US3933163A - Spray etching apparatus - Google Patents

Spray etching apparatus Download PDF

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Publication number
US3933163A
US3933163A US05/547,006 US54700675A US3933163A US 3933163 A US3933163 A US 3933163A US 54700675 A US54700675 A US 54700675A US 3933163 A US3933163 A US 3933163A
Authority
US
United States
Prior art keywords
drain well
nozzle
etchant
valve element
drain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US05/547,006
Other languages
English (en)
Inventor
Maurice Parramore
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ZF International UK Ltd
Original Assignee
Lucas Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lucas Industries Ltd filed Critical Lucas Industries Ltd
Application granted granted Critical
Publication of US3933163A publication Critical patent/US3933163A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/08—Apparatus, e.g. for photomechanical printing surfaces
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
    • H05K3/068—Apparatus for etching printed circuits

Definitions

  • This invention relates to spray etching apparatus, and is principally concerned with such apparatus when intended for use in the production of etched film electrical circuits.
  • the time during which the conductive film shall be exposed to an etchant spray is closely controlled.
  • the time between shutting off the etchant spray and applying a rinsing fluid to the metal film, during which time etchant remains on the film, is preferably to be reduced to a minimum.
  • the rinsing fluid is to be introduced substantially immediately after shutting off the supply of etchant, the rinsing fluid must be prevented from draining into the etchant tank.
  • a spray etching apparatus comprises a housing defining a chamber having a surface to which workpieces to be etched may be secured, a valve element movable within said housing and including first and second supply passages for an etchant and a rinsing fluid respectively, first and second spray nozzles mounted on said valve element and respectively communicating with said first and second supply passages, first and second drain wells in said housing, and means for moving said valve element between a first position in which said first nozzle is directed towards said surface, said chamber communicates with said first drain well and is isolated from said second drain well and said second nozzle communicates with said second drain well, and a second position in which said second nozzle is directed towards said surface, said chamber communicates with said second drain well and is isolated from said first drain well, and said first nozzle communicates with said first drain well.
  • FIG. 1 is a section through a spray etching apparatus
  • FIG. 2 is a section on line 2--2 in FIG. 1, and
  • FIG. 3 is a section on line 3--3 in FIG. 1.
  • the apparatus has a generally wedge-shaped spray chamber 10 having a removable lid 11 which can be sealingly clipped in place.
  • a rotatable carrier 12 which has its inner surface 13 recessed so as to receive workpieces which are to be etched.
  • Chamber 10 can communicate, via a valve arrangement 14 with either one of two drain wells 15, 16.
  • drain well 15 is generally T-shaped and drain well 16 is generally U-shaped. Drain well 15 has a single drain outlet 17 and drain well 16 has two drain outlets 18.
  • Valve arrangement 14 comprises a generally cylindrical control element 19 which extends sealingly through a housing 20.
  • Housing 20 has a port 21 which communicates with chamber 10, ports 22, 23 which communicate with drain well 15, and ports 35, 36 which communicate with drain well 16.
  • Control element 19 has three recesses 24, 25, 26, and is rotatable through 180° by means of a handle 27 so that in one limiting position chamber 10 communicates with drain well 15 via recess 24, and drain well 16 is isolated from chamber 10. In the other limiting position chamber 10 communicates with drain well 16 via recesses 25, 26, and is isolated from drain well 15.
  • passages 28, 29 Extending longitudinally through element 19 are passages 28, 29 having external connections 30, 31 through which an etchant and rinse water can respectively be supplied.
  • a spray nozzle 32 which communicates with passage 28 and is arranged to direct etchant through port 21 onto the surface 13 when the control element 19 is in its first limiting position.
  • spray nozzles, 33, 34 Mounted within recesses 25, 26 are spray nozzles, 33, 34, both of which communicate with passage 29 and are arranged, when element 19 is in its second limiting position, to direct rinse water through the port 21 onto surface 13.
  • control element 19 With control element 19 in the first limiting position (shown) the nozzles 33, 34 direct water through the ports 35, 36 in the housing 20, directly into the drain well 16. With control element 19 in its second limiting position nozzle 32 directs etchant through the port 23 directly into drain well 15.
  • both etchant and rinse water are constantly supplied to passages 28, 29.
  • etching control element 19 is in its first limiting position. After a predetermined etching period the control element 19 is moved to its other limiting position, so that rinse water is substantially immediately sprayed onto the workpieces.
  • Well 15 is conveniently connected to an etchant reservoir from which etchant is returned by means of a pump to passage 28.
  • the carrier 12 is preferably rotated in use to ensure a substantially even distribution of etchant and rinse water over the workpieces. It will be understood that both element 19 and carrier 12 may be automatically operated in response to a timing device.
  • the apparatus is fabricated from a synthetic resin material, and there is provided, within an axial groove 37 in the housing 20, an elastomeric seal 38 which prevents leakage flow between drain wells 15, 16 around the circumference of element 19.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
US05/547,006 1974-03-14 1975-02-04 Spray etching apparatus Expired - Lifetime US3933163A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
UK11418/74 1974-03-14
GB11418/74A GB1492042A (en) 1974-03-14 1974-03-14 Spray etching apparatus

Publications (1)

Publication Number Publication Date
US3933163A true US3933163A (en) 1976-01-20

Family

ID=9985854

Family Applications (1)

Application Number Title Priority Date Filing Date
US05/547,006 Expired - Lifetime US3933163A (en) 1974-03-14 1975-02-04 Spray etching apparatus

Country Status (6)

Country Link
US (1) US3933163A (fr)
JP (1) JPS50127573A (fr)
DE (1) DE2509268A1 (fr)
FR (1) FR2264104B1 (fr)
GB (1) GB1492042A (fr)
IT (1) IT1032285B (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06112625A (ja) * 1991-10-18 1994-04-22 Tokyo Kakoki Kk 処理室の密閉構造

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2575493A (en) * 1949-05-28 1951-11-20 Frank T Hilliker Dishwashing machine and plural liquid spray means therefor
US2591080A (en) * 1944-06-13 1952-04-01 Lawrence A Loeb Dishwashing machine
US2963029A (en) * 1957-11-04 1960-12-06 Albert E Bock Four-cycle dishwashing machine
US3078861A (en) * 1962-06-08 1963-02-26 Millco Corp Can and jug washing machine
US3182671A (en) * 1962-12-19 1965-05-11 North American Aviation Inc Etching apparatus

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2591080A (en) * 1944-06-13 1952-04-01 Lawrence A Loeb Dishwashing machine
US2575493A (en) * 1949-05-28 1951-11-20 Frank T Hilliker Dishwashing machine and plural liquid spray means therefor
US2963029A (en) * 1957-11-04 1960-12-06 Albert E Bock Four-cycle dishwashing machine
US3078861A (en) * 1962-06-08 1963-02-26 Millco Corp Can and jug washing machine
US3182671A (en) * 1962-12-19 1965-05-11 North American Aviation Inc Etching apparatus

Also Published As

Publication number Publication date
GB1492042A (en) 1977-11-16
FR2264104A1 (fr) 1975-10-10
DE2509268A1 (de) 1975-09-18
FR2264104B1 (fr) 1977-04-15
JPS50127573A (fr) 1975-10-07
IT1032285B (it) 1979-05-30

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