US3719025A - Resolving gas mixtures - Google Patents

Resolving gas mixtures Download PDF

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US3719025A
US3719025A US00196604A US3719025DA US3719025A US 3719025 A US3719025 A US 3719025A US 00196604 A US00196604 A US 00196604A US 3719025D A US3719025D A US 3719025DA US 3719025 A US3719025 A US 3719025A
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zone
pressure
gas mixture
gas
air
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G Heinze
R Sarnes
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Bayer AG
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Bayer AG
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/047Pressure swing adsorption
    • B01D53/0476Vacuum pressure swing adsorption
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2253/00Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10Inorganic adsorbents
    • B01D2253/104Alumina
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2253/00Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10Inorganic adsorbents
    • B01D2253/106Silica or silicates
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2253/00Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10Inorganic adsorbents
    • B01D2253/106Silica or silicates
    • B01D2253/108Zeolites
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2256/00Main component in the product gas stream after treatment
    • B01D2256/12Oxygen
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2257/00Components to be removed
    • B01D2257/10Single element gases other than halogens
    • B01D2257/102Nitrogen
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2257/00Components to be removed
    • B01D2257/50Carbon oxides
    • B01D2257/504Carbon dioxide
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2257/00Components to be removed
    • B01D2257/80Water
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2259/00Type of treatment
    • B01D2259/40Further details for adsorption processes and devices
    • B01D2259/40007Controlling pressure or temperature swing adsorption
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2259/00Type of treatment
    • B01D2259/40Further details for adsorption processes and devices
    • B01D2259/402Further details for adsorption processes and devices using two beds
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2259/00Type of treatment
    • B01D2259/40Further details for adsorption processes and devices
    • B01D2259/403Further details for adsorption processes and devices using three beds
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/26Drying gases or vapours
    • B01D53/261Drying gases or vapours by adsorption
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02CCAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00Capture or disposal of greenhouse gases
    • Y02C20/40Capture or disposal of greenhouse gases of CO2

