US3827017A - Adjustable induction coil for heating semiconductor rods - Google Patents

Adjustable induction coil for heating semiconductor rods Download PDF

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Publication number
US3827017A
US3827017A US00309420A US30942072A US3827017A US 3827017 A US3827017 A US 3827017A US 00309420 A US00309420 A US 00309420A US 30942072 A US30942072 A US 30942072A US 3827017 A US3827017 A US 3827017A
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United States
Prior art keywords
coil
inner sections
rod
sections
loop
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Expired - Lifetime
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US00309420A
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English (en)
Inventor
W Keller
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Siemens AG
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Siemens AG
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Priority to US435837A priority Critical patent/US3886509A/en
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    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/16—Heating of the molten zone
    • C30B13/20—Heating of the molten zone by induction, e.g. hot wire technique
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1076—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone
    • Y10T117/1088—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone including heating or cooling details

Definitions

  • the coil is 1,335,895 4/l920 Hughes 336/62 X provided onduits adapted to upport a flow 2,264,301 12 1941 Dcnnccn ct a1 219/1019 x for cooling the CO during Operation. 2,266,176 12/1941 Dcnnccn ct a1 219/1079 X 2,404,987 7/1946 Rudd 219/1079 X 2 Claims, 7 Drawing Figures PATENTED I 3,827,017
  • SHEET 1 [IF 3 ADJUSTABLE INDUCTION COIL FOR HEATING SEMICONDUCTOR RODS BACKGROUND OF THE INVENTION 1.
  • the present invention relates to induction coils and more particularly to induction coils which are employed in the process of treating semiconductor rods by the floating zone melting process.
  • the Prior Art It is frequently desirable to purify rods consisting of semiconductor material by subjecting them to a socalled floating zone melting process, employing an induction coil which heats the semiconductor rod by in duction. A melting zone is established within the rod, which is encircled by the coil, and this melting zone is shifted along the length of the rod from one end to another, by moving the rod relative to the coil. In this manner, impurities are transported to one end of the rod, leaving the remaining structure more free of impurities than before.
  • the floating zone melting process is also used for the breeding of single crystals by melting a core crystal to one end of the rod, and guiding a melting zone from the core crystal to the other end of the rod.
  • a principal object of the present invention is to provide an induction heating coil which is constructed in a way which permits it to be dismounted from a semiconductor rod which it is adapted to heat.
  • Another object of the present invention is to provide a coil which has means for adjusting its inner diameter without removing it from a semiconductor rod which it is adapted to heat.
  • a coil having two components which are selectively connectable with each other and which are adapted to be separated from each other to permit removal of the coil from the semiconductor rod.
  • the coil consists of one or more loops with a ring shaped inner part formed of two components adapted to be separated from each other and from the coil loops.
  • FIG. 1 is a perspective view of a coil incorporating an illustrative embodiment of the present invention, shown in separated condition;
  • FIG. 2 is a plan view of the coil of F IG. 1, shown in assembled condition
  • FIG. 3 is a perspective view of an alternative embodiment of the present invention.
  • FIG. 4 is a plan view of a further embodiment of the present invention.
  • FIG. 5 is a vertical cross-sectional view of the coil of FIG. 4, taken along a plane V-V;
  • FIG. 6 is a plan view of yet another embodiment of the present invention.
  • FIG. 7 is a vertical cross-sectional view of the coil of FIG. 6, taken along a plane VII-VII.
  • a coil 1 which is adapted to be used for heating a semiconductor rod and which is selectively separable from the rod.
  • the coil 1 consists of a single loop, and is provided with a pair of hollow conductive terminals 34 and 35, which may be connected to a suitable source of electric potential to establish an electric current within the coil.
  • the terminals 34 and 35 are also connected to a source of cooling fluid and to a sink therefor, respectively.
  • the coil 1 is composed of copper or silver or some other metal with good conducting properties. It is formed of two component sections 2 and 3, which are in electrical contact with each other along the end surfaces thereof 4 and S.
  • the two sections 2 and 3 each have an interior conduit 31 connected at one end to the interior of the ho]- low terminals 34 and 35, and at the other end to each other via a sealing arrangement which prevents leakage of the fluid at the joint between the sections 2 and 3.
  • a flange 32 is provided on each of the sections 2 and 3 and each flange 32 having aligned bolt holes 6, 7 and 8 by which the flanges 32 may be bolted together by bolts 6a and 7a.
  • An O-ring 9 surrounds the joint between the conduits 31 to insure a fluid-tight sealing relationship between the two flanges 32 when the same are bolted together.
  • the surfaces of the two flanges 32 are spaced slightly from the planes of the surfaces 4 and 5, to accomodate the thickness of the O-ring 9, permitting good electrical connection between the surfaces 4 and 5.
  • the inner diameter is about 30 millimeters and the outer diameter is between millimeters and millimeters.
  • the sizes of the coil diameters depend on the rod sizes which are to be used with the coil.
