US3666527A - Method of electroless deposition of metals with improved sensitizer - Google Patents
Method of electroless deposition of metals with improved sensitizer Download PDFInfo
- Publication number
- US3666527A US3666527A US60091A US3666527DA US3666527A US 3666527 A US3666527 A US 3666527A US 60091 A US60091 A US 60091A US 3666527D A US3666527D A US 3666527DA US 3666527 A US3666527 A US 3666527A
- Authority
- US
- United States
- Prior art keywords
- solution
- plating
- ion
- sensitizing
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 title abstract description 23
- 229910052751 metal Inorganic materials 0.000 title abstract description 17
- 239000002184 metal Substances 0.000 title abstract description 17
- 150000002739 metals Chemical group 0.000 title description 6
- 230000008021 deposition Effects 0.000 title description 2
- 238000007747 plating Methods 0.000 abstract description 33
- 230000001235 sensitizing effect Effects 0.000 abstract description 19
- 239000004809 Teflon Substances 0.000 abstract description 8
- 229920006362 Teflon® Polymers 0.000 abstract description 8
- 239000004033 plastic Substances 0.000 abstract description 5
- 229920003023 plastic Polymers 0.000 abstract description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 5
- 229920002799 BoPET Polymers 0.000 abstract description 3
- 229920005479 Lucite® Polymers 0.000 abstract description 3
- 230000003197 catalytic effect Effects 0.000 abstract description 3
- 239000004926 polymethyl methacrylate Substances 0.000 abstract description 3
- 229920002379 silicone rubber Polymers 0.000 abstract description 3
- 239000005041 Mylar™ Substances 0.000 abstract description 2
- -1 NICKEL Substances 0.000 abstract description 2
- 229910017052 cobalt Inorganic materials 0.000 abstract description 2
- 239000010941 cobalt Substances 0.000 abstract description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 abstract description 2
- 230000002940 repellent Effects 0.000 abstract description 2
- 239000005871 repellent Substances 0.000 abstract description 2
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical compound FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 abstract 1
- 239000000243 solution Substances 0.000 description 42
- 150000002500 ions Chemical class 0.000 description 26
- 229910001432 tin ion Inorganic materials 0.000 description 9
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 8
- 239000000758 substrate Substances 0.000 description 8
- 239000000463 material Substances 0.000 description 7
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- 238000000151 deposition Methods 0.000 description 5
- 230000003213 activating effect Effects 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 150000003839 salts Chemical class 0.000 description 4
- 229910052718 tin Inorganic materials 0.000 description 4
- 239000004593 Epoxy Substances 0.000 description 3
- 238000013019 agitation Methods 0.000 description 3
- 239000011550 stock solution Substances 0.000 description 3
- 238000009736 wetting Methods 0.000 description 3
- ROSDSFDQCJNGOL-UHFFFAOYSA-N Dimethylamine Chemical compound CNC ROSDSFDQCJNGOL-UHFFFAOYSA-N 0.000 description 2
- 101150003085 Pdcl gene Proteins 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 229910021626 Tin(II) chloride Inorganic materials 0.000 description 2
- 230000004913 activation Effects 0.000 description 2
- QDWJUBJKEHXSMT-UHFFFAOYSA-N boranylidynenickel Chemical compound [Ni]#B QDWJUBJKEHXSMT-UHFFFAOYSA-N 0.000 description 2
- 239000003153 chemical reaction reagent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000007772 electroless plating Methods 0.000 description 2
- 239000002657 fibrous material Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 235000011150 stannous chloride Nutrition 0.000 description 2
- 239000001119 stannous chloride Substances 0.000 description 2
- IUTCEZPPWBHGIX-UHFFFAOYSA-N tin(2+) Chemical compound [Sn+2] IUTCEZPPWBHGIX-UHFFFAOYSA-N 0.000 description 2
- TXUICONDJPYNPY-UHFFFAOYSA-N (1,10,13-trimethyl-3-oxo-4,5,6,7,8,9,11,12,14,15,16,17-dodecahydrocyclopenta[a]phenanthren-17-yl) heptanoate Chemical compound C1CC2CC(=O)C=C(C)C2(C)C2C1C1CCC(OC(=O)CCCCCC)C1(C)CC2 TXUICONDJPYNPY-UHFFFAOYSA-N 0.000 description 1
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 1
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- KCXVZYZYPLLWCC-UHFFFAOYSA-N EDTA Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(O)=O)CC(O)=O KCXVZYZYPLLWCC-UHFFFAOYSA-N 0.000 description 1
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 1
- 241001602742 Gegenes niso Species 0.000 description 1
- 229910021120 PdC12 Inorganic materials 0.000 description 1
- 229910021627 Tin(IV) chloride Inorganic materials 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000003929 acidic solution Substances 0.000 description 1
- 239000012190 activator Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 230000003679 aging effect Effects 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 239000003599 detergent Substances 0.000 description 1
