US4045594A - Planar insulation of conductive patterns by chemical vapor deposition and sputtering - Google Patents

Planar insulation of conductive patterns by chemical vapor deposition and sputtering Download PDF

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US4045594A
US4045594A US05/645,772 US64577275A US4045594A US 4045594 A US4045594 A US 4045594A US 64577275 A US64577275 A US 64577275A US 4045594 A US4045594 A US 4045594A
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insulating film
forming
conductive
apertures
layer
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Fred Sterns Maddocks
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International Business Machines Corp
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International Business Machines Corp
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Priority to FR7636398A priority patent/FR2337429A1/fr
Priority to GB50820/76A priority patent/GB1502230A/en
Priority to JP14792976A priority patent/JPS5284002A/ja
Priority to DE19762655937 priority patent/DE2655937A1/de
Priority to IT30662/76A priority patent/IT1070028B/it
Priority to CA268,532A priority patent/CA1055616A/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics

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  • This invention relates to conductive layers formed atop substrates, e.g., semiconductor structures.
  • it relates to a method for forming a layer, or layers, of metallization so that the insulating layer covering each layer of metal is substantially planar with respect to the substrate.
  • the film In the usual methods of forming thin film integrated semiconductor circuits containing passivating or insulating films over raised conductive line patterns on a substrate, the film ordinarily follows the contours of the underlying metallization pattern.
  • the insulating layer has raised portions or elevations corresponding to the pattern.
  • the elevated portions formed by the conductive lines at the locations where insulation passes over or under the lines are a principal cause of pinholes and stress cracks in the insulation layer as well as pinholes in the metallization.
  • the effect is cumulative and increases with the number of metallurgical levels atop the semiconductor.
  • Copending application Ser. No. 103,250 of R. P. Auyang et al, filed Dec. 31, 1970, and assigned to the assignee of the present invention, relates to a method for solving this problem.
  • the insulating layer is sputtered quartz and the invention is a novel method for removing all elevations from the deposited quartz by resputtering to completely planarize the surface of the layer.
  • the Auyang et al., technique has been eminently successful. However, it is time consuming; and planarization by resputtering alone is limited by the width of the metallic land pattern.
  • R. F. resputtering may take as much as 24 hours of R. F. resputtering to completely planarize a conventional quartz layer deposited over a raised metallization pattern having stripes of standard width, say 300 to 1500 microinches.
  • R. F. resputtering may not completely planarize the layer effectively.
  • the resputtering may then be supplemented by a conventional chemical etching step on extremely wide stripes. This adds to the number of process steps required, hence to the cost of manufacturing.
  • the passivation and insulation properties of sputtered quartz are not as good as desired.
  • sputtering equipment is complicated and expensive.
  • an insulator such as silicon dioxide (SiO 2 ) is deposited atop a substrate.
  • a photoresist material which can be subsequently removed without affecting the SiO 2 is deposited atop the surface.
  • the photoresist is developed to form a mask; and the photoresist and the SiO 2 are then etched to form windows for a conductive pattern, typically metal.
  • the metal is then deposited in blanket fashion atop the photoresist as well as within the windows. For subsequent planarity, the metallization must be deposited so as to be substantially flush or planar with respect to the insulating layer.
  • the photoresist is then lifted off, thereby leaving metal in the windows only.
  • the pattern as this point consists of a single level of metallic lines or stripes and a complementary insulator pattern. By the nature of the process, there are gaps between the metal and the insulator.
  • a second insulating film such as SiO 2 is chemically vapor deposited in blanket fashion atop the structure. If the thickness of this second insulator equals or exceeds one-half the width of the largest of said gaps, a substantially planar layer results. Planarity depends on the phenomenon that the insulator formed by the second deposition grows normal with respect to the surfaces of the first level insulation and metal, irrespective of the fact that the angles within the gaps are not parallel to the substrate. Methods for forming multiple levels of planar insulation by substantially the same technique are also described.
  • the metallization deposited is of the high temperature type, such as Pt, Cr, Ta or W, then a high-temperature CVD process may be used. However, if the metallization is of the low temperature type, such as Al, then a low-temperature CVD process must be used.