Definitions

  • Oxygen-enriched air is required for example for intensifying oxidation reactions in chemical processes, for use in metallurgy, for accelerating fermentative processes and for producing hot flames.
  • the advantage of adsorptive methods for producing oxygen-enriched air is embodied in the simplicity of the processes, which are generally carried out at ambient temperature. Since no high-percentage oxygen or even liquid oxygen is formed in the plants, plants of this kind can be operated in the complete absence of danger and the safety precautions normally taken in liquid air plants are unnecessary. By virtue of the simplicity of the installations, it is also possible to build economically operating units, even down to extremely low capacities.
  • Installations for the adsorptive enrichment of constituents of a gas mixture on the pressure-variation principle function in the pressure range between the inlet or entry pressure p of the gas to be separated, which can be available either at atmospheric pressure or at excess pressure, and the desorption pressure p which is produced by a vacuum pump.
  • the desorption pressure p can also be atmospheric pressure, in other words the gas is allowed to expand to atmospheric pressure in the absence of a vacuum pump. Accordingly, pressure-variation installations can be operated in the excess pressure normal pressure, normal pressure vacuum or excess pressure vacuum ranges. In installations for enriching the oxygen in air, it is preferred to operate by evacuation with a vacuum pump because the N -desorption at atmospheric pressure is inadequate.
  • Installations of this kind can consist of a single adsorption system communicating with a storage vessel, or of two or more parallel adsorption systems functioning in sequence so that a constant stream of oxygen-enriched air is obtained as the product gas.
  • the overflow, evacuation and pressure-buildup cycles follow one another in chronological rotation.
  • Adsorptive enrichment processes for oxygen are based on the principle that different molecular sieve zeolites adsorb nitrogen to a greater extent than they adsorb oxygen. Since only a few percent by weight of nitrogen are adsorbed at ambient temperature, the charging cycles are so short that the nitrogen cannot be thermally desorbed. Accordingly, the zeolite is regenerated by pressure reduction, optionally combined with the application of a purge gas.
  • the air can adequately be predried in adsorbers filled with molecular sieve zeolites which are thermally regenerated after saturation with water.
  • a drying installation of this kind with the associated regenerating apparatus is relatively complex and also has the disadvantage that a considerable, undesirable increase in the temperature of the air stream occurs during the adsorptive removal of water, especially when air at atmospheric pressure is being dried, on account of the heat of adsorption.
  • the separating efficiency of an adsorptive oxygen enrichment installation decreases with increasing temperature.
  • DAS 1,259,857 to dry the air by passing it through low temperature recuperators until its water content amounts to less than 201p mg/Nm (p is the pressure in kg/cm).
  • p is the pressure in kg/cm
  • a process of this kind can only be worked economically in cases where adsorptive oxygen enrichment is to be carried out at low temperatures of, for example, from -60 to -100C.
  • DAS 1,259,844 It has also been proposed (DAS 1,259,844) to have the actual oxygen enrichment installation for drying the air preceded by an independently operating, adsorption installation functioning on the pressure-variation principle which is filled with any drying agent suitable for this purpose, for example activated alumina, and which delivers the dried air to a storage vessel from which the actual separating plant is fed.
  • any drying agent suitable for this purpose for example activated alumina
  • a process of this kind has the disadvantage of high energy consumptionv because, to regenerate the drying towers, some of the previously compressed air has to be continuously vented to the atmosphere.
  • the process also includes intermittently discontinuing passage of the gas mixture through the first and second zones, reducing the pressure in the first zone relative to the second zone by withdrawing gas from said first zone, whereby the gaseous component adsorbed in said second zone is desorbed, passes into said first zone, replaces the adsorbed gas therein and the now desorbed, previously adsorbed gas in the first zone is withdrawn from the first zone, discontinuing the reduction of pressure in said first zone, reinitiating passage of the gas mixture to said first zone and from there into said second zone,.and temporarily delaying the flow of said gas mixture from said first zone into said second zone so that the pressure in said first zone builds up prior to build-up of pressure in said second zone.
  • the process according to the invention obviates the disadvantages of earlier processes and enables the oxygen content of moist air to be enriched without an appreciable energy requirement for drying.
  • the process according to the invention can be carried out as follows for example using zeolites as adsorbents: a zeolite-filled adsorber and an adsorber filled with a drying agent are associated with one another and connected by a pipe provided with a throttle means.
  • afairly high resistance is put up to the gas flowing through the connecting pipe in alternating directions as it flows from the drying agent to the zeolite (adsorption), at least during the period of pressure increase in the zeolite adsorber from the desorption pressure to at most the working pressure, with the throttle means more closed than open.
  • a lower resistance is offered to the gas stream during the period of pressure decrease from the working pressure to the desorption pressure with the throttle means more open than closed.
  • zone I after regeneration of the adsorption system and resumption of the flow of gas to the first zone (zone I) the flow of gas from zone I to the second zone (zone ll) is altogether interrupted, rather than being merely throttled, until the pressure in zone I approaches or reaches its normal working level.
