US3831052A - Hollow cathode gas discharge device - Google Patents

Hollow cathode gas discharge device Download PDF

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Publication number
US3831052A
US3831052A US00363904A US36390473A US3831052A US 3831052 A US3831052 A US 3831052A US 00363904 A US00363904 A US 00363904A US 36390473 A US36390473 A US 36390473A US 3831052 A US3831052 A US 3831052A
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cathode
wall
perforated
anode
plasma
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R Knechtli
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Raytheon Co
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Hughes Aircraft Co
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Priority to US00363904A priority Critical patent/US3831052A/en
Priority to GB1798174A priority patent/GB1424658A/en
Priority to DE19742421907 priority patent/DE2421907C3/de
Priority to FR7418099A priority patent/FR2231099B1/fr
Priority to JP5802674A priority patent/JPS552902B2/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/025—Electron guns using a discharge in a gas or a vapour as electron source
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J17/00—Gas-filled discharge tubes with solid cathode
    • H01J17/02—Details
    • H01J17/04—Electrodes; Screens
    • H01J17/06—Cathodes
    • H01J17/066—Cold cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J17/00—Gas-filled discharge tubes with solid cathode
    • H01J17/38—Cold-cathode tubes
    • H01J17/40—Cold-cathode tubes with one cathode and one anode, e.g. glow tubes, tuning-indicator glow tubes, voltage-stabiliser tubes, voltage-indicator tubes
    • H01J17/44—Cold-cathode tubes with one cathode and one anode, e.g. glow tubes, tuning-indicator glow tubes, voltage-stabiliser tubes, voltage-indicator tubes having one or more control electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/09707—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser using an electron or ion beam
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2893/00—Discharge tubes and lamps
    • H01J2893/0064—Tubes with cold main electrodes (including cold cathodes)
    • H01J2893/0065—Electrode systems
    • H01J2893/0066—Construction, material, support, protection and temperature regulation of electrodes; Electrode cups
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2893/00—Discharge tubes and lamps
    • H01J2893/0064—Tubes with cold main electrodes (including cold cathodes)
    • H01J2893/0065—Electrode systems
    • H01J2893/0068—Electrode systems electrode assembly with control electrodes, e.g. including a screen

Definitions

  • the hollow cathode gas discharge device is configured with a maximized cathode-to-anode area ratio to operate in a low-pressure glow discharge mode to generate a plasme of adequate density from which electrons or ions can be extracted and accelerated. This permits the gas pressure to be kept low to avoid Paschen breakdown in the high voltage acceleration region.
  • This invention is directed to a hollow cathode gas discharge device having a low-pressure glow discharge plasma from which can be extracted electrons or ions for high voltage acceleration.
  • High energy electron and ion beams are used in a variety of equipment, such as irradiation equipment, TEA gas lasers, and ion thrustors.
  • Various electron and ion sources are available.
  • Glow discharge plasma contain both ions and electrons, are widely used for various purposes, and can be used for this purpose.
  • differential pumping is usually needed to keep the gas pressure in the accelerating region low enough to prevent Paschen breakdowns in the beam under high accelerating voltages.
  • FIG. 1 is a perspective view of a hollow cathode gas discharge device, in accordance with this invention, as attached to a laser for ionization of laser gas by means of the high energy electron beam from the said hollow cathode gas discharge device.
  • FIG. 2 is an enlarged section, with parts broken away, taken generally along the line 22 of FIG. 1.
  • FIG. 3 is a transverse section through another embodiment of the hollow cathode gas discharge device of this invention showing the gas discharge device as an ion source.
  • the hollow cathode gas discharge device is a high energy electron source 10. It is shown as being attached to a laser cavity 12 for the ionization of the gas thereof.
  • the laser cavity is shown as being in association with laser mirrors 14 and 16.
  • the laser cavity 12 contains sustainer discharge electrode 18, which is part of a conventional laser.
  • the laser cavity 12 is the cavity of a gas laser, of which the TEA laser in U.S. Pat. No. 3,702,973 is an example.
  • U.S. Pat. No. 3,577,096 discloses a gas laser
  • U.S. Pat. No. 3,641,454 discloses an electron beam-ionzed gas laser to illustrate the fact that a gas laser can be electron beam-ionized. See also the article by A. J. Beaulieu in APPLIED PHYSICS LETTERS, Vol. 16, page 504, 1970. The entire disclosures of these patents and this article are incorporated herein in their entirety.
