US3484276A - Apparatus for and method of providing a melted insulating coating on the inner surface of a tubular article - Google Patents

Apparatus for and method of providing a melted insulating coating on the inner surface of a tubular article Download PDF

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Publication number
US3484276A
US3484276A US566865A US3484276DA US3484276A US 3484276 A US3484276 A US 3484276A US 566865 A US566865 A US 566865A US 3484276D A US3484276D A US 3484276DA US 3484276 A US3484276 A US 3484276A
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US
United States
Prior art keywords
coating
tube
wall
jacket
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US566865A
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English (en)
Inventor
Anthonie Jan Burggraaf
Ernest Onno Willem Van D Stelt
Jacob Willem De Ruiter
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US Philips Corp
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US Philips Corp
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Publication date
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Publication of US3484276A publication Critical patent/US3484276A/en
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Expired - Lifetime legal-status Critical Current

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32733—Means for moving the material to be treated
    • H01J37/32752—Means for moving the material to be treated for moving the material across the discharge
    • H01J37/32761—Continuous moving
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/20—Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored; Applying coatings to the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/332—Coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S65/00—Glass manufacturing
    • Y10S65/04—Electric heat

Definitions

  • the attack of the wall surface is due to the presence of strongly electropositive metal vapors such as sodium vapor, cadmium vapor, magnesium vapor, and the like and to the production of metal ions during the electric discharge.
  • strongly electropositive metal vapors such as sodium vapor, cadmium vapor, magnesium vapor, and the like
  • metal ions during the electric discharge.
  • coating layers are applied consisting of the said substances.
  • metal oxides capable of withstanding high temperatures and are not attacked by metal vapor such as alumina, zirconium oxide, calcium oxide, magnesia or beryllium oxide.
  • the protective action of such a coating is not only based on the kind of material used. It is important that a completely uninterrupted layer should be formed. A density such that the metal ions and the harmful vapors absolutely cannot reach the subjacent wall cannot be attained with certainty if the known coating techniques are used in which the layer is formed by sintering or burning the coating material into the subjacent surface. It goes without saying that the formation of completely uninterrupted layers is promoted by melting the applied substance resistant to attack. The generally requires higher temperatures than the material for the tubular envelope is capable of withstanding so that such a protective layer cannot be obtained by the conventional method of application. It must be prevented that the softening temperature of the glass support should be exceeded during the supply of the required heat.
  • the invention relates to a method of applying such a coating increasing the resistance to chemical and electrochemical attack to the inner surface of a tubular article of glass, quartz or another insulating material, in which an uninterrupted layer is formed by melting the coating material, while the use of insulating substances of a higher melting point than that of the tube wall does not hamper the manufacture of such a layer.
  • the heat required for melting the coating material on the inner surface of the tubular article is obice tained by the presence of an electric gas discharge in the hollow space of the article, which discharge is maintained by an alternating magnetic field of high frequency produced by an induction coil surrounding the article.
  • the invention further relates to devices for carrying out the method.
  • inductive plasma In a gas discharge maintained by high-frequency induction, which is referred to as inductive plasma, very high temperatures can be attained which decrease from the core of the discharge towards the surroundings.
  • the heat required for attaining the desired temperature can be developed in the proximity of the wall.
  • the invention is more particularly intended for applying a thin protective layer.
  • a thin protective layer With a view to the thickness of the layer, the difference in expansion between the material of the wall of the article and the material of the coating must frequently be taken into account. Therefore, it is sometimes preferred to apply to a first coating a second layer, the intermediate layer consisting of another material which has a coefficient of expansion lying in the transitional area between the expansion coeflicients of the material of the wall and that of the protective coating.
  • Such an intermediate layer may be sintered, for exf ample, and may form an opaque layer if a diffuse transparency is required.
  • the conventional kinds of glass used for the manufacture of discharge tubes have an expansion coefiicient of from 50-75 10" cm. cm. degree C7 and are not particularly resistant to the unequal expansion under the influence of the heating, if produced locally, for example, with the use of the inductive plasma.