  • predrying of the air and the separation of nitrogen are carried out in a single process stage.
  • the drying agent and the adsorbent for nitrogen are arranged in separate vessels, one dryer and one nitrogen adsorber together form a unit through which the gases to be dried and enriched and, in the opposite direction, the regeneration gases flow chronologically in the same cycle.
  • the moist gas enters the dryer, gives off its moisture to the drying agent and then flows through the separating column.
  • the gas flows through the dryer in the opposite direction from the separating column and carries the moisture previously stored there into the open.
  • the throttle means arranged between the two zones I and II is substantially or completely closed so that the entry pressure p of the air is adjusted relatively quickly in the dryer, while the increase of pressure in the zeolite adsorber, by virtue of the throttle effect, only takes place after some delay.
  • the advantage of this measure is that drying of the entry air, taken as an average over the inflow time, takes place at a higher pressure than in the absence of the throttle means. Since, at the same time as the pressure, the H 0 partial pressure is also increased accordingly, greater charging of the drying agent and hence a shorter adsorption zone are obtained. In addition, the effective rate of flow in the dryer is reduced which also improves the drying effect.
  • the pressure would fall more rapidly in the dryer than in the zeolite adsorber if the throttle means were substantially closed. Basically, this would promote the desorption of water from the drying agent because, in the event of a rapid drop in pressure, an effectively larger quantity of regenerating gas would flow through the drying agent.
  • it is actually the desorption stage, providing it is carried out by evacuation with a vacuum pump, which is the principal energy-consuming stage in oxygen enrichment processes.
  • the flow of gas between the zones II and I is kept as free as possible from interference in the process according to the invention during the desorption stage in order to reduce flow resistances, especially for as long as the vacuum pump is functioning effectively, i.e. during the fall in pressure from the working pressure to the desorption pressure, at least from that point in time at which atmospheric pressure is approximately reached in the drying agent adsorber.
  • FIG. 1 is a schematic illustration of an apparatus in accordance with the invention having a time-controlled throttled valve between first and second zones;
  • FIG. 2 is a similar view of another embodiment with a one-way valve in a by-pass pipe extending between the first and second zones;
  • FIG. 3 is a similar view of still another embodiment of valving to delay pressure build-up in the second zone
  • FIG. 4 is a schematic illustration of a system comprising two banks of adsorption zones arranged in parallel, one undergoing desorption while the other is undergoin g adsorption;
  • FIG. 5 is a schematic illustration of a system with three banks arranged in parallel, one undergoing adsorption, one desorption and the third pressure buildup after desorption and prior to renewed adsorption.
  • variable throttle means can consist of a non-return flap which is installed in a bypass pipe to the connecting pipe as shown in FIG. 2.
  • the reference I denotes the adsorber filled with drying agent while the reference II denotes the zeolite adsorber for the adsorption of N
  • the two adsorbers are connected to the regulating valve 5 through the pipe 3.
  • the regulating valve 5 is fixedly adjusted to the required through-flow cross section.
  • a bypass pipe 4 with the non-return valve 6 leads around the valve 5.
  • the non-return valve When the gas is flowing from I to II (adsorption), the non-return valve is closed, whereas when the gases are flowing in the opposite direction (desorption) it is automatically opened so that the total cross-sectional area of pipe for flow of gas is larger than during adsorption.
  • the throttle means can also consist of an electrically or pneumatically controlled valve 5 which is accommodated in the connecting pipe 3 between the two zones.
  • the valve is actuated, i.e. more or less widely opened, by a timedependent regulating system.
  • the throttle valve 5 is regulated directly as a function of the pressure difference between zones I and II, rather than by a time control system.
  • the throttle valve 5 remains less widely open until the pressure prevailing in thezeolite column II has approached the entry pressure of the air adjusted in the drying column I.
  • This method of regulation has the advantage that any changes in the operating parameters of the installation, such as the throughput, entry pressure, cycle time, pump efficiency, etc., do not necessitate readjustment of the setting of the throttle valve 5.
  • FIG. 3 Another embodiment is shown in FIG. 3.
  • a regulating valve 5 is arranged in the connecting pipe 3 between the two zones I and I], being completely closed during charging and completely open during desorption.
  • An overflow valve is installed in the bypass pipe 4 parallel to this regulating valve, remaining initially closed during charging to produce a particularly rapid build up of pressure in the dryer I. Only after a certain pre-adjusted pressure has been reached does the overflow valve open, allowing the adsorber II to fill up while maintaining the pressure in the dryer I.
  • the combination of one dryer with one nitrogen adsorber according to the invention into a unit which functions in time in the adsorption cycle, and the principle of regulating the flow resistance in the connecting line between both vessels by a throttle means in the manner described above, can be applied to oxygen enrichment plants with 2,3 or more nitrogen adsorbers.
  • the principle of the invention is not confined to a certain construction of pressure-variation systems or to application within certain pressure ranges. It can function generally at pressures of from 5.0 Torr to 15 atmospheres. Regeneration is preferably carried out at reduced pressures of down to 50 Torr, preferably of from 50 to 400 Torr, while gas removal is preferably carried out at atmospheric pressure.