  • Laser cavity housing 12 has secured to the side thereof electron source housing 20.
  • Housing 20 serves as a shell around the remainder of the electron source structure to serve as a vacuum envelope therefor.
  • One side of housing 20 is wall 22, which is a common wall with laser cavity housing 12.
  • Wall 22 has a thin foil section 24 which serves as an electron transmission window. Metals are suitable for these housings.
  • the foil window section 24 is as thin as possible to permit electron passage with maximum freedom, but also to maintain the vacuum integrity of housing 20.
  • Foil section 24 can be mechanically supported to aid in its support of the pressure differential between the interiors of the two housings.
  • the pressure within electron source 10 is made independent of the ambient by means of housing 20, which is closed all the way around.
  • Hollow cathode 26 is mounted within housing 20 on suitable electrically insulative structural supports.
  • Cathode 26 carries webs 28 and 30 on which are mounted insulators 31 and 33.
  • the thin foil window section 24 is in line with and faces the perforated electrodes. Window section 24 is spaced from control grid 34 and is adapted to be connected as an electron accelerator electrode.
  • Cathode webs 36 and 38 extend inward over the exposed portion of the insulators 32 and 34 and extend over the mounting edges of the perforated anode electrode 32 so that only the perforated section is visible from the interior of cathode 26.
  • the effective cathode surface 40 has an area which extends around the interior of cathode 26 out to the facing edges of cathode webs 36 and 38.
  • the opening 42 between the facing edges of cathode webs 36 and 38 is the effective anode area.
  • Webs 44 and 46 protect the outer surface of insulators 32 and 34 by carrying the cathode potential around the outer, protected surfaces of these insulators.
  • the presence and length of cathode webs 36 and 38 is optional.
  • webs 44 and 46 need extend only to the outer insulator faces, and may cause beam focusing if they extend as far as they are shown in FIG. 2.
  • the structure of electron source also includes an ignition electrode 48.
  • Ignition electrode 48 is preferably in the form of a thin wire. It extends substantially through the center of the cathode space. When the cathode 26 is in the form of an elongated tube, as shown, the ignition electrode conveniently extends along the length of the structure.
  • Power sources are connected to provide the necessary currents for operation.
  • Power source 50 is connected between cathode 26 and perforated anode electrode 32 to maintain the anode electrode positive with respect to cathode surface 40 to maintain the plasma of the glow discharge within the interior of the cathode.
  • Voltage is in the order of 300 to 600 volts, and current is between about 10* to 1 amp per square centimeter of effective cathode area for the type of discharge desired.
  • Ignition power supply 52 is connected between the cathode and ignition electrode 48. When ignition is desired, ignition power supply 52 provides a positive pulse on ignition electrode 48. A pulse in the order of 500 to 1,000 volts and in the order of l microsecond time duration is convenient.
  • Control grid power supply 54 is connected between anode electrode 32 and control grid 34 to bias the control grid with respect to the anode electrode.
  • the control grid can be made negative up to a voltage exceeding the discharge voltage of power supply 50 to cut off electron flow.
  • the control grid power supply is usually operated so that control grid 34 is at a potential close to that of the anode electrode 32. It can be either positive or negative.
  • Accelerator power supply 56 is connected between anode electrode 32 and foil window section 24.
  • the window section is made positive to accelerate the electrons. In accordance with this invention, accelerating voltages of in excess of 150 kilovolts can be achieved.
  • the hollow cathode electron gun of FIG. 2 is able to generate a plasma of adequate density, up to about 10 electrons and ions per cubic centimeter, from which electrons can conveniently be extracted and accelerated without causing Paschen breakdown in the high voltage acceleration region between control grid 34 and foil window section 24.
  • the gas pressure of the discharge has to be kept relatively low.
  • the pressure is typically below about 50 microns of mercury pressure column for helium and lower for other gases.
  • the configuration of electron source 10 permits operation at such a low gas pressure, because most of the discharge volume is enclosed by the hollow cathode surface, because the anode area is kept much smaller than the cathode and because the anode area is essentially flush with the cathode area.
  • the enclosure of the discharge volume by the hollow cathode surface leads to optimum utilization of the ions generated in the plasma, which substantially all fall back onto the cathode where they generate the secondary electrons needed to sustain the discharge.
