US3723276A - Article coating method - Google Patents

Article coating method Download PDF

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Publication number
US3723276A
US3723276A US00829906A US3723276DA US3723276A US 3723276 A US3723276 A US 3723276A US 00829906 A US00829906 A US 00829906A US 3723276D A US3723276D A US 3723276DA US 3723276 A US3723276 A US 3723276A
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Prior art keywords
target
coating
articles
substrate
cleaning
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US00829906A
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English (en)
Inventor
G Lane
C Cartwright
K Elmslie
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Warner Lambert Co LLC
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Warner Lambert Co LLC
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/36—Gas-filled discharge tubes for cleaning surfaces while plating with ions of materials introduced into the discharge, e.g. introduced by evaporation

Definitions

  • ABSTRACT OF THE DISCLOSURE 10 There is also a need for simplified apparatus which make practical the practice of a process having a plurality of An apparatus and method for coating articles or substeps within a single unit of apparatus.
  • the described apparatus which P e for Pleamng Substrate Prior coating by sequential or simultaneous operations carried includes means for providing preliminary cleamng o t e out within a single evacuated chamber so that the operasubstrate as well as the target before coating, such cleaning operation being capable of operating in any one of Hons may be f' i wlthout breekmg the .vacuum several different Operational modes various mechanical necessary to obtain conditions under which sputtering takes handling and protective devices are described for carrying out the operations in a single vacuum chamber.
  • the substrate is first cleaned by so-calle reveal-Se an article to be coated, for cleaning the target which serves sputtering (using the intended substrate as a target) or as a Source glow discharge cleaning, or sputter etching, then protected against contamination while the target is cleaned, with the substrate thereafter being exposed to coating by sputtering.
  • simultaneous substrate cleaning and deposition takes place, as the target and the substrate are maintained at different potentials while having radio frequency alternating voltages impressed thereon.
  • the apparatus provides a means of performing these the blade to a h g Vacuum m operations either simultaneously or in sequence on a p ue e l of the mventlen 15 9 PYOVlde an effp rality of articles at one or more stations without breaking Yams 1n Whleh e reverse eputtefmg y be ut lhled the vacuum in the evacuated chamber, or allowing as amethed of cleaning the article to be coated prior to tamination of the article, substrate or target between eoalmg thereo? cleaning and coating operations.
  • Another object is to provide an apparatus in which cleaning of an article or substrate by glow discharge, or
  • a still further ob'ect is to rovide a cleaning and coat of using the sputtering deposition methods described in apparatus which iniludes ayacuum chamber means m these applications is that the cutting instrument may be in for pp g a plurality of articles to ⁇ De coated finish ground, honed and stropped to a desired degree 0 for advancin them in succession ast a coafm Sta sharpness and thereafter coated bprotecgifizh
  • 222 g 223 3 z g f includes means for establishing a high frequency elect a field either alternately or simultaneously between the or to sharpen an edge previously imparted to an instrumeut after the edge has been hardened.
  • Edge surfaces at and the groufld and the aftlcles f ceated am so coated may also readily be coated with lubricous coatground for cleemng and eoatmg the article 111 the de ing materials such as plastic materials, silicone lubricants, mannernow known
  • a further ob ect of the invention is to provide ai or the like, in any known manner.
  • cles approximately parallel to a surrounding surfac ing the time they are being cleaned, and which includes given axis to reverse the orientation thereof at a desired means for rotating one or more article holders to a depoint in the apparatus; and sired extent about its own axis within a relatively small is a fragmentary plan view of a portion of the portion of the motion cycle of the article holder and for article protective device of the invention, showing the olding it against axial rotation during a relatively larger mo e of operation and an alternate position thereof in portion of its rotating cycle. phantom lines.
  • Another Object IS to provide an apparatus IH- OF THE cludes means, preferably single means, for exposing ar- MENTS OF THE INVENTION ticles to be coated to coating material being sputtered from the target in one position of said means, and for pro- 1
  • the invention l now be d s ribed With reference tecting the articles against contamination sputtered from to Partlchlar ehlhodlmems thereof, In h first f which the target durmg cleanmg th f m another posmon f c caning of all the articles to be coated takes place before such means, as well as serving as means for aiding target any of the articles, groups of artlcles, a ate cleaning prior to the time the target material is sputtered F emhg how the drawings In greater etai and onto the articles to b Coated.