  • the process as a whole and the gas-removal stage in particular can be carried out at elevated working pressure, i.e. up to pressures of 15 and preferably up to 6 atmospheres.
  • regeneration is carried out either by expansion to atmospheric pressure or even at reduced pressure.
  • Drying agents suitable for use in installations implementing the process according to the invention include various adsorbents such as, for example, silica gels, activated alumina and molecular sieve zeolites, providing they can be reversibly charged and discharged under the operating conditions of the pressure-variation system which is also known as cold regeneration.
  • Molecular sieve zeolites suitable for the N adsorbers include natural and synthetic zeolites providing they show sufficiently high selectivity and absorptivity for nitrogen at the working temperatures of the process. It is preferred to use type A zeolites exchanged with divalent cations or faujasite in granular form.
  • Synthetic faujasites and type 5 A zeolites are preferably used for removing carbon dioxide from combustion or cracked gases.
  • Throttle means as shown in FIG. 2 with the nonreturn valves 6a and 6b were installed in a laboratory installation of the kind shown in FIG. 4 comprising two nitrogen adsorbers (Na and IIb) and the associated dryers (la and lb). 7a and 7b are further non-return flaps at the outlet end of the nitrogen adsorbers which close during evacuation of the adsorbers.
  • the magnetic valves 8a, 9a, 8b and 9b are controlled by a time relay.
  • the air to be enriched with oxygen is removed at the valve 10 of a compressed air line.
  • 11 is a water saturator in which the air is saturated with water vapor at room temperature.
  • 12 is a relief pressure valve which throughout the entire system only admits an excess pressure corresponding to the water column in 12.
  • 13 is a non-return valve which prevents the water from rising back from the relief pressure valve 12.
  • the dryers Ia and lb are each filled with 200 g of silica gel in bead form with a moisture indicator, so-called Blaugel.
  • the nitrogen adsorbers Ila and 11b each contain 477 g of a calcium-strontium zeolite A in bead.
  • the vacuum pump 18 is a gas ballast pump with an intake of 1100 liters per hour.
  • a time relay changes the setting of the magnetic valves 8a, 9a, 8b and 9b every 55 seconds.
  • the valves 8a and 9b are opened and the valves 9a and 8b closed.
  • air saturated with moisture flows through pipe 16 and the magnetic valve 8a into the previously evacuated adsorbers Ia and [la until the pressure is equalized.
  • the non-return flap 6a closes, thus causing a fairly rapid build up of pressure in the dryer Ia.
  • the non-return flap 7a opens and oxygenrich dry product gas flows through pipe 14 to a gasometer 15.
  • the adsorbers lb and llb, with the non-return flap 7b closed are evacuated through the magnetic valve 9b and the pipe 17 by the vacuum pump 18 which gives ofi' nitrogenrich moist gas to the atmosphere.
  • the same operations take place with the magnetic valves 8b and 9a opened and the magnetic valves 8a and 9b closed, only the adsorption systems a and b exchanging their functions. For an average rate of flow of the entry air of 420 N-l/hour, 150 N-l/hour of dry product gas with an oxygen content of 43 percent by volume are obtained.
  • the vacuum reached at the end of each switching cycle in the nitrogen adsorber amounts to 105 Torr.
  • the indicator color of the silica gel in the dryers Ia and lb showed that, after a few hours operation, the charging front did not move any further forwards, but remained stationary.
  • the non-retum valves 6a and 6b were forcefully prevented from closing through jamming of the cones, the Ibo-charging zone moved through the dryers which were not adequate for this operational state.
  • the function of the non-return flaps 6a and 6b was restored, the water-charging zone returned again and settled at the original stationary value.
  • EXAMPLE 2 In an industrial installation comprising three adsorber units of the kind shown in FIG. 5, 1 13 liters (90 kg) of silica gel in bead form with so-called Blaugel as the moisture indicator were accommodated in each of the containers 1a, b and c, while 190 liters (125 kg) of calcium zeolite A in head form were accommodated in each of the containers Ila, b and c.
  • the containers la, b and were used to dry the incoming atmospheric air, while the containers Ila, b and c were used for nitrogen adsorption and oxygen enrichment.
  • valves 7a, 7b and 7c at the head of the zeolite containers were non-return valves.
  • the vacuum pump had a delivery of approximately 500 mlh.
  • valve 8b was adjusted with atmospheric air flowing in through pipe 16 and the opened valve 8b from an absolute pressure of approximately to 100 Torr to atmospheric pressure.
  • the valves 5b and 9b were closed during this operation.
  • the overflow valve 6b was also initially closed and, as a result, caused the rapid build up of atmospheric pressure in container lb. After this pressure had been reached valve 6b permitted gas to escape into container llb so that its pressure also rose to atmospheric whereupon valve 5b could be opened for resumption of normal flow during adsorption.
  • the containers la, b and c were provided with one transparent wall. Even after continuous operation for several weeks, it was impossible to detect any local change in the mass-transfer zone, i.e. the zone in which the Blaugel undergoes a change in color to pink, remained stationary.
  • the improvement which comprises intermittently discontinuing passage of the gas mixture through the first and second zones, reducing the pressure in the first zone relative to the second zone by withdrawing gas from said first zone, whereby the gaseous component adsorbed in said second zone is desorbed, passes into said first zone, replaces the adsorbed gas therein and the now desorbed, previously adsorbed gas in the first zone is withdrawn from the first zone, discontinuing the reduction of pressure in said first zone, reinitiating passage of the gas mixture to said first zone and from there into said second zone, and temporarily delaying the flow of said gas mixture from said
US00196604A 1970-11-11 1971-11-08 Resolving gas mixtures Expired - Lifetime US3719025A (en)