  • FIG. 3 an alternative embodiment is illustrated which is like the embodiment shown in FIGS. 1 and 2 except that the separating line between the two sections 2 and 3 lies partly in the plane of the coil, rather than being transverse thereto as in the embodiment of FIGS. 1 and 2.
  • the separating line extends through the coil and is defined by two parallel planes which extend perpendicular to the plane of the coil joined to a third plane between and perpendicular to the parallel planes.
  • the two sections 2 and 3 are connected for good electrical contact therebetween, and with a fluid-tight seal, by means of screws 6b and 7b.
  • the screws 6b and 7b are received in aligned apertures in the two sections 2 and 3, those in the section 3 having cooperating threads.
  • the screws 6b and 7b are located on opposite sides of junction between the interior conduits of the two sections.
  • the interior conduit in each section is formed so that the junction between the sections 2 and 3 is disposed solely on the horizontal surface 10, in the manner shown in FIG. 7, which is described hereinafter. This insures that a fluid-tight seal is achieved by surrounding the opening on one side or the other with a gasket member such as an O-ring.
  • FIG. 3 is preferable to that illustrated in FIGS. 1 and 2 in some circumstances, when the screws 6b and 7b, being oriented differently from the bolts 6a and 7a, are more accessible.
  • FIGS. 4 and 5 an alternative embodiment of the present invention is illustrated, showing an induction heating coil or loop 11 composed of copper, silver or the like having three convolutions 12 connected between the hollow terminals 34 and 35.
  • the coil 11 is formed of tubular material to support a stream of cooling fluid.
  • the winding includes two arcuate inner sections 13 and 14 which are in electrical contact with the inner convolution of the coil 11.
  • a flange 30 is attached by means of soldering, welding or the like, to the inner convolution 12 of the coil 11, and the sections 13 and 14 are connected to the flange 30 by means of screws -22.
  • a solder joint 24 fills the space between the flange 30 and the inner convolution of the coil.
  • a gap is provided in the flange 30 between the beginning and end of the inner convolution 12, to avoid short circuiting the convolution.
  • a gap is also provided between the sections 13 and 14 at this location for the same purpose.
  • FIGS. 6 and 7 another embodiment of the present invention is illustrated.
  • This embodiment resembles that shown in FIGS. 5 and 6 except that the inner sections 13 and 14 are provided with an interior conduit for cooling purposes.
  • the coil 11 has two convolutions 12, and the flange 30 is soldered by a solder joint 24 to the inner convolution of the coil, just as in the embodiment of FIGS. 4 and 5.
  • the flange 30 has a rectangular cross-section, and includes a horizontal bore 36 communicating at one end with the interior of the inner convolution 12 of the coil 11, and at the other end with a vertical bore aligned with a vertical bore 37 provided in the sections 13 and 14 and leading to the hollow interior of the sections 13 and 14.
  • the inner convolution is connected to the inner sections at four locations, and cooling fluid flows through the hollow inner sections 13 and 14, as well as through the coil 11, as illustrated by the arrows 25.
  • Both of the sections 13 and 14 have end walls closing off the ends of the conduit therewithin, so no sealing arrangement is needed at the vertical plane of contact between the sections 13 and 14.
  • Four O-rings 26-29 surround the four fluid junction points between the two inner sections 13 and 14 and the ring flange 30, as best illustrated in FIG. 6, to insure a fluid-tight connection therebetween.
  • Screws 15-22 interconnect the inner sections 13 and 14 to the ring flange 30 in the same manner as has been described in reference to FIGS. 4 and 5.
  • FIGS. 6 and 7 may be employed in the same manner as that illustrated in FIGS. 4 and 5, but the embodiment of FIGS. 6 and 7 achieves the additional advantage of permitting cooling of the inner sections 13 and 14.
  • An induction heating coil for use in heating a semiconductor rod comprising:
  • an induction coil adapted to encircle said rod and including a current conducting loop forming an outer section of said coil and a plurality of separable inner sections, whereby at least some of said inner sections may be independently separated from association with said rod;
  • said loop formed of a plurality of convolutions of an elongated tube
  • said inner sections being removably connected with an innermost convolution of said loop, said inner sections being in substantially continuous electrical contact with said innermost convolution of said loop, said inner sections having a radially innermost surface defining a circle for surrounding said rod, said inner sections being separable from each other along a separating line;
  • conduit means within said inner sections for supporting a fluid flow therethrough
  • a disassembleable induction heating arrangement for floating zone melting of semiconductor rods comprising:
  • a flat coil having at least two separable components contacting each other along a separating line; means for securing said components together; a fluid passageway through each of said components; and gasket means for forming a fluid-tight connection therebetween; said separating line extending through said coil and being defined by two parallel planes which extend perpendicular to the plane of said coil joined to a third plane between and perpendicular to said parallel planes.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Induction Heating (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
US00309420A 1971-12-07 1972-11-24 Adjustable induction coil for heating semiconductor rods Expired - Lifetime US3827017A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US435837A US3886509A (en) 1972-11-24 1974-01-23 Adjustable induction coil for zone melting of semiconductor rods

