US3924563A - Vapor deposition on electrostatically tensioned foil - Google Patents

Vapor deposition on electrostatically tensioned foil Download PDF

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Publication number
US3924563A
US3924563A US431851A US43185174A US3924563A US 3924563 A US3924563 A US 3924563A US 431851 A US431851 A US 431851A US 43185174 A US43185174 A US 43185174A US 3924563 A US3924563 A US 3924563A
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US
United States
Prior art keywords
foil
cooling drum
insulating layer
drum
plastic foil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US431851A
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English (en)
Inventor
Hartmut Kessler
Hubert Kraus
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Siemens Corp
Original Assignee
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19732311217 external-priority patent/DE2311217C3/de
Application filed by Siemens Corp filed Critical Siemens Corp
Application granted granted Critical
Publication of US3924563A publication Critical patent/US3924563A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/20—Metallic material, boron or silicon on organic substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Definitions

  • the insulating layer on the drum is broken into ,small areas and the product of its resistance and its thickness is selected so that it does not exceed one-fifth of the product of the resistance and thickness of the foil.
  • the present invention provides a cooling drum filled with a cooling substance and which has an outer metal surface over which is provided a layer of insulation material which engages one side of the plastic foil upon which the metalized layer is formed.
  • An electric field is applied between the metalized layer and the cooling drum so as to attract the plastic film and hold it smooth and unwrinkled under the drum as vapor deposit of metal occurs on the opposite surface of the plastic foil.
  • the electric field will also cause breakdowns at holes or weak points of the foil which are clearly distinguishable from common burnouts which occur in air under pressure in that a much larger area of the metal coating is effected.
  • the inventors have discovered that by incorporating a special barrier resistance in the current supply line that the area of the burnout regions can be controlled so that they do not cover as large an area. Due to the high number of breakdowns, the voltage will decrease behind a normal barrier resistance because of the current required to charge the insulating areas where breakdown has previsouly occurred.
  • the present invention allows the maintaining of the optimum voltage between the coating and the cooling drum for the vapor deposition of metal in that the present invention provides for the maintenance of the optimum voltage necessary for preventing heat creasesand wrinkles in the plastic film during the vapor deposition even though burnout paths cover a large area.
  • the problem is solved by the provision of an insulating layer over the cooling drum as a barrier resistance which has an electrical resistance and a thickness so as to assure that a clean, however, limited area of burnout of the coating takes place in the area of pores or weak points of the plastic foil.
  • a clean burnout in this invention means that an electrically conductive connection to a metal layer does not exist or remain through the pores of the plastic foil.
  • the insulating layer on the cooling drum serves as a barrier resistance and has a sufficient resistance that means it has a small enough resistance per unit area relative to the vapor deposited foil to allow a large portion of the applied voltage to be applied to the dielectric foil to assure that the foil is attracted and held smooth on the cooling drum.
  • a high degree of efficiency is achieved when the insulating layer on the drum is selected so that the product of the specific resistance and its thickness does not exceed a value equal to one-fifth of the product of the specific resistance and the thickness of the plastic foil.
  • An advantageous embodiment of the invention lies in the fact that plastic foil is attractedflto a cooling drum by electrostatic forces in the area where vapor deposition of metal occurs and wherein an insulating layer in the form of an insulating foil passes with the plastic foil across the cooling drum.
  • the insulating layer does not necessarily have to have a voltage resistance which by itself prevents the breakdown of the voltage through the insulating layer but it need only have a resistance to the applied voltage which is necessary for the prevention of breakdowns at the weak points of the foil which has been vaporized.
  • the upper limit is set by the requirement that after the vapor deposition has commenced, the electrostatic field forces should become fully effective without an unusual delay which means should occur after a few seconds.
  • the lower limit is set physically in that during a possible breakdown which occurs the charge from the adjacent areas has to be strongly re tarded and delayed so that only a very small fraction of the energy in the entire capacitor between the coating and the surface will be supplied during the short duration of the breakdown which occurs during a time of approximately 1 microsecond in the breakdown spark.
