US3906262A - Two-axis magnetic positioning device - Google Patents

Two-axis magnetic positioning device Download PDF

Info

Publication number
US3906262A
US3906262A US490661A US49066174A US3906262A US 3906262 A US3906262 A US 3906262A US 490661 A US490661 A US 490661A US 49066174 A US49066174 A US 49066174A US 3906262 A US3906262 A US 3906262A
Authority
US
United States
Prior art keywords
teeth
energizing means
surface comprises
electromagnetic energizing
magnetic material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US490661A
Other languages
English (en)
Inventor
Hiromichi Shichida
Kenichi Toyoda
Seiji Irie
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Application granted granted Critical
Publication of US3906262A publication Critical patent/US3906262A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
    • B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B26—HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26D—CUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
    • B26D7/00—Details of apparatus for cutting, cutting-out, stamping-out, punching, perforating, or severing by means other than cutting
    • B26D2007/0012—Details, accessories or auxiliary or special operations not otherwise provided for
    • B26D2007/0043—Details, accessories or auxiliary or special operations not otherwise provided for the cutting machine comprising a linear motor
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom

Definitions

  • a device for transferring an object on a horizontal plane in a first direction, in a second direction which [30] Forelgn Apphcatlon Pnonty Data crosses the first direction or in any direction between July 31, 1973 Japan 48-89980[U 1 the first and Second direction by making use of a pulse operated linear motor is referred to, wherein the de- [52] US. Cl. 310/12; 310/13; 318/38; vice Comprises a first member which moves in a first 1 318/135 direction, a second member which moves in a second [51] Int. Cl.
  • the present invention relates in general, to a two-axis magnetic positioning device by which an object can be transferred in a first direction, a second direction which crosses the first direction, or in any direction between the first and second directions and more particularly, relates to a two-axis magnetic positioning device utilizing a pulse operated linear motor which comprises a first member and a cooperating second member as a stator and a slider, respectively. Said second member can move with constant fine steps in one direction along the surface of said first member.
  • the movement of the second member is electromagnetically controlled in response to command pulses from control circuits.
  • the pulse operated linear motor includes at least one electromagnetic energizing means made of magnetic material surrounded by exciting coils which receives said command pulses and at least one stator made of magnetic material which cooperates electromagnetically with said slider.
  • said pulse operated linear motor includes means to provide a space between the bottom surface of the second member and the top surface of the first member which acts as a scale. The space prevents direct contact of the two surfaces, although a strong attractive force occurs between them when said exciting coils are energized.
  • the pulse operated linear motor is utilized in, for example, an automatic manufacturing system which requires fine machining control without manual operation by setting the work on the surface of the second member which is located slightly above the top surface of the first member.
  • the pulse operated linear motor has the following advantages. When movement in one direction is required, it is usually produced by converting a rotational motion from the conventional electric motor or handle to a rectilinear motion by using a converting means, which may be a feed screw or a similar type of screw.
  • a converting means which may be a feed screw or a similar type of screw.
  • no converting means is required as the rectilinear motion is directly produced.
  • a converting means such as the feed screw, creates backlash during operation.
  • the pulse operated linear motor can be operated with high accuracy because, as mentioned above, converting means such as the feed screw, is not required, thus eliminating creation of backlash. Further, since the converting means is worn away during operation, a manufacturing system including said converting means requires periodic inspection and maintenance. In this respect, the pulse operated motor requires no maintenance because no converting means is involved. In addition, a manufacturing system comprised of the pulse operated linear motor makes almost no noise and can deliver a work with high speed to a desired position. Thus, a work which is set on the second member can be delivered on a horizontal plane to any position according to design. There the work is produced with the desired configuration, hole, threaded hole or groove, by means of cutting tools such as a drill and/or milling cutter which are stationary with regard to the work.
  • FIGS. 1A, 1B, 1C and IE are enlarged side views illustrating the principle with respect to a moving action of a pulse operated linear motor
  • FIG. 1D is a partially enlarged plane view from the bottom of the second member, and:
  • FIG. IF is a sectional view of a conventional pulse operated linear motor to illustrate the principle of moving
  • FIG. 2 is a block diagram of a control circuit
  • FIG. 3 is a perspective view. partially cut off, showing an embodiment of a pulse operated linear surface motor according to the present invention
  • FIGS. 4 and 5 are plan views, partially cut off. showing, respectively, the bottom and the top of an X-slidcr;
  • FIG. 6 is a sectional view of a first embodiment according to the present invention taken along line 66 of FIG. 3;
