US3706475A - Air slides - Google Patents

Air slides Download PDF

Info

Publication number
US3706475A
US3706475A US128777A US3706475DA US3706475A US 3706475 A US3706475 A US 3706475A US 128777 A US128777 A US 128777A US 3706475D A US3706475D A US 3706475DA US 3706475 A US3706475 A US 3706475A
Authority
US
United States
Prior art keywords
air slide
accordance
recesses
air
plenum chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US128777A
Other languages
English (en)
Inventor
Carl Yakubowski
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of US3706475A publication Critical patent/US3706475A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks

Definitions

  • ABSTRACT An air slide for imparting both lift and direction to a semiconductor wafer, the air slide comprisinga guide plane having a plurality of arcuate recesses in the-surface thereof, the recesses having side and bottom walls with the bottom wall of each of the recesses having an upward slope which merges into the surface of the guide plane substantially in the direction of intended motion of the semiconductor wafer.
  • a longitudinally extending plenum chamber may be connected so as to underlie the track or be positioned at opposite lateral edges of the track, the edge connection of the plenum chambers enhancing the ability for close spacing and thus tiering of the guide planes.
  • two basic track'structu'res which permit of alternate air supply sources, such as a fan or high pressure air.
  • Another object of the present invention is to provide an air slide which is adaptable for both long and short runs to permit the supply of air thereto to be accomplished by existing in house air supply systems or a simple fan.
  • Yet another object of the present invention is to provide an air slide which may be easily tiered so as to permit simultaneous sending and receiving of workpieces in which the limitation of tier spacing is the height of I the object.
  • Still another object of the present invention is to provide an air slide which is simple in operation and manufacture and which may be fabricated from inexpensive materials.
  • FIG. 1 is a fragmentary schematic plan view of an air slide constructed in accordance with the present invention
  • FIG. 2 is an enlarged fragmentary perspective view of a portion of the air slide shown in FIG. 1;
  • FIG. 3 is an enlarged fragmentary plan view of another embodiment of an air slide constructed in accordance with the present invention.
  • FIG. 4 is a fragmentary sectional view taken along line 4-4 of FIG. 3;
  • FIG. 5 is a fragmentary perspective view of another embodiment of the air slide of the present invention.
  • FIG. 6 is a fragmentary side elevational view of a portion of the slide shown in FIG. 5;
  • FIG. 7 is a plan view of another embodiment of the air slide of the present invention being used as a tumtable transport.
  • FIG. 1 an air slide or track 10 particularly adapted for imparting lift and direction to a workpiece, in the illustrated instance a semiconductor wafer 11, is illustrated therein.
  • the air slide or track in the embodiment illustrated in FIGS. 1 and 2 includes a guide plane 12 bounded on opposite longitudinal edges, in the present instance with low upstanding walls 13 and 14 which serve to prevent the workpiece or wafer 11 from being laterally discharged off of the slide.
  • means are provided in the guide plane 12 for imparting lift to the workpiece while propelling the same (when provided with a suitable flow of gaseous media) along the direction shown by the arrows 15 in FIG 1.
  • each of the recesses merges into the guide plane at a'point so as to cause air to flow substantially in the direction of intended motion of the workpiece.
  • the air slide or track 10 in the embodiment illustrated in FIG. 2, includes a longitudinally extending channel 19 which serves as the plenum chamber for the air slide.
  • the channel 19 bisects the arcuate recesses forming a clear passage for air or other gaseous media to enter into the plenum chamber as by inlet means 20.
  • the lower portion of the channel 19 may be closed as by a support plate 21 or the channel may be formed directly in the material of the track 10.
  • cover means 22 close off the upper surface of the channel 19 forming the upper surface of the plenum chamber.
  • the cover means includes a longitudinally extending strip 23 which is fittable into a ledge-shaped recess 24 cut into the side walls 19A and 19B of the channel 19.
  • the air inlet openings from the plenum chamber into the recess form an orifice 16A defined by I the underside of the strip 23, and the side and bottom walls 17 and 18 respectively of the recesses 16.
  • the cover means 22 serves as a baffle to cause air to flow from the plenum chamber into the air recesses in a direction substantially along the axis of the recesses.
  • a simple muffin fan may be connected to the inlet means 20 and effect sufficient air flow to cause the workpieces to be lifted above the surface or guide plate 12 while imparting direction to the workpiece.
  • a Rotron muffin fan with approximately C.F.M. at zero (0) static pressure, approximately 10 feet of track may be serviced. With ten (10) feet of track length the static pressure restricts the fan output to roughly twenty (20) C.F.M.
  • multiple fans may be utilized spaced along the track at appropriate intervals depending upon, of course, the cubic feet per minute rating of the fan, the size of the recesses and of course the orifice 16A.
  • a guide plane 30 includes a pluralityof arcuate recesses 31, each having upstanding side walls 32 and 33 and upwardly sloped bottom walls 34.
  • the bottom wall of each of the arcuate recesses merges into the guide plane at a point so as to cause air to flow substantially in the direction of intended motion of the workpiece.
  • the nature of the recess is in effect the same as that disclosed in FIGS. 1-2 and above described.
  • a plenum chamber 35 is formed in a similar manner as described hereinbefore.