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2160694A DE2160694C3 (de) 1971-12-07 1971-12-07 Induktionsheizspule zum tiegelfreien Zonenschmelzen von Halbleiterstäben

Publications (1)

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US3827017A true US3827017A (en) 1974-07-30

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US00309420A Expired - Lifetime US3827017A (en) 1971-12-07 1972-11-24 Adjustable induction coil for heating semiconductor rods

Country Status (12)

Country Link
US (1) US3827017A (de)
JP (1) JPS5124964B2 (de)
AT (1) AT324433B (de)
BE (1) BE789504A (de)
CA (1) CA976617A (de)
DE (1) DE2160694C3 (de)
DK (1) DK146725C (de)
FR (1) FR2162442B1 (de)
GB (2) GB1406079A (de)
IT (1) IT971386B (de)
NL (1) NL7213754A (de)
PL (1) PL79132B1 (de)

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4035600A (en) * 1974-07-16 1977-07-12 Siemens Aktiengesellschaft Apparatus for crucible-free zone processing of a semiconductor rod
US4059493A (en) * 1976-04-29 1977-11-22 Cities Service Company Anode, anode basket and method of packaging anodes
US4109128A (en) * 1975-09-01 1978-08-22 Wacker-Chemitronik Gesellschaft Fur Elektronik-Grundstoffe Mbh Method for the production of semiconductor rods of large diameter and device for making the same
US4184135A (en) * 1978-04-10 1980-01-15 Monsanto Company Breakapart single turn RF induction apparatus
US4220839A (en) * 1978-01-05 1980-09-02 Topsil A/S Induction heating coil for float zone melting of semiconductor rods
US4506132A (en) * 1981-10-30 1985-03-19 Siemens Katiengesellschaft Induction coil in the form of a flat coil for crucible-free floating zone melting
US4579719A (en) * 1982-08-06 1986-04-01 Siemens Aktiengesellschaft Apparatus for crucible-free floating-zone melting a semiconductor rod, particularly of silicon
US4714808A (en) * 1986-09-02 1987-12-22 Fmc Corporation Induction heating pressure welding with linear bus bar joint
US4833287A (en) * 1987-04-27 1989-05-23 Shin-Etsu Handotai Co., Ltd. Single-turn induction heating coil for floating-zone melting process
US4942279A (en) * 1987-05-25 1990-07-17 Shin-Etsu Handotai Co., Ltd. RF induction heating apparatus for floating-zone melting
US5009860A (en) * 1987-05-25 1991-04-23 Shin-Etsu Handotai Co., Ltd. Semiconductor rod zone melting apparatus
US5113049A (en) * 1991-02-14 1992-05-12 Pda Engineering Flexible induction heating coil
US5792258A (en) * 1995-01-31 1998-08-11 Shin-Etsu Handotai Co., Ltd. High-frequency induction heater and method of producing semiconductor single crystal using the same
US20110073591A1 (en) * 2008-07-17 2011-03-31 Seiichi Sawatsubashi Guide Chip Structure for High-Frequency Induction Heating Coil
US20110204044A1 (en) * 2008-11-25 2011-08-25 Chaoxuan Liu High-frequency coil pulling holes arrangement for producing multiple silicon cores
EP2366814A1 (de) * 2008-11-25 2011-09-21 Chaoxuan Liu Hochfrequenzspulen-ziehlochanordnung zur herstellung von mehreren siliziumkernen
US20120018422A1 (en) * 2010-01-20 2012-01-26 Benteler Automobiltechnik Gmbh Method and apparatus for producing a structural part using induction heating
US20130140299A1 (en) * 2011-12-05 2013-06-06 Neturen Co., Ltd. Heating coil
US9282593B2 (en) 2011-06-03 2016-03-08 General Electric Company Device and system for induction heating
CN111101199A (zh) * 2019-12-30 2020-05-05 亚洲硅业(青海)股份有限公司 可拆卸高频线圈与硅芯炉

