US3859226A - Secondary ion mass spectroscopy - Google Patents

Secondary ion mass spectroscopy Download PDF

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Publication number
US3859226A
US3859226A US414768A US41476873A US3859226A US 3859226 A US3859226 A US 3859226A US 414768 A US414768 A US 414768A US 41476873 A US41476873 A US 41476873A US 3859226 A US3859226 A US 3859226A
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United States
Prior art keywords
analyzer
probe
disposed
arrangement
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US414768A
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English (en)
Inventor
Helmut Schillalies
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold Heraeus Verwaltung GmbH
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Leybold Heraeus Verwaltung GmbH
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H01J49/067—Ion lenses, apertures, skimmers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/004—Combinations of spectrometers, tandem spectrometers, e.g. MS/MS, MSn
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0431—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components for liquid samples
    • H01J49/044—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components for liquid samples with means for preventing droplets from entering the analyzer; Desolvation of droplets
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
    • H01J49/4205—Device types
    • H01J49/421—Mass filters, i.e. deviating unwanted ions without trapping
    • H01J49/4215—Quadrupole mass filters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter

Definitions

  • a baffle is disposed in the instru- [301 Forelgn Apphcatmn Pnomy Data ment between the source and the analyzer so as to NOV.
  • the secondary electron multiplier which is disposed at the output of the quadrupole analyzer, to be axially offset or rotated by 90 and by deflecting the ions leaving the quadrupole analyzer with the aid of a suitable deflecting field.
  • baffle which prevents direct line-of-sight communication, in such device between the probe and the entrance plane of the quadrupole mass analyzer.
  • a baffle could be formed as a plane circular metal foil and prevents interfering particles of the type mentioned above from entering directly into the quadrupole mass analyzer and passing therethrough.
  • the danger of the production of annoying tertiary particles in the region of the exit plane of the quadrupole is also eliminated so that the secondary electron multiplier need no longer be axially offset or rotated.
  • the comlicated devices for producing the draw field can also be eliminated.
  • baffle within an electrostatic lens which is disposed between the probe and the quadrupole mass analyzer.
  • electrostatic lens can be so designed that the ions travel around the baffle, so that the intensity loss of the ion stream due to the baffle will be low.
  • the lens is composed of three tubes which form two tubular lenses.
  • the baffle is here arranged in the center tube and is connected thereto to be at the same electrical potential as the center tube.
  • the electrostatic properties of such a lens can be selected so that particle paths in the center portion of the lens extend parallel to the axis.
  • the baffle in the center tube does not create any interference with the potential distribution with the lens since the baffle is at the same potential as the center tube.
  • the significant advantage of such a lens is that a characteristic analagous to that producing a strong chromatic color error in an optical lens will automatically result, particularly with a focal length which is selected to be relatively short. This property can be utilized to effect a rough energy analysis of the particles.
  • the ions to be analyzed in secondary ion mass spectroscopy generally have an intensity maximum between 2 and l0eV with an intensity distribution which tapers toward higher energies, the higher energy particles often impede the analysis of those masses which have a lower energy value directly adjacent to that of masses with high energy.
  • the above-described rough energy analysis effected by the lens connected ahead of the quadrupole prevents the occurrence of these undesired effects.
  • tubular lenses permit accurate adaptation of the lens to the acceptance characteristics of the quadrupole so that the device can be operated in its best possible manner.
  • the probe is finally advantageous for the probe to be disposed in the focal plane of the tubular lens facing the probe and for the focal plane of the second lens to lie in the entrance plane of the quadrupole mass analyzer.
  • a further advantageous solution of the problem of the present invention involves disposing the bafile within an energy analyzer located between the probe and the quadrupole mass analyzer.
  • the energy analyzer may be a known analyzer which is suited for focusing decelerated particles.
  • a decelerating device for the ions may be constituted, for example, by a grid or an electrostatic lens.
  • a lens connected therebetween also permits adaptation of the energy levels and acceptance characteristics of the energy analyzer to the quadrupole system. The cutting out of the center beam is then assured already by the baffle disposed in the analyzer.
  • a baffle according to the invention can be inserted in any known mass spectroscopic apparatus employing a quadrupole mass analyzer.
  • FIG. 1 is a schematic cross-sectional view of one pre-.
  • FIG. 2 is a view similar to that of FIG. 1 of a second preferred embodiment of the invention.
  • FIG. 1 shows the basic elements of apparatus according to the invention which includes a probe, or sample, from which the ions to be analyzed emanate.
  • a known quadrupole mass analyzer 2 is provided for the mass analysis of these ions.
  • Such analyzers are known to be composed of four parallel cylindrical rods, pairs of which are provided with superposed alternating and constant voltages which filter out all ions except those of a predetermined mass.
  • the measurement of the ions passing through the quadrupole 2 is effected with the aid of a known secondary electron multiplier 3.
  • an electrostatic lens 7 composed of three tubes 4, and 6.
  • a baffle 9 is mounted through the intermediary bars 8 to prevent a direct line-of-sight communication between probe 1 and the entrance plane of the quadrupole 2.
  • the electrostatic focuss ing properties of the tubular lenses 10 and 11 formed by tubes 4, 5 and 6 are selected so that the probe 1 lies in the focal plane of lens 10, the entrance plane of quadrupole 2 lies in the focal plane of lens 11, and the particle paths 12 in the region of the center tube 5 extend parallel to the lens axis 13.
  • lens 7 is simultaneously suited for producing a rough energy analysis.
  • the ions penetrating the quadrupole 2 are measured, or detected, by the secondary electron multiplier.
  • the signals produced thereby are processed by the electronic system shown as block 14, which can be of any well known type currently used for this purpose and which, therefore, will not be described in detail.
  • an energy analyzer 15 is additionally disposed between lens 7 and probe 1.
  • Such an arrangement is known and is described, for example, in the periodical Journal of Applied Physics, Volume 43, No. 5, at page 2291 (New York).
  • the baffle 9' in this embodiment is mounted inside analyzer 15 in a manner not illustrated in detail. Thus a line-of-sight communication between probe 1 and the secondary electron multiplier 3 is avoided.
  • the energy analyzer 15 includes deceleration grids l6 and a draw grid 17 producing the requisite acceleration field, with the aid of which the energy of the ions passing around baffle 9 is analyzed.
  • a suitable deceleration unit is provided.
  • this is lens 7 of FIG. 1, with baffle 9 removed.
  • This lens may be replaced, however, by a known deceleration grid or any like known element disposed in the exit region of the energy analyzer 15.
  • FIG. 2 has been found to be very advantageous since it permits the realization of an improvement in the energy resolution without interfering with optimum adaptation to the input requirements of the quadrupole 2.
  • a secondary ion mass spectroscopy apparatus composed of a probe from which the ions to be measured emanate, a quadrupole mass analyzer presenting an entrance plane for the ions, and a secondary electron multiplier for receiving the ions to be measured, the improvement comprising baffle means disposed between said probe and said entrance plane of said quadrupole mass analyzer for blocking direct line-of-sight communication therebetween.
  • apparatus further includes an electrostatic lens disposed between said probe and said quadrupole mass analyzer, and said baffle means is located in said lens.
  • said lens comprises three successive tubes which define two successive tubular lenses, and said baffle means is disposed in the center one of said tube and is placed at the same potential as said center tube.
  • apparatus further includes an energy analyzer disposed between said probe and said quadrupole mass analyzer, and said baffle means is disposed in said energy analyzer.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
US414768A 1972-11-11 1973-11-12 Secondary ion mass spectroscopy Expired - Lifetime US3859226A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2255302A DE2255302C3 (de) 1972-11-11 1972-11-11 Einrichtung für die Sekundär-Ionen-Massenspektroskopie