  • this form of the invention 0t er object is to provide a method in which a radio may be seen to be di in a combination article requency 1s Impressed both on a target and on an arm cleaning and coating apparatus 10 whic is somewhat dicle to be coated, the target and article are allowed to agrammahcahy Q t0 1110111618 8 rame or base 12, reach differing electrical potentials so that there is a signifimeans P estahhshlhfe ah evachated r 8 h rm f cant potential between the two, in which minute quantities an exterior, q h hght houslflg Which is mounted of an inert gas are introduced at least into an evacuated means for recelvlhg and handling arhcles t e c ated, 1n region between the articles and the target, whereby atoms the form of F assembly 16 Comprised of a lower ring ionized by the electrons
  • ring 28 which adapted to Support a P sputtering off one or more surface atoms, thereof, to prorahtY P amcle holdhr means the f m 0 bayonet as vide simultaneous lower rate surface cleaning of the arsembheF 30 f holdlhg a plurality of rt s 32 thereon. ticle and higher rate sputtering of the coating onto the ar- The driven rmg 28 mc1udeS external rlhg ge teeth 34 ticle, and an apparatus for carrying out the method.
  • Stub shaft Eilch bayonet assembly Q by providing a vacuum apparatus having means for cludeswertically disposed tines 42 which are received porting a plurality of articles or groups or articles within a clrcular holder member 44 havmg a lower exten an evacuated chamber or other region target means Com sion 46 rotatably mounted for iotation in bearings 48 and taining a coating material, means for moving the articles further Includes a bottom g 50 fixedly attached h f about in the chamber, means for supplying high frequency i 52 .arespmvlded on h gear for recelvmg electrical energy to the articles for one mode of operation, C am T e 4 also has Pomohs thereof ehgflgmg and to the target In another mode and Control means for teeth 56 on the outer periphery of a central, fixed
  • FIG 1 is a vertical sectional View, taken through a alternately for each full revolution of the ring 28.
  • t e exterior circumference of the sprockets and vention, and illustrating certain principal portions of the gears 50, 58 may be selected so as to turn the bayonet ,pparams; assembly 30 one-half turn for each complete turn of the FIG.
  • FIG 2 is a top plan view, partly in plan and partly in Tlhg ection, with portions broken away, showing the appara- In the embodiment shown in FIGS- 1 and a motor Us of FIG 1; 68 is provided having a shaft 70 thereon containing a driv-
  • FIG 3 is a schematic View of a simplified form of the en bevel gear 74 which is fixedly attached t0 the stub lectrical circuitry of the invention; shaft 40.
  • the ring 28 and the parts associated there- F G. 4 is a schematic view of another portion of the with are rotated by the manner set forth above. ectrical circuit of the invention showing a power sup- As shown in FIGS.
  • F 5 is a schematic view showing the operation of and for assisting in the cleaning of such articles, in the Jortion of the electrical circuit of the apparatus in one form of an article shroud assembly 76 defining, on the dc of operation for cleaning the blade; inside thereof, a cylindrical passageway 78.
  • the shroud E is a schematic view showing the circuit of the assembly 76 includes an outer wall portion 80, an inner iaratus in another mode of operation thereof, for cleanwall portion 82, a top wall portion 84, and on an insulatthe blades or the like by another process; ing support 86 which is fixedly attached to the roof por- G 7 is a top view, partly in horizontal section, and tion 88 of the chamber 14.
  • the bottom edge 90 of the l portions broken away, showing another form of the shroud assembly 76 is closely spaced apart from the iratus of the invention; upper surface of the ring 28, so that the articles 32 held on is a vertical sectional view, on a greatly enthe tines of 42 of the bayonets 30 are substantially comis for orienting groups of articles to be coated in a rotation of the ring 28. ed position of use, and for rotating them about a Referring now particularly to FIG.