- 229960001484 edetic acid Drugs 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 239000011630 iodine Substances 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- PIBWKRNGBLPSSY-UHFFFAOYSA-L palladium(II) chloride Chemical compound Cl[Pd]Cl PIBWKRNGBLPSSY-UHFFFAOYSA-L 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- 229920001568 phenolic resin Polymers 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- MNWBNISUBARLIT-UHFFFAOYSA-N sodium cyanide Chemical compound [Na+].N#[C-] MNWBNISUBARLIT-UHFFFAOYSA-N 0.000 description 1
- 159000000000 sodium salts Chemical class 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 235000000346 sugar Nutrition 0.000 description 1
- 150000008163 sugars Chemical class 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 150000003606 tin compounds Chemical class 0.000 description 1
- HPGGPRDJHPYFRM-UHFFFAOYSA-J tin(iv) chloride Chemical compound Cl[Sn](Cl)(Cl)Cl HPGGPRDJHPYFRM-UHFFFAOYSA-J 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
- C23C18/28—Sensitising or activating
- C23C18/285—Sensitising or activating with tin based compound or composition
Definitions
- Certain metals can be plated on non-metallic surfaces by an autocatalytic electroless process in which the surface is first treated with a sensitizing solution, then with an activating solution which precipitates nucleating centers.
- ceramics and many synthetic resins can be provided with coatings of nickel or copper, for example, which may or may not be later covered with a heavier layer of metal by electroplating.
- the sensitizing solution most commonly used in the past contains Sn+ ions generally formed from the salt stannous chloride. This material has proved to be quite satisfactory for electroless plating of metals on most nonmet-allic materials. However, there are certain plastics, such as Teflon, Lucite and silicone rubbers, as well as certain commercial photoresists, which cannot be satisfactorily plated by this method. The reason for the difficulty appears to be that these materials are unusually smooth and non-porous and are not readily wetted by aqueous solutions of stannous salts.
- One object of the present invention is to provide an improved method of autocatalytically electrolessly depositing metals on certain non-metallic substrates which are difiicult to wet.
- Another object of the invention is to provide an improved sensitizing solution for autocatalytically electrolessly depositing metals on non-metallic substrates.
- the plate is permitted to remain in the plating bath until either a good uniform plating is obtained or it is apparent that no further deposit is being obtained on unplated areas. This is usually a few minutes.
- the following table shows the effect of adding varying amounts of SnCL, solution to a conventional SnCl sensitizing solution.
- the SnCl, stock solution was prepared by dissolving crystalline material in water and permitting the solution to stand for about one week at room temperature before using. It has been found that an aging effect, not fully understood, occurs in this solution. Less of the aged solution is required to impart the improved wetting to the sensitizer. The aging efiect may be due to an hydrolysis reaction taking place.
- Example II With all conditions and treating and plating solutions remaining the same as in Example I except the proportion of stannic ion, Mylar tape coated with AZ-l350, a positive acting photoresist, was plated with nickel from the same nickel-boron bath. In this case, when the concentration of stannic ion was above zero and up to '7.5X10- moles/liter, only patchy plating was obtained. Above about 1.25 X moles/liter good plating was obtained although this increase in coverage was again gradual. With no stannic ion added, only little plating was obtained.
- Example III In another test run using a nickel-boron plating bath, as described in Example I, on AZ-1350 photoresist, the sensitizing solution was made up by adding varying amounts of powdered SnCl -5-H O (reagent grade) to freshly prepared SnCl solution.
- the stock solution from which the stannous ion solution was prepared comprised 214 gms. SnCl -2H O (Baker reagent grade) and 290 cc. conc. HCl.
- the actual solution used for the run contained 64x10 molar concentration of Sn+ ion and an HCl content of 0.19 M.
- Example IV iWith conditions otherwise the same as in Example HI, the molar concentrations of Sn+ ion used was increased to 12.8Xl0- molar and the HCl to 0.38 Patchy plating on AZ-1350 photoresist from the same nickelboron plating bath was obtained using molar concentration of Sn+ ion below about 10.4)(10' molar. Good, uniform plating was obtained above about 104x10 molar.
- the copper plating bath had the following composition.
- E.D.T.A. Ethylene diaminetetra-acetic acid (40% solution of the sodium salt) -gm-s 36.5
- the sensitizing solution contained Sn+ ion 6.4X10- molar and had an HCl content of 0.19 molar. To this was added varying amounts of stannic chloride solution that had been aged for a minimum of one week.