Publications (1)

Publication Number Publication Date
US3859226A true US3859226A (en) 1975-01-07

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ID=5861444

Family Applications (1)

Application Number Title Priority Date Filing Date
US414768A Expired - Lifetime US3859226A (en) 1972-11-11 1973-11-12 Secondary ion mass spectroscopy

Country Status (5)

Country Link
US (1) US3859226A (cs)
CH (1) CH557598A (cs)
DE (1) DE2255302C3 (cs)
FR (1) FR2206579B1 (cs)
GB (1) GB1399588A (cs)

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3939344A (en) * 1974-12-23 1976-02-17 Minnesota Mining And Manufacturing Company Prefilter-ionizer apparatus for use with quadrupole type secondary-ion mass spectrometers
US4047030A (en) * 1974-09-30 1977-09-06 Balzers Patent-Und Beteiligungs-Aktiengesellschaft Arrangement for the mass-spectrometric detection of ions
US4058724A (en) * 1975-06-27 1977-11-15 Minnesota Mining And Manufacturing Company Ion Scattering spectrometer with two analyzers preferably in tandem
US4075479A (en) * 1976-03-04 1978-02-21 Finnigan Corporation Focusing ion lens system for mass spectrometer for separating charged and neutral particles
US4132892A (en) * 1975-12-13 1979-01-02 Gesellschaft Fur Strahlen- Und Umweltforschung Mbh Munchen Raster scanning ion microscope with quadrupole mass filter
DE2753412A1 (de) * 1977-11-30 1979-05-31 Max Planck Gesellschaft Verwendung eines ionen-elektronen- konverters in einem massenspektrometer
US4362936A (en) * 1979-11-26 1982-12-07 Leybold-Heraeus Gmbh Apparatus for monitoring and/or controlling plasma processes
WO1983002572A1 (en) * 1982-01-22 1983-08-04 Hurst, G., Samuel Sputter initiated resonance ionization spectrometry
WO1986004732A1 (en) * 1985-01-30 1986-08-14 Hughes Aircraft Company Secondary ion collection and transport system for ion microprobe
WO1993018540A1 (en) * 1992-03-03 1993-09-16 Fisons Plc Mass spectrometer
US5514868A (en) * 1992-09-15 1996-05-07 Fisons Plc Reducing interferences, in plasma source mass spectrometers
US20120248304A1 (en) * 2011-03-28 2012-10-04 Jean Jacques Dunyach Ion Guide with Improved Gas Dynamics and Combined Noise Reduction Device
US20140299577A1 (en) * 2012-01-09 2014-10-09 Carl Zeiss Smt Gmbh Apparatus and method for surface processing of a substrate
US8921803B2 (en) 2011-03-04 2014-12-30 Perkinelmer Health Sciences, Inc. Electrostatic lenses and systems including the same
EP3090441A4 (en) * 2013-12-31 2017-08-30 DH Technologies Development PTE. Ltd. Ion guide for mass spectrometry