  • an opening 92 is provided in a part of the exterior wall 80 of the shroud 76, and that this opening 92, which is defined by oppositely facing end surfaces 94, 96 of the wall 80 includes means in the form of a movable shield 98 for protecting the articles 32 against contamination which might enter through the opening 92.
  • the shield 98 is adapted to be removably received in a relatively snug relation within the opening 92, that is, with the edges 100, 102 of the shield 98 engaging the end surfaces 94, 96.
  • Means in the form of pins 104, 106 are provided for locating the shield 98 and for establishing the path of movement thereof in a manner which will be described in greater detail herein. As shown in the phantom lines in FIG.
  • the shutter or shield 98 may be moved from the closed position to an open position'lying closely along the outer surface of the wall 80, thereby exposing the articles 32 to any particles which may be sputtered from the target assembly 108 received in a target housing portion 110 of the chamber 14.
  • each wall 80, 83 comprises respectively an outer surface 112, 114, an inner surface 116, 118, and intermediate heater units 120, 122, the construction and function of which will be described in further detail herein.
  • the target assembly 108 includes a dark space shielding assembly 124, a target plate 126, and a backing plate 128 which will be described in further detail herein.
  • a co-axial lead-in assembly 130 extends through a rear wall portion 132 of the housing portion 110.
  • FIG. 9 shows that a support arm 134 is fixedly attached to the rear surface 136 of the shield 98, and the support arm 134 includes a driving gear sector 138, a pair of elongated slots 140 receiving respectively a guide pin 142 and a guide and pivot pin 144. Teeth 146 are arranged on the sector 138 so that rotation of the shaft 148 and its associated driving gear 150 will move the arm 134 straight forward a given distance as shown in the phantom lines, until further rotation of the gear 150 will cause a swinging of the shield 98 to the fully opened position shown in phantom lines in FIG. 9.
  • the backing plate 128 contains a continuous tube 152 having the near end thereof communicating with the interior passage 154 of an outer coolant tube 156, inside which is co-axially disposed an inner coolant tube 158, the interior 160 of which communicates with the far end of the tube 152.
  • Water or like coolant passes in the direction of the arrows, that is, into the backing plate 128 of the target assembly 108 through the outer tube 156 and thence circuitously through the tube 152 within the backing plate 128 and out the exit opening 162 of the inner tube 158.
  • a wire lead 164 is attached to the outer surface of the outer tube 156, which serves as the connection to the radio frequency generator, shown schematically at 166.
  • a ceramic insulator 168 and gasket assembly 170 are provided to provide electrical and vacuum insulation, and, being conventional and not forming per se a novel part of the present invention, further description thereof is omitted.
  • the target plate 126 is disposed in electrical as well as intimate heat exchange contact with the backing plate 128, and typically in a pure chromium metal or other metal or alloy to be deposited on the article or substrate.
  • the backing plate 128 is preferably copper or other like electrically and thermally conductive material.
  • the dark space shielding assembly 124 surrounds these components in the illustrated manner.
  • a direct current (DC) supply 172 is schematically illustrated for connection at a terminal 174 to a movable pole 176 of a switch 178 so that, in one position of the switch 178, communication may be established between the direct current source or supply 172, which has one terminal thereof grounded, as by lead 180, and the article 32 to be coated.
  • a radio frequency (RF) supply 182 having a grounded lead 184 on one terminal thereof has an opposite terminal 186 connected to a lead 188, so that connection may also be established between this supply 182 and the articles 32.
  • Another terminal 190 is grounded by lead 192 so that the articles 32 may be grounded by moving the switch 178 to an appropriate position.
  • Means in the form of a lead 194 are provided for grounding the shield 98 through the switch 196 if desired.
  • the RF generator 166 and the RF supply 182 may be the same unit, and may be different units in other embodiments.
  • FIG. 3 shows that an RF connection may be established between the generator 166 and the target and backing plate 126, 128, that the shield 98 may or may not be grounded, and that the blade or other articles 32 may alternately be floating, grounded, or connected to a DC supply or to an RF supply, as desired.
  • the exact connections and the sequences in which they are made will be set forth below in connection with a description of the operation of the apparatus.