  • the risk of mechanical stresses being produced which exceed the strength of the material can be avoided by the use of a heating furnace by which heat is supplied from the out side to the wall until a temperature is reached at which the material has a viscosity suitable for the neutralization of the mechanical stresses.
  • An efiicient combination therefore consists in the use of an elecrtic resistance furnace and a high-frequency coil located immediately adjacent one another, while the tube is slipped into the furnace and is moved uniformly in the direction of the coil.
  • the coating material may be sucked up into the tube in the form of a suspension and the excess material can be removed after a quantity of this coating material has been deposited on the tube wall.
  • the thickness of the layer after the suspension has been conducted away depends upon the viscosity which can be chosen in accordance with the desired thickness of the layer.
  • the suspension is made of powder intended for the coating having a given grain size which is mixed with alcohol and a solution of nitrocellulose in suitably chosen quantities, whereupon the mixture is ground in a ball-mill for a comparatively long time, for example, for 24 hours.
  • the suspension layer can be processed to a melted layer adhering to the wall in different ways.
  • the method in acocrdance with the invention can be carried out in that the gas, for example, argon is supplied at one end of the tubular article,
  • the gas is supplied and conducted away at the ends of the jacket of quartz glass. Contamination of the argon or neon gas required for the discharge must be avoided as far as possible so that gases must be prevented from being released from the suspension on the wall of the tube.
  • the heating of this suspension until the material melts is therefore preceded by a drying period followed by a heat treatment such that the gasforming constitutents are removed therefrom.
  • the meltable layer may be applied in a manner differ ent from that in which a suspension is used.
  • the tube is rapidly rotated about its longitudinal axis during the activity of the inductive plasma while simmultaneously with the gas current finely divided coating material is allowed to enter the tube.
  • the centrifugal forces produced by the rotary movement are imparted to the powder which is heated in the gas discharge and is pushed by these forces to the outside and reaches the wall in the melted state.
  • the formation of a layer completely coating the wall requires a relative displacement of the tube with respect to the plasma and the inlet aperture of the pulverulent material.
  • FIG. 1 shows an arrangement for applying a coating to the walls of tubes of considerable lengths
  • FIG. 2 shows such an arrangement for short tubes
  • FIG. 3 shows diagrammatically a suitable device for carrving out the invention
  • FIG. 4 shows the device for rotating the tube.
  • the tube 1 may be provided at both ends with plugs 2 and 3 which both have an aperture 4 and 5, respectively.
  • the aperture 4 in the plug 2 communicates with a contaniner containing a quantity of required gas, for example argon or neon.
  • the aperture 5 in the plug 3 is connected with an exhaust device.
  • the inner surface of the tube 1 is coated with a thin layer 6 of the suspension of the material intended for the coating.
  • a heating furnace 7 and the induction coil 8 of a high-frequency generator are provided around the wall of the tube.
  • a separate cylindrical jacket 9 may be provided consis ing of quartz glass or of another material melting with diflicultv and having insulating properties.
  • the plugs 2 and 3 and the apertures 4 and 5 provided therein are disposed at the ends of the jacket 9, while the heating furnace 7 and the induction coil 8 surround the jacket 9.
  • the len h of tubing 10 to be treated is placed inside the jacket 9, the inner surface of which length of tubing is coated with the suspension layer 6.
  • the length of tubing 10 is supported by a tubular support 11 of material melting only with difficulty, for example, of quartz glass.
  • the tube 1 or the jacket 9 is placed on a platform 12 (FIG. 3).
  • a flexible hose 13 the aperture 4 in the plug 2 communicates with a needle valve 14 by means of which the supply of gas from a vessel 15 is controlled.
  • the aperture 5 in the plug 3 serving for conducting away the gas communicates through a flexible hose 16 with the exhaust pump 17. With the needle valve 14 a gas pressure between 10- and 10" torr is maintained.
  • the heating furnace 7 can be used for drying the suspension and serves at the same time for heating the tube glass in order to avoid impermissibly high mechanical stresses.
  • the furnace 7 and the jacket 9 can be displaced along each other in the longitudinal direction of the tube.
  • the platform 12 is provided with a helical rod 18 and a device cooperating therewith for converting a rotary movement into a rectilinear movement, for example, constituted by a transmission 19 with the aid of a worm and a wormwheel, the drive being effected by the motor 20.
  • the voltage control member 21 of the autotransformer 22 connected to the supply mains serves for adjusting the temperature of the heating furnace 7.