  • FIGS. 1A-1G are diagrammatic cross-sectional views of a structure being fabricated in accordance with the preferred embodiment of the present invention.
  • the figures include a flow chart describing briefly each of the steps.
  • FIG. 2 is an expanded view of a gap between the metallic pattern and the initially deposited insulating layer which illustrates the growth of the second insulating layer as being normal, rather than vertical, with respect to the sides of the metal and first insulating layer.
  • FIG. 3 and 4 illustrate alternate embodiments of the formation of multiple levels of metallization atop a semiconductor structure in accordance with my invention.
  • a composite layer of silicon dioxide 4 and silicon nitride 6 as a diffusion mask is formed on a silicon semiconductor substrate 2.
  • the thickness of conjoint layer 4/6 with respect to the layers to be deposited subsequently is insignificant. Typically, the thickness is around 0.18 micrometers.
  • Apertures 5 are formed in the composite layer to provide contact openings to the semiconductor substrate.
  • the substrate contains active regions of semiconductor impurities for the formation of transistors, diodes, resistors, and the like. These are not illustrated because in themselves they form no part of my invention and are quite conventional in the art.
  • conjoint layer 4/6 and the etching of windows therein is also quite conventional at this point in the semiconductor art. It is well known to use a conjoint layer of silicon dioxide and silicon nitride as a diffusion mask. Moreover, my invention is in no way limited to the use of a conjoint layer for such purposes. Any other passivating material known to the art which may be used as a diffusion mask, such as silicon dioxide alone or aluminum oxide, may be used for this purpose.
  • an insulating layer 8 which is preferably glass (SiO 2 ), is blanket deposited atop the surface of silicon nitride 6 as well as in the contact openings 5.
  • the thickness of layer 8 is typically around 0.9 ⁇ 0.05 micrometers.
  • Glass layer 8 may be deposited by conventional chemical vapor deposition (CVD) or RF or DC sputtering techniques which are now well known to those of the skill in the art. Chemical vapor deposition is also termed pyrolytic deposition.
  • layer 8 may also be formed by standard sputtering techniques or any other known method. It is most conveniently done by a chemical vapor deposition, because the subsequent deposition of another insulation layer must be done by chemical vapor deposition to fall within the scope of my invention.
  • the thickness of silicon dioxide layer 8 is around 0.9 micrometers, but it could be larger.
  • the thickness of this layer although it may encompass a large range, must be known so that the subsequently deposited metallic pattern is substantially planar or flush therewith. The accurate thickness measurement of this film is quite standard in the art.
  • Photoresist 10 may be any conventional photoresist which is sensitive to actinic rediation or to an electron beam. I prefer to use types known as AZ 1350J or AZ 111 both of which are available from the Shipley Company.
  • the photoresist is for the purpose both of forming contact openings to substrate 2 as well as metallization patterns atop the composite insulator 4/6.
  • the technique for doing so comprises exposing and developing the photoresist to form a mask as shown in FIG. 1D.
  • the developed mask covers the entire glass layer 8 except for windows 11, 12, and 13 where metallization is subsequently to be deposited. This is followed by etching glass layer 8 with a conventional etchant such as buffered HF. As a result, apertures corresponding to the windows are formed in glass layer 8.
  • FIG. 1E metallization is deposited by chemical vapor deposition techniques to form both a blanket layer 14 atop the photoresist layer 10 as well as contacts 16 and conductive land 18 within openings 11, 12, 13 respectively.
  • Land 18 is a metallic stripe.
  • Conductive film 14 may consist of any conventional metal used in integrated circuits, such as aluminum, aluminum-copper alloys, platinum, palladium, chromium, molydenum, etc.
  • lift-off removal techniques are used to remove photoresist layer 10. Lift-off may be accomplished by immersing the photoresist in a solvent for about 15 to 30 minutes. Those portions of metallic film 14 dispose atop photoresist layer 10 are also washed away. Other solvents such as trichloroethylene, ethyl methyl ketone, or acetone may be used.
  • FIG. 1F The structure at this point is shown in FIG. 1F and includes metallic films 16 and 18 which are substantially flush with respect to silicon dioxide layer 8.
  • an insulator such as SiO 2
  • sputtering or by chemical vapor deposition would result in elevations in those portions of the glass atop the metallic layers.
  • the thickness of insulator 8' be equal to or greater than one-half the maximum width of the gaps.
  • FIG. 1G shows the results of forming a second layer of silicon dioxide by a chemical vapor deposition technique where the desired planar property is realized.
  • the second glass layer denoted by the numeral 8', is substantially flush with substrate 2, i.e., planar.
