GB1326334A - Fluid slides - Google Patents

Fluid slides

Info

Publication number
GB1326334A
GB1326334A GB686872A GB686872A GB1326334A GB 1326334 A GB1326334 A GB 1326334A GB 686872 A GB686872 A GB 686872A GB 686872 A GB686872 A GB 686872A GB 1326334 A GB1326334 A GB 1326334A
Authority
GB
United Kingdom
Prior art keywords
guide plane
recess
fluid
air
slide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB686872A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of GB1326334A publication Critical patent/GB1326334A/en
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks

Abstract

1326334 Fluid slide INTERNATIONAL BUSINESS MACHINES CORP 15 Feb 1972 [29 March 1971] 6868/72 Heading B8A A fluid slide comprises a longitudinal guide plane 12, a plurality of similarly oriented arcuate recesses 16 in the surface of the guide plane, each recess having a bottom surface 18 which slopes upwardly and merges with the guide plane substantially in the longitudinal direction of the track, and means for supplying fluid to each recess in a direction substantially parallel to the guide plane. In the Fig., air is supplied to plenum chamber 19 by inlet 20 and enters recesses 16 through the aperture formed by the portion of the recess below the level of the cover 23 for the plenum chamber. In an alternative embodiment (Figs. 5 and 6, not shown) a plurality of air slides stacked vertically with the air supplied at the edges rather than the centre is shown. The slide is used for the transport of silicon wafers.
GB686872A 1971-03-29 1972-02-15 Fluid slides Expired GB1326334A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US12877771A 1971-03-29 1971-03-29

Publications (1)

Publication Number Publication Date
GB1326334A true GB1326334A (en) 1973-08-08

Family

ID=22436929

Family Applications (1)

Application Number Title Priority Date Filing Date
GB686872A Expired GB1326334A (en) 1971-03-29 1972-02-15 Fluid slides

Country Status (5)

Country Link
US (1) US3706475A (en)
JP (1) JPS5233393B1 (en)
DE (1) DE2213842C2 (en)
FR (1) FR2131976B1 (en)
GB (1) GB1326334A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2228243A (en) * 1989-02-16 1990-08-22 Ibm Air bed transfer track.

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3785027A (en) * 1971-08-25 1974-01-15 Ind Modular Syst Corp Method of producing fluid bearing track structure
US4348139A (en) * 1980-04-30 1982-09-07 International Business Machines Corp. Gas film wafer transportation system
US4493548A (en) * 1982-03-26 1985-01-15 Eastman Kodak Company Apparatus for supporting flexible members
US5209387A (en) * 1990-09-20 1993-05-11 Eastman Kodak Company Gas film conveyor for elongated strips of web material
JPH07508961A (en) * 1992-07-15 1995-10-05 ミネソタ・マイニング・アンド・マニュファクチュアリング・カンパニー Fluid transfer device for transferring goods
US5788425A (en) * 1992-07-15 1998-08-04 Imation Corp. Flexible system for handling articles
US5839722A (en) * 1996-11-26 1998-11-24 Xerox Corporation Paper handling system having embedded control structures
NL1011487C2 (en) * 1999-03-08 2000-09-18 Koninkl Philips Electronics Nv Method and device for rotating a wafer.
US20030168174A1 (en) * 2002-03-08 2003-09-11 Foree Michael Todd Gas cushion susceptor system
US6883250B1 (en) * 2003-11-04 2005-04-26 Asm America, Inc. Non-contact cool-down station for wafers
TW201118027A (en) * 2009-11-30 2011-06-01 Schmid Yaya Technology Co Ltd Chip transporting machine table
EP2388808A1 (en) * 2010-05-20 2011-11-23 Westfälische Wilhelms-Universität Münster Contactless transport system

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3103388A (en) * 1963-09-10 High speed pneumatic conveyor
US1515965A (en) * 1922-10-25 1924-11-18 Pardee Frank Air spiral
US2805898A (en) * 1955-01-18 1957-09-10 Jr Edward A Willis Fluid current conveyor for fragile articles
US3181916A (en) * 1963-11-04 1965-05-04 Epstein Ralph Air conveyor or pneumatic conveyor for light materials, plastics etc.
GB1137555A (en) * 1965-10-22 1968-12-27 Pilkington Brothers Ltd Improvements in or relating to the transporting of sheet materials
US3411830A (en) * 1966-11-14 1968-11-19 Leon W. Smith Air-cushioning pneumatic conveyor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2228243A (en) * 1989-02-16 1990-08-22 Ibm Air bed transfer track.
US5065858A (en) * 1989-02-16 1991-11-19 International Business Machines Corporation Gas-fed transfer track

Also Published As

Publication number Publication date
FR2131976A1 (en) 1972-11-17
US3706475A (en) 1972-12-19
FR2131976B1 (en) 1974-09-13
DE2213842C2 (en) 1983-06-23
DE2213842A1 (en) 1972-10-12
JPS5233393B1 (en) 1977-08-27

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee