US3542655A - Electrodeposition of copper - Google Patents
Electrodeposition of copper Download PDFInfo
- Publication number
- US3542655A US3542655A US725209A US3542655DA US3542655A US 3542655 A US3542655 A US 3542655A US 725209 A US725209 A US 725209A US 3542655D A US3542655D A US 3542655DA US 3542655 A US3542655 A US 3542655A
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- US
- United States
- Prior art keywords
- good
- air
- copper
- group
- carbon atoms
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010949 copper Substances 0.000 title description 35
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical group [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title description 33
- 229910052802 copper Inorganic materials 0.000 title description 33
- 238000004070 electrodeposition Methods 0.000 title description 4
- 150000001875 compounds Chemical class 0.000 description 36
- 238000000034 method Methods 0.000 description 29
- 239000000203 mixture Substances 0.000 description 28
- 125000004432 carbon atom Chemical group C* 0.000 description 25
- 238000007747 plating Methods 0.000 description 22
- 239000005077 polysulfide Substances 0.000 description 21
- 229920001021 polysulfide Polymers 0.000 description 21
- 150000008117 polysulfides Polymers 0.000 description 21
- 239000000654 additive Substances 0.000 description 18
- 229920000570 polyether Polymers 0.000 description 17
- -1 ferrous metals Chemical class 0.000 description 15
- 125000000217 alkyl group Chemical group 0.000 description 14
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 13
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 12
- 239000004721 Polyphenylene oxide Substances 0.000 description 12
- 125000001931 aliphatic group Chemical group 0.000 description 11
- 125000003118 aryl group Chemical group 0.000 description 11
- 238000013019 agitation Methods 0.000 description 10
- 150000002391 heterocyclic compounds Chemical class 0.000 description 10
- 238000006243 chemical reaction Methods 0.000 description 9
- 229910052739 hydrogen Inorganic materials 0.000 description 9
- 239000001257 hydrogen Substances 0.000 description 9
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 8
- 150000001768 cations Chemical class 0.000 description 8
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 230000002378 acidificating effect Effects 0.000 description 7
- 125000000623 heterocyclic group Chemical group 0.000 description 7
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 7
- 239000000243 solution Substances 0.000 description 7
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 6
- 230000000996 additive effect Effects 0.000 description 6
- 125000004103 aminoalkyl group Chemical group 0.000 description 5
- 125000004122 cyclic group Chemical group 0.000 description 5
- 239000002659 electrodeposit Substances 0.000 description 5
- 125000002768 hydroxyalkyl group Chemical group 0.000 description 5
- 125000000962 organic group Chemical group 0.000 description 5
- 239000011734 sodium Substances 0.000 description 5
- 229910052717 sulfur Inorganic materials 0.000 description 5
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 4
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 4
- 125000002877 alkyl aryl group Chemical group 0.000 description 4
- 125000003710 aryl alkyl group Chemical group 0.000 description 4
- 150000002431 hydrogen Chemical group 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- FSSPGSAQUIYDCN-UHFFFAOYSA-N 1,3-Propane sultone Chemical compound O=S1(=O)CCCO1 FSSPGSAQUIYDCN-UHFFFAOYSA-N 0.000 description 3
- 239000002253 acid Substances 0.000 description 3
- 229910052783 alkali metal Inorganic materials 0.000 description 3
- 125000003342 alkenyl group Chemical group 0.000 description 3
- 229910000365 copper sulfate Inorganic materials 0.000 description 3
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 3
- 125000000753 cycloalkyl group Chemical group 0.000 description 3
- 239000002270 dispersing agent Substances 0.000 description 3
- 125000001183 hydrocarbyl group Chemical group 0.000 description 3
- 239000011593 sulfur Substances 0.000 description 3
- 150000008053 sultones Chemical class 0.000 description 3
- GVNVAWHJIKLAGL-UHFFFAOYSA-N 2-(cyclohexen-1-yl)cyclohexan-1-one Chemical compound O=C1CCCCC1C1=CCCCC1 GVNVAWHJIKLAGL-UHFFFAOYSA-N 0.000 description 2
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 2
- 101150065749 Churc1 gene Proteins 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 102100038239 Protein Churchill Human genes 0.000 description 2
- WQDUMFSSJAZKTM-UHFFFAOYSA-N Sodium methoxide Chemical compound [Na+].[O-]C WQDUMFSSJAZKTM-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 150000001340 alkali metals Chemical class 0.000 description 2
- 125000002947 alkylene group Chemical group 0.000 description 2
- 125000000304 alkynyl group Chemical group 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 2
- LEKPFOXEZRZPGW-UHFFFAOYSA-N copper;dicyanide Chemical compound [Cu+2].N#[C-].N#[C-] LEKPFOXEZRZPGW-UHFFFAOYSA-N 0.000 description 2
- 229910001651 emery Inorganic materials 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 2