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DE2055425A DE2055425B2 (de) 1970-11-11 1970-11-11 Adsorptionsverfahren zum Zerlegen von Gasgemischen

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JP (1) JPS5117146B1 (xx)
BE (1) BE775175A (xx)
DE (1) DE2055425B2 (xx)
FR (1) FR2114554A5 (xx)
GB (1) GB1375728A (xx)
IT (1) IT944819B (xx)
NL (1) NL172027C (xx)

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US3866428A (en) * 1971-05-03 1975-02-18 Air Liquide Cryogenic separation of an air feed using multi-zone adsorption units
DE2443072A1 (de) * 1973-12-12 1975-07-03 Air Prod & Chem Verfahren zur sauerstoffanreicherung
US3923477A (en) * 1973-10-24 1975-12-02 British Oxygen Co Ltd Adsorption system
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US4065272A (en) * 1975-01-02 1977-12-27 Boc International Limited Oxygen-enriched air
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US4321069A (en) * 1979-10-26 1982-03-23 Ritter Robert A Multiple vessel cascade gas enrichment system
US4326858A (en) * 1977-06-01 1982-04-27 Linde Aktiengesellschaft Pressure buildup technique in pressure swing adsorption process
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US4784672A (en) * 1987-10-08 1988-11-15 Air Products And Chemicals, Inc. Regeneration of adsorbents
US4812147A (en) * 1985-11-08 1989-03-14 Union Carbide Corporation Multicomponent adsorption process
US4822383A (en) * 1987-04-30 1989-04-18 United Technologies Corporation Method and apparatus for removing carbon dioxide from air
US4950311A (en) * 1988-03-07 1990-08-21 White Jr Donald H Heaterless adsorption system for combined purification and fractionation of air
US4973339A (en) * 1989-10-18 1990-11-27 Airsep Corporation Pressure swing absorption process and system for gas separation
US5061455A (en) * 1987-04-30 1991-10-29 United Technologies Corporation Apparatus for removing carbon dioxide from air
US5531809A (en) * 1994-09-14 1996-07-02 Air Products And Chemicals, Inc. Pretreatment layer for CO-VSA
US6158580A (en) * 1999-08-27 2000-12-12 Kenneth Davis Container having a humidity control system
US20050000428A1 (en) * 2003-05-16 2005-01-06 Shero Eric J. Method and apparatus for vaporizing and delivering reactant
US20100266765A1 (en) * 2009-04-21 2010-10-21 White Carl L Method and apparatus for growing a thin film onto a substrate
US20110053383A1 (en) * 2009-08-26 2011-03-03 Asm America, Inc. High concentration water pulses for atomic layer deposition
EP2563496A1 (en) * 2010-03-29 2013-03-06 Wearair Oxygen, Inc. Contaminant mitigation in psa air fractionation

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DE3122701A1 (de) * 1981-06-06 1982-12-23 Bergwerksverband Gmbh, 4300 Essen Verfahren zur trennung von gasgemischen mittels druckwechseltechnik
JP3677086B2 (ja) * 1995-06-30 2005-07-27 ペルメレック電極株式会社 電解方法
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US3242651A (en) * 1961-04-24 1966-03-29 United Aircraft Corp Purification system with equalizing valve
US3674429A (en) * 1971-01-06 1972-07-04 Union Carbide Corp Adsorption process for water and nitrogen oxides

Cited By (39)