  • the heating furnace 7 Prior to the ignition of the inductive plasma, the heating furnace 7 is brought to the correct temperature. At a low gas pressure in the tube, the movability of the gas molecules resulting from this heating is suflicient to give rise to ionization of the gas under the influence of a high-frequency induction field. This field is obtained by the energization of the induction coil 8 which for this purpose is connected through a coupling transformer 23 to the high-frequency generator 24.
  • the tube 1 is lowered as far as possible so that the upper end lies in the heating furnace 7.
  • the platform 12 is set into rotation by putting the motor 20 in operation and as soon as the zone heated by the furnace 7 has got within the reach of the induction coil 8, the coil is energized and the gas discharge is effected. Owing to the resultant developed heat, the suspension layer melts and the temperature required for melting can be adjusted by control of the high-frequency energy supplied to the induction coil 8.
  • the heat of the tube wall can be satisfactorily conducted away to the open air if a rapid cooling is desirable for preventing softening of the glass or crystallization.
  • the tube wall When the platform is gradually raised, the tube wall is displaced through the high-temperature range and provided with a coating throughout its length.
  • the shorter lengths of tube of FIG. 2 are treated in a corresponding manner and the displacement by means of the platform is adapted to the length of the tubular glass.
  • the tube to be treated is not subjected to a difference in pressure and the maximum permissible viscosity can be lower without leading to deformation so that the admissible heating temperature is higher than in the case of FIG. 1.
  • the heat can be conducted away more satisfactorily when a cooling gas is used which is passed through the intermediate space between the length of tubing 10 and the jacket 9.
  • a jacket 9 of high melting-point insulating material is rotatably arranged between two caps 25 and 26 which are rigidly connected to each other by means of rods 27 and 28 (FIG. 4).
  • a pulley 29 serves to set the jacket 9 into rotation.
  • the rotatable object is supported by ball bearings 30 and 31.
  • Gaskets 32 and 33 serve to prevent the open air from penetrating into the gas-filled space.
  • the caps 25 and 26 and the interposed jacket 9 may be moved upwards and downwards by means of, for example, a hydraulic drawing device 34 the drawing rod 35 of which is connected through flexible cables 36 and 37 to the cap 25.
  • the induction coil 8 and the heating furnace 7 do not change their places.
  • the gas supply is located in the upper cap 25, while the lower cap 26 is provided with a connection for the outlet.
  • the supply duct 38 includes a thin pipe 39 which extends to the outside and is movably arranged in a stuffing ring 40 in a closure member 41 closing the supply duct 38.
  • the pipe 39 should not change its place during the upward and downward movement of the jacket 9 and it should merge in the proximity of the inductive plasma 42 obtained by means of the induction coil 8.
  • the pulverulent material supplied through the pipe 39 which serves to manufacture the coating is pushed towards the wall upon rotation of the jacket 9 and is deposited on the wall in the melted state owing to the heat of the inductive plasma 42.
  • the coating may be providcd throughout the surface of the wall in that the construction is uniformly drawn upwards during rotation of the jacket 9 and the activation of the plasma.
  • a length of tubing 43 arranged inside this jacket and supported by a support 44 of high melting-point material may be provided on its inner surface with a coating.
  • a method of coating the inner surface of a tubular article of insulating material with a protective coating of a melted second insulating material comprising the steps of applying a suspension of the second insulating material to the inner surface of the article, introducing an ionizable gas in the hollow space of said tubular article, and subjecting the suspension to a plasma formed by a high-frequency induction field which develops the heat required for melting the coating material.
  • a device for coating the inner surface of a tubular article of insulating material with a protective layer of another insulating material comprising means to connect one end of the tubular article the inner surface of which is covered with a suspension of the other insulating material to a gas supply conductor and the other end to an exhaust device, and an induction coil surrounding the article and being relatively displaceable with respect thereto in axial direction for generating an inductive plasma in the gas supplied to said tubular member for melting the suspension of insulating material on the inner surface thereof.
  • a tube of smaller diameter is provided for supplying pulverulent coating material. from the outside to an area lying in the proximity of the plasma zone.
  • a device as claimed in claim 8 in which in the axis of rotation a tube is provided for supplying pulverulent coating material from the outside to an area lying in the proximity of the plasma zone.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
US566865A 1965-07-31 1966-07-21 Apparatus for and method of providing a melted insulating coating on the inner surface of a tubular article Expired - Lifetime US3484276A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL6509968A NL6509968A (en, 2012) 1965-07-31 1965-07-31