- 229910052740 iodine Inorganic materials 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 239000002244 precipitate Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 125000001424 substituent group Chemical group 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 150000004763 sulfides Chemical class 0.000 description 2
- 238000006277 sulfonation reaction Methods 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- 125000000954 2-hydroxyethyl group Chemical group [H]C([*])([H])C([H])([H])O[H] 0.000 description 1
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 1
- 125000001494 2-propynyl group Chemical group [H]C#CC([H])([H])* 0.000 description 1
- RVBUGGBMJDPOST-UHFFFAOYSA-N 2-thiobarbituric acid Chemical compound O=C1CC(=O)NC(=S)N1 RVBUGGBMJDPOST-UHFFFAOYSA-N 0.000 description 1
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 1
- BTBUEUYNUDRHOZ-UHFFFAOYSA-N Borate Chemical compound [O-]B([O-])[O-] BTBUEUYNUDRHOZ-UHFFFAOYSA-N 0.000 description 1
- 229910001369 Brass Inorganic materials 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- BRLQWZUYTZBJKN-UHFFFAOYSA-N Epichlorohydrin Chemical compound ClCC1CO1 BRLQWZUYTZBJKN-UHFFFAOYSA-N 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 229910018828 PO3H2 Inorganic materials 0.000 description 1
- GOOHAUXETOMSMM-UHFFFAOYSA-N Propylene oxide Chemical group CC1CO1 GOOHAUXETOMSMM-UHFFFAOYSA-N 0.000 description 1
- DWAQJAXMDSEUJJ-UHFFFAOYSA-M Sodium bisulfite Chemical compound [Na+].OS([O-])=O DWAQJAXMDSEUJJ-UHFFFAOYSA-M 0.000 description 1
- FKNQFGJONOIPTF-UHFFFAOYSA-N Sodium cation Chemical compound [Na+] FKNQFGJONOIPTF-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 1
- 125000003545 alkoxy group Chemical group 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000007900 aqueous suspension Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 229910052794 bromium Inorganic materials 0.000 description 1
- 125000000480 butynyl group Chemical group [*]C#CC([H])([H])C([H])([H])[H] 0.000 description 1
- CSNJTIWCTNEOSW-UHFFFAOYSA-N carbamothioylsulfanyl carbamodithioate Chemical compound NC(=S)SSC(N)=S CSNJTIWCTNEOSW-UHFFFAOYSA-N 0.000 description 1
- QGJOPFRUJISHPQ-UHFFFAOYSA-N carbon disulfide Substances S=C=S QGJOPFRUJISHPQ-UHFFFAOYSA-N 0.000 description 1
- QGJOPFRUJISHPQ-NJFSPNSNSA-N carbon disulfide-14c Chemical compound S=[14C]=S QGJOPFRUJISHPQ-NJFSPNSNSA-N 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- FQMNUIZEFUVPNU-UHFFFAOYSA-N cobalt iron Chemical compound [Fe].[Co].[Co] FQMNUIZEFUVPNU-UHFFFAOYSA-N 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 150000001923 cyclic compounds Chemical class 0.000 description 1
- 125000000582 cycloheptyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 1
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 1
- 125000000640 cyclooctyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C([H])([H])C1([H])[H] 0.000 description 1
- 125000001511 cyclopentyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C1([H])[H] 0.000 description 1
- 125000003493 decenyl group Chemical group [H]C([*])=C([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 125000002704 decyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- XPPKVPWEQAFLFU-UHFFFAOYSA-J diphosphate(4-) Chemical compound [O-]P([O-])(=O)OP([O-])([O-])=O XPPKVPWEQAFLFU-UHFFFAOYSA-J 0.000 description 1
- 235000011180 diphosphates Nutrition 0.000 description 1
- 150000002019 disulfides Chemical class 0.000 description 1
- 125000005066 dodecenyl group Chemical group C(=CCCCCCCCCCC)* 0.000 description 1
- 125000003438 dodecyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 238000005323 electroforming Methods 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 125000003187 heptyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 125000006038 hexenyl group Chemical group 0.000 description 1
- 150000002430 hydrocarbons Chemical group 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 239000011630 iodine Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 1
- 125000004491 isohexyl group Chemical group C(CCC(C)C)* 0.000 description 1
- 125000001972 isopentyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- 239000002932 luster Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 125000005394 methallyl group Chemical group 0.000 description 1
- 125000001421 myristyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000001280 n-hexyl group Chemical group C(CCCCC)* 0.000 description 1
- 125000004123 n-propyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000001624 naphthyl group Chemical group 0.000 description 1
- 125000001971 neopentyl group Chemical group [H]C([*])([H])C(C([H])([H])[H])(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 125000004433 nitrogen atom Chemical group N* 0.000 description 1
- 125000005064 octadecenyl group Chemical group C(=CCCCCCCCCCCCCCCCC)* 0.000 description 1
- 125000004365 octenyl group Chemical group C(=CCCCCCC)* 0.000 description 1
- 150000008116 organic polysulfides Chemical class 0.000 description 1