  • FIG. 4 there are shown somewhat schematically a vacuum chamber 198, having a target electrode 200 therein, in a spatially communicating relation with an inert gas source 202 by means of a leak valve 204 disposed in the connector line 206, and in electrical communication or contact with the tunable RF renerator and amplifier assembly 208 and the tunable pi matching network 210, through the coaxial lead-in assembly 130.
  • a leak valve 204 disposed in the connector line 206
  • the tunable RF renerator and amplifier assembly 208 and the tunable pi matching network 210 through the coaxial lead-in assembly 130.
  • the tunable generator and amplifier assembly 208 is schematically shown in the form of lead 212 adapted for connection to an oscillator or other radio frequency source (not shown), and a tube 214 which is connected thereto so as to amplify the RF signal to the desired intensity, an inductor 216 and a pair of grounded variable capacitors 21-8, 220 being connected to either terminal of the inductor 216 for establishing a resonant condition of the electrical circuit, typically at a frequency of 13.56 megacycles.
  • the pi matching network 210 includes a grounded fixed capacitor 222 and a variable capacitor 224 in parallel with each other, and further includes an inductor 226 and a second variable capacitor 228 between the inductor 226 and the target electrode 200.
  • the matching network 210 is adapted to match the impedance of the output circuit, including the amplifier tube 214 and its associated circuitry with the impedance of the target electrode 200.
  • the target electrode 200 which is isolated from the ground, together with its inductor 226 and variable capacitor 228, is an open circuit to direct current but has a definite AC impedance at a given frequency, and this impedance is matched in the manner shown, or in an other suitable manner, to the impedance of the output circuit furnishing the signal.
  • the output circuit has a 50 ohm impedance, and the target assembly should be tuned so as to have the same impedance.
  • the capacitor 228 also serves to couple the output circuit to the target electrode 200 capacitively, so that direct current bias may be built up on the target electrode 200.
  • FIG. 5 the connection between the DC supply 172 and the articles 32 are shown, it being apparent that the blade is separated by a high vacuum gap 230 from a grounded element 232, which is shown as being disposed parallel to the edges 66 of the blade or other articles 32.
  • a glow discharge may be developed in the space 230 between the grounded element 232 and the blade 32, in the presence of a minute amount of inert gas leaked into the space 230 over a background of very high vacuum (low pressure), and ionized by high energy current flow.
  • FIG. 6 shows an RF supply 182 connected to the article 32 and also shows the grounded element 232 being spaced apart from the articles 32, and with the edges 66 of the articles 32 and the element 232 being generally parallel.
  • a reverse sputtering or sputter etching may take place under these conditions if an inert gas is leaked in minute quantity into the space 230 between the article 32 and the element 232, over a background of high vacuum, and ionized.
  • the articles 32 to be coated are razor blades, and the process may be carried out as follows.
  • EXAMPLE 1 The vacuum tight housing 14, including the roof portion 88 thereof, is lifted vertically from the base 12, and a plurality of razor blades 32 are disposed in a stack in parallel relation to each other with the central apertures thereof in registry with the tines 42 on the bayonet assemblies 30.
  • Each bayonet assembly 30 is loaded with a stack of blades, with each stack containing up to several thousand blades.
  • the housing 14 is aligned and placed over the base 12, so that the blades are surrounded by the shroud 76 in the manner shown in FIG. 1.
  • a roughing vacuum pump (not shown) is operated to draw an initial vacuum inside the unit 10, and thereafter, the vacuum is increased to a level approximately 1 10- millimeters (mm.) of mercury (torr).
  • the shield 98 is moved to the closed position so that two continuous inwardly facing surfaces 116, 118 are presented to the blades.
  • the shroud assembly 76 may be grounded, so that the element 232 in FIG. 5, in this mode of operation, would be one or both of the surfaces 116, 118 of the shroud 76.
  • a potential of from about 500 to 3000 volts DC, and preferably about 1000 volts is impressed on the blades, such as from the DC source 172.
  • argon or like inert gas is leaked through the valve 204 by a source 202 (FIG. 4) until the pressure reaches a level from about 1 10- to 1 10 torr.
  • a current of about 500 milliamperes (ma.) will be developed, and the resulting glOW discharge will cause ionization of argon atoms and impingment thereof onto the blade edges to a degree sufficient to remove surface contaminants, particularly organic material and adsorbed gases.
