US3621186A - Support structure - Google Patents

Support structure Download PDF

Info

Publication number
US3621186A
US3621186A US880867A US3621186DA US3621186A US 3621186 A US3621186 A US 3621186A US 880867 A US880867 A US 880867A US 3621186D A US3621186D A US 3621186DA US 3621186 A US3621186 A US 3621186A
Authority
US
United States
Prior art keywords
elements
elongated support
generally
chamber
chucking
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US880867A
Inventor
Milton Stoll
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Application granted granted Critical
Publication of US3621186A publication Critical patent/US3621186A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67126Apparatus for sealing, encapsulating, glassing, decapsulating or the like

Definitions

  • heater means for raising the temperature of one of each pair of chuck elements and refractory low expansion means for supporting the heated chuck portion so that the center-to-center distances therebetween remain substantially constant.
  • Another primary object of the present invention is the provision of a novel and improved lower assembly for utilization with equipment of the class described.
  • Still another primary object of the present invention in addition to each of the foregoing objects, is the provision of such a lower assembly wherein each chucking unit is substantially independent of the adjacent chucking unit and are each mounted on a substantially thermally insensitive amount fabricated, for example, of a ceramic material.
  • the invention resides in the combination, construction, arrangement and disposition of the various component parts and elements incorporated in improved apparatus constructed in accordance with the principles of this invention.
  • the present invention will be better understood and objects and important features other than those specifically enumerated above will become apparent when consideration is given to the following details and description, which when taken in conjunction with the annexed drawing describes, discloses, illustrates and shows a preferred embodiment or modification of the present invention and what is presently considered and believed to be the best mode of practicing the principles thereof.
  • Other embodiments or modifications may be suggested to those having the benefit of the teachings herein, and such other embodiments or modifications are intended to be reserved especially as they fall within the scope and spirit of the subjoined claims.
  • FIG. 1 is a side elevational, cross-sectional, partial view of sealing apparatus incorporating a lower assembly constructed in accordance with the present invention
  • FIG. 2 is a front elevational, cross-sectional, partial view taken along line 2-2 of FIG. 1.
  • FIGS. 1 and 2 are substantially similar to FIGS. 6 and 7 of the aforesaid copending parent application but illustrating the improved lower assembly of the present application.
  • sealing machine substantially similar to the sealing machine fully described and disclosed in the aforesaid copending parent application.
  • the sealing machine will not be herein described in detail, reference being had instead to the aforesaid copending parent application, the complete disclosure of which is expressly incorporated herein and forms a part of this application.
  • Like reference characters will be used in this application as in the aforesaid copending parent application, with the exception that those parts of the lower assembly which differ in the present application from those of the aforesaid copending parent application will be primed.
  • the sealing machine 60' may comprise a base structure 68 for supporting lower clamping or chucking assemblies 44and a bell jar 70 structurally associated with a movable upper chucking assembly 26 and movable relative to the base block assembly 68 between an open loading position and a closed seal position, as shown, wherein an O-ring gasket 72 provides a seal therebetween to define a hermetically sealed sealing chamber 15 therebetween.
  • a plurality of chucking sections or stations 86' may be provided in generally aligned relationship.
  • the lower clamping or chucking assembly 44' may comprise a fixed jaw 46' at each of the chucking stations 86', each fixed jaw 46' being provided with a gripping portion 48 constructed and arranged to grip a tubular casing member of a device to be sealed and a support surface or portion 50 for the annular end portion of the tubular casing member.
  • Each of the fixed jaws 46 may further be provided with a generally vertically extending aperture 52 to enable passage therethrough of a lower lead wire extending deownwardly axially of the casing member.
  • a movable jaw 54 having a casing gripping portion 56 is provided for actuation to move into gripping heat transfer engagement with such casing member adjacent the fixed jaw 46' as fully detailed in the aforesaid copending parent application.
  • Each of the fixed jaws 46' which may be fabricated, for example, of a highly thermally conductive material, such as copper, or the like, may be separately mounted, as by means of screws 302, to an elongated support 304 fabricated of a material which is substantially thermally insensitive, such as a ceramic, or the like, so that it will not change its dimensions upon heating and cooling by any substantial degree.
  • the support 304 in turn, may be mounted with the base block, as by means of screws 306 extending generally downwardly therethrough.
  • each of the fixed jaws 46 are separated from the adjacent fixed jaws, as by a space 306 therebetween, and are mounted to a substantially thennally insensitive material, or a material having a low coefiicient of thermal expansion the center-to-center distance between the stations 86' will not be affected, to any substantial degree, by temperature changes.
  • each of the fixed jaws 46' may be provided with a generally transversely extending groove 308, through which a heater element 134' comprising, for example, an electrical resistance wire contained within a ceramic sheath, may extend for heating the fixed jaws 46' and, therefore, the lower end portion of the device or devices supported thereby.
  • a heater element 134' comprising, for example, an electrical resistance wire contained within a ceramic sheath
  • the heater assemblies 58 and the connector blocks 142 and 143 associated therewith may similarly be secured, as by means of screws 133 on an insulator 132 disposed generally on top of the block 304 and secured, as by means of the screws 306 so that the center-to-center distances therebetween may be maintained.
  • the entire lower assembly is, as in the aforesaid copending parent application readily and easily removable from the lower block for rapid and easy adaptation of the machine to various diverse packages.
  • Assembly for supporting a plurality of casing members generally upright within a chamber for heat sealing thereof comprising, in combination, a plurality of separated fixed chuck elements disposed in said chamber in general alignment with each other generally longitudinally through said chamber to define a plurality of sealing stations and an elongated support fabricated of a material having a low thermal coefficient of expansion extending generally across the chamber generally adjacent each of said sealing stations, each of said fixed chuck elements being mounted with and supported by said elongated support in spaced-apart relationship to each other, the coefficient of expansion of the material of said elongated support being so chosen that upon a change of temperature of said chuck elements the center-to-center spacing therebetween remains substantially constant.
  • said elongated support further comprises a thermally insulating, refractory material so that the temperature thereof will remain substantially constant even during cyclic heating of said fixed chuck elements,
  • Assembly defined in claim 4 further comprising individually mounted movable chuck elements disposed generally oppositely said fixed chuck elements for gripping such casing members therebetween.
  • Assembly defined in claim 5 further comprising sealing heater elements mounted with said elongated support generally above said fixed chuck element for encircling such casing members and supply heat generally annularly thereto.
  • an assembly within said chamber f supporting a plurality of casing members for such devices generally upright therewithin and comprising, in combination, an elongated support fabricated of a material having a low thermal coefficient of expansion extending generally across said chamber, a plurality of adjacent spaced-apart chucking elements independently mounted with said elongated support the coefiicient of expansion of the material of said elongated support being chosen so that no dimensional changes occurs in said chucking elements due to temperature changes and variations during or due to heat sealing cycling which cause stress to occur in said adjacent chuckin elements or which cause any cumulative effect across the p urality of chucking elements, thereby enabling center-to-center spacing therebetween to reaming substantially constant and independent of the temperatures thereof.
  • said elongated support further comprises a thermally insulating, refractory material so that the temperature thereof will remain substantially constant even during cyclic heating of said chucking ele- I ments to thereby further reduce center-to-center spacing variations during cyclic operations.
  • said chucking elements comprise cooperating pairs of fixed and movable jaws and wherein each of said fixed jaws is provided with a groove extending generally transversely thereacross adjacent said elongated support and said heating means comprises a heating element extending generally through said grooves.

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

Structure for supporting a plurality of generally tubular casing members during sealing thereof comprising a plurality of sets of separated heat-conducting chuck portions, heater means for raising the temperature of one of each pair of chuck elements and refractory low expansion means for supporting the heated chuck portion so that the center-to-center distances therebetween remain substantially constant.

Description

sis
ited States Patent lnventor Milton Stoll, 14-19 212th Street Bayside, N.Y. Appl. No. 880,867 Filed Nov. 28, 1969 Patented Nov. 16, 1971 Continuation-impart of application Ser. No. 558,142, June 16, 1966, now Patent No. 3,490,886, dated Nov. 25, 1969.
SUPPORT STRUCTURE 10 Claims, 2 Drawing Figs.
US. Cl 219/138 Int. Cl 823k 9/28 Field ofSeai-ch 219/85, 10.67, 385, 429
[56] References Cited UNITED STATES PATENTS 3,033,973 5/1962 Herbert, .lr. 219/117 HD X Primary Examiner-J. V. Truhe Assistant Examiner-Lawrence A. Rouse Attorney-Lackenbach & Lackenbach ABSTRACT: Structure for supporting a plurality of generally tubular casing members during sealing thereof comprising a plurality of sets of separated heat-conducting chuck portions,
heater means for raising the temperature of one of each pair of chuck elements and refractory low expansion means for supporting the heated chuck portion so that the center-to-center distances therebetween remain substantially constant.
PATENTEDuDv 1s ISTI v 3.621.186
VI) If. Ml N LL SUPPORT STRUCTURE This application is a continuation-in-part application of my copending U.S. application Ser. No. 558,142, filed June 16, 1966 and now U.S. Pat. No. 3,490,886 dated Nov. 25, 1969 and the full and complete disclosure thereof is hereby expressively incorporated, by reference, into and forms a part of the present application. his invention relates to nevel and improved support means and, more particularly to novel and imroved means for supporting articles and furnishing heat thereto while retaining accurate center-o-center distances therebetween.
In my copending application Ser. No. 558,142, there is disclosed methods, apparatus and systems for assembling and sealing devices having generally tubular casing members, such as glass enclosed semiconductor diodes. A lower assembly is disclosed therein having a plurality of chucking portions for supporting a plurality of such generally tubular casings with an open end thereof disposed generally upwardly and with the axes thereof being generally parallel and in line. Further, provision is disclosed for applying heat to the lower assembly for enabling process heating, such as soldering, of the device being fabricated during, or substantially simultaneously, with the sealing operation. However, the lower assembly as disclosed in the aforesaid copending application has been found to be of less than optimum design since dimensional changes are introduced to lower assembly during such heating which may result in misalignment between the upper and lower assemblies.
Accordingly, it is a primary object of the present invention, in addition to the objects and important features set forth in the above-identified copending application, to provide apparatus of the class described which is substantially insensitive to temperature changes and wherein center-to-center distances are maintained even during severe temperature changes.
Another primary object of the present invention, in addition to the foregoing objects, is the provision of a novel and improved lower assembly for utilization with equipment of the class described.
Still another primary object of the present invention, in addition to each of the foregoing objects, is the provision of such a lower assembly wherein each chucking unit is substantially independent of the adjacent chucking unit and are each mounted on a substantially thermally insensitive amount fabricated, for example, of a ceramic material.
Yet still further, it is another primary object of the present invention, in addition to each of the foregoing objects, to pro vide such chucking means with means for adding heat thereto so that control process heating of the article gripped thereby may be performed yet without affecting the center-to-center distance between adjacent chucking units.
Yet further, it is still another primary object of the present invention, in addition to each of the foregoing objects, to provide such a lower assembly which is economical to manufacture and durable and efficient in use.
The invention resides in the combination, construction, arrangement and disposition of the various component parts and elements incorporated in improved apparatus constructed in accordance with the principles of this invention. The present invention will be better understood and objects and important features other than those specifically enumerated above will become apparent when consideration is given to the following details and description, which when taken in conjunction with the annexed drawing describes, discloses, illustrates and shows a preferred embodiment or modification of the present invention and what is presently considered and believed to be the best mode of practicing the principles thereof. Other embodiments or modifications may be suggested to those having the benefit of the teachings herein, and such other embodiments or modifications are intended to be reserved especially as they fall within the scope and spirit of the subjoined claims.
In the drawing:
FIG. 1 is a side elevational, cross-sectional, partial view of sealing apparatus incorporating a lower assembly constructed in accordance with the present invention and FIG. 2 is a front elevational, cross-sectional, partial view taken along line 2-2 of FIG. 1.
FIGS. 1 and 2 are substantially similar to FIGS. 6 and 7 of the aforesaid copending parent application but illustrating the improved lower assembly of the present application.
With reference now to the drawing, there is shown and illustrated a sealing machine substantially similar to the sealing machine fully described and disclosed in the aforesaid copending parent application. In the interest of brevity, therefore, the sealing machine will not be herein described in detail, reference being had instead to the aforesaid copending parent application, the complete disclosure of which is expressly incorporated herein and forms a part of this application. Like reference characters will be used in this application as in the aforesaid copending parent application, with the exception that those parts of the lower assembly which differ in the present application from those of the aforesaid copending parent application will be primed. Further description of the component parts and elements of the sealing machine, designated by the reference character 60', is therefore not deemed necessary herein, except to point out that the sealing machine 60'may comprise a base structure 68 for supporting lower clamping or chucking assemblies 44and a bell jar 70 structurally associated with a movable upper chucking assembly 26 and movable relative to the base block assembly 68 between an open loading position and a closed seal position, as shown, wherein an O-ring gasket 72 provides a seal therebetween to define a hermetically sealed sealing chamber 15 therebetween. A plurality of chucking sections or stations 86' may be provided in generally aligned relationship.
The lower clamping or chucking assembly 44' may comprise a fixed jaw 46' at each of the chucking stations 86', each fixed jaw 46' being provided with a gripping portion 48 constructed and arranged to grip a tubular casing member of a device to be sealed and a support surface or portion 50 for the annular end portion of the tubular casing member. Each of the fixed jaws 46 may further be provided with a generally vertically extending aperture 52 to enable passage therethrough of a lower lead wire extending deownwardly axially of the casing member.
A movable jaw 54, having a casing gripping portion 56 is provided for actuation to move into gripping heat transfer engagement with such casing member adjacent the fixed jaw 46' as fully detailed in the aforesaid copending parent application.
Each of the fixed jaws 46', which may be fabricated, for example, of a highly thermally conductive material, such as copper, or the like, may be separately mounted, as by means of screws 302, to an elongated support 304 fabricated of a material which is substantially thermally insensitive, such as a ceramic, or the like, so that it will not change its dimensions upon heating and cooling by any substantial degree. The support 304, in turn, may be mounted with the base block, as by means of screws 306 extending generally downwardly therethrough. Accordingly, since each of the fixed jaws 46 are separated from the adjacent fixed jaws, as by a space 306 therebetween, and are mounted to a substantially thennally insensitive material, or a material having a low coefiicient of thermal expansion the center-to-center distance between the stations 86' will not be affected, to any substantial degree, by temperature changes.
The rear surface of each of the fixed jaws 46' may be provided with a generally transversely extending groove 308, through which a heater element 134' comprising, for example, an electrical resistance wire contained within a ceramic sheath, may extend for heating the fixed jaws 46' and, therefore, the lower end portion of the device or devices supported thereby.
The heater assemblies 58 and the connector blocks 142 and 143 associated therewith may similarly be secured, as by means of screws 133 on an insulator 132 disposed generally on top of the block 304 and secured, as by means of the screws 306 so that the center-to-center distances therebetween may be maintained.
The entire lower assembly is, as in the aforesaid copending parent application readily and easily removable from the lower block for rapid and easy adaptation of the machine to various diverse packages.