  • a longitudinally extending recess 36 is provided in the guide plane 30 and adapted for receiving cover means 37 identical to the cover means 22 described relative to FIGS. 1 and 2.
  • cover means 37 identical to the cover means 22 described relative to FIGS. 1 and 2.
  • an aperture or orifice 38 may be formed through the arcuate recess into the plenum chamber substantially along the center line of the recess 36 thus providing fluid communication between the plenum chamber 35 and therecesses 31.
  • the small orifices 38 then he in a plane substantially perpendicular to the guide plane such that when the cover means 37 is in position, air is directed along the axis of the arcuate recesses causing the air flow to egress in a forward and upward direction out of the guide plane 30.
  • the apertures or orifices 38 may be relatively small, the volume of air flow is reduced but of necessity the air pressure interiorally of the plenum chamber must be increased due to the increase in resistance. Thus with an air slide of this construction, a low pressure in-house air supply may be used.
  • the structure of the present invention permits the tiering of the air slides so that a multiplicity-of workpieces may be transported simultaneously in the same or opposite directions.
  • a plurality of guide planes 40, 50 and 60 are shown in superimposed juxtaposition relation, in the illustrated instance each of the guide planes being connected to a plenum chamber 70, 71 disposed along the opposite longitudinally extending edges 41, 42, 51, 52, 61, 62 of the guide planes.
  • the arcuate recesses 43, 53, 63 formed in the surface of each of the guide planes 40, 50 and 60 each have upwardly sloped bottom walls which merge into the surface of the respective guide planes so as to impart both lift and direction to workpieces such as wafers 11 in the direction of intended motion (see arrows 40A, 50A).
  • the recesses in each of the planes is formed in. left and right hand sets, for example, the left hand set 43A in guide plane 40 being connected to .plenum chamber 70 through suitable orifice-like apervery close intervals.
  • the recesses may be formed in opposite directions, such that the wafer 11A supported above guide plane 40 is caused to be transported from left to right, while the wafer 113 which is supported above guide plane 50 intermediate guide plane 40 and 50 is caused to be transported in the opposite direction.
  • an inexpensive air slide constructed in accordance with the present invention may be utilized in lieu of a turntable.
  • the air slide may be constructed in the form of a circular track having a plurality of arcuate recesses 81 similar to that heretofor described.
  • the workpiece 82 may be transported in a circular fashion about the track by placing the workpiece 82 on the slide and transported from one station to any other station disposed about the perimeter of the track without rotationthereof.
  • an upstanding annular wall 83 must be provided to prevent centrifugal force from ejecting the workpiece radially outward from the track.
  • the slide of the present invention may be constructed of any convenient material such as nylon, Delrin (trademark of DuPont de Nemours) etc. the recesses being formed either by molding, or even angulating a circular hole saw.
  • the present invention provides a novel air slide for imparting both lift and direction to a workpiece, the air slide being readily adapted for both long and short runs to permit the supply of air theretoto be accomplished by existing in-house air supply systems or a simple fan arrangement. Additionally, the present invention is easily adapted to permit simultaneous sending and receiving of workpieces at or by tiering the slides thereby effecting spatial economies.
  • An air slide for imparting lift and direction to a workpiece placed thereon; said air slide comprising: a track including a guide plane having a plurality of narrow elongated arcuate recesses in the surface thereof, each of said recesses having closely spaced side walls and a bottom wall joining said side walls, said bottom wall being sloped upwardly and merging into said guide plane substantially in the'direction of intended motion of said workpiece, a longitudinally extending plenum chamber connected to said track, and means connecting said plenum chamber to said recesses, and means to cause air to flow from said plenum chamber into said arcuate recesses in a direction substantially along the axis of said recesses.
  • An air slide in accordance with claim 2 including a longitudinally extending recess in the upper surface of said air slide, a channel underlying said recess and extending longitudinally along said track, said channel being in fluid communication with said arcuate recesses.
  • An air slide in accordance with claim 3 including a bottom wall in said longitudinally extending recess, and a plurality of apertures in said bottom wall extending through said bottom wall and providing said means for fluid communication between said plenum chamber and said longitudinally extending recess.
  • An air slide in accordance with claim 3 including cover means overlying said longitudinally extending recess.
  • An air slide in accordance with claim 7 including a second plenum chamber disposed along the opposite longitudinally extending edge of said guide plane.
  • An air slide in accordance with claim 7 including a plurality of guide planes in superimposed juxtapositioned relation, each of said guide planes being connected to said plenum chamber.
  • An air slide in accordance with claim 10 including a plurality of guide planes in superimposed juxtapositioned relation, each of said guide planes being connected to each of said plenum chambers and having recesses arranged in sets.
  • An air slide in accordance with 13 including wall means along the periphery of said track.
US128777A 1971-03-29 1971-03-29 Air slides Expired - Lifetime US3706475A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US12877771A 1971-03-29 1971-03-29