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US3484276A true US3484276A (en) 1969-12-16

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US566865A Expired - Lifetime US3484276A (en) 1965-07-31 1966-07-21 Apparatus for and method of providing a melted insulating coating on the inner surface of a tubular article

Country Status (6)

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US (1) US3484276A (en, 2012)
AT (1) AT263140B (en, 2012)
BE (1) BE684828A (en, 2012)
CH (1) CH454281A (en, 2012)
GB (1) GB1127426A (en, 2012)
NL (1) NL6509968A (en, 2012)

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3841264A (en) * 1971-09-29 1974-10-15 S Masuda Apparatus for applying dust particles by contact type electric field curtain
US3869300A (en) * 1970-10-24 1975-03-04 Metallgesellschaft Ag Method of internally coating ducts with synthetic resin
US3946125A (en) * 1970-10-24 1976-03-23 Metallgesellschaft Aktiengesellschaft Method for internally coating ducts with synthetic resin
US3974306A (en) * 1972-10-06 1976-08-10 Kansai Paint Company, Ltd. Method for coating the inner surface of metal pipes
US3982050A (en) * 1973-05-21 1976-09-21 Dai Nippon Co., Ltd. Method for coating inner faces of metal pipes of small diameter
US4090055A (en) * 1977-02-10 1978-05-16 Northern Telecom Limited Apparatus for manufacturing an optical fibre with plasma activated deposition in a tube
US4145456A (en) * 1974-09-14 1979-03-20 Dieter Kuppers Method of producing internally coated glass tubes for the drawing of fibre optic light conductors
US4183320A (en) * 1976-08-21 1980-01-15 Maschinenfabrik Augsburg-Nurnberg Aktiengesellschaft Apparatus for nickel plating
USRE30635E (en) * 1974-09-14 1981-06-02 U.S. Philips Corporation Method of producing internally coated glass tubes for the drawing of fibre optic light conductors
US4349582A (en) * 1980-03-18 1982-09-14 Hans Beerwald Gas-discharge method for coating the interior of electrically non-conductive pipes
FR2527742A1 (fr) * 1982-05-31 1983-12-02 Hakko Co Procede de revetement interieur de tubes de canalisations
US4505613A (en) * 1982-04-30 1985-03-19 Hakko Co., Ltd. Method for lining pipes in pipelines
US4571522A (en) * 1983-05-20 1986-02-18 U.S. Philips Corporation Method of manufacturing a low-pressure mercury vapor discharge lamp, a low-pressure mercury vapor discharge lamp manufactured by means of this method, and a device for carrying out this method
US4714589A (en) * 1985-08-07 1987-12-22 U.S. Philips Corporation Method of and device for coating the inside of tubes
DE19529318A1 (de) * 1995-08-09 1997-02-13 Uwe Biederer Verfahren zur Herstellung dekorativer Gebrauchsgegenstände und die nach diesem Verfahren hergestellten dekorativen Gebrauchsgegenstände
EP0849769A3 (de) * 1996-12-17 1999-06-09 Schott Glas Verfahren und Vorrichtung zur Aussenbeschichtung von Lampen
WO2015197748A1 (fr) * 2014-06-25 2015-12-30 Commissariat à l'énergie atomique et aux énergies alternatives Dispositif de depot chimique en phase vapeur a rendement de depot ameliore
CN115069463A (zh) * 2021-03-15 2022-09-20 日本碍子株式会社 废气处理装置用筒状部件的制造方法及涂膜形成装置

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2040767A (en) * 1933-05-24 1936-05-12 Nat Tube Co Method and apparatus for coating pipes and tubes
US2643956A (en) * 1950-03-01 1953-06-30 Gen Electric Coating method and apparatus for luminescent tubes
US2676894A (en) * 1948-04-02 1954-04-27 Gen Electric Method of coating with fluorescent material
US2940011A (en) * 1958-07-11 1960-06-07 Alan C Kolb Device for producing high temperatures
US3179784A (en) * 1962-12-20 1965-04-20 Giannini Scient Corp Method and apparatus for spraying plastics
US3383163A (en) * 1964-01-24 1968-05-14 Little Inc A Treatment of surfaces

