JPS5136236B1 - - Google Patents
Info
- Publication number
- JPS5136236B1 JPS5136236B1 JP45047543A JP4754370A JPS5136236B1 JP S5136236 B1 JPS5136236 B1 JP S5136236B1 JP 45047543 A JP45047543 A JP 45047543A JP 4754370 A JP4754370 A JP 4754370A JP S5136236 B1 JPS5136236 B1 JP S5136236B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/36—Gas-filled discharge tubes for cleaning surfaces while plating with ions of materials introduced into the discharge, e.g. introduced by evaporation
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US82990669A | 1969-06-03 | 1969-06-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5136236B1 true JPS5136236B1 (es) | 1976-10-07 |
Family
ID=25255867
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP45047543A Pending JPS5136236B1 (es) | 1969-06-03 | 1970-06-03 | |
| JP7538676A Pending JPS5313591B1 (es) | 1969-06-03 | 1976-06-25 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7538676A Pending JPS5313591B1 (es) | 1969-06-03 | 1976-06-25 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US3723276A (es) |
| JP (2) | JPS5136236B1 (es) |
| CA (1) | CA949021A (es) |
| DE (1) | DE2027301C3 (es) |
| ES (1) | ES380347A1 (es) |
| FR (1) | FR2049889A5 (es) |
| GB (1) | GB1318771A (es) |
| NL (1) | NL169349C (es) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4151059A (en) * | 1977-12-27 | 1979-04-24 | Coulter Stork U.S.A., Inc. | Method and apparatus for sputtering multiple cylinders simultaneously |
| DE3404880A1 (de) * | 1984-02-11 | 1985-08-14 | Glyco-Metall-Werke Daelen & Loos Gmbh, 6200 Wiesbaden | Verfahren zum herstellen von schichtwerkstoff oder schichtwerkstuecken |
| US4896813A (en) * | 1989-04-03 | 1990-01-30 | Toyo Kohan Co., Ltd. | Method and apparatus for cold rolling clad sheet |
| US5961798A (en) * | 1996-02-13 | 1999-10-05 | Diamond Black Technologies, Inc. | System and method for vacuum coating of articles having precise and reproducible positioning of articles |
-
1969
- 1969-06-03 US US00829906A patent/US3723276A/en not_active Expired - Lifetime
-
1970
- 1970-06-03 DE DE2027301A patent/DE2027301C3/de not_active Expired
- 1970-06-03 GB GB2673470A patent/GB1318771A/en not_active Expired
- 1970-06-03 JP JP45047543A patent/JPS5136236B1/ja active Pending
- 1970-06-03 ES ES380347A patent/ES380347A1/es not_active Expired
- 1970-06-03 CA CA084,552A patent/CA949021A/en not_active Expired
- 1970-06-03 FR FR7020447A patent/FR2049889A5/fr not_active Expired
- 1970-06-03 NL NLAANVRAGE7008076,A patent/NL169349C/xx not_active IP Right Cessation
-
1976
- 1976-06-25 JP JP7538676A patent/JPS5313591B1/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| NL169349B (nl) | 1982-02-01 |
| DE2027301B2 (de) | 1980-09-11 |
| NL7008076A (es) | 1970-12-07 |
| DE2027301C3 (de) | 1981-05-27 |
| DE2027301A1 (de) | 1970-12-10 |
| ES380347A1 (es) | 1973-04-16 |
| JPS5313591B1 (es) | 1978-05-11 |
| NL169349C (nl) | 1982-07-01 |
| FR2049889A5 (es) | 1971-03-26 |
| GB1318771A (en) | 1973-05-31 |
| US3723276A (en) | 1973-03-27 |
| CA949021A (en) | 1974-06-11 |