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US3866428A (en) * 1971-05-03 1975-02-18 Air Liquide Cryogenic separation of an air feed using multi-zone adsorption units
US3796022A (en) * 1971-11-30 1974-03-12 Air Liquide Method of and installation for the fractionation of a gaseous mixture by adsorption
US3923477A (en) * 1973-10-24 1975-12-02 British Oxygen Co Ltd Adsorption system
DE2443072A1 (de) * 1973-12-12 1975-07-03 Air Prod & Chem Verfahren zur sauerstoffanreicherung
US3957463A (en) * 1973-12-12 1976-05-18 Air Products And Chemicals, Inc. Oxygen enrichment process
US4065272A (en) * 1975-01-02 1977-12-27 Boc International Limited Oxygen-enriched air
US4000990A (en) * 1975-04-16 1977-01-04 Nrg Nufuel Company Adsorption process
US4190424A (en) * 1975-07-17 1980-02-26 Boc Limited Gas separation
US4299596A (en) * 1976-02-04 1981-11-10 Linde Aktiengesellschaft Adsorption process for the separation of gaseous mixtures
US4222750A (en) * 1976-08-16 1980-09-16 Champion Spark Plug Company Oxygen enrichment system for medical use
US4326858A (en) * 1977-06-01 1982-04-27 Linde Aktiengesellschaft Pressure buildup technique in pressure swing adsorption process
US4432774A (en) * 1977-06-30 1984-02-21 Bergwerksverband Gmbh Adsorption-desorption process for the recovery of hydrogen
JPS5454989A (en) * 1977-10-07 1979-05-01 Nippon Denshi Zairiyou Kk Method and apparatus for enriching oxygen
US4331455A (en) * 1979-05-11 1982-05-25 Osaka Oxygen Industries, Ltd. Method of producing oxygen rich gas utilizing an oxygen concentrator having good start-up characteristics
US4321069A (en) * 1979-10-26 1982-03-23 Ritter Robert A Multiple vessel cascade gas enrichment system
US4406675A (en) * 1981-12-10 1983-09-27 Union Carbide Corporation RPSA Process
US4449990A (en) * 1982-09-10 1984-05-22 Invacare Respiratory Corp. Method and apparatus for fractioning oxygen
US4478714A (en) * 1983-01-10 1984-10-23 Ciba-Geigy Ag Pressurized filtration system
US4477264A (en) * 1983-03-30 1984-10-16 Air Products And Chemicals, Inc. Pressure swing adsorption process for a medical oxygen generator for home use
US4491459A (en) * 1983-05-04 1985-01-01 Pinkerton Charles J Portable oxygen enrichment and concentration system
US4627856A (en) * 1983-12-15 1986-12-09 Linde Aktiengesellschaft Process for the adsorptive separation of steam and a less readily adsorbable component from a gaseous stream
US4636225A (en) * 1984-03-23 1987-01-13 Linde Aktiengesellschaft Drying of gases with multi-layer adsorption beds
US4552571A (en) * 1984-04-05 1985-11-12 Vbm Corporation Oxygen generator with two compressor stages
US4812147A (en) * 1985-11-08 1989-03-14 Union Carbide Corporation Multicomponent adsorption process
US4711645A (en) * 1986-02-10 1987-12-08 Air Products And Chemicals, Inc. Removal of water and carbon dioxide from atmospheric air
US4756723A (en) * 1987-03-04 1988-07-12 Air Products And Chemicals, Inc. Preparation of high purity oxygen
US5061455A (en) * 1987-04-30 1991-10-29 United Technologies Corporation Apparatus for removing carbon dioxide from air
US4822383A (en) * 1987-04-30 1989-04-18 United Technologies Corporation Method and apparatus for removing carbon dioxide from air
US4784672A (en) * 1987-10-08 1988-11-15 Air Products And Chemicals, Inc. Regeneration of adsorbents
US4950311A (en) * 1988-03-07 1990-08-21 White Jr Donald H Heaterless adsorption system for combined purification and fractionation of air
US4973339A (en) * 1989-10-18 1990-11-27 Airsep Corporation Pressure swing absorption process and system for gas separation
US5531809A (en) * 1994-09-14 1996-07-02 Air Products And Chemicals, Inc. Pretreatment layer for CO-VSA
US6158580A (en) * 1999-08-27 2000-12-12 Kenneth Davis Container having a humidity control system
US20050000428A1 (en) * 2003-05-16 2005-01-06 Shero Eric J. Method and apparatus for vaporizing and delivering reactant
US20100266765A1 (en) * 2009-04-21 2010-10-21 White Carl L Method and apparatus for growing a thin film onto a substrate
US20110053383A1 (en) * 2009-08-26 2011-03-03 Asm America, Inc. High concentration water pulses for atomic layer deposition
US9117773B2 (en) 2009-08-26 2015-08-25 Asm America, Inc. High concentration water pulses for atomic layer deposition
EP2563496A1 (en) * 2010-03-29 2013-03-06 Wearair Oxygen, Inc. Contaminant mitigation in psa air fractionation
EP2563496A4 (en) * 2010-03-29 2014-04-30 Wearair Oxygen Inc CONTAMINANTS DEPRESSION IN A PSA AIR FRACTIONATION

Also Published As

Publication number Publication date
DE2055425B2 (de) 1979-09-06
GB1375728A (xx) 1974-11-27
NL172027B (nl) 1983-02-01
NL7115352A (xx) 1972-05-15
JPS5117146B1 (xx) 1976-05-31
BE775175A (fr) 1972-05-10
FR2114554A5 (xx) 1972-06-30
DE2055425A1 (de) 1972-05-18
NL172027C (nl) 1983-07-01
IT944819B (it) 1973-04-20

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