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2040767A (en) * 1933-05-24 1936-05-12 Nat Tube Co Method and apparatus for coating pipes and tubes
US2676894A (en) * 1948-04-02 1954-04-27 Gen Electric Method of coating with fluorescent material
US2643956A (en) * 1950-03-01 1953-06-30 Gen Electric Coating method and apparatus for luminescent tubes
US2940011A (en) * 1958-07-11 1960-06-07 Alan C Kolb Device for producing high temperatures
US3179784A (en) * 1962-12-20 1965-04-20 Giannini Scient Corp Method and apparatus for spraying plastics
US3383163A (en) * 1964-01-24 1968-05-14 Little Inc A Treatment of surfaces

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3869300A (en) * 1970-10-24 1975-03-04 Metallgesellschaft Ag Method of internally coating ducts with synthetic resin
US3946125A (en) * 1970-10-24 1976-03-23 Metallgesellschaft Aktiengesellschaft Method for internally coating ducts with synthetic resin
US3841264A (en) * 1971-09-29 1974-10-15 S Masuda Apparatus for applying dust particles by contact type electric field curtain
US3974306A (en) * 1972-10-06 1976-08-10 Kansai Paint Company, Ltd. Method for coating the inner surface of metal pipes
US3982050A (en) * 1973-05-21 1976-09-21 Dai Nippon Co., Ltd. Method for coating inner faces of metal pipes of small diameter
US4145456A (en) * 1974-09-14 1979-03-20 Dieter Kuppers Method of producing internally coated glass tubes for the drawing of fibre optic light conductors
USRE30635E (en) * 1974-09-14 1981-06-02 U.S. Philips Corporation Method of producing internally coated glass tubes for the drawing of fibre optic light conductors
US4183320A (en) * 1976-08-21 1980-01-15 Maschinenfabrik Augsburg-Nurnberg Aktiengesellschaft Apparatus for nickel plating
US4090055A (en) * 1977-02-10 1978-05-16 Northern Telecom Limited Apparatus for manufacturing an optical fibre with plasma activated deposition in a tube
US4349582A (en) * 1980-03-18 1982-09-14 Hans Beerwald Gas-discharge method for coating the interior of electrically non-conductive pipes
US4505613A (en) * 1982-04-30 1985-03-19 Hakko Co., Ltd. Method for lining pipes in pipelines
FR2527742A1 (fr) * 1982-05-31 1983-12-02 Hakko Co Procede de revetement interieur de tubes de canalisations
US4571522A (en) * 1983-05-20 1986-02-18 U.S. Philips Corporation Method of manufacturing a low-pressure mercury vapor discharge lamp, a low-pressure mercury vapor discharge lamp manufactured by means of this method, and a device for carrying out this method
US4714589A (en) * 1985-08-07 1987-12-22 U.S. Philips Corporation Method of and device for coating the inside of tubes
DE19529318A1 (de) * 1995-08-09 1997-02-13 Uwe Biederer Verfahren zur Herstellung dekorativer Gebrauchsgegenstände und die nach diesem Verfahren hergestellten dekorativen Gebrauchsgegenstände
DE19529318C2 (de) * 1995-08-09 2001-05-17 Heinzl Friedrich Verfahren zur Herstellung dekorativer Gebrauchsgegenstände und die nach diesem Verfahren hergestellten dekorativen Gebrauchsgegenstände
EP0849769A3 (de) * 1996-12-17 1999-06-09 Schott Glas Verfahren und Vorrichtung zur Aussenbeschichtung von Lampen
WO2015197748A1 (fr) * 2014-06-25 2015-12-30 Commissariat à l'énergie atomique et aux énergies alternatives Dispositif de depot chimique en phase vapeur a rendement de depot ameliore
FR3022918A1 (fr) * 2014-06-25 2016-01-01 Commissariat Energie Atomique Dispositif de depot chimique en phase vapeur a rendement de depot ameliore
CN115069463A (zh) * 2021-03-15 2022-09-20 日本碍子株式会社 废气处理装置用筒状部件的制造方法及涂膜形成装置

Also Published As

Publication number Publication date
CH454281A (de) 1968-04-15
GB1127426A (en) 1968-09-18
AT263140B (de) 1968-07-10
BE684828A (en, 2012) 1967-01-30
NL6509968A (en, 2012) 1967-02-01

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