Publications (1)

Publication Number Publication Date
US3706475A true US3706475A (en) 1972-12-19

Family

ID=22436929

Family Applications (1)

Application Number Title Priority Date Filing Date
US128777A Expired - Lifetime US3706475A (en) 1971-03-29 1971-03-29 Air slides

Country Status (5)

Country Link
US (1) US3706475A (ja)
JP (1) JPS5233393B1 (ja)
DE (1) DE2213842C2 (ja)
FR (1) FR2131976B1 (ja)
GB (1) GB1326334A (ja)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3785027A (en) * 1971-08-25 1974-01-15 Ind Modular Syst Corp Method of producing fluid bearing track structure
EP0039079A1 (en) * 1980-04-30 1981-11-04 International Business Machines Corporation Air track system
US4493548A (en) * 1982-03-26 1985-01-15 Eastman Kodak Company Apparatus for supporting flexible members
US5209387A (en) * 1990-09-20 1993-05-11 Eastman Kodak Company Gas film conveyor for elongated strips of web material
US5839722A (en) * 1996-11-26 1998-11-24 Xerox Corporation Paper handling system having embedded control structures
WO2000054310A1 (en) * 1999-03-08 2000-09-14 Asm International N.V. Method and device for rotating a wafer
US20030168174A1 (en) * 2002-03-08 2003-09-11 Foree Michael Todd Gas cushion susceptor system
US20050145180A1 (en) * 2003-11-04 2005-07-07 Ravinder Aggarwal Non-contact cool-down station for wafers
US20110129322A1 (en) * 2009-11-30 2011-06-02 Chih-Hao Huang Wafer conveying system
EP2388808A1 (de) * 2010-05-20 2011-11-23 Westfälische Wilhelms-Universität Münster Berührungsloses Transportsystem

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2228243A (en) * 1989-02-16 1990-08-22 Ibm Air bed transfer track.
DE69304917T2 (de) * 1992-07-15 1997-02-06 Minnesota Mining & Mfg Luftkissenfördersystem zum fördern von gegenständen
US5788425A (en) * 1992-07-15 1998-08-04 Imation Corp. Flexible system for handling articles

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1515965A (en) * 1922-10-25 1924-11-18 Pardee Frank Air spiral
US3411830A (en) * 1966-11-14 1968-11-19 Leon W. Smith Air-cushioning pneumatic conveyor
US3473910A (en) * 1965-10-22 1969-10-21 Pilkington Brothers Ltd Apparatus for transporting glass sheets on a gas module bed

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3103388A (en) * 1963-09-10 High speed pneumatic conveyor
US2805898A (en) * 1955-01-18 1957-09-10 Jr Edward A Willis Fluid current conveyor for fragile articles
US3181916A (en) * 1963-11-04 1965-05-04 Epstein Ralph Air conveyor or pneumatic conveyor for light materials, plastics etc.