- 125000006353 oxyethylene group Chemical group 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 125000002924 primary amino group Chemical group [H]N([H])* 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 229930195734 saturated hydrocarbon Natural products 0.000 description 1
- 125000002914 sec-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- SRRKNRDXURUMPP-UHFFFAOYSA-N sodium disulfide Chemical compound [Na+].[Na+].[S-][S-] SRRKNRDXURUMPP-UHFFFAOYSA-N 0.000 description 1
- 235000010267 sodium hydrogen sulphite Nutrition 0.000 description 1
- 125000004079 stearyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000012258 stirred mixture Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000011550 stock solution Substances 0.000 description 1
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 description 1
- 150000003871 sulfonates Chemical class 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 125000005063 tetradecenyl group Chemical group C(=CCCCCCCCCCCCC)* 0.000 description 1
- ZEMGGZBWXRYJHK-UHFFFAOYSA-N thiouracil Chemical compound O=C1C=CNC(=S)N1 ZEMGGZBWXRYJHK-UHFFFAOYSA-N 0.000 description 1
- 125000003944 tolyl group Chemical group 0.000 description 1
- 229930195735 unsaturated hydrocarbon Natural products 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 125000005023 xylyl group Chemical group 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C255/00—Carboxylic acid nitriles
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/38—Electroplating: Baths therefor from solutions of copper
Definitions
- this invention relates to novel compositions and to a process for electrodepositing bright, strongly leveled, ductile copper from an aqueous acidic copper plating bath containing chloride ions and at least one member from each of the following groups:
- each R is independently a divalent aliphatic or aromatic non-heterocyclic group of 1-10 carbon atoms;
- R is hydrogen, a metal cation, a monovalent aliphatic or aromatic organo group of l-20 carbon atoms, or the groups R40 M or -R(S) -RSO M wherein q is an integer 2-5;
- M is a cation;
- R" is hydrogen or an alkyl, hydroxyalkyl or aminoalkyl group of 1-6 carbon atoms; Y is a divalent organo group of 1-10 carbon atoms which forms a '5-6-membered cyclic ring structure with the group and n is an integer 2-5 inclusive.
- This invention relates to novel processes and compositions for the electrodeposition of copper from aqueous acidic baths. More particularly, this invention relates to certain bath compositions containing specified combinations of chemical ingredients and to the use of such compositions to obtain bright, ductile, strongly leveled copper electrodeposits.
- a further object of the invention is to provide novel plating bath compositions from which bright copper electrodeposits may be obtained wherein said electrodeposits exhibit good leveling and ductility over wide current density ranges.
- this invention relates to novel compositions and to a process for electrodepositing bright, strongly leveled, ductile copper from an aqueous acidic copper plating bath containing chloride ions and at least one member from each of the following groups:
- each R is independently a divalent aliphatic or aromatic non-heterocyclic group of 1-10 carbon atoms;
- R is hydrogen, a metal cation, a monovalent aliphatic or aromatic organo group of 1-20 carbon atoms, or the groups R-SO M or -R-(S) RSO M wherein q is an integer 2-5; M is a cation;
- R is hydrogen or an alkyl, hydroxyalkyl or aminoalkyl group of 1-6 carbon atoms
- Y is a divalent organo group of l-lO carbon atoms which forms a 5-6-membered cyclic ring structure with the group and n is an integer 2-5 inclusive.
- the -R groups may or may not be identical.
- leveled denotes a surface which is smoother than its substrate.
- these additives When used alone these additives may be found to be deficient in that the copper deposits obtained may not be bright, smooth, and exhibit adequate leveling properties over a sufiicient current density range. Combinations utilizing two of the additives may give fairly bright copper deposits, but the current density range of brightness may be limited and/ or the rate of leveling (decrease of surface roughness) may be low. Other double combinations may give striated deposits and limited bright current density ranges.
- novel compositions of the invention may be employed in combination with aqueous acidic copper plating baths.
- Typical aqueous acidic copper plating baths which may be employed in combination with the novel compositions of the invention include the following:
- Fluoborate bath (2) Cu(BF -600 g./l. (preferably about 224 g./l.)
- HBF 1-60 g./l. (preferably about 3.5 g./l.)
- the basis metals which may be electroplated in accordance with the process of this invention may include ferrous metals, such as steel, iron, etc. bearing a surface layer of nickel or cyanide copper; zinc and its alloys including zinc-base die-cast articles bearing a surface layer of cyanide copper or pyrophosphate copper; nickel, including nickel alloys with other metals such as cobalt-iron; aluminum, including its alloys, after suitable pretreatment, etc.
