JPS5233393B1 - - Google Patents

Info

Publication number
JPS5233393B1
JPS5233393B1 JP47011493A JP1149372A JPS5233393B1 JP S5233393 B1 JPS5233393 B1 JP S5233393B1 JP 47011493 A JP47011493 A JP 47011493A JP 1149372 A JP1149372 A JP 1149372A JP S5233393 B1 JPS5233393 B1 JP S5233393B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP47011493A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5233393B1 publication Critical patent/JPS5233393B1/ja
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
JP47011493A 1971-03-29 1972-02-02 Pending JPS5233393B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US12877771A 1971-03-29 1971-03-29

Publications (1)

Publication Number Publication Date
JPS5233393B1 true JPS5233393B1 (ja) 1977-08-27

Family

ID=22436929

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47011493A Pending JPS5233393B1 (ja) 1971-03-29 1972-02-02

Country Status (5)

Country Link
US (1) US3706475A (ja)
JP (1) JPS5233393B1 (ja)
DE (1) DE2213842C2 (ja)
FR (1) FR2131976B1 (ja)
GB (1) GB1326334A (ja)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3785027A (en) * 1971-08-25 1974-01-15 Ind Modular Syst Corp Method of producing fluid bearing track structure
US4348139A (en) * 1980-04-30 1982-09-07 International Business Machines Corp. Gas film wafer transportation system
US4493548A (en) * 1982-03-26 1985-01-15 Eastman Kodak Company Apparatus for supporting flexible members
GB2228243A (en) * 1989-02-16 1990-08-22 Ibm Air bed transfer track.
US5209387A (en) * 1990-09-20 1993-05-11 Eastman Kodak Company Gas film conveyor for elongated strips of web material
JPH07508961A (ja) * 1992-07-15 1995-10-05 ミネソタ・マイニング・アンド・マニュファクチュアリング・カンパニー 物品を移送するための流体移送装置
US5788425A (en) * 1992-07-15 1998-08-04 Imation Corp. Flexible system for handling articles
US5839722A (en) * 1996-11-26 1998-11-24 Xerox Corporation Paper handling system having embedded control structures
NL1011487C2 (nl) * 1999-03-08 2000-09-18 Koninkl Philips Electronics Nv Werkwijze en inrichting voor het roteren van een wafer.
US20030168174A1 (en) * 2002-03-08 2003-09-11 Foree Michael Todd Gas cushion susceptor system
US6883250B1 (en) * 2003-11-04 2005-04-26 Asm America, Inc. Non-contact cool-down station for wafers
TW201118027A (en) * 2009-11-30 2011-06-01 Schmid Yaya Technology Co Ltd Chip transporting machine table
EP2388808A1 (de) * 2010-05-20 2011-11-23 Westfälische Wilhelms-Universität Münster Berührungsloses Transportsystem

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3103388A (en) * 1963-09-10 High speed pneumatic conveyor
US1515965A (en) * 1922-10-25 1924-11-18 Pardee Frank Air spiral
US2805898A (en) * 1955-01-18 1957-09-10 Jr Edward A Willis Fluid current conveyor for fragile articles
US3181916A (en) * 1963-11-04 1965-05-04 Epstein Ralph Air conveyor or pneumatic conveyor for light materials, plastics etc.
GB1137555A (en) * 1965-10-22 1968-12-27 Pilkington Brothers Ltd Improvements in or relating to the transporting of sheet materials
US3411830A (en) * 1966-11-14 1968-11-19 Leon W. Smith Air-cushioning pneumatic conveyor

Also Published As

Publication number Publication date
FR2131976A1 (ja) 1972-11-17
US3706475A (en) 1972-12-19
FR2131976B1 (ja) 1974-09-13
DE2213842C2 (de) 1983-06-23
DE2213842A1 (de) 1972-10-12
GB1326334A (en) 1973-08-08

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