  • FIGS. 7 through 9 are sectional views of second, third and fourth embodiments according to the present invention, taken along the corresponding line of FIG. 6;
  • FIG. I0-A is a perspective view of the typical twoaxis magnetic positioning device of the prior art
  • FIG. 10-8 is a perspective view of the bottom of a second member and
  • FIG. l0-C is an enlarged plan view ofa part of the top surface C in FIG. l0-A of a first member.
  • FIGS. IA. 18 and 1C 10 designates an X-slider to which X-slider elements SXA, SXB, SXC, S XD and SXE, made of magnetic materials, are attached and the second member consists of X-slider l0 and X-slider elements and moves by sequentially energizing the X-slider elements, in the first direction along the X-axis which is indicated at the top left of FIG. 1A.
  • Each X-slider element is comprised of a pole piece 11 to which a plurality of X- slider teeth 12 are attached and X-exciting coils 13 which surround the pole piece 11.
  • Each terminal 14 of X-exciting coils 13 is connected to the control circuit C.C; (FIG. 2).
  • the control circuit choses a sequence by which each exciting coil is energized.
  • the reference numeral,15 designates anX-stator, that .is, a scale,- to which X-stator teeth 16 are attached and both of which constitute said first member.
  • These X-s'tator teeth 16 are arranged'in a first direction along-the X-axis at .a
  • each tooth 16 extends in the second directionron a vertical plane.
  • The:pitch with which" the X-slider elements are arrangedtis-selected'to be *1 /SP .whenthere are five X- slider elements SXA-SXE-wherein the pitch P- is usually nearly: equal to '1 mm. If the X-slider 10 is drivenby three X-sliderelements SXA, SXB and SXC, saidpitch should .be -AaPuThe pitc'l-r with which the X.- slider elements are arranged will be clarified by refer ring to 'FIGm 1D, .which is a'partiallyenlarged. plan view from the bottom showing the configuration-of. the X- s-l'ider'elements, that is, the secondmember.
  • the Xslider element SXA and accordingly, the Xslider 10, move to a position where the center portion of the X-slider teeth 12 coincides with the center portion. of the adjacent X-stator teeth 16.
  • Two attracting forces occur which are depicted by the two groups of parallcl lines 17 shown in FIG.
  • SXE' SXD,-:SXE'
  • SXD, SXB, SXA SXE, SXA
  • SXE, SXA, SXB are more preferable in view of increased driving force .and reduced vibration during actual operation.
  • the above-mentioned sequence is the so called two-phase three-phase alternative excitation sequence.
  • Said attractive forces 17 in the three-phase alternative excitation, for example the order (SXA, SXB, SXC), are shown in FIG. 1E.
  • FIG. 2 is a block diagram of the control circuit CC.
  • the X-slider, element is driven by one control circuit CC.
  • the Y-slider element is driven by another control circuit C.C. Both control circuits havethe same blockdiagram shown in FIG. 2. Operation of the control circuit as follows.
  • Command pulses are applied to exciting controller 21 through the forward input terminal 22.
  • the exciting controller 21 decides energization orders of the X- (Y-) exciting coils of the X-( Y-) slider, and the outputs from theexciting controller 21 excite the selected exciting coils through power amplifiers 23A, 23B 23E in accordance with said energization orders.
  • each set of two reactance elements connected in series indicates a pair of exciting coils attached to each slider element.
  • the command pulses are applied to the reverse input terminal 24.
  • FIG. 3 is a perspective view, partially cut off, showing a first embodiment according to the present invention.
  • the reference numeral 31 indicates the first member.
  • the first mem ber 31 has the X-stator 15 on its first surface31.
  • the X-stator l5 acting as a scale comprises the X-stator teeth 16 which are arranged in the first direction. that is along the X-axis, at a predetermined constant pitch,
  • each X-stator tooth 16 extends in the second direction, that is along the Y-axis.
  • the reference numeral 10 indicates the second member which is located above the surface 31 that is, the top surfaces of the X-stator teeth 16, and the second member 10 is able to move by means of roller 32 in the first direction (X).
  • the roller 32 which rotates on a rail 33, located on the first surface 31 of the first member 31, together with thesecond member 10, maintains a constant small air gap between said first surface 31, and a second surface 10 (not shown), that is, the bottom surface of the second member 10.
  • the X-slider elements are arranged on the second surface 10 of the second member 10, which'cooperate electromagnetically with the X-stator teeth 16 according to the power amplified command pulses from the control circuit C.C. through feed line 34.
  • the X-slider elements are arranged as shown in FIG. 4
  • FIG. 4 which is an enlarged plan view, partially cut off, of the second surface 10'.
  • FIG. 4 there are five pairs of X- slider elements SXA, SXB, SXC, SXD and SXE, and each of the X-slider elements has X-slider teeth 12 and exciting coils 13.
  • each X-slider element SXA SXE is actually shifted by l/SP in relation to the adjacent element, in the first direction along the X-axis as previously mentioned with regard to FIG. 1D.
  • power amplified command pulses from the control circuit CC When power amplified command pulses from the control circuit CC.
  • the second member 10 in FIG. 3 moves to any desired position in the first direction along the X-axis with respect to the first member 31,by the command pulses: from the control circuit C.C.
  • the second member is restricted to movement only in the first .direction along :the X-axis'by means of guide rail 35 which is fixed to the first member 31 and extends in the first direction along the X-axis.