  • the second and third features, the small anode-to-cathode area ratio and the essentially flush configuration of the anode surface with respect to the cathode surface are essential to permit sustaining the discharge down to low pressures and are further discussed below.
  • the volume inside the hollow cathode defined by the effective cathode surface area 40 and extending across between webs 36 ad 38, is filled with plasma which has potential close to that of the most positive electrode, the perforated anode electrode 32.
  • the discharge voltage therefor ap pears mostly across the cathode sheath which exists between the cathode surface and the plasma.
  • the cathode sheath thickness is much smaller than the diameter of the cathode. This is typical of a cold cathode glow discharge.
  • the rate of ion generation has to equal the rate of ion loss. This condition determines both the lowest pressure at which the discharge can be sustained and the discharge voltage.
  • ion loss is due predominantly to the ion flux to the cathode. There is negligible ion loss due to volume recombination.
  • the ions reaching the cathode are accelerated through the cathode sheath to an energy corresponding to the discharge voltage. As noted above, this is typically several hundred volts for the desired cold cathode glow mode discharge. Upon impact on the cathode, these ions produce secondary electrons. The secondary electrons, in turn, are accelerated through the cathode sheath to the full discharge voltage.
  • the electron mean-free path will be much longer than the distance between opposite cathode surfaces. Most of the accelerated electrons will, therefore, traverse the discharge volume, be reflected on the opposite cathode surface, and oscillate back and forth between opposite cathode surfaces in the hollow cathode volume until they eventually make an inelastic collision.
  • Such inelastic collisions have a high probability of being ionizing collisions. The probability for an electron to reach the anode before having made such an ionizing collision increases with decreasing gas pressure, but decreases with decreasing anode area for a given cathode area. As a result, a small anode area is important to minimize lowest pressure at which the discharge can be sustained in this mode.
  • the effective cathode surface area was 250 square centimeters, and the opening which corresponds to the effective anode area was 30 square centimeter.
  • the cathode material was stainless steel.
  • the gas in the chamber was helium, and a wellcontrolled discharge could be sustained down to a helium gas pressure of less than 20 milli-Torr. This pressure is suitably low for a plasma cathode gas discharge device with high voltage electron or ion acceleration.
  • the ignition electrode 48 is provided for practical ignition.
  • the success of this ignition can be understood by realizing that, when the wire diameter is made thin enough, typically less than 1 millimeter in diameter, the probability for an electron which is accelerated toward the ignition anode electrode 48 being collected depends upon the initial azimuthal electron velocity. Under practical conditions, having the small diameter wire, such an initial electron under the influence of the vacuum field will be accelerated toward the ignition wire, but will have a high probability to miss it. Under these circumstances, it becomes trapped in an orbit around this wire until it makes an ionizing collision and initiates the avalanche required to ignite the hollow cathode discharge. Once the discharge is ignited, it can be readily transferred from the auxiliary ignition anode electrode 48 to perforated anode electrode 32. This can be simply accomplished by keeping the perforated anode electrode 32 at or above the discharge voltage and letting the ignition wire anode electrode 48 voltage fall below the discharge voltage once ignition has taken place.
  • Electrons are extracted from the plasma by means of the relative positive polarity of anode electrode 32. Electrons passing through the perforations of the anode electrode 32, which acts as an extraction grid, are first accelerated in substantially space-charge limited flow in the extraction and control region between electrodes 32 and 34. They are further accelerated, once past control grid 34, by the high voltage accelerating field applied between window 24 and grid 34. It is seen that electrodes 32 and 34 are at approximately the same potential. With a distance between electrodes 24 and 34 in the order of 2.5 centimeters, and with helium as the gas in the space at a pressure of 50 milli-Torr or less, accelerating voltage in excess of 150 kilovolts has been applied without either Paschen or vacuum breakdown.
  • the maximum accelerating voltage which can be applied between window 24 and grid 34 is determined by the conditions for both Paschen breakdown and vacuum breakdown.
  • the vacuum breakdown voltage is essentially determined by the distance d between the high voltage electrodes 24 and 34. For a voltage on the order of kilovolts, a practical minimum value for d is on the order of 2.5 centimeters.
  • the Paschen breakdown voltage is determined by the value of the product p'd of the gas pressure p and the electrode spacing d. In the low pressure region of interest for the hollow cathode discharge electron (or ion) guns, the Paschen breakdown voltage increases with decreasing value of the product pd.