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1515965A (en) * 1922-10-25 1924-11-18 Pardee Frank Air spiral
US3473910A (en) * 1965-10-22 1969-10-21 Pilkington Brothers Ltd Apparatus for transporting glass sheets on a gas module bed
US3411830A (en) * 1966-11-14 1968-11-19 Leon W. Smith Air-cushioning pneumatic conveyor

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3785027A (en) * 1971-08-25 1974-01-15 Ind Modular Syst Corp Method of producing fluid bearing track structure
EP0039079A1 (en) * 1980-04-30 1981-11-04 International Business Machines Corporation Air track system
US4493548A (en) * 1982-03-26 1985-01-15 Eastman Kodak Company Apparatus for supporting flexible members
US5209387A (en) * 1990-09-20 1993-05-11 Eastman Kodak Company Gas film conveyor for elongated strips of web material
US5839722A (en) * 1996-11-26 1998-11-24 Xerox Corporation Paper handling system having embedded control structures
US6824619B1 (en) 1999-03-08 2004-11-30 Asm International N.V. Method and device for rotating a wafer
NL1011487C2 (nl) * 1999-03-08 2000-09-18 Koninkl Philips Electronics Nv Werkwijze en inrichting voor het roteren van een wafer.
WO2000054310A1 (en) * 1999-03-08 2000-09-14 Asm International N.V. Method and device for rotating a wafer
US20050051101A1 (en) * 1999-03-08 2005-03-10 Kuznetsov Vladimir Ivanovich Method and device for rotating a wafer
KR100704572B1 (ko) * 1999-03-08 2007-04-09 에이에스엠 인터내쇼날 엔.브이. 웨이퍼를 회전시키는 장치 및 방법
US7351293B2 (en) 1999-03-08 2008-04-01 Asm International N.V. Method and device for rotating a wafer
US20030168174A1 (en) * 2002-03-08 2003-09-11 Foree Michael Todd Gas cushion susceptor system
US7601224B2 (en) 2002-03-08 2009-10-13 Asm America, Inc. Method of supporting a substrate in a gas cushion susceptor system
US20050145180A1 (en) * 2003-11-04 2005-07-07 Ravinder Aggarwal Non-contact cool-down station for wafers
US7147720B2 (en) 2003-11-04 2006-12-12 Asm America, Inc. Non-contact cool-down station for wafers
US20110129322A1 (en) * 2009-11-30 2011-06-02 Chih-Hao Huang Wafer conveying system
EP2388808A1 (de) * 2010-05-20 2011-11-23 Westfälische Wilhelms-Universität Münster Berührungsloses Transportsystem

Also Published As

Publication number Publication date
FR2131976B1 (ja) 1974-09-13
FR2131976A1 (ja) 1972-11-17
DE2213842C2 (de) 1983-06-23
JPS5233393B1 (ja) 1977-08-27
DE2213842A1 (de) 1972-10-12
GB1326334A (en) 1973-08-08

Similar Documents

Publication Publication Date Title
US3706475A (en) Air slides
US3539216A (en) Pickup device
US5067762A (en) Non-contact conveying device
US7510226B2 (en) Non-contact holder device and non-contact holding and conveying device
EP0201240B1 (en) Apparatus for supporting and/or conveying a plate with fluid without physical contact
US3438668A (en) Contactless lifter
GB1301285A (ja)
JPS6443027U (ja)
US3717381A (en) Transporting and positioning system
CN110071061A (zh) 前开式晶圆传送盒
US3131974A (en) Air-lift conveying of solid objects
JP4493742B2 (ja) 浮上搬送装置用の気体噴出構造
EP0076566A1 (en) Gasborne stage positioner for two directions X and Y
US3718371A (en) Fluid bearing track structure and components thereof
US4015880A (en) Multiple level fluid bearing track assembly
US4712784A (en) Adjustable vacuum pad
US4123113A (en) Gas table
GB1492000A (en) Apparatus for breaking a semiconductor wafer
TWI543918B (zh) 用來運送平板構件之輸送載具
US3976329A (en) Vacuum braking system for semiconductor wafers
US3250573A (en) Conveyors
US3431009A (en) Pickup device for supporting workpieces on a layer of fluid
US6218727B1 (en) Wafer frame
KR101261313B1 (ko) 평판 이송물 정렬픽업 이송장치
US3326350A (en) Lamp bulb assorting apparatus