  • the second member 10 is illustrated with a guide member 36, slidably connected to the guide rail 35, beside it.
  • a third member 37 in FIG. 3 is located above a third surface 10", that is the top surface of the second member 10.
  • the third member 37 is able to move by meansof roller 38 in the second direction alongthe Y- axis.
  • a rail (not shown in FIG. 3 but shown by numeral 61 in FIG. 6) is located on a fourth surface 37, that is the bottom surface of the third member 37 and rides on the roller 38.
  • the roller 38 maintains a constant small air gap between the third surface 10', and the fourth surface 37'.
  • the third member 37 acts as, for example, a machining table which firmly holds a work piece to be processed on its top surface 37" by way of T-shaped fixing grooves 40.
  • the Y-stator elements are arranged on the third surface 10" of the second member 10 as one body, which cooperate electromagnetically with Y-slider teeth 41 according to power amplified command pulses from a control circuit C.C. through feed line 34.
  • the fourth surface 37 of the third member 37 acts as a scale comprised of Y-slider teeth 41 as shown in FIG. 3.
  • Electromagnetic exciting member, that is exciting coils, are included in the Ystator 39 which are on the third surface 10".
  • the Y-stator elements are arranged as shown in FIG/5 which is an en larged plan view, partially cut off, of the top surface of the second member 10.
  • the Y-slider teeth 41 in FIG. 3 are arranged in the same manner as the arrangement of the X-stator teeth 16, wherein the Y-slider teeth 41 are arranged at a predetermined constant pitch in the second direction along the Y-axis and each of the Y-slider teeth 41 extends in the first direction along the X-axis.
  • FIG. 5 there are five pairs of Y-stator elements SYA, SYB, SYC, SYD and SYE, and each of the- Y-stator elements has Y-stator teeth 42 and exciting coils 51. As can be seen in FIG.
  • each Y-stator element is also actually shifted by l/SP in relation to the adjacent element, in the second direction along the Y-axis as previously mentioned with regard to FIG. 1D.
  • the third member 37 moves in the second direction along the Y-axis by fine steps with respect to the Y-stator 39, that is, the second member 10.
  • the principle regarding the moving action is the same as previously described with reference to FIGS. 1A and 1C.
  • the command pulses from the control circuit C.C. causes the third member 37 in FIG. 3 to move to any desired position in the second direction along the Y-axis with respect to the second member 10.
  • the third member 37 is restricted to movement only in the second direction along the Y-axis with respect to the second member 10 by means of guide bar 43 shown in FIG. 3.
  • FIG. 6 is a sectional view taken along the line 66 of FIG. 3 through the third member 37, the second member 10 and the first member 31. In FIG. 6, the.
  • the second member 10 moves above the first member 31 perpendicular to the plane of the drawing in the X- direction,.and further, the third member 37'moves above the second member 10 in the Y-direction with respect to the second member 10. Consequently, the work piece to beprocessed which is set on the top-sun. face 37" of the third member moves on a horizontal place in the first (X) direction, second (Y) direction or first-second (X-Y) directions with respect to thefirst member 31.
  • The'work piece can be moved smoothly with fine steps, to any position on the horizontal plane.
  • the first surface 31 includes only the Xstator teeth 16 and the cooperatingsecond surface 10 includes only the:X-slider teeth 12, and includes neither.
  • FIG.-10-A is a perspective view 'of the typical two-axis magnetic positioningdcvice used for driving chart plotters and other devicesv InFIG, .1 ()-A' a second member (corresponding to said second-member 10) is floated on an air bearing through a pipe F,. over.
  • FIG. 10-A a first member 131 (corresponding to said first member 31) and said second member 110 can move in any direction.
  • FIG. 10-A there is no third member (previously quoted as numeral 37 in the first embodiment), since the second member 110 in FIG. III-A has both X- slider teeth 112 (corresponding to said X-slider teeth 12) and Y.-slider teeth 142 (corresponding to said Y- stator teeth 42) on its bottom.
  • FIG. 10-B is a plan view of the bottom of the second member 110.
  • the first member 131 has both X-stator teeth and Y-stator teeth on its top surface such as shown in FIG. IO-C.
  • FIG. 10-C is an enlarged plan view of apart of the top sur-. face C in FIG. 10-A of the first member 131.
  • the entire hatched area which is made of magnetic material and acts as X-stator teeth and also Y-stator teeth, is much smaller than that of the present invention.
  • a plurality of first teeth.made of a magnetic material which are indicated by 16 in FIG. 6, are arranged on the first surface 31 of the first member 31; a plurality of first electromagnetic energizing means which are indicated by SXA SXE in FIG. 6 are arranged on the second surface 10' of the second member 10; a plurality of second electromagnetic energizing means which means which are indicated by the letters SXA, SXB, SXC, SXD and SXE are arranged on the first surface 31 of the first member 31; a plurality of second electromagnetic energizing means, one of which is indicated by SYC as indicated in FIG. 6, are arranged on the third surface of the second member 10, and; a plurality of second teeth (indicated by 41 in FIG. 7), are made of a magnetic materiai and are arranged on the fourth surface 37 of the third member 37.
  • FIG. 8 is a sectional view of the third embodiment according to the present invention.
  • a plurality of first teeth (indicated by 16 in FIG. 8), are made of a magnetic material and are arranged on the first surface 31 of the first member 31;