While the invention has been described, disclosed, illustrated and shown in terms of certain embodiments or modifications which it has assumed in practice, the scope of the invention shouldnot be deemed to be limited by the precise embodiments or modifications herein described, disclosed, illustrated or shown, such other embodiments or modifications as may be suggested to those having the benefit of the teachiners herein being intended to be reserved especially as they fall within the scope and breadth of the claims here appended.
What is claimed is:
1. Assembly for supporting a plurality of casing members generally upright within a chamber for heat sealing thereof comprising, in combination, a plurality of separated fixed chuck elements disposed in said chamber in general alignment with each other generally longitudinally through said chamber to define a plurality of sealing stations and an elongated support fabricated of a material having a low thermal coefficient of expansion extending generally across the chamber generally adjacent each of said sealing stations, each of said fixed chuck elements being mounted with and supported by said elongated support in spaced-apart relationship to each other, the coefficient of expansion of the material of said elongated support being so chosen that upon a change of temperature of said chuck elements the center-to-center spacing therebetween remains substantially constant.
2. Assembly defined in claim 1 wherein said elongated support further comprises a thermally insulating, refractory material so that the temperature thereof will remain substantially constant even during cyclic heating of said fixed chuck elements,
3. Assembly defined in claim 2 wherein said fixed chuck elements are each provided with a groove extending generally transversely thereacross adjacent said elongated support and wherein there is further provided a heating element extending generally through said grooves and between said chuck elements and said elongated support.
4. Assembly defined in claim 3 wherein said fixed chuck elements comprise a highly thermally conductive material for rapidly transmitting heat from said heating element.
5. Assembly defined in claim 4 further comprising individually mounted movable chuck elements disposed generally oppositely said fixed chuck elements for gripping such casing members therebetween.
6. Assembly defined in claim 5 further comprising sealing heater elements mounted with said elongated support generally above said fixed chuck element for encircling such casing members and supply heat generally annularly thereto.
7. In a machine for assembling and heat sealing a plurality of electronic devices such as glass-enclosed diodes simultaneously within a chamber wherein accurate positioning of each suce device within said chamber is necessary for successful assembling and sealing, an assembly within said chamber f supporting a plurality of casing members for such devices generally upright therewithin and comprising, in combination, an elongated support fabricated of a material having a low thermal coefficient of expansion extending generally across said chamber, a plurality of adjacent spaced-apart chucking elements independently mounted with said elongated support the coefiicient of expansion of the material of said elongated support being chosen so that no dimensional changes occurs in said chucking elements due to temperature changes and variations during or due to heat sealing cycling which cause stress to occur in said adjacent chuckin elements or which cause any cumulative effect across the p urality of chucking elements, thereby enabling center-to-center spacing therebetween to reaming substantially constant and independent of the temperatures thereof.
8. Machine defined in claim 7 wherein said elongated support further comprises a thermally insulating, refractory material so that the temperature thereof will remain substantially constant even during cyclic heating of said chucking ele- I ments to thereby further reduce center-to-center spacing variations during cyclic operations.
9. Machine defined in claim 8 wherein said chucking elements are fabricated of a material having high thermal diffusivity and further comprising heating means associated with said chucking elements for providing heat thereto.
10. Machine defined in claim 9 wherein said chucking elements comprise cooperating pairs of fixed and movable jaws and wherein each of said fixed jaws is provided with a groove extending generally transversely thereacross adjacent said elongated support and said heating means comprises a heating element extending generally through said grooves.
* l t 1* i