- the bright leveled copper deposit of this invention After the deposition of the bright leveled copper deposit of this invention, generally a bright nickel deposit and a chromium deposit (which may be microporous or microcracked) may be applied.
- the bright acid copper deposit of this invention contributes to the appearance and performance of the composite coating because of its very high rate of leveling, its excellent pore-filling capacity, its high luster, good ductility and low internal stress. It improves corrosion resistance and permits economy in nickel.
- the bright acid copper electrodeposits of this invention may be used for industrial applications such as the plating of printing rolls, memory drums, etc., and for electroforming. It gives very good results also for the plating of non-conducting materials, such as plastics, after the usual pretreatment.
- the plating conditions for electrodeposition from the aforementioned baths may, for example, include temperatures of C.-60 C. (preferably 20 C.-40 C.); pH (electrometric) of less than about 1.5; and a cathode current density of .1-30.0 amperes per square decimeter (a./s.d.).
- 'Iypical average current densities may be 2-20 a./s.d. for the sulfate bath, and about 4-40 a./s.d. for the fluo borate bath.
- Air agitation, volume agitation, or mechanical agitation may increase the effective current density ranges and enhance the uniformity of the copper deposit.
- this invention relates to novel compositions and to a process for electrodepositing bright, strongly leveled, ductile copper from an aqueous acidic copper plating bath containing chloride ions and at least one member from each of the following groups:
- R may be a divalent hydrocarbon group (including such hydrocarbon groups containing inert substituents such as hydroxyl, alkoxy, polyoxyalkylene, halogen, etc.) of 1-10 carbon atoms such as an alkylene group of 1-10 carbon atoms (i.e., CH -CH CH '(CH2)3 (CH2)4F 2)5' in general, (CH wherein p is an integer 1-10).
- R may be a divalent non-heterocyclic group of 1-10 carbon atoms containing 1-3 oxygen, 1-3 sulfur, or 1-3 nitrogen atoms (such as --CH CH OCH CH CH CHOHCI-I CH CH CH NHCH CH -CH CH SCH CH etc.).
- R may be a hydrocarbon radical preferably selected from the group consisting of alkyl, alkenyl, alkynyl, cycloalkyl, aralkyl, aryl, alkaryl, including such radicals when inertly substituted.
- R When R is alkyl, it may typically be straight chain alkyl or branched alkyl, including methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, sec-butyl, tert-butyl, n-amyl, neopentyl, isoamyl, n-hexyl, isohexyl, heptyls, octyls, decyls, dodecyls, tetradecyl, octadecyl, etc.
- Preferred alkyl includes lower alkyl, i.e., having less than about 8 carbon atoms, i.e., octyls and lower.
- R alkenyl
- it may typically be vinyl, allyl, methallyl, buten-lyl, buten-Z-yl, buten-S-yl, penten-l-yl, hexenyl, heptenyl, octenyl, decenyl, dodecenyl, tetra-decenyl, octadecenyl, etc.
- R is alkynyl
- it may typically be ethynyl, propargyl, butynyl, etc.
- R When R is cycloalkyl, it may typically be cyclopentyl, cyclohexyl, cycloheptyl, cyclooctyl, etc.
- R is aralkyl it may typically be benzyl, [3- phenylethyl, u-phenylpropyl, B-phenylpropyl, etc.
- R is aryl it may typically be phenyl, naphthyl, etc.
- R When R is alkaryl, it may typically be tolyl, xylyl, pethylphenyl, p-nonylphenyl, etc.
- K may be inertly substituted, e.g., may bear a non-reactive substituent such as alkyl, aryl, cycloalkyl, aralkyl, alkaryl, alkenyl, ether, etc.
- Polysulfide compounds of the formula (1) may typically be prepared by the reaction of an alkali metal salt of a hydropolysulfide and a sultone according to the reaction:
- R(S) Na compound may be prepared by the reaction of RSNa with sulfur if R is an aromatic group (compounds 8-1, 8-2, 8-3, S4, 8-5, -20).
- a typical procedure is: To a methanol solution (150 ml.) containing sodium methoxide (0.1 m.) is added the RSH (0.1 m.) compound. The mixture is stirred at room temperature until the compound has dissolved. Sulfur powder (0.1 m.) compound. The mixture is stirred at room temuntil all the sulfur is dissolved. Propanesultone (0.12 m.) is added to the stirred solution. Stirring is continued for 30 minutes, during which time a solid precipitates from the solution. Acetone (250 ml.) is then added to give additional solid, which is then filtered, washed with acetone, and dried.
- Aliphatic R'(S),,Na compounds are prepared by reaction of R'Q with Na S where Q is Cl, Br, I, OSOZCGH5, --OSO2C6H4'CH3, Compounds S-l7, 5-18, 5-19).