  • a barrier re sistance in the current feed line such that during short duration of the breakdown spark, energy is not supplied from the voltage source. Since, according to the present invention, the number of breakdowns and the total energy dissipated during a breakdown is maintained, a high resistance value,'as for example, 50,000 ohms can be chosen for the barrier resistance.
  • the insulating layer can be formed on the cooling drum as an endless belt which engages the drum at the point and areas where the plastic foil contacts the cooling drum.
  • the cooling drum is covered with an insulating layer which might, for example, be a thick cellulose propionate layer about 10 micrometers in thickness.
  • the insulating layer can be improved so as to taper the amount of energy discharged in the case of breakdowns if the cylindrical wall of the cooling drum is composed of a multitude of small cells which are insulated from each other and which are connected to each other electrically by a voltage source via barrier resistances and wherein the barrier resistances'are selected such that the time con- 3 stant for charging them relative to the vapor deposited coating is between microseconds and 1 second.
  • the electrostatic adhesion between the foil and the drum can be reversed prior to removing the foil by discharging the area of the cooling cylinder wall adjacent the point where the foil is to leave the cooling drum.
  • the surface of the cylinder wall of the cooling drum can be preferably designed in rasterlike form or in stripes.
  • FIGURE illustrates the novel method of the invention.
  • FIGURE illustrates the plastic foil 1 which passes over a first guide roller 2 and then over a cooling drum 3 and over a second guide roller 4.
  • the cooling drum 3 may be filled with a cooling liquid 8 as shown in cutaway.
  • the outer wallsurface of the cooling drum 3 may be coated and covered with an insulating layer 6 which has a resistance per unit area which is small relative to the resistance per unit area of the plastic foil 1.
  • a voltage source 10 has one side connected to ground and has its positive terminal connected to the guide roller 4 and the metalized layer of the foil engages the electrically conducting roller 4 so as to apply a positive charge to the metalized side of the foil 1.
  • the cooling drum 3 has an inner conducting portion which is grounded so that electrostatic attraction exists between the foil and the drum so as to hold the foil smoothly onto the drum 3.
  • metal coating is applied from an evaporator 7 which applies metal vapor through the opening 5 in the shutter 9 onto the foil.
  • the surface of the cooling drum 3 may be formed by several mutually insulated pieces or stripes which are grounded only near the opening 5.
  • the rollers 2 and 4 are driven with the roller 4 being connected to the positive terminal of the voltage source 10.
  • the roller 2 may also be attached to the positive terminal of the voltage source 10 so as to apply a positive potential to the foil 1 before it reaches the drum 3.
  • the cooling drum is grounded and thus, the foil is attracted and held on the surface of the cooling drum in the metalizing region and a metal layer is deposited from the foil from the evaporator 7 through the opening 5 in the shutter 9.
  • the insulating layer 6 is selected such that the produce of its thickness and its resistance per unit area is approximately one-fifth of the product of the resistance per unit area and the thickness of the plastic foil 1.
  • this invention provides an improved method for uniformly and smoothly appling a metal layer to an insulating foil; and although it has been described with respect to preferred embodiments, it is not to be so limited as changes and modifications may be made which are within the full intended scope as defined by the appended claims.
  • Apparatus for vapor deposition of a metal layer to a plastic foil comprising a metallic cooling drum rotatably supported, an insulating layer covering the cylindrical surface of said cooling drum, means moving said plastic foil with one surface entrained about said insulating layer on said cooling drum, means for applying a metallized layer to the opposed surface of said plastic foil at the area of entrainment and voltage means for applying an electrostatic field between said cooling drum and said plastic foil including an electrically conducting roller engageable with the metallized side of the plastic foil.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Vapour Deposition (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Extrusion Moulding Of Plastics Or The Like (AREA)
  • Laminated Bodies (AREA)
  • Insulating Bodies (AREA)
  • Moulding By Coating Moulds (AREA)
US431851A 1973-03-07 1974-01-09 Vapor deposition on electrostatically tensioned foil Expired - Lifetime US3924563A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19732311217 DE2311217C3 (de) 1973-03-07 Vorrichtung zum Metallisieren einer Kunststoffolie