  • Preliminary vaporization of such volatile contaminants, and elimination of adsorbed material may be aided by activating the heater units, 120, 122 so as to heat the blades 32 to a temperature well below their annealing point, but high enough to aid in removing these contaminants.
  • the blade edges may reach a temperature of 300 to 400 F.
  • the DC supply is disconnected from the blades or articles 32, the ground connection to the shroud 76 is removed so that it is insulated from the ground, and the ring 28 and associated components, including the articles 32 are then grounded.
  • the vacuum is then again reduced to the level of about 1 l0- torr as a background pressure, RF energy at 13.56 megacycles or megahertz (me. or mHz.) is supplied to the target electrode 126, and argon is leaked through the valve 204 until a pressure of approximately 6 to 9X10- torr is reached, while the shield 98 remains in the closed position.
  • the electrode 126 becomes the cathode in this mode of operation, and the argon or other inert gas atoms which are ionized in the RF field are attracted to the target 126 by the DC bias thereon with consequent sputtering of surface atoms from the target 126.
  • the major portion of these sputtered atoms of coating material fall on the outer surface of the shield 98, which is interposed between the articles 32 and the target 126.
  • the surface of the target 126 which would normally have contained a certain amount of contamination such as oxides, adsorbed gases, or the like will become completely clean and pure, free from any contamination.
  • each blade or article passes by the target 126 with its edges 66 generally parallel thereto and in a facing relation to the target 126.
  • each bayonet assembly 30 has passed the target 126 twice, both edges of the articles 32 contained thereon have been exposed for coating for the desired time, and the coating operation is complete.
  • the apparatus and method just described provides means and methods for glow discharge cleaning under vacuum conditions to clean the surface of the articles to be coated, following which the articles are protected during vacuum cleaning of the target, whereupon the final step of coating the clean blades with material deposited from the cleaned target is accomplished. All of these steps are carried out in the same apparatus, merely by changing electrical conditions and manipulating the vacuum level and inert gas leak valve controls, but without exposing the articles to any atmospheric contamination by breaking the vacuum during any of the operational cycles.
  • the blades cleaned and coated by the use of this method and apparatus have proved to be outstanding in coating integrity and uniformity.
  • EXAMPLE 2 A method was performed as set forth above, differing significantly only in the respects set forth below. Following loading of the articles within the apparatus and establishment of the described vacuum, articles 32 were connected to an RF supply such as the supply 182, having one terminal thereof grounded, and the other terminal 186 thereof in electrical communication with the bayonet 30 and the articles 32 contained thereon. The shield 98 remains in the closed position, and the shroud assembly 76 may be grounded. Argon or like inert gas is leaked through the valve 204 to establish a pressure of about 1 to 3 10- torr.
  • the blades at a power setting of the RF supply sufficient to cause a current flow of about 50 ma., achieve a DC bias of up to about 3000 volts, and as the argon ionized atoms bombard the blade edges, any oxide layer thereon, and small amounts of the metal surface itself, are removed by this bombardment, to insure that the blade surface to be coated is completely free of contamination, including atmospheric contamination.
  • the cleaning operation which can be characterized as reverse sputtering, that is, using the intended substrate or article as a target
  • the RF supply is connected to the target 126
  • the blades or articles 32 are electrically grounded, and the surface of the target 126 is cleaned in the manner set forth in connection with 'Example 1.
  • the shield 98 is moved to the open position, and the blades or other articles 32, which are at ground potential, are coated, also in the same manner as set forth above in Example 1.
  • the blades cleaned and coated by the use of this method and apparatus have also proved to be outstanding in coating integrity and uniformity.
  • EXAMPLE 3 Blades were cleaned and coated in the manner set forth in Example 2, except that a cleaning operation, in this case is characterized as a sputter etching operation, instead of reverse sputtering.
  • This operation was accomplished by applying approximately 1000 watts of RF power at 13.56 mHz. to the blades, which attained a DC bias of from about 4000 to about 5000 volts.