  • the Paschen breakdown voltage will exceed l50 kilovolts for values of p-d typically smaller than 0.4 Torr-centimeter. Now it is observed that increasing the vacuum breakdown requires an increase in the electrode spacing d, while maintaining the Paschen breakdown voltage at a selected value requires keeping the 1d product constant; hence, the need to increase d results in a need to decrease the gas pressure p. This is why the ability of the hollow cathode discharge described above to operate at low pressures is especially valuable for this application.
  • a typical practical set of values is an acceleration voltage up to about 200 kilovolts for a maximum helium gas pressure of about 50 microns of mercury pressure column and an electrode spacing of about 4 centimeters.
  • an extracted current density up to several amperes per square centimeter has been obtained with a stainless steel cathode, with a discharge voltage in the order of 300 to 500 volts, and an extraction grid current smaller than or of the same order of magnitude as the extracted electron current.
  • cathode 26 need not be cylindrical. A rectangular configuration is also satisfactory. The only key conditions to be satisfied are that theeffective anode area is much smaller than the effective hollow cathode area, that the cathode substantially enclose the plasma space, and that the anode be substantially flush with the cathode surface.
  • the plasma cathode electron gun 10 is as an electron source for a gas laser with high energy electron ionization. In modern lasers of this type, large area high voltage electron guns are required. As compared to the thermionic cathode electron guns presently used for this application, the plasma cathode electron gun described above has the following advantages. Small leaks in the thin metal window can be tolerated, provided that the enclosure pressure is maintained at 10 to 10' Torr range. Thermionic cathodes require at least two orders of magnitude lower pressure. Furthermore, accidental loss'of vacuum would have no serious consequences with plasma cathodes; it is usually catastrophic with thermionic cathodes.
  • the plasma cathode is not sensitive to electronegative impurity gases, in contrast to thermionic cathodes.
  • the plasma cathode does not require heat-up time.
  • the discharge in the plasma gun can be started within microseconds prior to the initiation of a high energy beam.
  • the plasma cathode electrode gun structure can be maintained at much lower temperature than that of thermionic cathodes. No inherently delicate heater elements are required.
  • the plasma cathode electron gun can readily be scaled to large size without major difficulties; i.e., no unwieldy heater power, no difficulties with structural rigidity, etc.
  • the eventual cost of the plasma cathode gun is expected to be lower than that of a comparable large area thermionic cathode, due to its inherent structural simplicity and potentially greater reliability.
  • the plasma cathode gun does not require power-consuming heater elements.
  • the power required for the discharge in the plasma gun constitutes only a small fraction of the high energy electron beam power. In pulsed duty, the average power consumption can be lower than that of an equivalent thermionic cathode.
  • Electron irradiation is sometimes applied to polymer composition materials to cause polymerization and can be used for other chemical uses.
  • Ion source 60 has a housing 62 which maintains a vacuum in the vacuum space 64 therein.
  • Cathode 66 is mounted in and is insulated with respect to housing 64. Cathode 66 is the same as cathode 26. However, cathode 66 has an extraction grid 68 at the cathode potential. Pressure is maintained within the cathode space '70 at an appropriate value so that a plasma discharge can be initiated by ignition electrode 72 and maintained by discharge-sustaining anode 74, the latter being essentially flush with the cathode surface.
  • the pressure is maintained as low as practical within cathode space 70 consistent with the maintenance of a low pressure plasma discharge in cathode space 70.
  • ions drift from the plasma to extraction grid 68, they are accelerated by ion-accelerating grid 76 toward target 78.
  • Ignition pulse power supply 80 is connected between cathode 66 and ignition electrode 72 to produce a pulse which initiates the discharge.
  • Discharge power supply 82 is connected between cathode 68 and discharge-sustaining anode 74 to maintain the previously described low pressure plasma glow discharge.
  • Acceleration power supply 84 is connected between cathode 66 and accelerator grid 76.
  • Target 78 is at about the same potential as accelerator grid 76, or is more negative, and thus is connected to the negative side of accelerator power supply 84 or to the negative side of a separate accelerating power supply 85.
  • Ion source 60 thus produces the low pressure ion and electron-generating discharge which was previously described, and ions can be extracted and accelerated from the plasma.
  • the low pressure in space 64 again permits higher accelerating fields without Paschen breakdown.
  • the extraction grid, and a control grid, if desired, can be best made according to the known techniques developed for electron bombardment and thrustors and ion sources.