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012017130B4 (de) 2012-09-01 2016-06-16 Man Diesel & Turbo Se Laser-Rohreinschweißen

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Publication number Priority date Publication date Assignee Title
US1335895A (en) * 1919-03-24 1920-04-06 Emily W Hughes Electrode-holder
US2264301A (en) * 1934-03-29 1941-12-02 Ohio Crankshaft Co Heating and quenching apparatus
US2266176A (en) * 1934-03-29 1941-12-16 Ohio Crankshaft Co Apparatus for electric heating
US2404987A (en) * 1944-04-19 1946-07-30 Induction Heating Corp Induction heating and quenching device
US2419116A (en) * 1944-04-20 1947-04-15 Westinghouse Electric Corp Apparatus for high-frequency induction heating of strips
US2456091A (en) * 1945-03-12 1948-12-14 Induction Heating Corp Inductor for high-frequency induction heating
US2459971A (en) * 1945-08-30 1949-01-25 Induction Heating Corp Inductor for high-frequency induction heating apparatus
US2481008A (en) * 1945-06-27 1949-09-06 Induction Heating Corp Multiturn split inductor
US2709741A (en) * 1952-04-17 1955-05-31 Allis Chalmers Mfg Co Inductor coil comprising parallel plates connected by a cooling conduit
US3110793A (en) * 1961-11-20 1963-11-12 Gen Electric Brazing tool
GB1002388A (en) * 1963-07-18 1965-08-25 Philips Electronic Associated Improvements in and relating to inductors for use in high-frequency heating apparatus
US3428769A (en) * 1966-07-26 1969-02-18 Mc Donnell Douglas Corp Induction heating tool
US3534198A (en) * 1967-11-29 1970-10-13 Leonidas C Miller Adjustable induction heating head for a coaxial cable
US3593242A (en) * 1967-07-12 1971-07-13 Asea Ab Liquid cooled magnet coil for particle acceleration

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US156707A (en) * 1874-11-10 Improvement in faucets
GB615779A (en) * 1946-08-17 1949-01-11 Standard Telephones Cables Ltd Improvements in or relating to high frequency heating equipment

Patent Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1335895A (en) * 1919-03-24 1920-04-06 Emily W Hughes Electrode-holder
US2264301A (en) * 1934-03-29 1941-12-02 Ohio Crankshaft Co Heating and quenching apparatus
US2266176A (en) * 1934-03-29 1941-12-16 Ohio Crankshaft Co Apparatus for electric heating
US2404987A (en) * 1944-04-19 1946-07-30 Induction Heating Corp Induction heating and quenching device
US2419116A (en) * 1944-04-20 1947-04-15 Westinghouse Electric Corp Apparatus for high-frequency induction heating of strips
US2456091A (en) * 1945-03-12 1948-12-14 Induction Heating Corp Inductor for high-frequency induction heating
US2481008A (en) * 1945-06-27 1949-09-06 Induction Heating Corp Multiturn split inductor
US2459971A (en) * 1945-08-30 1949-01-25 Induction Heating Corp Inductor for high-frequency induction heating apparatus
US2709741A (en) * 1952-04-17 1955-05-31 Allis Chalmers Mfg Co Inductor coil comprising parallel plates connected by a cooling conduit
US3110793A (en) * 1961-11-20 1963-11-12 Gen Electric Brazing tool
GB1002388A (en) * 1963-07-18 1965-08-25 Philips Electronic Associated Improvements in and relating to inductors for use in high-frequency heating apparatus
US3428769A (en) * 1966-07-26 1969-02-18 Mc Donnell Douglas Corp Induction heating tool
US3593242A (en) * 1967-07-12 1971-07-13 Asea Ab Liquid cooled magnet coil for particle acceleration
US3534198A (en) * 1967-11-29 1970-10-13 Leonidas C Miller Adjustable induction heating head for a coaxial cable

