5, on a substantially larger scale than in FIG. 1, and
  • FIG. 5 is a top plan view of the subject of FIG. 4.
  • the spinning plate has on its upper side a substantially cup-shaped central recess whose rim adjoins a substantially hollow conical marginal area having a slight upward slope " ⁇ " which is slightly less steep than the slope immediately below the rim of the central cup.
  • the configuration of the spinning plate will then be somewhat similar to that of a soup plate.
  • the recess be made in a replaceable top portion of the spinning plate, and that the receptacle for the top portion be provided with passages for coolant. It is especially desirable that the top portion be made of the same material as the powder.
  • a vacuum chamber 10 with which there is associated a holding and advancing device 11 constructed as an electrode shank for starting material 12 in rod form. Since this starting material must be included in the circuit of the corresponding electron beam gun, it is also referred to as a fusing electrode.
  • a pressure gradient system for the passthrough of the electrode shank is identified as 13 and is associated with a drive system 14.
  • an extension chamber 15 which surrounds the starting material 12 and consequently can be referred to also as an electrode chamber.
  • a shut-off valve 16 Between the vacuum chamber 10 and the extension chamber 15 there is a shut-off valve 16, so that the extension chamber 15 can serve as a material loading airlock.
  • the starting material rod 12 Under the action of the drive 14, the starting material rod 12 performs a movement composed of advancement and rotation, the rate of advancement being governed by the rate at which the starting material melts away. Underneath the central axis or axis of rotation of the starting material rod 12 there is a spinning plate 17 which consists of a replaceable top portion 18 made of the same material as the starting material, as well as a rotating receptacle 19 for accommodating the top portion 18.
  • the receptacle 19 is affixed on a shaft 20 which can be raised to a high rotatory speed by a drive means 21 which is an electric motor.
  • the shaft 20 is passed into the vacuum chamber through a vacuum seal 22, a bearing 23 and a cooling water connecting head 24.
  • Adjacent the starting material 12 and the spinning plate 17 are two electron beam generators 25 and 26 of known construction, which are equipped with systems not further described for the focusing and deflection of one electron beam each.
  • the electron beam generator 25 serves for melting away the rod-like starting material 12 and for the distribution of the molten metal on the spinning plate 17.
  • the electron beam generator 26 performs the function of the invention, i.e., it directs against the metal on the spinning plate an electron beam which is so focused and periodically deflected that its focal spot is many times smaller than the diameter of the spinning plate, and that the beam deflection between the center of rotation of the spinning plate and its outer margin 50 (see FIG.
  • This radial zone includes areas 47 and 49 (see FIG. 4), and extends perpendicular to the plane of FIG. 1, between the axis of rotation and the marginal area of the spinning plate nearest the observer.
  • an electron beam programming apparatus 27 is provided for the proper control or regulation of the electron beam generators 25 and 26, an electron beam programming apparatus 27 is provided.
  • the electron beam generators are provided with power from a high voltage apparatus 28.
  • a pump system for the production of the working vacuum required in the vacuum chamber 10 is generally designated at 29. Such apparatus are also state of the art and therefore are not further described.
  • FIGS. 1 and 2 From FIGS. 1 and 2 it can be seen that the parts of the apparatus described up to this point are located, along with the starting material to be made into powder, within a relatively small, lateral extension of the vacuum chamber 10, i.e., they are disposed eccentrically in the vacuum chamber.
  • the largest part of the vacuum chamber 10 is in the form of a pocket which laterally adjoins the space around the spinning plate 17, the dimensions and shape of the pocket being designed to accommodate the flight paths 30 of the metal particles until they solidify.
  • the flight paths 30 are clearly indicated in FIGS. 1 and 2; they diverge with increasing distance from the spinning plate 17 and fill an approximately wedge-shaped space having a relatively small aperture angle. This space is adapted to the cross section of the vacuum chamber 10 and to its lateral pocket.
  • the vacuum chamber 10 continues downwardly through an approximately conical or pyramidal prolongation 31 which serves as a means of guiding the falling or rolling metal powder 32.