  • the key difference between the ion source 60 and the prior ion sources is the low pressure ion-generating discharge which is sustained by means of the hollow cathode structure and operating conditions described above, without the need for a magnetic field or a hot cathode.
  • One advantage in using a flush anode configuration to sustain the discharge rather than a thin wire such as is used for ignition is the easier cooling of the flush anode resulting in its ability to sustain a higher average discharge current.
  • a higher average discharge current produces a higher plasma density and permits extraction of a higher average ion current.
  • Another advantage of the configuration object of this invention over a thin wire anode is the fact that it results in a more uniform plasma density distribution, leading to a more uniform current density distribution for the extracted ion beam.
  • a hollow cathode plasma discharge device comprising:
  • walls defining a hollow cathode space, said walls comprising an anode wall and a cathode wall, said anode wall and said cathode wall together defining the exterior boundaries of a low-pressure glow discharge plasma, said anode wall being positioned so that it does not substantially intrude into the plasma, the ratio of anode area to cathode area being smaller than unity for low-pressure glow discharge plasma mode operation;
  • one of said walls being perforated so that particles can be extracted through said perforation into space exterior of said perforated wall;
  • an accelerator electrode positioned exteriorly of said hollow cathode space to accelerate particles passing out through said wall perforation
  • a vessel enclosing at least said perforation and said accelerator electrode to maintain pressure within said vessel and within said cathode at subatmospheric pressure to cause conditions between said perforation and said accelerator electrode to be outside the breakdown region of the Paschen curve for the particular gas.
  • a hollow cathode plasma discharge device comprising:
  • walls defining a hollow cathode space, said walls comprising an anode wall and a cathode wall, said anode wall and said cathode wall together defining the exterior boundaries of a low-pressure glow discharge plasma, said anode wall being positioned so that it does not substantially intrude into the plasma, the ratio of anode area to cathode area being smaller than unity for low-pressure glow discharge plasma mode operation;
  • an auxiliary anode positioned interiorly of said space for initial ignition of the plasma discharge so that plasma discharge can be sustained by said anode wall;
  • one of said walls being perforated so that particles can be extracted through said perforation into space exterior of said perforated wall; an accelerator electrode positioned exteriorly of said hollow cathode space to accelerate particles passing out through said wall perforation;
  • a vessel enclosing at least said perforation and said accelerator electrode to maintain pressure within said vessel and within said cathode at subatmospheric pressure to cause conditions between said perforation and said accelerator electrode to be outside the breakdown region of the Paschen curve for the particular gas.
  • said perforated wall is a perforated anode wall so that electrons are the particles extracted from the plasma.
  • said perforated wall is a perforated cathode wall so that ions can be extracted from the plasma
  • said accelerator electrode being spaced from said perforated cathode wall and being connected to a negative electric voltage with respect to said cathode to accelerate ions from said perforated cathode wall, said vessel maintaining the space between said perforated cathode wall and said accelerator electrode in the non-breakdown region of the Paschen curve for the particular gas.
  • a control grid consisting of a perforated electrode or conducting mesh is placed between said perforated cathode wall and said negative accelerator electrode to control the current of the extracted ion, the potential of said control grid being negative with respect to the cathode and the ion optical design of said control grid being such as to keep ion interception low.
  • a control grid consisting of a perforated electrode or conducting mesh is placed between said perforated cathode wall and said negative accelerator electrode, the potential of said control grid being substantially equal to cathode poten tial or being positive with respect to cathode potential.

