US3575133A - Apparatus for evaporation by levitation in an ultravacuum - Google Patents

Apparatus for evaporation by levitation in an ultravacuum Download PDF

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Publication number
US3575133A
US3575133A US808580A US3575133DA US3575133A US 3575133 A US3575133 A US 3575133A US 808580 A US808580 A US 808580A US 3575133D A US3575133D A US 3575133DA US 3575133 A US3575133 A US 3575133A
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United States
Prior art keywords
rod
transfer device
extension
chamber
bar
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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US808580A
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English (en)
Inventor
Jean Van Audenhove
Jean Joyeux
Maurits Parengh
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European Atomic Energy Community Euratom
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European Atomic Energy Community Euratom
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D3/00—Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping
    • B01D3/10—Vacuum distillation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/02—Induction heating
    • H05B6/22—Furnaces without an endless core
    • H05B6/32—Arrangements for simultaneous levitation and heating

Definitions

  • the apparatus has an inductor to effect levitation and heating of the material to be evaporated and a transfer device to bring a succession of such pieces into position.
  • the transfer device is operable from the outside of the device by use of two bars which pass through seals in the wall of the device.
  • This invention relates to apparatus whereby thin coatings can be deposited by evaporation by levitation on any substrates in an ultravacuum (e.g. 10 to 10 Torr).
  • an ultravacuum e.g. 10 to 10 Torr
  • the vacuum chamber must remain absolutely hermetically sealed.
  • the chamber must also be of small dimensions in order to reduce degasification due to desorption and hence the capacity of the pumps and pumping time required.
  • the mechanisms in the vacuum must also be very well designed to prevent any seizing because all the surfaces must be absolutely clean and the use of some alloys or antifriction materials is prohibited. The reason for this is that they contain lubricating metals which have an excessive vapor tension in an ultravacuum and hence evaporate.
  • the use of graphite is also prohibited because of its porosity: it desorbs large quantities of gas.
  • the apparatus comprises an ultravacuum chamber provided with at least one window or hatch, a mask covering said window within the chamber and movable to uncover the window, a substrate support, an inductor for effecting levitation and heating of the material to be evaporated, a transfer device operable to bring a succession of pieces of material to be evaporated to a station beneath the in ductor, the transfer device embodying upwardly removable carriers for the material pieces, means operable from outside the chamber for operation of the transfer device and comprising a first bar passing through the chamber wall with a vacuum seal and arranged for rectilinear lengthwise movements, and raising means operable from outside of the chamber by a second bar or rod passing through the chamber wall with a vacuum seal and arranged for lengthwise movement, said raising means fulfilling simultaneously two functions, one to move the mask to uncover the window and the other to raise a carrier and material piece from the transfer device to position the carrier accurately on the inductor axis and then to locate the material piece within the inductor.
  • FIG. 1 is a general view of a specific example of the apparatus according to the invention.
  • FIG. 2 is a section through a vertical plane of a material holder used in the apparatus shown in FIG. 1.
  • FIG. 1 shows part of the wall 1 of the vacuum chamber, or more precisely, part of the base thereof.
  • the chamber is provided with viewing windows or hatches 2 which need not necessarily be diametrically opposite.
  • a substrate carrier 3 is disposed above an inductor 4 which is intended to ensure levitation and heating of the material pieces which are to be evaporated.
  • a reception crucible 29 and the pieces or charges 5 for evaporation situated in material holders 6 are disposed on a transfer device, which in the case of FIG. 1 is a turret rotated by a rack and pinion system 7-8, the rack being cut in a bar 9 which extends through the chamber wall by means of a metallic bellows seal similar to the types used commercially for ultravacuum valves and not illustrated in FIG. 1.
  • the turret 10 can thus be rotated simply by a rectilinear movement of the bar 9 from outside.
  • the turret is so disposed that each of the holders 6 can be brought beneath the inductor and approximately in line with its
  • a rod 12 extends through the wall 1 via a seal at 19 (consisting of metal bellows not shown in detail). Like the bar 9, the rod 12 can undergo only rectilinear axial movements which are controlled from outside by the operator. Inside the chamber, the rod 12 has an extension 13 of smaller section so that there is a shoulder 14 at their junction. The rod extension 13 is in turn continued in the form of a hollow cylinder 15 of a nonconductive and nonporous material, e.g. quartz or Pyrex" glass. The rod 12-13-15 is in line with the inductor axis 11 and can perform movements along this axis only.
  • the rod extension 13 extends through a weight in the form of a cylindrical bush 16 which can slide freely around it.
  • the internal surface of the weight is formed with a helical slot 17 in which engages a pin or lug 18 secured to the rod extension 13.
  • the wall 1 is formed with a recess 20 which acts as a seat for the weight.
  • Rods 21 are secured to the outer surface of the weight and carry masks 22 adapted to cover the windows 2.
  • FIG. 2 shows more particularly and in greater detail a suitable material-holder 6 for use in the apparatus described with reference to FIG. I.
  • This material-holder is intended for transport of a sample 5. It is in the form of a hollow cylindrical member 6 with a radial flange 23.
  • the material-holder is disposed in a circular hole 24 of a radius between the radius of the flange 23 and the radius of the cylinder 6 so as to allow the material-holder some freedom of movement.