  • a plurality of first elec tromagnetic energizing means which are indicated by SXA SXE in FIG. 8 are arranged on the second surface 10' of the second member 10;
  • a plurality of second energizing means one of which is indicated by the letters SYC in FIG. 8, are arranged on the fourth surface 37' of the third member 37, and;
  • a plurality of second teeth made of magnetic material which are indicated by 41 in FIG. 8 are arranged on the third surface 10 of the second member 10.
  • FIG. 9 is a sectional view of the fourth embodiment according to the present invention.
  • a plural ity of first teeth (indicated by 16' in FIG. 9), are made of magnetic material and are arranged on the second surface 10 of the second member 10;
  • a plurality offirst electromagnetic energizing means one of which is indicated by the letters SXC in FIG. 9, are arranged on the first surface 31 of the first member 31;
  • a plurality of second electromagnetic energizing means which are indicated by the letters SYA', SYB, SYC, SYD and SYE in FIG. 9, are arranged on the fourth surface 37' of the third member 37, and;
  • a plurality of second teeth made of magnetic material which are indicated by 41 in FIG. 9. are arranged on the third surface 10" of the second member 10.
  • the above-mentioned second, third and fourth embodiments also have the same advantage of increased efficiency as that of the first embodiment. This is because a plurality of first teeth and a cooperating plurality of first electromagnetic energizing means are located on one horizontal plane, which drives an object set on the third member in the first direction. A plurality of second teeth and a cooperating plurality of second electromagnetic energizing means are located on another horizontal plane, which drive the object in the second direction.
  • the first embodiment has another advantage in that the structure is simple and canbe manufactured easily.
  • a two-axis magnetic positioning device comprised of pulse operated linear motors including:
  • a third member having a fourth surface, which can move in a second direction which crosses the first direction with respect to the second member keeping a small air gap between said third surface and said fourth surface;
  • one of the first and second surfaces being provided with a plurality of first teeth made of a magnetic material which are arranged in the first direction with a constant pitch P, and each first tooth extends in a direction which is not parallel to the first direction;
  • the other first surface or second surface comprises N number of first electromagnetic energizing means which drive the second member in the first direction with respect to the first member by electromagnetically cooperating with said first teeth
  • each first electromagnetic energizing means has a plurality of pairs of first driving teeth which are surrounded by exciting coils and are arranged in the first direction with the constant pitch P' and each of the first driving teeth extends in the direction in which each first tooth is arranged and further, each of the first driving teeth of one of the first electromagnetic energizing means is shifted by (l/N)P in relation to each of the first driving teeth of the
  • one of the third and fourth surfaces being provided with a plurality of second teeth made of a magnetic material which are arranged in the second direction with a constant pitch P," and each second tooth extends in a direction which is not parallel to the second direction;
  • the other of the third surface or the fourth surface comprises N number of second electromagnetic energizing means which drive the third member in the second direction with respect to the second member by electromagnetically cooperating with said second teeth
  • each second electromagnetic energizing means has a plurality of pairs of second driving teeth which are surrounded by exciting coils and are arranged in the second direction with the constant pitch P and each of the second driving teeth extends in the direction in which each second tooth is arranged and further, each of the second driving teeth of one of the second electromagnetic energizing means is shifted by l/N)P in relation to each of the second driving teeth of the adjacent members of the second electromagnetic energizing means.
  • a two-axis magnetic positioning device as set forth in claim I, wherein said first surface comprises a plurality of said first teeth made of a magnetic material,
  • said second surface comprises N number of first elec tromagnetic energizing means
  • said third surface comprises N number of second electromagnetic energizing means
  • said fourth surface comprises a plurality of said second teeth made of a magnetic material.
  • a two-axis magnetic positioning device as set forth in claim 1, wherein said first surface comprises N number of first electromagnetic energizing means,
  • said second surface comprises a plurality of said first teeth made of a magnetic material
  • electromagnetic energizing means
  • a two-axis magnetic positioning device as set forth in claim 1, wherein said first surface comprises N number of first electromagnetic energizing means,
  • said second surface comprises a plurality of said first teeth made of a magnetic material
  • said third surface comprises a plurality of said second teeth made of a magnetic material
  • said fourth surface comprises N number of second electromagnetic energizing means.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Linear Motors (AREA)
  • Machine Tool Units (AREA)
  • Jigs For Machine Tools (AREA)
  • Control Of Position Or Direction (AREA)
US490661A 1973-07-31 1974-07-22 Two-axis magnetic positioning device Expired - Lifetime US3906262A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1973089980U JPS5037169U (enrdf_load_stackoverflow) 1973-07-31 1973-07-31