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2534665C2 (de) * 1975-08-02 1985-09-05 Leybold-Heraeus GmbH, 5000 Köln Massenspektroskopische Einrichtung
DE2540505A1 (de) * 1975-09-11 1977-03-24 Leybold Heraeus Gmbh & Co Kg Flugzeit-massenspektrometer fuer ionen mit unterschiedlichen energien
DE3048392A1 (de) * 1980-12-22 1982-07-22 Leybold-Heraeus GmbH, 5000 Köln Linsensystem fuer analysatoren
CA1245778A (en) * 1985-10-24 1988-11-29 John B. French Mass analyzer system with reduced drift

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3501630A (en) * 1969-03-17 1970-03-17 Bell & Howell Co Mass filter with removable auxiliary electrode

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3501630A (en) * 1969-03-17 1970-03-17 Bell & Howell Co Mass filter with removable auxiliary electrode

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4047030A (en) * 1974-09-30 1977-09-06 Balzers Patent-Und Beteiligungs-Aktiengesellschaft Arrangement for the mass-spectrometric detection of ions
US3939344A (en) * 1974-12-23 1976-02-17 Minnesota Mining And Manufacturing Company Prefilter-ionizer apparatus for use with quadrupole type secondary-ion mass spectrometers
US4058724A (en) * 1975-06-27 1977-11-15 Minnesota Mining And Manufacturing Company Ion Scattering spectrometer with two analyzers preferably in tandem
US4132892A (en) * 1975-12-13 1979-01-02 Gesellschaft Fur Strahlen- Und Umweltforschung Mbh Munchen Raster scanning ion microscope with quadrupole mass filter
US4075479A (en) * 1976-03-04 1978-02-21 Finnigan Corporation Focusing ion lens system for mass spectrometer for separating charged and neutral particles
DE2753412A1 (de) * 1977-11-30 1979-05-31 Max Planck Gesellschaft Verwendung eines ionen-elektronen- konverters in einem massenspektrometer
US4362936A (en) * 1979-11-26 1982-12-07 Leybold-Heraeus Gmbh Apparatus for monitoring and/or controlling plasma processes
US4442354A (en) * 1982-01-22 1984-04-10 Atom Sciences, Inc. Sputter initiated resonance ionization spectrometry
WO1983002572A1 (en) * 1982-01-22 1983-08-04 Hurst, G., Samuel Sputter initiated resonance ionization spectrometry
WO1986004732A1 (en) * 1985-01-30 1986-08-14 Hughes Aircraft Company Secondary ion collection and transport system for ion microprobe
WO1993018540A1 (en) * 1992-03-03 1993-09-16 Fisons Plc Mass spectrometer
US5514868A (en) * 1992-09-15 1996-05-07 Fisons Plc Reducing interferences, in plasma source mass spectrometers
US8921803B2 (en) 2011-03-04 2014-12-30 Perkinelmer Health Sciences, Inc. Electrostatic lenses and systems including the same
US20120248304A1 (en) * 2011-03-28 2012-10-04 Jean Jacques Dunyach Ion Guide with Improved Gas Dynamics and Combined Noise Reduction Device
US8461524B2 (en) * 2011-03-28 2013-06-11 Thermo Finnigan Llc Ion guide with improved gas dynamics and combined noise reduction device
US20140299577A1 (en) * 2012-01-09 2014-10-09 Carl Zeiss Smt Gmbh Apparatus and method for surface processing of a substrate
EP3090441A4 (en) * 2013-12-31 2017-08-30 DH Technologies Development PTE. Ltd. Ion guide for mass spectrometry

Also Published As

Publication number Publication date
DE2255302A1 (de) 1974-05-22
DE2255302C3 (de) 1980-09-11
DE2255302B2 (de) 1980-01-17
FR2206579B1 (cs) 1978-03-10
GB1399588A (en) 1975-07-02
CH557598A (de) 1974-12-31
FR2206579A1 (cs) 1974-06-07

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