- Example VI Using the same copper-depositing bath as in Example V and Sn+ ion concentration of 6.4X10- moles, an experimental run was made to see if the quality of the plating was affected by using increasingly high ratios of Sn ion to Sn+ ion, with the following results.
- the substrate used was Teflon.
- stannic ion may be generated.
- agents capable of oxidizing the Sn ion to Sn ion such as iodine or permangauates, for example.
- Another method is by exposing the Sn+ solution to U.V. light for a period of time. By merely heating the Sn+ solution in air, some of the Sn ion is converted to Su
- the addition of Sn ion is preferred because the amount can be more accurately controlled and can conveniently be used in production facilities.
- the pH of the solutions was generally below one and the solutions were clear. At pH values around 1.5 the solutions become turbid. It is therefore preferred that the pH value he kept below about 1.5 and, more preferably, below one.
- a molar ratio of divalent tin ion to tetravalent tin ion between about 1:1 and 1000:1 has been found to be operative.
- stanic chloride is given as an example of a suitable tin compound to use to add So ion in the present invention, it will be understood that other soluble stannic compounds can be used.
- the improved method of the present invention is also of particular interest in the making of printed circuit boards; especially boards having small-diameter through holes which must be plated with metal.
- Materials commonly used for printed circuit substrates are phenolic resinimpregnated fibrous materials, epoxy resin-impregnated boards and glass fiber-epoxy resin boards.
- the boards are usually laminates of several thin sheets.
- the improved sensitizers described herein wet these materials very well. The sensitizers wet so efliciently that very small diameter through holes, usually very diflicult to plate electrolessly with previously used Sn+ sensitizers, can now be plated very well.
- the improvement is due not only to the increased wetting ability of the present sensitizers but also due to the fact that they are not degraded by air agitation. Agitation of the bath is necessary to cause solutions to flow through the holes. Air agitation adversely affects Sn+ sensitizers.
- a method for electrolessly plating a surface with a metal comprising the steps of sensitizing the surface with a sensitizing solution made by mixing separate sources of divalent tin ion and tetravalent tin ion in a molar ratio from about 1:1 to about 1000: 1, the solution having a pH lower than about 1.5, the tetravalent tin ion being prepared as a separate solution of a stannic salt which is aged for a time before combining it with the source of divalent tin ion, treating the sensitized surface with a catalyzing solution so as to provide catalytic nucleating centers thereon, and plating said metal on the catalyzing surface by contacting the surface with an electroless metal plating bath.
- said surface is a smooth, dense, difficultly wettable plastic.
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemically Coating (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US6009170A | 1970-07-31 | 1970-07-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| US3666527A true US3666527A (en) | 1972-05-30 |
Family
ID=22027287
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US60091A Expired - Lifetime US3666527A (en) | 1970-07-31 | 1970-07-31 | Method of electroless deposition of metals with improved sensitizer |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US3666527A (cg-RX-API-DMAC10.html) |
| JP (1) | JPS5223982B1 (cg-RX-API-DMAC10.html) |
| CA (1) | CA945838A (cg-RX-API-DMAC10.html) |
| DE (1) | DE2137179A1 (cg-RX-API-DMAC10.html) |
| FR (1) | FR2104816B1 (cg-RX-API-DMAC10.html) |
| GB (1) | GB1348793A (cg-RX-API-DMAC10.html) |
| NL (1) | NL7110561A (cg-RX-API-DMAC10.html) |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3877965A (en) * | 1970-09-28 | 1975-04-15 | Rohm & Haas | Conductive nylon substrates and method of producing them |
| US3982054A (en) * | 1972-02-14 | 1976-09-21 | Rca Corporation | Method for electrolessly depositing metals using improved sensitizer composition |
| US3993801A (en) * | 1975-02-18 | 1976-11-23 | Surface Technology, Inc. | Catalytic developer |
| US4082899A (en) * | 1976-09-07 | 1978-04-04 | Nathan Feldstein | Method of applying catalysts for electroless deposition and article |
| DE2856375A1 (de) * | 1977-12-28 | 1979-08-02 | Cbs Sony Records Inc | Verfahren zur herstellung von schallplattenmatrizen |