  • the method of chemical vapor deposition to be used depends on the materials used for metallization 16. If only high-temperature materials such as Cr, Pt, Ta, or W are used, then the CVD deposition techniques already discussed may be employed. However, if a low-temperature metal such as Al is used, than a low-temperature CVD deposition process must be employed. Otherwise, the Al would migrate into the semiconductor material, causing defective devices.
  • a SiO 2 layer is formed by the reaction between silane and oxygen in a nitrogen carrier:
  • Applied Materials SOX 10 System may be employed. Such a system is operated at 500° C. and below, depending on the activation energy of the reaction. Wafer substrate temperatures may range from 330° to around 450° C., which is sufficiently low to preclude the migration of commonly used low temperature metals onto the semiconductor substrate.
  • gaps 17 in FIG. 1F Due to the fact that devices fabricated in semiconductor substrates are much longer and wider at the surface of the substrate than they are deep (thick) within the substrate, it has been the conventional practice to substantially reduce the horizontal dimension of drawings with respect to the vertical. This makes it difficult to illustrate the actual dimension of gaps 17 in FIG. 1F which remain between the insulating layer 8 and the metallization.
  • the gap width is at least as large as, and may be as much as double, the thickness of layer 8, even though it appears to be insignificant in most published literature.
  • gap 17 is between 0.9 and 1.8 micrometers wide. The gap is thus of substantial size and creates problems with respect to cracks which may form in layers deposited directly over the gaps.
  • FIG. 2 is an expanded view of a gap between a metallic contact 16 and the initially deposited insulating layer 8.
  • insulating layer 8' grows normal with respect to the contours of layers 8 and 16, as shown in FIG. 2. This is illustrated by the arrows ⁇ and means that more glass is deposited within the gaps than on the flat surfaces.
  • T the thickness of layer 8'
  • W the total width
  • FIGS. 3A-3D illustrate a technique similar to that described heretofore to form a second layer of metallization which is substantially planar except in those areas where a connection is made between separate layers of metallization.
  • the advantage of this particular process is that it uses a minimal number of steps which are substantially the same as have already been used to form the first level of metallization. For brevity and ease of understanding, it will be assumed that the first level has already been formed; and the subsequent steps are applied with respect to the structure illustrated in FIG. 1G.
  • An insulating layer 30 is deposited atop planar layer 8'.
  • Layer 30 is preferrably silicon dioxide deposited to a thickness of around 1.3 micrometers by a chemical vapor deposition technique.
  • RF or DC sputtering may also be used.
  • it is more convenient to use chemical vapor deposition because the subsequently deposited layer 30' must be formed using that technique.
  • the thickness of layer 30 must be known.
  • FIG. 3B a layer 32 of photoresist has been applied atop layer 30.
  • layer 32 is utilized as a mask for forming aperture 33 in layer 30.
  • the photoresist is exposed and developed to form an initial aperture 33 in insulating layer 30.
  • the depth of aperture 33 should be substantially the same as the thickness of layer 8', around 0.9 micrometers.
  • the photoresist is then reexposed and redeveloped to form an increased area of aperture 34, denoted 34'; and also to form another aperture 35 as shown in FIG. 3C.
  • a second etching is then performed which removes insulation material which is equal to the thickness of layer 30. Apertures 39 and 40 are formed thereby. Because only a thickness of insulator 30 equal to the thickness of layer 8' is removed from aperture 33 in the first step, overetching of aperture 40 is avoided in the second etching step.
  • a metal layer 36 is then deposited in blanket fashion atop photoresist layer 32 and into apertures 39 and 40. They are formed thereby conductive lands 37 and 38 at a second level. Generally speaking, levels 37 and 38 are metal stripes which have a third dimension (not shown) into the drawing.
  • photoresist layer 32 is exposed, masked and developed twice to allow separate formation of apertures 34 and 35.
  • photoresist 32 must be of the type which maintains its photosensitivity after being exposed once so that it can be reexposed and redeveloped.
  • the commercially available photoresist AZ 1350J has this property.
  • Other photoresists may also be used. Practically speaking, however, the photoresist must be positive rather than negative, as negative photoresists polymerize upon exposure to light.
  • Another photoresist which is useful is the type known as AZ 111 which is also available from the Shipley Company.