  • Cleaning was carried out under an argon pressure of from about 6 to about 9 10- torr, for a period of several minutes. In this mode, less argon or other inert gas was used than in the foregoing examples, and the distance between the blade or other articles 32 and the grounded terminal is preferably somewhat greater than under the conditions set forth in Example 2.
  • This operation may be suitably carried out in an apparatus in which the shroud 76 has the walls 116, 118 thereof spaced farther from the edges 66 of the articles 32 than would be the case where glow discharge cleaning is used.
  • the target cleaning and blade coating is carried out in the same manner as in the foregoing Examples 1 and 2. Excellent results were obtained.
  • EXAMPLE 4 An apparatus substantially the same as that described above was used to carry out the following method of the invention, in which the blades or other articles 32 were cleaned and coated simultaneously.
  • the inner surfaces 116, 118 of the outer and inner walls 80, 82 of the shroud 76 were made with a substantial thickness of article coating material thereon, that is, typically, with a relatively thick coating of pure metallic chromium thereon.
  • Blades were loaded in the manner set forth in the above examples, and the shield 98 was moved to the closed position.
  • An RF supply 234, having one terminal 236 thereof grounded, has the other terminal 238 thereof connected, as by a switch 240, to the inner surface 116, 118 of the shroud 76, and to the inner surface 136 of the shield 98.
  • An RF supply such as the supply 182 is connected to the ring 28 and thus to the bayonet 30 and the articles 32 supported thereon.
  • the RF supply may be a single unit having one lead attached to the shroud 76 and the other to the articles 32, or two individual RF supplies, one for the shroud and one for the articles, may be used.
  • the interior of the apparatus 10 is evacuated to a background pressure of about 1x10- torr, and the walls 116, 118 of the shroud 76 are supplied with a 13.56 megacycle RF, the shroud 76 being electrically isolated, as by the insulator 86, from the ground.
  • a power of about 5000 watts is applied and a voltage of about 5000 volts DC may be developed as argon is leaked through the valve 204 until a pressure of about 6 to 9X 1O is reached.
  • the blades or articles 32 to be coated are also supplied with an RF of the same frequency, and the insulator 20 or the like insures that the ring 28 and parts of the apparatus 10 operatively associated therewith are isolated from the ground.
  • a power of from about 800 to 1000 watts is supplied to the blades, which develop a DC bias of about 2000 volts.
  • the articles 32 or blades form one electrode of one RF supply and the ground the other electrode.
  • the shroud 76 forms one electrode, and the ground is the other electrode.
  • the ionized inert gas atoms will strike both the DC biased articles 32 and the target, which in this case comprises the interior surfaces 116, 118 of the shroud 76.
  • any contamination of either the target or the blade will thus become diffused rather than remaining in one or two, near surface layers, and, since a thickness of 10 to 30 atomic diameters of surface coating is ultimately built up on the blade or other articles, such contaminants, even if present, do not damage the quality or integrity of the coating.
  • a certain incidental amount of coated material is resputtered back to the target, but the overall effect is that of simultaneously reducing the target thickness and placing a high quality coating on the articles.
  • the shield 98 need not be movable, and the target assembly 108 and the housing may be eliminated, although it is possible to operate the apparatus in the form shown herein according to the method described in this example, the target and housing not being functionally involved, but not being required to be removed for operation.
  • the apparatus illustrated herein may be used in these different modes of operation without alteration, or an apparatus according to the invention may be constructed so as to be useful in all modes but to favor a particular mode of operation 1n use.
  • FIGS. 7 and 8 portions of another form of the apparatus of the invention are shown, these elements being adapted to receive a plurality of articlesupporting elements thereon for handling in a manner and for purposes which will now be set forth.
  • a cam track assembly 242 is shown to include a circular continuous cam body 242 having an outer surface 246 adapted to guidingly receive thereon a front bayonet drive pin 248 and a rear bayonet drive pin 250, each pin 248, 250 being operatively associated with an article holder 252.
  • a second, outer cam element 254 for effecting rotation of each of the holders 252 about its axis is disposed on a ring and cam support plate 256 which also supports the body 244, with the profiled inner surface 258 of the element 254 facing a complementary shaped outwardly facing surface 260 on the body 244, and spaced apart therefrom by approximately the diameter of a pin 248 plus a slight working clearance.