  • a shoulder 25 which serves as an abutment for a plug 26 which has a head and pointed stem somewhat like a drawing pin, is of nonconductive and nonporous material, e.g.
  • the plug 26 is so dimensioned that it can slide upwardly inside the materialholder. Its point is so dimensioned that it fits in the tube 15 described hereinbefore (FIG. 1).
  • the bottom part 27 of the material-holder 6 is internally frustoconical or flared so that it can be centered about the tube 15 during the ascent of the latter.
  • the portion 28 of the material-holder has an inside diameter such as to allow vertical sliding therein of the tube 15.
  • a material-holder 6 carrying in a carrier or plug 6 a piece of material to be evaporated is brought into a substantially centered position about the axis 11 by operation of the control bar 9 from outside.
  • the operator then actuates rod 12 upwards so that the weight 16 is turned by the action of gravity and the nut and screw system fonned by the lug 18 and the slot 17.
  • the masks 22 at the ends of the rods 21 will then free the windows 2.
  • the pitch required for the helical slot 17 depends upon the movement required of the masks.
  • the shoulder 14 engages and lifts the weight 16 after the lug 18 has covered the entire length of the slot less a distance equivalent to the diameter of the said lug. It is preferable for the latter not to leave the slot since otherwise, after leaving the interior of the weight, the latter would be able to turn either by inertia or as a result of vibration through an angle sufficient to make it impossible to return to the bottom position, the top entrance of the slot no longer being situated vertically beneath the lug.
  • the tube 15 After fine centering of the material-holder, the tube 15, which continues its movement, engages the point of the plug or carrier 26 and lifts the plug until it is brought into the center of the induction coil 4. High-frequency current is then fed into the latter and the material is levitated. After the rotation of the masks 22 the operator can monitor by usual observation the centering of the material-holder around the tube and the levitation of the material into the center of the inductor 4.
  • the operator simply lowers the tube 15 which deposits the plug 26 on the holder and which, at the end of its movement, returns the masks to the position in front of the windows. Evaporation then begins and the windows remain completely free of any vapor deposit (which is deposited on the masks), so that the windows retain their transparency.
  • the crucible 29 intended to receive the metallic charges when evaporation is discontinued is brought beneath the inductor by rotation of the turret. Evaporation is stopped (and the molten drop falls into the crucible) by cutting off the HF current.
  • the above-described cycle can be immediately repeated with a fresh metallic charge without breaking the vacuum.
  • the apparatus according to the invention is of very simple construction. Only two seals permitting rectilinear movement are required to provide for changes of pieces for evaporation, their positioning in the inductor, and the movements of the window masks.
  • the transfer device is a turret but of course any plate formed with apertures 24 and whose movements can be controlled from outside simply by a translatory movement can be used without departing from the scope of this invention.
  • Apparatus for deposition of thin coatings on substrates by evaporation in an ultravacuum of solid materials which apparatus comprises an ultravacuum chamber provided with at least one window or hatch, a mask covering said window within the chamber and movable to uncover the window, a substrate support, an inductor for effecting levitation and heating of the material to be evaporated, a transfer device operable to bring a succession of pieces of material to be evaporated to a station beneath the inductor, the transfer device embodying upwardly removable carriers for the material pieces, means operable from outside the chamber for operation of the transfer device and comprising a first bar passing through the chamber wall with a vacuum seal and arranged for rectilinear lengthwise movements, and raising means operable from outside of the chamber by a second bar or rod passing through the chamber wall with a vacuum seal and arranged for lengthwise movement, said raising means fulfilling simultaneously two functions, one to move the mask to uncover the window and the other to raise a carrier and material piece from the transfer device to position the carrier accurately on the inductor axi
  • each material holder consists of a tubular cylindrical member having on the outside a radial flange and on the inside a shoulder in the form of a circular ring adapted to support a carrier or crucible containing the material for evaporation, the bottom end of the cylinder being internally of frustoconical shape.
  • Apparatus according to claim 2 characterized in that the carrier or crucible containing the sample for evaporation is a drawing-pin-shaped plug of quartz of an outside diameter such that it can slide in the top part of the material-holder situated above the shoulder.
  • Apparatus according to claim 1 characterized in that the transfer device is a turret, rotation of which is effected by a pinion engaged by a rack to which rectilinear movements are given by said first bar.
  • the said raising means consists of an extension of said second bar or rod in the form of a hollow cylindrical tube made of a nonconductive and nonporous material of a thickness and section such that it can be introduced from below into the material holder and engage the plug.
  • Apparatus according to claim 1 characterized in that for moving the mask to uncover the window there is a lug secured to an extension of the second bar or rod which extension is of a smaller section than the rod of which it forms the extension, so that a shoulder is formed at their junction, and there is a cylindrical bush surrounding the said rod extension, freely slidable along said extension rod and formed with a helical slot in its internal surface and engaging the said lug, the external surface bearing at least one rod supporting the said mask.