- a typical procedure is: To a stirred methanol solution (150 ml.) containing sodium di sulfide (0.1 m.) is added dropwise a solution of RQ (0.1 m.) in methanol (50 ml.) at room temperature. The reaction is slightly exothermic. After the addition is completed the mixture is stirred for 30 minutes. Propane sultone (0.12 m.), which may be dissolved in methanol (50 ml.), is added to the stirred mixture. During the addition of propane sultone a white solid usually precipitates from the solution. The mixture may be heated and stirred at 65 C. for 30 minutes and then cooled. Acetone is added and the solid is filtered and dried.
- haloalkane sulfonates including, e.g., ClCH CHOHCH SO Na (prepared by reaction of epichlorohydrin with sodium bisulfite), and in general compounds of the type QRSO M, may be used.
- Some polysulfide compounds may also be prepared by the direct sulfonation of an organic polysulfide (e.g., S-7; or 8-21 by sulfonation of 8-20).
- an organic polysulfide e.g., S-7; or 8-21 by sulfonation of 8-20.
- Symmetrical disulfides may be prepared by careful oxidation of compounds of the type HSRSO Na.
- the sulfide compounds of the invention may be present in the copper bath in eifective amount of about 0.001 g./l. 1.0 g./l., preferably 0.005 g./l.0.2 g./l.
- heterocyclic cooperating additives of the invention may include heterocyclic compounds of the formulae:
- Typical heterocyclic compounds which may be employed according to the invention may include compounds of Table 111 wherein the groups X and Y of formulae (1) and (2) are as shown.
- the heterocyclic compounds may be employed in eifective amounts, typically 0.5l0.0 mg./l. and preferably 0.7-4.0 mg./l. of total aqueous bath composition.
- heterocyclic cooperating additives of Table III may be obtained commercially or may be prepared as indicated herein.
- compounds such as H-1 and H-4 may be prepared according to equation:
- H- may be prepared from ethanolamine and carbon disulfide, which by oxidation with iodine gives bis-(2-hydr0xyethyl-)thiuram disulfide. Boiling of an aqueous suspension of this compound yields H-S.
- Compounds such as H-l, H-2, H-4 may also be prepared by heating of the alkanolamine-carbon disulfide reaction product according to the equation:
- Polyethers which may be used according to the process of the invention may have at least 5 ether oxygen atoms and include polyethers of the formulae:
- Suitable polyethers which may be used according to the invention include polyethers set forth in Table IV.
- the polyether additives may be employed in elfective amounts, typically 0.005-l0.0 g./l. and preferably 0.1- 1.0 g./l. of total aqueous bath composition.
- aqueous copper plating bath Good results may be obtained using a chloride ion concentration of from about 4 mg./l. to 60 mg./1. of aqueous copper plating bath composition, and preferably a chloride ion concentration of from 20 mg./l. to 60 mg./l. of aqueous copper plating solution.
- the aqueous copper plating bath contains:
- the plating experiments were performed in a Hull Cell containing 250 ml. of this acid copper sulfate bath.
- each of M1 and M is an alkali metal (preierably Na or K? or a hydrogen atom.
- Hull Cell allows one to observe the appearance of the deposit over a wide current density range.
- Type of Additives g./l. agitation Results udge the degree of leveling the polished brass panels 02 used for these plating tests were scratched with 4/0 11 ⁇ P-u 0.1 ⁇ Air Very good. emery polishing paper over a horizontal band of about r 51- 8; D 10 mm. width.
- the plating temperature used in these 0 12 01 0 8-1 0.02 experiments was the ambient room temperature (24-30 13 1H3 0.20 Air Very good. 0.), unless otherwise stated.
- the total current was 2 H-1 0.001 amperes and the plating time 10 minutes. Air agitation 14 @1 ⁇ Air Poor.
- Each property in groups (1) and (2) is independently 1 measured as poor, fair, good, and very good as 21 1 0 3g Air 0 very good, follows: 11-7 0. 00075 Property (1) pe y Rating Width of lustrous current density range Rating Degree of leveling Poor Less than one half of length of test panel Poor No visual change in original roughness of scratched band Fair More than onehalf andless than two thirds of length oitestpanel Fair Ntg ig e a l i le decrease in roughness. but scratches still Good More than two thirds but less than entire length of test pane1 Good Rtiughlne ss decreased andportions of scratches completely 8V6 Very good... Entire length of test panel is lustrous Very good... Scratches on the portion of the panel having a current density greater than 2.5 a./s.d. are practically invisible.
- H4 88 Good Good to very good leveling and good to very good semi- 7 .0 bright Olll'gllt ggnsity ratnge or good levehng and good to 00 very goo rig curren ensl yrange. I Poor Poor leveling and/or poor lustrous current density range. 25 H4 88 Very good- Fair All intermediate panels not otherwise classified. gg 0 2 26 8-7 0.05 Meclganicalu Poor. TABLE VI 28 0.20 ⁇ . 0 Do. A yp p 3 3: Additives g./l. agitation Result 29 Good H-1 0.001 Exam 10 No.2
- R-SOaM in effective amount of 0.001 g./l.-1.0 g./l.