  • FIG. 8 the disposition of the pins 248, 250 between the surface 260 of the cam body 244 and the inner surface 258 of the outer cam element 254 is shown.
  • the two pins 248, 250 ride with their inner surfaces in a sliding relation to the outer surface 246 of the cam body 244, thereby maintaining the holders 252 and any articles disposed thereon substantially in a fixed orientation with respect to the circular body 244. That is, for example, the articles are supported so that a line extending between the pins 248, 250 would always be substantially perpendicular to a radius of a circle disposed co-axially with relation to the cam body 244.
  • this pin 250 rides along or outside of the outer surface 244 of the cam element 244, while following the profile of the cam channel 264 causes the lead pin 248 to begin lagging behind in respect to the trailing pin 250 as the holder 252 continues movement, until their positions are reversed, as shown in FIG. 7 where the pins 248, 250 are emerging from the channel 264 and passing the end of the cam element 254 in FIG. 7.
  • a holder 252 will maintain an orientation with a part of the articles mounted thereon facing inwardly toward the center of the cam track 244 for about 300 to 330 of revolution, for example, after which, by engagement with the cam mechanism just described, it will rotate one-half turn about its own axis to present an opposite face of a supported article to the side, or toward the center of revolution.
  • each article holder 252 includes a lower extension portion 268 held by a fastener 270 in fixed relation to a base 272, which includes openings 274 for for receiving the pins 248, 250.
  • a bearing assembly 276 locates the holder 252 and mounts it and its associated components for rotation about its vertical axis.
  • a snap ring 278 retains the bearing assembly 276 in position within the opening 282 in the rotatable ring 282.
  • Fasteners 284, 286 respectively secure an internally toothed ring gear 288 and a bearing plate 290 to the ring 282.
  • the ring and cam support plate 256 supports a lower bearing race 292 having a groove 294 therein in which is received a plurality of ball bearings 296 for supporting the plate 290.
  • Another bearing assembly 298 on an inner surface 300 of the plate 256 includes a ring driving stub shaft 302 having on one end thereof a pinion gear 304 for engagement with the ring gear 288, and a bevel gear 306 on the other end thereof for engagement with a matched driving bevel gear 308 supported on a driven shaft 310.
  • a motor (not shown) drives the shaft 310 through an outer output shaft 312 and a flexible coupling 314.
  • a bearing assembly 316 supports the driven shaft 310 and the gear 308 in rotatable relation to the bottom support 318 for the plate 256.
  • An insulator 320 is disposed between the support 318 and a lower portion 322 of the cleaning and coating apparatus 10.
  • the means for driving the ring 282 are somewhat difierent, comprising the ring gear 288 and pinion gear 304 with its associated mechanism, instead of the chain 58 and the gears 50, 58 illustrated in connection with the description of FIGS. 1 and 2.
  • the resulting motion of the supported articles is different in the embodiment shown in FIGS. 7 and 8 than it is in the embodiments shown in FIGS. 1 and 2, for example.
  • the provision of the pins 248, 250 riding on the exterior surface 246 of the cam body 244 serves to maintain the edges 322 of any article 316 parallel to an inner surface 318 of a shroud or the like 320 and perpendicular to radial planes defined by the longitudinal axis of the shroud 320 during an entire revolution of the ring 282, except where the cam track assembly 242 acts to rotate each holder 252 about its own vertical axis.
  • the bayonet assemblies 30 were rotated continuously one degree about their own axes for each two degrees of revolution of the ring 28.
  • FIGS. 7 and 8 are preferred where it is desired to maintain an edge 322 of an article 316 parallel to a given surface 318 so that the potential drop between the edge 322 and the surface 318 is relatively the same at all points along the edge 322. Accordingly, in some modes of operation, the manner of supporting the blades and manipulating them shown in FIGS. 7 and 8 is preferred.
  • EXAMPLE 5 A plurality of blades 316 or like articles were placed on the holder 252, and the blades were cleaned by any of the methods set forth in the foregoing Examples 1 through 3, and were coated by sputtering a chromium coating from the target 324 disposed within a shield unit 326 in the same manner as described in connection with the above Examples 1 through 3.