Publications (1)

Publication Number Publication Date
US3906262A true US3906262A (en) 1975-09-16

Family

ID=13985800

Family Applications (1)

Application Number Title Priority Date Filing Date
US490661A Expired - Lifetime US3906262A (en) 1973-07-31 1974-07-22 Two-axis magnetic positioning device

Country Status (5)

Country Link
US (1) US3906262A (enrdf_load_stackoverflow)
JP (1) JPS5037169U (enrdf_load_stackoverflow)
DE (1) DE2436900A1 (enrdf_load_stackoverflow)
FR (1) FR2239316B1 (enrdf_load_stackoverflow)
GB (1) GB1474408A (enrdf_load_stackoverflow)

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4230978A (en) * 1978-02-24 1980-10-28 Compugraphic Corporation Impulse drive system
EP0109201A3 (en) * 1982-10-19 1984-07-11 Calspan Corporation A self-propelled robot platform and system and method of moving a tool over a support surface
US4508984A (en) * 1981-07-08 1985-04-02 Jeumont-Schneider Corporation Variable reluctance electric motor for the translation of control rods in a nuclear reactor
GB2194907A (en) * 1986-09-10 1988-03-23 W R Vaughan & Associates Limit Machine tools and automatic loading equipment therefor
US4746811A (en) * 1986-01-28 1988-05-24 Pianelli & Traversa S.A.S. Device for picking up control signals for conveyor units, particularly carriages of conveyor lines for industrial plants
US4788477A (en) * 1985-07-26 1988-11-29 Hiroshi Teramachi Linear motor-driven X-Y table
US4798985A (en) * 1987-02-17 1989-01-17 Anwar Chitavat Linear motor with air-lift bearing unloading
US4807791A (en) * 1985-11-29 1989-02-28 Hideyuki Cho Apparatus for actuating a sidemovement correcting member of a machine for correcting the sidemovement of a travelling sheet-like article
US4870306A (en) * 1981-10-08 1989-09-26 Polaroid Corporation Method and apparatus for precisely moving a motor armature
US4973892A (en) * 1989-02-28 1990-11-27 Tsubakimoto Chain Co. Energization system for linear motor transient reduction
US5832801A (en) * 1993-04-27 1998-11-10 Bando Kiko Co., Ltd. Numerical controller cutter apparatus for cutting a glass plate
US6144118A (en) * 1998-09-18 2000-11-07 General Scanning, Inc. High-speed precision positioning apparatus
US6259174B1 (en) * 1997-08-21 2001-07-10 Nikon Corporation Positioning apparatus, drive unit and exposure apparatus incorporating the positioning apparatus
US6952086B1 (en) 2003-10-10 2005-10-04 Curtiss-Wright Electro-Mechanical Corporation Linear position sensing system and coil switching methods for closed-loop control of large linear induction motor systems
US20090140582A1 (en) * 2007-11-29 2009-06-04 Canon Kabushiki Kaisha Planar motor and stage using the same
US20120249991A1 (en) * 2011-03-30 2012-10-04 Asml Netherlands B.V. Planar motor and lithographic apparatus comprising such planar motor
WO2016051124A1 (en) * 2014-09-29 2016-04-07 Senake Atureliya Features to improve 3d print and assembly machines