  • a shut-off valve 33 At the lowermost point of the prolongation 31 is a shut-off valve 33 below which is a powder collector 34.
  • the shutoff valve 33 enables the vacuum chamber 10 to be shut off and the powder collector 34 to be removed and emptied.
  • the powder making apparatus is expanded as follows:
  • the starting material 12' in rod form is fed, not vertically downward as in FIG. 1, but horizontally from left to right.
  • a feeding system 35 in the form of transport rolls which are driven at a speed corresponding to the rate of ablation of the metal.
  • a water-cooled intermediate reservoir 36 in the form of a shallow trough having an overflow spout 37 is disposed beneath the end at which the metal is melted.
  • an electron beam generator 38 which serves for melting the starting material 12' and for keeping the puddle of metal 39 in intermediate reservoir 36 in the molten state.
  • Starting material 12', advancing system 35, intermediate reservoir 36 and electron beam generator 38 are housed within a fusion chamber 40 which has the smallest possible volume and laterally adjoins the vacuum chamber 10'.
  • the molten metal passes into the vacuum chamber 10' through an overflow spout 37 beneath which the spinning plate 17 is disposed. Only one narrow connection between the fusion chamber 40 and the vacuum chamber 10' is provided in the area of the overflow spout, so that splashes of metal cannot enter the powder producing chamber and contaminate the powder.
  • An additional electron beam generator 41 is associated with the overflow spout 37 and serves to keep the metal running from the intermediate reservoir 36 onto the spinning plate 17 in the molten state.
  • High voltage apparatus 28' is provided for powering and electron beam programming apparatus 27' is provided for controlling the beam generators 25, 41 and 38.
  • the prolongation 31' of the vacuum tank 10' is also of conical or truncated pyramid shape and, unlike the one in FIG. 1, it empties into a transport apparatus 42 in the form of a spiral conveyor and, on the basis of rotatory oscillatory movements conveys the metal powder 32 upwardly along a helical path. The metal powder is then carried by a transverse trough 43 through the shutoff valve 33' into the powder container 34'. Details of the spiral conveyor pertain to the state of the art.
  • the spinning plate consists of the replaceable top part 18 which is joined by a dovetail 44 to the table 19.
  • the table 19 has a coolant passage 45 connected to the hollow shaft 20 through the water connection head 24.
  • the division into inflow and outflow channels is created by means of the concentrically inserted tube 46.
  • top part 18 On the top of the top part 18 there is provided a substantially cup-shaped central recess 47 whose rim 48 adjoins a marginal area 49 of substantially the shape of an inverted, truncated hollow cone.
  • the top part 18 is chamfered on its outer circumferential edge, and thus forms a truncoconical outer margin 50.
  • the radius of the recess is marked R, and its diameter D i .
  • the outside diameter is D a .
  • the slope angle ⁇ of the marginal area 49 is given, as is the slope angle ⁇ of the outer margin 50.
  • the range of these magnitudes for design purposes are given in the general description of the invention.
  • the angle ⁇ can be selected between 5 and 60 degrees, but preferably and in the present case it is 15 degrees.
  • Angle ⁇ can be between 45 and 90 degrees, but in the present case it is preferably 50 degrees. It is possible, of course, to omit the chamfering and refrain from forming any special outer margin 50.
  • the mechanism of the operation of the controlled spinning off of the metal particles will be further explained with reference to FIG. 5:
  • the beam deflection is produced by the step-wise increasing of the deflection voltage such that the briefly dwelling focal spots will be arrayed in rows extending radially of the axis of rotation of the spinning plate.
  • the amplitude or distance swept by the focal point is indicated in FIG. 5 by the double-headed arrow 51.
  • With respect to the rotating spinning plate the individual focal spots 54 will be in the positions indicated by hatching diagonally upward from right to left. It can be seen that the relative dwell time of the focal spot is made longer as the distance from the axis of rotation increases.
  • the take-off bases for the flight of the individual metal particles are indicated by the small circles 52 in the area of the outer margin 50.
  • the flight paths of the metal particles will be as represented by the droplets leaving from point P and having an angular range ⁇ .
  • the focusing of the electron beam is selected such that the focal spot is many times smaller than the diameter of the spinning plate.