Claims (10)

1. Assembly for supporting a plurality of casing members generally upright within a chamber for heat sealing thereof comprising, in combination, a plurality of separated fixed chuck elements disposed in said chamber in general alignment with each other generally longitudinally through said chamber to define a plurality of sealing stations and an elongated support fabricated of a material having a low thermal coefficient of expansion extending generally across the chamber generally adjacent each of said sealing stations, each of said fixed chuck elements being mounted with and supported by said elongated support in spacedapart relationship to each other, the coefficient of expansion of the material of said elongated support being so chosen that upon a change of temperature of said chuck elements the center-tocenter spacing therebetween remains substantially constant.
2. Assembly defined in claim 1 wherein said elongated support further comprises a thermally insulating, refractory material so that the temperature thereof will remain substantially constant even during cyclic heating of said fixed chuck elements.
3. Assembly defined in claim 2 wherein said fixed chuck elements are each provided with a groove extending generally transversely thereacross adjacent said elongated support and wherein there is further provided a heating element extending generally through said grooves and between said chuck elements and said elongated support.
4. Assembly defined in claim 3 wherein said fixed chuck elements comprise a highly thermally conductive material for rapidly transmitting heat from said heating element.
5. Assembly defined in claim 4 further comprising individually mounted movable chuck elements disposed generally oppositely said fixed chuck elements for gripping such casing members therebetween.
6. Assembly defined in claim 5 further comprising sealing heater elements mounted with said elongated support generally Above said fixed chuck element for encircling such casing members and supplying heat generally annularly thereto.
7. In a machine for assembling and heat sealing a plurality of electronic devices such as glass-enclosed diodes simultaneously within a chamber wherein accurate positioning of each such device within said chamber is necessary for successful assembling and sealing, an assembly within said chamber for supporting a plurality of casing members for such devices generally upright therewithin and comprising, in combination, an elongated support fabricated of a material having a low thermal coefficient of expansion extending generally across said chamber, a plurality of adjacent spaced-apart chucking elements independently mounted with said elongated support the coefficient of expansion of the material of said elongated support being chosen so that no dimensional changes occur in said chucking elements due to temperature changes and variations during or due to heat sealing cycling which cause stress to occur in said adjacent chucking elements or which cause any cumulative effect across the plurality of chucking elements, thereby enabling the center-to-center spacing therebetween to remain substantially constant and independent of the temperatures thereof.
8. Machine defined in claim 7 wherein said elongated support further comprises a thermally insulating, refractory material so that the temperature thereof will remain substantially constant even during cyclic heating of said chucking elements to thereby further reduce center-to-center spacing variations during cyclic operations.
9. Machine defined in claim 8 wherein said chucking elements are fabricated of a material having high thermal diffusivity and further comprising heating means associated with said chucking elements for providing heat thereto.
10. Machine defined in claim 9 wherein said chucking elements comprise cooperating pairs of fixed and movable jaws and wherein each of said fixed jaws is provided with a groove extending generally transversely thereacross adjacent said elongated support and said heating means comprises a heating element extending generally through said grooves.
US880867A 1969-11-28 1969-11-28 Support structure Expired - Lifetime US3621186A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US88086769A 1969-11-28 1969-11-28

Publications (1)

Publication Number Publication Date
US3621186A true US3621186A (en) 1971-11-16

Family

ID=25377290

Family Applications (1)

Application Number Title Priority Date Filing Date
US880867A Expired - Lifetime US3621186A (en) 1969-11-28 1969-11-28 Support structure

Country Status (1)

Country Link
US (1) US3621186A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3033973A (en) * 1957-05-24 1962-05-08 Rohr Aircraft Corp Apparatus and method for brazing honeycomb sandwich panels

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3033973A (en) * 1957-05-24 1962-05-08 Rohr Aircraft Corp Apparatus and method for brazing honeycomb sandwich panels

Similar Documents

Publication Publication Date Title
US3617682A (en) Semiconductor chip bonder
Iizima et al. Electrical and thermal properties of semiconducting glasses As Te Ge
SE8305476L (en) SET AND DEVICE FOR ASTADMATIC POINT HEATING OF A BODY, PARTICULAR TO CARRY OUT THE STAR OF GOLD MOLDING
KR102411023B1 (en) Workpiece holding and heating apparatus, method of heating workpiece and ring heater assembly
DE69317063D1 (en) Heater and sensor for a hob
US3621186A (en) Support structure
US3059086A (en) Radiant heater and method of operating the same
GB1531406A (en) Infrared radiating members
US3515840A (en) Diode sealer
CN109530847B (en) Quick response tungsten-rhenium thermocouple welding device
US4132886A (en) Heating element
JPS5565443A (en) Manufacture of semiconductor device
FR2292396A1 (en) Convection type electrical heating element - with components of element in close thermal contact to reduce heat losses substantially
US4872604A (en) Heated tool with stop mechanism
US1612897A (en) Thermocouple
JPS56160668A (en) Device for eliminating defective semiconductor device
JPS56133116A (en) Supporting body for plastic molding
DE69031929D1 (en) SEMICONDUCTOR COOLING ARRANGEMENT OF THE ELECTRICALLY INSULATED HEAT TUBE TYPE
US2186647A (en) Glass welding apparatus
CN108503195A (en) A kind of glass lens heating mould
DE3561912D1 (en) A thermal limiting device
KR100279499B1 (en) Wafer Cooling and Heating Equipment
ES322922A1 (en) Method and device for electrically welding a thermo-couple sheath
GB899287A (en) Method and apparatus for heat treating fusible material
JPH03101844A (en) Thermostatic bath