- a polyether containing at least 5 ether oxygen atoms per molecule in effective amount of 0.005- 10.0 g./l.
- each R is independently a divalent aliphatic or aromatic non-heterocyclic group of 1-10 carbon atoms;
- R is hydrogen, a metal cation, a monovalent aliphatic or aromatic organo group of 1-20 carbon atoms, or the groups RSO M or R(S) RSO M wherein q is an integer 2-5;
- M is a cation;
- n is an integer 2-4.
- n is an integer 2-4, R is an aromatic group, and R is a polymethylene group.
- polysulfide compound is of the formula in which R is NaO S(CH n is 2; and R is (CH-Q 5.
- the polysulfide compound is of the formula in which R is NaO S(CH S (CH n is 2; and R is 2)3- 6.
- the polysulfide compound is of the formula in R, is n is 2; and R is (CH2)3.
- polysulfide compound is of the formula in which R is NaO S(CH S (CH n is 2; and R is 2):;-
- a process as claimed in claim 1 wherein the polysulfide compound is of the formula f R S in which R is NaO SCH CH(OH)CH n is 2; and R is CH CH(OH)CH 12.
- a process as claimed in claim 1 wherein X is S-. 13.
- polyether is RSOaNa RSOaNa RSOaNa Ill- ⁇ 41:30, and wherein the process is carried out in the presence of a dispersing agent of the formula 20.
- a composition for electrodepositing bright, strongly leveled, ductile copper which comprises an aqueous acidic copper plating bath containing chloride ions and at least one member from each of the following groups:
- a polyether containing at least 5 ether oxygen atoms per molecule in effective amount of 0.005- 10.0 g./l.
- each R is independently a divalent aliphatic or aromatic non-heterocyclic group of 1-10 carbon atoms;
- R is hydrogen, a metal cation, a monovalent aliphatic or aromatic organo group of 1-20 carbon atoms, or the groups RSO M or -R-(S),, --RSO wherein q is an integer 2-5;
- M is a cation;
- R" is hydrogen or an alkyl, hydroxyalkyl or aminoalkyl group of 1-6 carbon atoms; Y is a divalent organo group of 1-10 carbon atoms which forms a 5-6 membered cyclic ring structure with the group 24 28.
- X is CH2CH2OH 29.
- Y is CH CH 30.
- the chloride ion concentration is at least 0.5 mg./l. of total aqueous bath composition.
- a composition as claimed in claim 22 wherein the chloride ion concentration is 1-500 mg./l. of total aqueous bath composition.
- a composition as claimed in claim 22 wherein the polyether is References Cited UNITED STATES PATENTS 2,663,684 12/1953 Pierce 20452 2,700,020 1/1955 Pierce 20452 2,840,518 6/1958 Condon 204-52 3,267,010 8/1966 Creutz et al. 20452 3,288,690 11/1966 Creutz et al. 20452 3,328,273 6/1967 CreutZ et al 20452 GERALD L, KAPLAN, Primary Examiner
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- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Electroplating And Plating Baths Therefor (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US72520968A | 1968-04-29 | 1968-04-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
US3542655A true US3542655A (en) | 1970-11-24 |
Family
ID=24913601
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US725209A Expired - Lifetime US3542655A (en) | 1968-04-29 | 1968-04-29 | Electrodeposition of copper |
Country Status (12)
Cited By (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3715289A (en) * | 1971-02-08 | 1973-02-06 | Stauffer Chemical Co | Brightener composition for acid copper electroplating baths |
US3725220A (en) * | 1972-04-27 | 1973-04-03 | Lea Ronal Inc | Electrodeposition of copper from acidic baths |
US3770598A (en) * | 1972-01-21 | 1973-11-06 | Oxy Metal Finishing Corp | Electrodeposition of copper from acid baths |
US3940320A (en) * | 1972-12-14 | 1976-02-24 | M & T Chemicals Inc. | Electrodeposition of copper |
US3956079A (en) * | 1972-12-14 | 1976-05-11 | M & T Chemicals Inc. | Electrodeposition of copper |
US3956078A (en) * | 1972-12-14 | 1976-05-11 | M & T Chemicals Inc. | Electrodeposition of copper |