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Physical Vapour Deposition (AREA)
US808580A 1968-04-05 1969-03-19 Apparatus for evaporation by levitation in an ultravacuum Expired - Lifetime US3575133A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
BE713308 1968-04-05

Publications (1)

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US3575133A true US3575133A (en) 1971-04-13

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US (1) US3575133A (id)
BE (1) BE713308A (id)
CH (1) CH494582A (id)
FR (1) FR2005635A1 (id)
GB (1) GB1217443A (id)
LU (1) LU58103A1 (id)
NL (1) NL6905225A (id)
SE (1) SE346338B (id)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4328763A (en) * 1979-05-03 1982-05-11 Leybold-Heraeus Vaporizer for vacuum deposition installations
EP0392067A1 (de) * 1989-04-14 1990-10-17 Vsesojuzny Nauchno-Issledovatelsky Proektno-Konstruktorsky I Tekhnologichesky Inst. Elektrotermicheskogo Oborudovania Vniieto Vakuuminduktionsofen
US5254173A (en) * 1992-01-31 1993-10-19 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Turntable mechanism
US6582523B2 (en) * 2000-12-30 2003-06-24 Hyundai Display Technology, Inc. Organic source boat structure for organic electro-luminescent display fabricating apparatus
US20050064110A1 (en) * 2002-02-21 2005-03-24 Corus Technology Bv Method and device for coating a substrate
US9920418B1 (en) 2010-09-27 2018-03-20 James Stabile Physical vapor deposition apparatus having a tapered chamber

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2584660A (en) * 1949-09-24 1952-02-05 Eastman Kodak Co Vacuum coating process and apparatus therefor
US2686864A (en) * 1951-01-17 1954-08-17 Westinghouse Electric Corp Magnetic levitation and heating of conductive materials
FR1273518A (fr) * 1960-10-28 1961-10-13 Ass Elect Ind Perfectionnements aux appareils de vaporisation sous vide
US3173283A (en) * 1960-12-27 1965-03-16 Vogtmann Hans Process and apparatus for loading extrusion presses
US3290567A (en) * 1960-09-23 1966-12-06 Technical Ind Inc Controlled deposition and growth of polycrystalline films in a vacuum
US3476170A (en) * 1967-05-15 1969-11-04 Traub Co The Casting method with laser beam melting of levitated mass

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2584660A (en) * 1949-09-24 1952-02-05 Eastman Kodak Co Vacuum coating process and apparatus therefor
US2686864A (en) * 1951-01-17 1954-08-17 Westinghouse Electric Corp Magnetic levitation and heating of conductive materials
US3290567A (en) * 1960-09-23 1966-12-06 Technical Ind Inc Controlled deposition and growth of polycrystalline films in a vacuum
FR1273518A (fr) * 1960-10-28 1961-10-13 Ass Elect Ind Perfectionnements aux appareils de vaporisation sous vide
US3173283A (en) * 1960-12-27 1965-03-16 Vogtmann Hans Process and apparatus for loading extrusion presses
US3476170A (en) * 1967-05-15 1969-11-04 Traub Co The Casting method with laser beam melting of levitated mass

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4328763A (en) * 1979-05-03 1982-05-11 Leybold-Heraeus Vaporizer for vacuum deposition installations
EP0392067A1 (de) * 1989-04-14 1990-10-17 Vsesojuzny Nauchno-Issledovatelsky Proektno-Konstruktorsky I Tekhnologichesky Inst. Elektrotermicheskogo Oborudovania Vniieto Vakuuminduktionsofen
US5254173A (en) * 1992-01-31 1993-10-19 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Turntable mechanism
US6582523B2 (en) * 2000-12-30 2003-06-24 Hyundai Display Technology, Inc. Organic source boat structure for organic electro-luminescent display fabricating apparatus
US20050064110A1 (en) * 2002-02-21 2005-03-24 Corus Technology Bv Method and device for coating a substrate
US7323229B2 (en) 2002-02-21 2008-01-29 Corus Technology Bv Method and device for coating a substrate
US9920418B1 (en) 2010-09-27 2018-03-20 James Stabile Physical vapor deposition apparatus having a tapered chamber

Also Published As

Publication number Publication date
DE1907542A1 (de) 1969-10-30
LU58103A1 (id) 1969-06-03
GB1217443A (en) 1970-12-31
CH494582A (fr) 1970-08-15
SE346338B (id) 1972-07-03
BE713308A (id) 1968-10-07
DE1907542B2 (de) 1976-10-28
FR2005635A1 (id) 1969-12-12
NL6905225A (id) 1969-10-07

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