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0016873A1 (fr) * 1979-04-04 1980-10-15 ATELIERS DE CONSTRUCTIONS ELECTRIQUES DE CHARLEROI (ACEC) Société Anonyme Installation de changement de position d'un panneau collecteur d'énergie solaire
DE2945269A1 (de) * 1979-11-09 1981-05-21 Teldix Gmbh, 6900 Heidelberg Positionierungseinrichtung fuer einen koerper
CH633740A5 (fr) * 1980-01-25 1982-12-31 Charmilles Sa Ateliers Machine-outil comprenant une table mobile.
JPH0336623Y2 (enrdf_load_stackoverflow) * 1987-02-27 1991-08-02
IT1281432B1 (it) * 1995-10-12 1998-02-18 Gisulfo Baccini Macchina punzonatrice
US5752425A (en) * 1995-12-25 1998-05-19 Chuo Precision Industrial Co., Ltd. Microtome
DE102006022193B4 (de) * 2006-05-12 2009-08-27 Rovema - Verpackungsmaschinen Gmbh Vertikale Schlauchbeutelmaschine mit zwei Linearmotoren
DE102006022192B4 (de) * 2006-05-12 2009-08-27 Rovema - Verpackungsmaschinen Gmbh Vorrichtung zum Verschweißen einer Folienbahn

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3268747A (en) * 1964-02-28 1966-08-23 Superior Electric Co Linear electric motor
US3832610A (en) * 1972-09-08 1974-08-27 Fujitsu Ltd Pulse operated surface motor
US3851196A (en) * 1971-09-08 1974-11-26 Xynetics Inc Plural axis linear motor structure
US3857075A (en) * 1971-07-19 1974-12-24 B Sawyer Positioning device
US3857078A (en) * 1971-06-28 1974-12-24 B Sawyer Actuating system

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3268747A (en) * 1964-02-28 1966-08-23 Superior Electric Co Linear electric motor
US3857078A (en) * 1971-06-28 1974-12-24 B Sawyer Actuating system
US3857075A (en) * 1971-07-19 1974-12-24 B Sawyer Positioning device
US3851196A (en) * 1971-09-08 1974-11-26 Xynetics Inc Plural axis linear motor structure
US3832610A (en) * 1972-09-08 1974-08-27 Fujitsu Ltd Pulse operated surface motor