US3956084A (en) * | 1972-12-14 | 1976-05-11 | M & T Chemicals Inc. | Electrodeposition of copper |
US3956120A (en) * | 1972-12-14 | 1976-05-11 | M & T Chemicals Inc. | Electrodeposition of copper |
US3966565A (en) * | 1972-12-14 | 1976-06-29 | M & T Chemicals Inc. | Electrodeposition of copper |
US4014760A (en) * | 1974-11-21 | 1977-03-29 | M & T Chemicals Inc. | Electrodeposition of copper |
US4036710A (en) * | 1974-11-21 | 1977-07-19 | M & T Chemicals Inc. | Electrodeposition of copper |
US4036711A (en) * | 1975-12-18 | 1977-07-19 | M & T Chemicals Inc. | Electrodeposition of copper |
US4376685A (en) * | 1981-06-24 | 1983-03-15 | M&T Chemicals Inc. | Acid copper electroplating baths containing brightening and leveling additives |
US4781801A (en) * | 1987-02-03 | 1988-11-01 | Mcgean-Rohco, Inc. | Method of copper plating gravure rolls |
US4786746A (en) * | 1987-09-18 | 1988-11-22 | Pennsylvania Research Corporation | Copper electroplating solutions and methods of making and using them |
US4948474A (en) * | 1987-09-18 | 1990-08-14 | Pennsylvania Research Corporation | Copper electroplating solutions and methods |
US5417841A (en) * | 1990-08-03 | 1995-05-23 | Mcgean-Rohco, Inc. | Copper plating of gravure rolls |
US20040016502A1 (en) * | 2002-07-26 | 2004-01-29 | Jones Gregory K. | Breathable materials comprising low-elongation fabrics, and methods |
US20040217009A1 (en) * | 2002-11-21 | 2004-11-04 | Shipley Company, L.L.C. | Electroplating bath |
EP2537962A1 (en) * | 2011-06-22 | 2012-12-26 | Atotech Deutschland GmbH | Method for copper plating |
CN109778264A (zh) * | 2017-11-10 | 2019-05-21 | 丹阳市金地生态园林发展有限公司 | 一种含环氧氯丙烷金属合金抗静电电镀液 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3804729A (en) * | 1972-06-19 | 1974-04-16 | M & T Chemicals Inc | Electrolyte and process for electro-depositing copper |
ZA739310B (en) * | 1972-12-14 | 1974-11-27 | M & T Chemicals Inc | Electrode position of copper |
US10060034B2 (en) * | 2017-01-23 | 2018-08-28 | Rohm And Haas Electronic Materials Llc | Electroless copper plating compositions |
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US2663684A (en) * | 1952-06-02 | 1953-12-22 | Houdaille Hershey Corp | Method of and composition for plating copper |
US2700020A (en) * | 1952-06-02 | 1955-01-18 | Houdaille Hershey Corp | Plating copper |
US2840518A (en) * | 1954-07-19 | 1958-06-24 | Westinghouse Electric Corp | Acid copper addition agents and plating electrolytes embodying the same |
US3267010A (en) * | 1962-04-16 | 1966-08-16 | Udylite Corp | Electrodeposition of copper from acidic baths |
US3288690A (en) * | 1962-04-16 | 1966-11-29 | Udylite Corp | Electrodeposition of copper from acidic baths |
US3328273A (en) * | 1966-08-15 | 1967-06-27 | Udylite Corp | Electro-deposition of copper from acidic baths |
-
1968
- 1968-04-29 US US725209A patent/US3542655A/en not_active Expired - Lifetime
-
1969
- 1969-04-21 FR FR6912391A patent/FR2007169A1/fr not_active Withdrawn
- 1969-04-24 BE BE732051D patent/BE732051A/xx not_active IP Right Cessation
- 1969-04-25 GB GB21349/69A patent/GB1213097A/en not_active Expired
- 1969-04-28 ES ES366560A patent/ES366560A1/es not_active Expired
- 1969-04-28 CH CH642769A patent/CH537462A/de not_active IP Right Cessation
- 1969-04-28 BR BR208411/69A patent/BR6908411D0/pt unknown
- 1969-04-28 SE SE06009/69A patent/SE357771B/xx unknown
- 1969-04-29 NL NL6906599.A patent/NL165513C/xx not_active IP Right Cessation
- 1969-04-29 CA CA050039A patent/CA924259A/en not_active Expired
- 1969-04-29 DE DE1921845A patent/DE1921845C3/de not_active Expired
- 1969-04-30 JP JP44033504A patent/JPS4934887B1/ja active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2663684A (en) * | 1952-06-02 | 1953-12-22 | Houdaille Hershey Corp | Method of and composition for plating copper |
US2700020A (en) * | 1952-06-02 | 1955-01-18 | Houdaille Hershey Corp | Plating copper |