| US4301190A (en) * | 1978-08-17 | 1981-11-17 | Nathan Feldstein | Pretreatment with complexing agent in process for electroless plating |
| US4396643A (en) * | 1981-06-29 | 1983-08-02 | Minnesota Mining And Manufacturing Company | Radiation absorbing surfaces |
| US4398462A (en) * | 1979-05-30 | 1983-08-16 | Tdk Electronics Co., Ltd. | Hot melt screen printing machine |
| US4582885A (en) * | 1978-07-20 | 1986-04-15 | Minnesota Mining And Manufacturing Company | Shaped plastic articles having replicated microstructure surfaces |
| US4582111A (en) * | 1981-06-29 | 1986-04-15 | Minnesota Mining And Manufacturing Company | Radiation absorbing surfaces |
| US4853320A (en) * | 1987-09-16 | 1989-08-01 | U.S. Philips Corporation | Method of locally providing metal on a surface of a substrate |
| US5403650A (en) * | 1982-04-27 | 1995-04-04 | Baudrand; Donald W. | Process for selectively depositing a nickel-boron coating over a metallurgy pattern on a dielectric substrate and products produced thereby |
| US20110105366A1 (en) * | 2007-06-18 | 2011-05-05 | Illumina, Inc. | Microfabrication methods for the optimal patterning of substrates |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3245826A (en) * | 1963-06-12 | 1966-04-12 | Clevite Corp | Magnetic recording medium and method of manufacture |
| US3573973A (en) * | 1967-11-13 | 1971-04-06 | Ibm | High speed additive circuit process |
| DE1905097A1 (de) * | 1969-02-01 | 1970-08-06 | Dynamit Nobel Ag | Verfahren zur Metallisierung von Kunststoffen |
-
1970
- 1970-07-31 US US60091A patent/US3666527A/en not_active Expired - Lifetime
-
1971
- 1971-06-07 CA CA115,027A patent/CA945838A/en not_active Expired
- 1971-07-22 GB GB3438071A patent/GB1348793A/en not_active Expired
- 1971-07-24 DE DE19712137179 patent/DE2137179A1/de active Pending
- 1971-07-28 JP JP46056686A patent/JPS5223982B1/ja active Pending
- 1971-07-30 NL NL7110561A patent/NL7110561A/xx unknown
- 1971-07-30 FR FR7128000A patent/FR2104816B1/fr not_active Expired
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3877965A (en) * | 1970-09-28 | 1975-04-15 | Rohm & Haas | Conductive nylon substrates and method of producing them |
| US3982054A (en) * | 1972-02-14 | 1976-09-21 | Rca Corporation | Method for electrolessly depositing metals using improved sensitizer composition |
| US3993801A (en) * | 1975-02-18 | 1976-11-23 | Surface Technology, Inc. | Catalytic developer |
| US4082899A (en) * | 1976-09-07 | 1978-04-04 | Nathan Feldstein | Method of applying catalysts for electroless deposition and article |
| DE2856375A1 (de) * | 1977-12-28 | 1979-08-02 | Cbs Sony Records Inc | Verfahren zur herstellung von schallplattenmatrizen |
| US4582885A (en) * | 1978-07-20 | 1986-04-15 | Minnesota Mining And Manufacturing Company | Shaped plastic articles having replicated microstructure surfaces |
| US4301190A (en) * | 1978-08-17 | 1981-11-17 | Nathan Feldstein | Pretreatment with complexing agent in process for electroless plating |
| US4398462A (en) * | 1979-05-30 | 1983-08-16 | Tdk Electronics Co., Ltd. | Hot melt screen printing machine |
| US4396643A (en) * | 1981-06-29 | 1983-08-02 | Minnesota Mining And Manufacturing Company | Radiation absorbing surfaces |
| US4582111A (en) * | 1981-06-29 | 1986-04-15 | Minnesota Mining And Manufacturing Company | Radiation absorbing surfaces |
| US5403650A (en) * | 1982-04-27 | 1995-04-04 | Baudrand; Donald W. | Process for selectively depositing a nickel-boron coating over a metallurgy pattern on a dielectric substrate and products produced thereby |
| US5565235A (en) * | 1982-04-27 | 1996-10-15 | Baudrand; Donald W. | Process for selectively depositing a nickel-boron coating over a metallurgy pattern on a dielectric substrate |
| US4853320A (en) * | 1987-09-16 | 1989-08-01 | U.S. Philips Corporation | Method of locally providing metal on a surface of a substrate |
| US20110105366A1 (en) * | 2007-06-18 | 2011-05-05 | Illumina, Inc. | Microfabrication methods for the optimal patterning of substrates |
| US9677194B2 (en) | 2007-06-18 | 2017-06-13 | Illumina, Inc. | Microfabrication methods for the optimal patterning of substrates |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2104816B1 (cg-RX-API-DMAC10.html) | 1975-08-29 |
| GB1348793A (en) | 1974-03-20 |
| CA945838A (en) | 1974-04-23 |
| NL7110561A (cg-RX-API-DMAC10.html) | 1972-02-02 |
| AU3126671A (en) | 1973-01-18 |
| FR2104816A1 (cg-RX-API-DMAC10.html) | 1972-04-21 |
| DE2137179A1 (de) | 1972-02-03 |
| JPS5223982B1 (cg-RX-API-DMAC10.html) | 1977-06-28 |
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