  • My preferred process for the dual exposure of photoresist layer 32 is as follows: AZ 1350 photoresist is initially spun on and baked. A chrome mask is applied over the photoresist; the mask is opaque except in those locations where window 34 (or windows) is to be formed. Thus, the first mask contains a pattern which will cause opening 34 to be formed in photoresist layer 32. The photoresist and the overlying mask are then exposed to ultraviolet light and the exposed photoresist "solubilizes". The exposed resist film is then developed, i.e., dissolved, to leave aperture 34 in photoresist film 32. Buffered HF is then used to etch aperture 33 in SiO 2 layer 30 as shown in FIG. 3B. Because the buffered HF and other common etchants tend to etch isotropically, aperture 33 is generally spherical in shape and there is a substantial amount of undercutting below photoresist layer 32.
  • a second chrome mask is then placed atop photoresist layer 32; the mask is opaque except where windows 34' and 35 are to be formed as shown in FIG. 3C.
  • the mask and photoresist 32 are again exposed to ultraviolet light; and the photoresist is developed so that apertures 34' and 35 remain in photoresist layer 32.
  • Buffered HF is again used to etch apertures 39 and 40 in the insulating layers.
  • aperture 39 is formed completely through insulating layer 30; and a like amount of material is removed from aperture 40.
  • the initial etching step which forms aperture 33 in FIG. 3B must be carefully controlled so that the amount of insulating material remaining above conductive land 18 equals the depth of layer 30. This is easily obtained using modern processing techniques.
  • a blanket layer of metallization 36 is then deposited atop photoresist layer 32 and within apertures 39 and 40.
  • Conductors 37 and 38 are thereby formed within apertures 39 and 40.
  • conductive lands 37 and 38 are generally metal stripes having significant lengths atop the substrate.
  • photoresist layer 32 is removed, which also causes metal layer 36 to be removed.
  • insulating layer 30' is deposited atop layer 30 so as to fill in the gaps as illustrated in FIG. 3D. That portion of glass layer 30' above conductive land 38 is thereby substantially flush with respect to layer 8'. However, because the upper surface of land 37 is below the upper surface of land 38, layer 30' is depressed at the region above land 37. Such a depression may not be significant in certain structures. In any event, the thickness of layer 30' must be at least one-half the width of the largest gap between the metal lands 37 and 38 and insulating layer 30 in accordance with my invention.
  • FIGS. 4A-4E illustrate another technique which uses substantially the same steps as heretofore described to form a second, substantially planar layer of metallization.
  • first level has already been formed; and the subsequent steps will be applied with respect to the structure illustrated in FIG. 1G.
  • the process to be described with respect to FIGS. 4A-4E is not as desirable as that described previously with respect to FIGS. 3A-3D. This is because the former requires more process steps; however, it does result in a surface which is planar throughout.
  • a layer 50 of photoresist is applied atop planar glass layer 8'.
  • Photoresist layer 50 is utilized as a mask for forming one or more apertures at desired locations in glass layer 8' in the manner already described with respect to FIGS. 1C and 1D, above, for the first level.
  • An aperture is etched in photoresist layer 50, illustrated by the numeral 54 in FIG. 4B. Obviously, other such apertures may also be formed.
  • a metallic layer 52 is subsequently deposited in blanket fashion atop the photoresist layer and into the aperture 54 atop electrode 18. There is formed thereby a via stud connection 55 to interconnect conductor 18 to a second level of metallization to be deposited. Connections could also be made in like fashion to ohmic contacts 16 if the electrode pattern were designed for this type of connection.
  • the thickness of metallic layer 55 must equal the thickness of glass layer 8'.
  • photoresist layer 50 is removed to thereby lift-off metallic layer 52.
  • glass layer 56 is then chemically vapor deposited atop glass layer 8' so as to fill in the gaps 57 as well as achieving planarity. This is done, as previously described, by insuring that the thickness of glass layer 56 is at least one-half the width of the largest gap 56 which may appear. This completes the formation of via connection 55 between the first level of metallization and a second level which is to be deposited subsequently in FIGS. 4D and 4E.
  • the second level of metallization is illustrated by numerals 60 and 61. Both are conductive lands or stripes. Land 61 is connected to stud 55, which acts as an via connection layer between the first and second levels of metallization. As shown in FIG. 4D, the lift-off resist is used to provide a mask for insulating layer 56, in which apertures are made to receive the metallization 59 deposited in blanket fashion atop the photoresist layer. As in the previous steps, lands 60 and 61 must have the same thickness as layer 56. The lift-off material 58 is removed, also removing excess metal 59. Finally, layer 56' is then deposited by a chemical vapor deposition technique to form the planar second level of metallization. Its thickness must be greater than one-half the width of the gaps 57'.
  • my technique is useful for very complex metallurgical patterns and is applicable for three or more levels metallurgy.
  • it can be used in combination with other techniques where substrate planarity of all insulators may not be required.