  • the apparatus described is also operative to produce excellent blades when modified and operated in the manner set forth in connection with the description of the embodiment of Example 4.
  • the provision of the shield 98 serves the dual function of providing means for shielding the blades or articles against contamination during the time the target is cleaned by sputtering the first several layers of surface material therefrom, and also the function of protecting the target from sputtered contamination during the time the blades are being cleaned by glow discharge, sputter etching, or reverse sputtering.
  • the illustrated apparatus includes support means for the article holders in the form of the solid rings shown, but it will be appreciated that the articles might be moved past the target by other means, such as by mounting the holders on links of a continuous belt or chain, for example.
  • One sputtered material illustrated herein is metallic chromium, but it will be understood that other metals, metal alloys, and compounds such as metal carbides or the like may also be sputtered onto the coated articles.
  • additional target means may be provided, suitable connections may be made to supply high frequency energy to them in any desired sequence.
  • a commonly inert gas used in the sputtering operation is argon, but other inert gases such as neon or krypton may also be used. Details of the electrical circuitry may be altered by those skilled in the art, but a typical means of establishing a connection between relatively movable parts in a high vacuum is by the use of a gold brush or the like such as that shown in FIG. 1.
  • step (d) moving said arrays between said inner surfaces in a circular direction while maintaining the relative array arrangements of step (a),
  • a method as defined in claim 1 further including the step of cleaning said at least one target by removing a portion of the surface thereof by sputtering prior to p (e)- 3.
  • step (0) includes applying a direct current bias to said arrays.
  • step (c) includes applying a high frequency alternating current to said arrays to establish a direct current bias on said arrays with respect to ground.
  • step (e) include atoms of organic contaminants and atoms of gases adsorbed on said surface.
  • step (e) includes portions of the cutting edges and atoms of oxide coatings formed on the cutting edges.
  • step (d) moving said arrays between said inner surfaces in a circular direction while maintaining the relative array arrangements of step (a),

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physical Vapour Deposition (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
US00829906A 1969-06-03 1969-06-03 Article coating method Expired - Lifetime US3723276A (en)

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US82990669A 1969-06-03 1969-06-03

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US (1) US3723276A (es)
JP (2) JPS5136236B1 (es)
CA (1) CA949021A (es)
DE (1) DE2027301C3 (es)
ES (1) ES380347A1 (es)
FR (1) FR2049889A5 (es)
GB (1) GB1318771A (es)
NL (1) NL169349C (es)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4151059A (en) * 1977-12-27 1979-04-24 Coulter Stork U.S.A., Inc. Method and apparatus for sputtering multiple cylinders simultaneously
US5961798A (en) * 1996-02-13 1999-10-05 Diamond Black Technologies, Inc. System and method for vacuum coating of articles having precise and reproducible positioning of articles

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3404880A1 (de) * 1984-02-11 1985-08-14 Glyco-Metall-Werke Daelen & Loos Gmbh, 6200 Wiesbaden Verfahren zum herstellen von schichtwerkstoff oder schichtwerkstuecken
US4896813A (en) * 1989-04-03 1990-01-30 Toyo Kohan Co., Ltd. Method and apparatus for cold rolling clad sheet

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4151059A (en) * 1977-12-27 1979-04-24 Coulter Stork U.S.A., Inc. Method and apparatus for sputtering multiple cylinders simultaneously
US5961798A (en) * 1996-02-13 1999-10-05 Diamond Black Technologies, Inc. System and method for vacuum coating of articles having precise and reproducible positioning of articles

Also Published As

Publication number Publication date
JPS5313591B1 (es) 1978-05-11
GB1318771A (en) 1973-05-31
CA949021A (en) 1974-06-11
NL169349C (nl) 1982-07-01
DE2027301B2 (de) 1980-09-11
FR2049889A5 (es) 1971-03-26
DE2027301C3 (de) 1981-05-27
DE2027301A1 (de) 1970-12-10
ES380347A1 (es) 1973-04-16
NL169349B (nl) 1982-02-01
JPS5136236B1 (es) 1976-10-07
NL7008076A (es) 1970-12-07

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