Cited By (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4230978A (en) * 1978-02-24 1980-10-28 Compugraphic Corporation Impulse drive system
US4508984A (en) * 1981-07-08 1985-04-02 Jeumont-Schneider Corporation Variable reluctance electric motor for the translation of control rods in a nuclear reactor
US4870306A (en) * 1981-10-08 1989-09-26 Polaroid Corporation Method and apparatus for precisely moving a motor armature
EP0109201A3 (en) * 1982-10-19 1984-07-11 Calspan Corporation A self-propelled robot platform and system and method of moving a tool over a support surface
US4536690A (en) * 1982-10-19 1985-08-20 Calspan Corporation Tool-supporting self-propelled robot platform
US4788477A (en) * 1985-07-26 1988-11-29 Hiroshi Teramachi Linear motor-driven X-Y table
US4807791A (en) * 1985-11-29 1989-02-28 Hideyuki Cho Apparatus for actuating a sidemovement correcting member of a machine for correcting the sidemovement of a travelling sheet-like article
US4746811A (en) * 1986-01-28 1988-05-24 Pianelli & Traversa S.A.S. Device for picking up control signals for conveyor units, particularly carriages of conveyor lines for industrial plants
GB2194907A (en) * 1986-09-10 1988-03-23 W R Vaughan & Associates Limit Machine tools and automatic loading equipment therefor
US4798985A (en) * 1987-02-17 1989-01-17 Anwar Chitavat Linear motor with air-lift bearing unloading
US4973892A (en) * 1989-02-28 1990-11-27 Tsubakimoto Chain Co. Energization system for linear motor transient reduction
US5832801A (en) * 1993-04-27 1998-11-10 Bando Kiko Co., Ltd. Numerical controller cutter apparatus for cutting a glass plate
US6259174B1 (en) * 1997-08-21 2001-07-10 Nikon Corporation Positioning apparatus, drive unit and exposure apparatus incorporating the positioning apparatus
US6144118A (en) * 1998-09-18 2000-11-07 General Scanning, Inc. High-speed precision positioning apparatus
US6744228B1 (en) 1998-09-18 2004-06-01 Gsi Lumonics Corp. High-speed precision positioning apparatus
US20040140780A1 (en) * 1998-09-18 2004-07-22 Cahill Steven P. High-speed precision positioning apparatus
US6949844B2 (en) 1998-09-18 2005-09-27 Gsi Group Corporation High-speed precision positioning apparatus
US6952086B1 (en) 2003-10-10 2005-10-04 Curtiss-Wright Electro-Mechanical Corporation Linear position sensing system and coil switching methods for closed-loop control of large linear induction motor systems
US20090140582A1 (en) * 2007-11-29 2009-06-04 Canon Kabushiki Kaisha Planar motor and stage using the same
US7898119B2 (en) * 2007-11-29 2011-03-01 Canon Kabushiki Kaisha Planar motor and stage using the same
US20120249991A1 (en) * 2011-03-30 2012-10-04 Asml Netherlands B.V. Planar motor and lithographic apparatus comprising such planar motor
US9172294B2 (en) * 2011-03-30 2015-10-27 Asml Netherlands B.V. Planar motor and lithographic apparatus comprising such planar motor
WO2016051124A1 (en) * 2014-09-29 2016-04-07 Senake Atureliya Features to improve 3d print and assembly machines

Also Published As

Publication number Publication date
FR2239316B1 (enrdf_load_stackoverflow) 1980-04-11
FR2239316A1 (enrdf_load_stackoverflow) 1975-02-28
DE2436900A1 (de) 1975-02-20
JPS5037169U (enrdf_load_stackoverflow) 1975-04-18
GB1474408A (en) 1977-05-25

Similar Documents

Publication Publication Date Title
US3906262A (en) Two-axis magnetic positioning device
KR930001909B1 (ko) Xy 테이블장치
US3376578A (en) Magnetic positioning device
TW531600B (en) XYZ-axes table
US3881139A (en) 3-Axis pulse operated linear motor
US4555650A (en) Two dimensional driving device for use in a positioning device in a semiconductor manufacturing apparatus
US6281644B1 (en) Combined linear motor
US7154198B2 (en) Linear motor
US4507598A (en) Two-axis positioning system
US3904900A (en) Pulse operated two-axis linear motor
JP2006025476A (ja) 直線駆動装置
EP0207353B1 (en) Surface pulse motor
ITMI971196A1 (it) Metodo per comandare un motore passo-passo
Hsue et al. Comparison on linear synchronous motors and conventional rotary motors driven Wire-EDM processes
JPH03124292A (ja) リニアサーボモータ用リニアセンサ
JPS5874226A (ja) 位置決め方法
JP7691811B2 (ja) リニアモータ
JP2006034016A (ja) 工作機械用リニアモータ
JP2706171B2 (ja) ステージ装置
JPS60135184A (ja) 球面駆動装置
SU1083302A1 (ru) Двухкоординатный электрический двигатель
JPS6281966A (ja) リニア直流モ−タ
JPS5980150A (ja) リニアパルスモ−タ
KR20040012527A (ko) 구동 장치 및 이를 이용한 ｘｙ 테이블
JPS6188760A (ja) リニアパルスモ−タ