Cited By (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4035600A (en) * 1974-07-16 1977-07-12 Siemens Aktiengesellschaft Apparatus for crucible-free zone processing of a semiconductor rod
US4109128A (en) * 1975-09-01 1978-08-22 Wacker-Chemitronik Gesellschaft Fur Elektronik-Grundstoffe Mbh Method for the production of semiconductor rods of large diameter and device for making the same
US4059493A (en) * 1976-04-29 1977-11-22 Cities Service Company Anode, anode basket and method of packaging anodes
US4220839A (en) * 1978-01-05 1980-09-02 Topsil A/S Induction heating coil for float zone melting of semiconductor rods
US4184135A (en) * 1978-04-10 1980-01-15 Monsanto Company Breakapart single turn RF induction apparatus
US4506132A (en) * 1981-10-30 1985-03-19 Siemens Katiengesellschaft Induction coil in the form of a flat coil for crucible-free floating zone melting
US4579719A (en) * 1982-08-06 1986-04-01 Siemens Aktiengesellschaft Apparatus for crucible-free floating-zone melting a semiconductor rod, particularly of silicon
US4714808A (en) * 1986-09-02 1987-12-22 Fmc Corporation Induction heating pressure welding with linear bus bar joint
AU588696B2 (en) * 1986-09-02 1989-09-21 Charles A. Brolin Induction heating pressure welding apparatus
US4833287A (en) * 1987-04-27 1989-05-23 Shin-Etsu Handotai Co., Ltd. Single-turn induction heating coil for floating-zone melting process
US4942279A (en) * 1987-05-25 1990-07-17 Shin-Etsu Handotai Co., Ltd. RF induction heating apparatus for floating-zone melting
US5009860A (en) * 1987-05-25 1991-04-23 Shin-Etsu Handotai Co., Ltd. Semiconductor rod zone melting apparatus
US5113049A (en) * 1991-02-14 1992-05-12 Pda Engineering Flexible induction heating coil
US5792258A (en) * 1995-01-31 1998-08-11 Shin-Etsu Handotai Co., Ltd. High-frequency induction heater and method of producing semiconductor single crystal using the same
US20110073591A1 (en) * 2008-07-17 2011-03-31 Seiichi Sawatsubashi Guide Chip Structure for High-Frequency Induction Heating Coil
US20110204044A1 (en) * 2008-11-25 2011-08-25 Chaoxuan Liu High-frequency coil pulling holes arrangement for producing multiple silicon cores
EP2366814A1 (de) * 2008-11-25 2011-09-21 Chaoxuan Liu Hochfrequenzspulen-ziehlochanordnung zur herstellung von mehreren siliziumkernen
EP2366814A4 (de) * 2008-11-25 2014-03-19 Luoyang Jinnuo Mechanical Eng Hochfrequenzspulen-ziehlochanordnung zur herstellung von mehreren siliziumkernen
US20120018422A1 (en) * 2010-01-20 2012-01-26 Benteler Automobiltechnik Gmbh Method and apparatus for producing a structural part using induction heating
US9282593B2 (en) 2011-06-03 2016-03-08 General Electric Company Device and system for induction heating
US20130140299A1 (en) * 2011-12-05 2013-06-06 Neturen Co., Ltd. Heating coil
US10582575B2 (en) * 2011-12-05 2020-03-03 Neturen Co., Ltd. Heating coil
CN111101199A (zh) * 2019-12-30 2020-05-05 亚洲硅业(青海)股份有限公司 可拆卸高频线圈与硅芯炉

Also Published As

Publication number Publication date
IT971386B (it) 1974-04-30
PL79132B1 (de) 1975-06-30
DK146725B (da) 1983-12-12
FR2162442A1 (de) 1973-07-20
NL7213754A (de) 1973-06-12
GB1406079A (en) 1975-09-10
DK146725C (da) 1984-05-28
CA976617A (en) 1975-10-21
JPS5124964B2 (de) 1976-07-28
DE2160694B2 (de) 1979-06-13
AT324433B (de) 1975-08-25
DE2160694A1 (de) 1973-06-14
DE2160694C3 (de) 1980-02-07
GB1406080A (en) 1975-09-10
JPS49100960A (de) 1974-09-24
BE789504A (fr) 1973-01-15
FR2162442B1 (de) 1977-08-26

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