US2840518A (en) * | 1954-07-19 | 1958-06-24 | Westinghouse Electric Corp | Acid copper addition agents and plating electrolytes embodying the same |
US3267010A (en) * | 1962-04-16 | 1966-08-16 | Udylite Corp | Electrodeposition of copper from acidic baths |
US3288690A (en) * | 1962-04-16 | 1966-11-29 | Udylite Corp | Electrodeposition of copper from acidic baths |
US3328273A (en) * | 1966-08-15 | 1967-06-27 | Udylite Corp | Electro-deposition of copper from acidic baths |
Cited By (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3715289A (en) * | 1971-02-08 | 1973-02-06 | Stauffer Chemical Co | Brightener composition for acid copper electroplating baths |
US3770598A (en) * | 1972-01-21 | 1973-11-06 | Oxy Metal Finishing Corp | Electrodeposition of copper from acid baths |
US3725220A (en) * | 1972-04-27 | 1973-04-03 | Lea Ronal Inc | Electrodeposition of copper from acidic baths |
US3940320A (en) * | 1972-12-14 | 1976-02-24 | M & T Chemicals Inc. | Electrodeposition of copper |
US3956079A (en) * | 1972-12-14 | 1976-05-11 | M & T Chemicals Inc. | Electrodeposition of copper |
US3956078A (en) * | 1972-12-14 | 1976-05-11 | M & T Chemicals Inc. | Electrodeposition of copper |
US3956084A (en) * | 1972-12-14 | 1976-05-11 | M & T Chemicals Inc. | Electrodeposition of copper |
US3956120A (en) * | 1972-12-14 | 1976-05-11 | M & T Chemicals Inc. | Electrodeposition of copper |
US3966565A (en) * | 1972-12-14 | 1976-06-29 | M & T Chemicals Inc. | Electrodeposition of copper |
US4014760A (en) * | 1974-11-21 | 1977-03-29 | M & T Chemicals Inc. | Electrodeposition of copper |
US4036710A (en) * | 1974-11-21 | 1977-07-19 | M & T Chemicals Inc. | Electrodeposition of copper |
US4036711A (en) * | 1975-12-18 | 1977-07-19 | M & T Chemicals Inc. | Electrodeposition of copper |
US4376685A (en) * | 1981-06-24 | 1983-03-15 | M&T Chemicals Inc. | Acid copper electroplating baths containing brightening and leveling additives |
US4781801A (en) * | 1987-02-03 | 1988-11-01 | Mcgean-Rohco, Inc. | Method of copper plating gravure rolls |
US4786746A (en) * | 1987-09-18 | 1988-11-22 | Pennsylvania Research Corporation | Copper electroplating solutions and methods of making and using them |
US4948474A (en) * | 1987-09-18 | 1990-08-14 | Pennsylvania Research Corporation | Copper electroplating solutions and methods |
US5417841A (en) * | 1990-08-03 | 1995-05-23 | Mcgean-Rohco, Inc. | Copper plating of gravure rolls |
US20040016502A1 (en) * | 2002-07-26 | 2004-01-29 | Jones Gregory K. | Breathable materials comprising low-elongation fabrics, and methods |
US20040217009A1 (en) * | 2002-11-21 | 2004-11-04 | Shipley Company, L.L.C. | Electroplating bath |
EP2537962A1 (en) * | 2011-06-22 | 2012-12-26 | Atotech Deutschland GmbH | Method for copper plating |
CN103703167A (zh) * | 2011-06-22 | 2014-04-02 | 安美特德国有限公司 | 镀铜方法 |
CN103703167B (zh) * | 2011-06-22 | 2016-06-29 | 安美特德国有限公司 | 镀铜方法 |
US9506158B2 (en) | 2011-06-22 | 2016-11-29 | Atotech Deutschland Gmbh | Method for copper plating |
TWI560326B (en) * | 2011-06-22 | 2016-12-01 | Atotech Deutschland Gmbh | Method for copper plating |
CN109778264A (zh) * | 2017-11-10 | 2019-05-21 | 丹阳市金地生态园林发展有限公司 | 一种含环氧氯丙烷金属合金抗静电电镀液 |
Also Published As
Publication number | Publication date |
---|---|
GB1213097A (en) | 1970-11-18 |
DE1921845A1 (de) | 1969-11-06 |
CA924259A (en) | 1973-04-10 |
CH537462A (de) | 1973-05-31 |
BE732051A (enrdf_load_stackoverflow) | 1969-10-01 |
FR2007169A1 (enrdf_load_stackoverflow) | 1970-01-02 |
JPS4934887B1 (enrdf_load_stackoverflow) | 1974-09-18 |
NL6906599A (enrdf_load_stackoverflow) | 1969-10-31 |
BR6908411D0 (pt) | 1973-01-09 |
SE357771B (enrdf_load_stackoverflow) | 1973-07-09 |
NL165513B (nl) | 1980-11-17 |
DE1921845C3 (de) | 1980-07-31 |
NL165513C (nl) | 1981-04-15 |
ES366560A1 (es) | 1971-07-16 |
DE1921845B2 (de) | 1979-11-15 |
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