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US06/085,155 1975-06-28 1979-10-15 Apparatus for the production of high-purity metal powder by means of electron beam heating Expired - Lifetime US4295808A (en)

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DE2528999A DE2528999C2 (de) 1975-06-28 1975-06-28 Verfahren und Vorrichtung zur Herstellung von hochreinem Metallpulver mittels Elektronenstrahlbeheizung
DE2528999 1975-06-28

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US05/902,475 Division US4218410A (en) 1975-06-28 1978-05-03 Method for the production of high-purity metal powder by means of electron beam heating

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US (1) US4295808A (cs)
JP (1) JPS525659A (cs)
AR (1) AR213094A1 (cs)
AT (1) AT357006B (cs)
BR (1) BR7603714A (cs)
CA (1) CA1077210A (cs)
CS (1) CS193076B2 (cs)
DD (1) DD123932A1 (cs)
DE (1) DE2528999C2 (cs)
FR (1) FR2317040A1 (cs)
GB (1) GB1503635A (cs)
NL (1) NL7605120A (cs)
SE (1) SE406282B (cs)
SU (1) SU860683A1 (cs)

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US5093602A (en) * 1989-11-17 1992-03-03 Charged Injection Corporation Methods and apparatus for dispersing a fluent material utilizing an electron beam
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US5171358A (en) * 1991-11-05 1992-12-15 General Electric Company Apparatus for producing solidified metals of high cleanliness
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WO2018053572A1 (en) * 2016-09-23 2018-03-29 Aurora Labs Limited Apparatus and process for forming powder
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US10315273B2 (en) * 2015-08-11 2019-06-11 Disco Corporation Laser processing apparatus
US10689196B2 (en) 2012-10-10 2020-06-23 Xyleco, Inc. Processing materials
CN119733839A (zh) * 2024-12-26 2025-04-01 郑州大学 一种电子束熔炼-超声雾化制粉系统及方法

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DE3024752A1 (de) * 1980-06-30 1982-02-11 Leybold-Heraeus GmbH, 5000 Köln Anlage zur metallpulverherstellung mit zwischenpfanne
US4435342A (en) * 1981-11-04 1984-03-06 Wentzell Jospeh M Methods for producing very fine particle size metal powders
DE3211861A1 (de) * 1982-03-31 1983-10-06 Leybold Heraeus Gmbh & Co Kg Verfahren und vorrichtung zur herstellung von hochreinen keramikfreien metallpulvern
JPS58210104A (ja) * 1982-06-01 1983-12-07 Ulvac Corp 金属粉の製造法
FR2545202B1 (fr) * 1983-04-29 1989-04-07 Commissariat Energie Atomique Procede et dispositif de refroidissement d'un materiau et application a l'elaboration de materiaux refractaires par trempe
GB2142046B (en) * 1983-06-23 1987-01-07 Gen Electric Method and apparatus for making alloy powder
JPS60162703A (ja) * 1984-02-04 1985-08-24 Agency Of Ind Science & Technol 金属粉末の製造方法
RU2173609C1 (ru) * 2000-06-07 2001-09-20 Открытое акционерное общество "Всероссийский институт легких сплавов" Способ получения порошков высокореакционных металлов и сплавов и устройство для его осуществления
CA2729224C (en) 2008-06-27 2016-04-12 Commonwealth Scientific And Industrial Research Organisation Rotary atomiser for atomising molten material
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WO1984002864A1 (en) * 1983-01-24 1984-08-02 Gte Prod Corp Method for making ultrafine metal powder
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US4759887A (en) * 1985-05-24 1988-07-26 Heliotronic Forschungs- und Entwicklungs-gesellschaft fur Solarzellen-Grundstoffe mbH Apparatus and process for the manufacture of shaped bodies from silicon granulates
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US5268018A (en) * 1991-11-05 1993-12-07 General Electric Company Controlled process for the production of a spray of atomized metal droplets
US20110011207A1 (en) * 2007-12-10 2011-01-20 The Boeing Company Metal powder production system and method
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US8343394B2 (en) 2008-10-02 2013-01-01 Gap Engineering LLC Pyrospherelator
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GB2500039A (en) * 2012-03-08 2013-09-11 Siemens Plc Rotary slag granulator with an annular metal disc and central cylinder containing plug of refractory material
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CN109202095A (zh) * 2018-11-09 2019-01-15 中国工程物理研究院机械制造工艺研究所 基于电子束熔化的金属材料离心制粉方法
CN119733839A (zh) * 2024-12-26 2025-04-01 郑州大学 一种电子束熔炼-超声雾化制粉系统及方法

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FR2317040A1 (fr) 1977-02-04
DE2528999A1 (de) 1977-01-27
NL7605120A (nl) 1976-12-30
FR2317040B1 (cs) 1982-05-21
CS193076B2 (en) 1979-09-17
AT357006B (de) 1980-06-10
DD123932A1 (cs) 1977-01-26
SE7605657L (sv) 1976-12-29
BR7603714A (pt) 1977-01-25
SE406282B (sv) 1979-02-05
SU860683A1 (ru) 1981-08-30
GB1503635A (en) 1978-03-15
JPS525659A (en) 1977-01-17

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