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US05/645,772 1975-12-31 1975-12-31 Planar insulation of conductive patterns by chemical vapor deposition and sputtering Expired - Lifetime US4045594A (en)

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Application Number Priority Date Filing Date Title
US05/645,772 US4045594A (en) 1975-12-31 1975-12-31 Planar insulation of conductive patterns by chemical vapor deposition and sputtering
FR7636398A FR2337429A1 (fr) 1975-12-31 1976-11-29 Procede d'isolement planaire de reseaux conducteurs par depot chimique en phase vapeur
GB50820/76A GB1502230A (en) 1975-12-31 1976-12-06 Semiconductor devices
JP14792976A JPS5284002A (en) 1975-12-31 1976-12-10 Method of forming conductive pattern on substrata
DE19762655937 DE2655937A1 (de) 1975-12-31 1976-12-10 Verfahren zum planaren isolieren von leitungsmustern, durch chemischen niederschlag aus der dampfphase
IT30662/76A IT1070028B (it) 1975-12-31 1976-12-21 Isolamento planare di andamenti conduttivi mediante deposito dallo stato di vapore
CA268,532A CA1055616A (en) 1975-12-31 1976-12-22 Planar insulation of conductive patterns by chemical vapor deposition

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CA (1) CA1055616A (cs)
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FR (1) FR2337429A1 (cs)
GB (1) GB1502230A (cs)
IT (1) IT1070028B (cs)

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US4181755A (en) * 1978-11-21 1980-01-01 Rca Corporation Thin film pattern generation by an inverse self-lifting technique
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US4492717A (en) * 1981-07-27 1985-01-08 International Business Machines Corporation Method for forming a planarized integrated circuit
US4502210A (en) * 1982-06-28 1985-03-05 Tokyo Shibaura Denki Kabushiki Kaisha Method for manufacturing semiconductor device
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US4656732A (en) * 1984-09-26 1987-04-14 Texas Instruments Incorporated Integrated circuit fabrication process
US4685030A (en) * 1985-04-29 1987-08-04 Energy Conversion Devices, Inc. Surface mounted circuits including hybrid circuits, having CVD interconnects, and method of preparing the circuits
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US4933743A (en) * 1989-03-11 1990-06-12 Fairchild Semiconductor Corporation High performance interconnect system for an integrated circuit
GB2234263A (en) * 1989-06-16 1991-01-30 Intel Corp Novel masking technique for depositing gallium arsenide on silicon
US5972800A (en) * 1995-05-10 1999-10-26 Nec Corporation Method for fabricating a semiconductor device with multi-level structured insulator
US6177134B1 (en) * 1997-01-15 2001-01-23 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Goerges Claude Process and plant for the production of a gaseous mixture containing a carrier gas an oxidizing gas and a silane
US6334249B2 (en) 1997-04-22 2002-01-01 Texas Instruments Incorporated Cavity-filling method for reducing surface topography and roughness
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EP0022580A1 (en) * 1979-07-17 1981-01-21 Western Electric Company, Incorporated Advantageous fabrication technique for devices relying on magnetic properties
JPS5815250A (ja) * 1981-07-21 1983-01-28 Fujitsu Ltd 半導体装置の製造方法
DE3627417A1 (de) * 1986-08-13 1988-02-18 Siemens Ag Verfahren zum herstellen von niederohmigen verbindungen in der isolationsschicht zwischen zwei metallisierungsebenen
DK166995B1 (da) * 1990-08-09 1993-08-16 Topsoe Haldor As Katalysator til dampreforming af carbonhydrider og anvendelse ved fremstilling af hydrogen- og/eller carbonmonoxidrige gasser

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Cited By (33)

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Publication number Priority date Publication date Assignee Title
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Also Published As

Publication number Publication date
IT1070028B (it) 1985-03-25
CA1055616A (en) 1979-05-29
JPS5284002A (en) 1977-07-13
GB1502230A (en) 1978-02-22
FR2337429A1 (fr) 1977-07-29
DE2655937A1 (de) 1977-07-14
JPS5733859B2 (cs) 1982-07-20
FR2337429B1 (cs) 1979-09-28

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