ATA3974A - Verfahren zum metallbedampfen von kunststoffolien im vakuum - Google Patents

Verfahren zum metallbedampfen von kunststoffolien im vakuum

Info

Publication number
ATA3974A
ATA3974A AT3974*#A AT3974A ATA3974A AT A3974 A ATA3974 A AT A3974A AT 3974 A AT3974 A AT 3974A AT A3974 A ATA3974 A AT A3974A
Authority
AT
Austria
Prior art keywords
vacuum
evaporation method
plastic films
metal evaporation
metal
Prior art date
Application number
AT3974*#A
Other languages
English (en)
Other versions
AT333396B (de
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19732311217 external-priority patent/DE2311217C3/de
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of ATA3974A publication Critical patent/ATA3974A/de
Application granted granted Critical
Publication of AT333396B publication Critical patent/AT333396B/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/20—Metallic material, boron or silicon on organic substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Vapour Deposition (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Extrusion Moulding Of Plastics Or The Like (AREA)
  • Moulding By Coating Moulds (AREA)
  • Laminated Bodies (AREA)
  • Insulating Bodies (AREA)
AT3974*#A 1973-03-07 1974-01-03 Verfahren zum metallbedampfen von kunststoffolien im vakuum AT333396B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19732311217 DE2311217C3 (de) 1973-03-07 Vorrichtung zum Metallisieren einer Kunststoffolie

Publications (2)

Publication Number Publication Date
ATA3974A true ATA3974A (de) 1976-03-15
AT333396B AT333396B (de) 1976-11-25

Family

ID=5874001

Family Applications (1)

Application Number Title Priority Date Filing Date
AT3974*#A AT333396B (de) 1973-03-07 1974-01-03 Verfahren zum metallbedampfen von kunststoffolien im vakuum

Country Status (11)

Country Link
US (1) US3924563A (de)
JP (1) JPS49119968A (de)
AT (1) AT333396B (de)
BR (1) BR7400027D0 (de)
ES (1) ES422264A1 (de)
FI (1) FI55526C (de)
FR (1) FR2220597B3 (de)
GB (1) GB1430534A (de)
IT (1) IT1000750B (de)
LU (1) LU69013A1 (de)
SE (1) SE397843B (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56163526A (en) * 1980-05-20 1981-12-16 Fuji Photo Film Co Ltd Production of magnetic recording medium
US4462332A (en) * 1982-04-29 1984-07-31 Energy Conversion Devices, Inc. Magnetic gas gate
US4440107A (en) * 1982-07-12 1984-04-03 Energy Conversion Devices, Inc. Magnetic apparatus for reducing substrate warpage
US4482622A (en) * 1983-03-31 1984-11-13 Xerox Corporation Multistage deposition process
JPS6130669A (ja) * 1984-07-24 1986-02-12 Matsushita Electric Ind Co Ltd 金属薄膜の製造方法
US4829189A (en) * 1986-07-18 1989-05-09 Sando Iron Works Co., Ltd. Apparatus for low-temperature plasma treatment of sheet material
DE4118807C2 (de) * 1991-06-07 1995-07-20 Eltex Elektrostatik Gmbh Vorrichtung zur Erhöhung des Wärmeübergangs an Kühlwalzen von Offset-Rollenrotationsmaschinen
US5803976A (en) * 1993-11-09 1998-09-08 Imperial Chemical Industries Plc Vacuum web coating
US7025833B2 (en) * 2002-02-27 2006-04-11 Applied Process Technologies, Inc. Apparatus and method for web cooling in a vacuum coating chamber
EP2119813A1 (de) * 2008-05-16 2009-11-18 Applied Materials, Inc. Beschichtungsvorrichtung mit Isolierung
JP2010163693A (ja) * 2010-04-12 2010-07-29 Ulvac Japan Ltd 巻取式真空蒸着方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3082735A (en) * 1960-09-20 1963-03-26 Columbia Ribbon & Carbon Apparatus for feeding and coating a web
US2978636A (en) * 1957-04-30 1961-04-04 Viking Instr Inc Flaw detecting apparatus
NL264252A (de) * 1960-05-03 1900-01-01
US3364421A (en) * 1966-06-29 1968-01-16 Kimberly Clark Co Method and apparatus for assaying dielectric properties of a paper web by means of applied voltage pulses

Also Published As

Publication number Publication date
ES422264A1 (es) 1976-04-01
LU69013A1 (de) 1974-02-22
FR2220597B3 (de) 1976-10-22
GB1430534A (en) 1976-03-31
BR7400027D0 (pt) 1974-10-29
AT333396B (de) 1976-11-25
IT1000750B (it) 1976-04-10
DE2311217A1 (de) 1974-09-26
FR2220597A1 (de) 1974-10-04
DE2311217B2 (de) 1976-12-23
SE397843B (sv) 1977-11-21
FI55526C (fi) 1979-08-10
JPS49119968A (de) 1974-11-15
FI55526B (fi) 1979-04-30
US3924563A (en) 1975-12-09

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Legal Events

Date Code Title Description
ELJ Ceased due to non-payment of the annual fee
EEIH Change in the person of patent owner
EELA Cancelled due to lapse of time