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Lasers (AREA)
  • Plasma Technology (AREA)
US00363904A 1973-05-25 1973-05-25 Hollow cathode gas discharge device Expired - Lifetime US3831052A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
US00363904A US3831052A (en) 1973-05-25 1973-05-25 Hollow cathode gas discharge device
GB1798174A GB1424658A (en) 1973-05-25 1974-04-24 Hollow cathode gas discharge device
DE19742421907 DE2421907C3 (de) 1973-05-25 1974-05-07 Vorrichtung zur Erzeugung eines Elektronen- bzw. Ionenstrahl
FR7418099A FR2231099B1 (enrdf_load_stackoverflow) 1973-05-25 1974-05-24
JP5802674A JPS552902B2 (enrdf_load_stackoverflow) 1973-05-25 1974-05-24

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JP (1) JPS552902B2 (enrdf_load_stackoverflow)
FR (1) FR2231099B1 (enrdf_load_stackoverflow)
GB (1) GB1424658A (enrdf_load_stackoverflow)

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US3999094A (en) * 1975-06-27 1976-12-21 Zenith Radio Corporation Cathodoluminescent gas discharge device with improved modulation characteristics
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RU2250577C2 (ru) * 2003-07-15 2005-04-20 Институт электрофизики Уральского отделения Российской академии наук Газоразрядный плазменный катод
RU2306683C1 (ru) * 2005-12-21 2007-09-20 Томский университет систем управления и радиоэлектроники Плазменный электронный источник
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US20110095674A1 (en) * 2009-10-27 2011-04-28 Herring Richard N Cold Cathode Lighting Device As Fluorescent Tube Replacement
CN101952926B (zh) * 2008-01-11 2012-11-21 埃克西可集团公司 脉冲电子源、脉冲电子源的供电方法和控制脉冲电子源的方法
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US20140117259A1 (en) * 2011-07-04 2014-05-01 Tetra Laval Holdings & Finance S.A. Electron beam device and a method of manufacturing said electron beam device
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WO2003049139A1 (fr) * 2001-12-07 2003-06-12 Centre National De La Recherche Scientifique Source d'electrons
US7911120B2 (en) 2001-12-07 2011-03-22 Centre National De La Recherche Scientifique Source for providing an electron beam of settable power
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RU2231164C1 (ru) * 2003-03-24 2004-06-20 Томский государственный университет систем управления и радиоэлектроники Плазменный электронный источник ленточного пучка
RU2250577C2 (ru) * 2003-07-15 2005-04-20 Институт электрофизики Уральского отделения Российской академии наук Газоразрядный плазменный катод
RU2306683C1 (ru) * 2005-12-21 2007-09-20 Томский университет систем управления и радиоэлектроники Плазменный электронный источник
RU2339191C2 (ru) * 2006-12-25 2008-11-20 Институт систем обработки изображений Российской академии наук (ИСОИ РАН) Фокусатор газоразрядной плазмы
US20130001368A1 (en) * 2008-01-04 2013-01-03 The Boeing Company Systems and methods for controlling flows with pulsed discharges
US8727286B2 (en) * 2008-01-04 2014-05-20 The Boeing Company Systems and methods for controlling flows with pulsed discharges
CN101952926B (zh) * 2008-01-11 2012-11-21 埃克西可集团公司 脉冲电子源、脉冲电子源的供电方法和控制脉冲电子源的方法
US20100004799A1 (en) * 2008-07-01 2010-01-07 The Boeing Company Systems and Methods for Alleviating Aircraft Loads with Plasma Actuators
US9446840B2 (en) 2008-07-01 2016-09-20 The Boeing Company Systems and methods for alleviating aircraft loads with plasma actuators
EP2164309A1 (de) * 2008-09-15 2010-03-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zum Betreiben einer Hohlkathoden-Bogenentladung
US20110095674A1 (en) * 2009-10-27 2011-04-28 Herring Richard N Cold Cathode Lighting Device As Fluorescent Tube Replacement
US20140117259A1 (en) * 2011-07-04 2014-05-01 Tetra Laval Holdings & Finance S.A. Electron beam device and a method of manufacturing said electron beam device
US9202661B2 (en) * 2011-07-04 2015-12-01 Tetra Laval Holdings & Finance S.A. Electron beam device for shaping an electric field and a method of manufacturing said electron beam device the same
RU2574339C1 (ru) * 2014-10-08 2016-02-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "ДАГЕСТАНСКИЙ ГОСУДАРСТВЕННЫЙ УНИВЕРСИТЕТ" Устройство для формирования плазменно-пучкового разряда
RU222392U1 (ru) * 2023-09-22 2023-12-22 Федеральное государственное бюджетное образовательное учреждение высшего образования "Томский государственный университет систем управления и радиоэлектроники" Форвакуумный плазменный источник ленточного пучка электронов, функционирующий в широком диапазоне рабочих давлений

Also Published As

Publication number Publication date
JPS5022567A (enrdf_load_stackoverflow) 1975-03-11
DE2421907A1 (de) 1974-12-05
JPS552902B2 (enrdf_load_stackoverflow) 1980-01-22
FR2231099B1 (enrdf_load_stackoverflow) 1978-01-20
FR2231099A1 (enrdf_load_stackoverflow) 1974-12-20
GB1424658A (en) 1976-02-11
DE2421907B2 (de) 1976-11-11

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