Publications (1)

Publication Number Publication Date
US3924563A true US3924563A (en) 1975-12-09

Family

ID=5874001

Family Applications (1)

Application Number Title Priority Date Filing Date
US431851A Expired - Lifetime US3924563A (en) 1973-03-07 1974-01-09 Vapor deposition on electrostatically tensioned foil

Country Status (11)

Country Link
US (1) US3924563A (enrdf_load_stackoverflow)
JP (1) JPS49119968A (enrdf_load_stackoverflow)
AT (1) AT333396B (enrdf_load_stackoverflow)
BR (1) BR7400027D0 (enrdf_load_stackoverflow)
ES (1) ES422264A1 (enrdf_load_stackoverflow)
FI (1) FI55526C (enrdf_load_stackoverflow)
FR (1) FR2220597B3 (enrdf_load_stackoverflow)
GB (1) GB1430534A (enrdf_load_stackoverflow)
IT (1) IT1000750B (enrdf_load_stackoverflow)
LU (1) LU69013A1 (enrdf_load_stackoverflow)
SE (1) SE397843B (enrdf_load_stackoverflow)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0040437A3 (en) * 1980-05-20 1982-05-26 Fuji Photo Film Co., Ltd. Method of manufacturing magnetic recording medium
FR2527384A1 (fr) * 1982-04-29 1983-11-25 Energy Conversion Devices Inc Porte magnetique a gaz
US4440107A (en) * 1982-07-12 1984-04-03 Energy Conversion Devices, Inc. Magnetic apparatus for reducing substrate warpage
US4482622A (en) * 1983-03-31 1984-11-13 Xerox Corporation Multistage deposition process
US4829189A (en) * 1986-07-18 1989-05-09 Sando Iron Works Co., Ltd. Apparatus for low-temperature plasma treatment of sheet material
US5275103A (en) * 1991-06-07 1994-01-04 Eltex-Elektrostatik Gmbh Device for increasing heat transmission to the cooling cylinders in rotary-offset machines
US5803976A (en) * 1993-11-09 1998-09-08 Imperial Chemical Industries Plc Vacuum web coating
US20040074443A1 (en) * 2002-02-27 2004-04-22 John Madocks Apparatus and method for web cooling in a vacum coating chamber
EP2119813A1 (en) * 2008-05-16 2009-11-18 Applied Materials, Inc. Coating device with insulation
WO2024250100A1 (en) * 2023-06-05 2024-12-12 Li-Metal Corp. Coating drum and system for vapor deposition

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6130669A (ja) * 1984-07-24 1986-02-12 Matsushita Electric Ind Co Ltd 金属薄膜の製造方法
JP2010163693A (ja) * 2010-04-12 2010-07-29 Ulvac Japan Ltd 巻取式真空蒸着方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2978636A (en) * 1957-04-30 1961-04-04 Viking Instr Inc Flaw detecting apparatus
US3068528A (en) * 1960-05-03 1962-12-18 Du Pont Method for conveying and stretching thermoplastic film
US3082735A (en) * 1960-09-20 1963-03-26 Columbia Ribbon & Carbon Apparatus for feeding and coating a web
US3364421A (en) * 1966-06-29 1968-01-16 Kimberly Clark Co Method and apparatus for assaying dielectric properties of a paper web by means of applied voltage pulses

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2978636A (en) * 1957-04-30 1961-04-04 Viking Instr Inc Flaw detecting apparatus
US3068528A (en) * 1960-05-03 1962-12-18 Du Pont Method for conveying and stretching thermoplastic film
US3082735A (en) * 1960-09-20 1963-03-26 Columbia Ribbon & Carbon Apparatus for feeding and coating a web
US3364421A (en) * 1966-06-29 1968-01-16 Kimberly Clark Co Method and apparatus for assaying dielectric properties of a paper web by means of applied voltage pulses

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0040437A3 (en) * 1980-05-20 1982-05-26 Fuji Photo Film Co., Ltd. Method of manufacturing magnetic recording medium
FR2527384A1 (fr) * 1982-04-29 1983-11-25 Energy Conversion Devices Inc Porte magnetique a gaz
US4440107A (en) * 1982-07-12 1984-04-03 Energy Conversion Devices, Inc. Magnetic apparatus for reducing substrate warpage
US4482622A (en) * 1983-03-31 1984-11-13 Xerox Corporation Multistage deposition process
US4829189A (en) * 1986-07-18 1989-05-09 Sando Iron Works Co., Ltd. Apparatus for low-temperature plasma treatment of sheet material
US5275103A (en) * 1991-06-07 1994-01-04 Eltex-Elektrostatik Gmbh Device for increasing heat transmission to the cooling cylinders in rotary-offset machines
US5803976A (en) * 1993-11-09 1998-09-08 Imperial Chemical Industries Plc Vacuum web coating
US20040074443A1 (en) * 2002-02-27 2004-04-22 John Madocks Apparatus and method for web cooling in a vacum coating chamber
US7025833B2 (en) * 2002-02-27 2006-04-11 Applied Process Technologies, Inc. Apparatus and method for web cooling in a vacuum coating chamber
EP2119813A1 (en) * 2008-05-16 2009-11-18 Applied Materials, Inc. Coating device with insulation
WO2024250100A1 (en) * 2023-06-05 2024-12-12 Li-Metal Corp. Coating drum and system for vapor deposition

Also Published As

Publication number Publication date
FI55526B (fi) 1979-04-30
GB1430534A (en) 1976-03-31
FR2220597A1 (enrdf_load_stackoverflow) 1974-10-04
FI55526C (fi) 1979-08-10
ATA3974A (de) 1976-03-15
AT333396B (de) 1976-11-25
SE397843B (sv) 1977-11-21
FR2220597B3 (enrdf_load_stackoverflow) 1976-10-22
IT1000750B (it) 1976-04-10
ES422264A1 (es) 1976-04-01
BR7400027D0 (pt) 1974-10-29
DE2311217A1 (de) 1974-09-26
DE2311217B2 (de) 1976-12-23
JPS49119968A (enrdf_load_stackoverflow) 1974-11-15
LU69013A1 (enrdf_load_stackoverflow) 1974-02-22

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