US3475186A - Electroless copper plating - Google Patents

Electroless copper plating Download PDF

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Publication number
US3475186A
US3475186A US695860A US3475186DA US3475186A US 3475186 A US3475186 A US 3475186A US 695860 A US695860 A US 695860A US 3475186D A US3475186D A US 3475186DA US 3475186 A US3475186 A US 3475186A
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United States
Prior art keywords
copper
electroless
solution
plating
ductility
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Expired - Lifetime
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US695860A
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English (en)
Inventor
Oleh B Dutkewych
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Shipley Co Inc
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Shipley Co Inc
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Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/31Coating with metals
    • C23C18/38Coating with copper
    • C23C18/40Coating with copper using reducing agents
    • C23C18/405Formaldehyde

Definitions

  • Electroless copper deposition refers to the chemical plating of copper over active surfaces by chemical means and in the absence of external electric current. Such processes and compositions useful therewith are known and are in substantial commercial use. They are disclosed in a number of prior art patents, for example US. Patent No. 3,001,920, issued Dec. 16, 1961.
  • Known electroless copper deposition solutions generally comprise four ingredients dissolved in water. These are (l) a source of cupric ions, usually copper sulphate, (2) reducing agent such as formaldehyde, (3) free hydroxide, generally an alkali metal hydroxide, and usually sodium hydroxide, sufficient to provide the required alkaline solution in which said compositions are effective, and (4) a complexing agent for the copper sufficient to prevent its precipitation in alkaline solution.
  • a complexing agent for the copper sufficient to prevent its precipitation in alkaline solution.
  • electroless plating solutions of the above type usually provide a plate which, if mechanically dense and strong, is somewhat brittle such that it can withstand only limited bending or thermal stresses without fracture.
  • This is not a substantial disadvantage where the electroless plate is of the order of millionths of an inch in thickness and is overplated with ductile electrolytic copper.
  • the entire desired thickness typically 1 to 3 mils in electrical applications, is provided by electroless plating, limited ductility can be a serious limitation.
  • the instant invention is predicated upon the discovery "ice that electroless plating solution of the above type can be substantially improved by the inclusion therein of a small but noncritical quantity of a silicon compound in which silicon is believed to be the effective agent. It is used in an amount of at least 1 part per million of solution by weight, preferably between about 5 and 2500 parts per million and most preferably between about 25 and 500 parts per million. Generally, the higher the concentration of copper in solution, the larger the amount of silicon compound required to obtain the same benefit. Excessive silicon compound retards copper deposition.
  • silicon compounds within the scope of the invention are the substituted silanes, such as ethyltriethoxy silane, amyltriethoxysilane, ethyltrichlorosilane, amyltrichlorosilane, vinyltrichlorosilane, vinyltriethoxysilane, phenyltriethoxysilane, etc., and low to high molecular weight polysiloxanes such as silicone fluids, gums and resins substituted with methyl, ethyl, vinyl, phenyl, chloro, bromo, methoxy, hydroxy, etc.
  • substituted silanes such as ethyltriethoxy silane, amyltriethoxysilane, ethyltrichlorosilane, amyltrichlorosilane, vinyltrichlorosilane, vinyltriethoxysilane, phenyltriethoxysilane, etc.
  • the polysiloxanes are the least soluble silicon compounds in basic copper solutions, but are preferred because they provide the greatest increase in ductility and also enhance appearance by yielding a finer grained, more highly reflective copper deposit. Of the polysiloxanes, the silicone fluids are most preferred. The silanes must be handled with caution as they are reactive with water, and in some cases, violently reactive.
  • the mechanism by which the silicon compound performs is not understood, but is believed to be effective by suppressing side reactions in the bath which result in instability, poor grain structure, and inclusion of impurities such as hydrogen in the metal deposit. Maximum benefits from its inclusion depend upon the quality and balance of the basic copper solution, but the addition of a silicon compound will provide measurable benefit in any useable bath.
  • agitation of the solution is provided to maintain the silicon compound at least partially dispersed in the bath.
  • Copper sulphate is the source of cupric ion
  • NaOI-I provides the desired free hydroxide
  • HCHO acts as the reducing agent.
  • EDTA.4Na is the tetrasodium salt of ethylenediaminetetracetic acid and is the complexing agent for the cupric ions rendering them soluble in alkaline solution.
  • Other well known complexing agents for this purpose for example those disclosed in the foregoing patents, can be employed.
  • Sufiicient copper must be employed to provide a useful deposit and sutficient alkali to provide the high pH required, generally from about 10 to 14.
  • Sufiicient formaldehyde must be employed to serve as a reducing agent for the copper in the presence of a catalytic surface and sufficient complexing agent used to prevent precipitation of copper in alkaline solution during storage and use.
  • a catalytic surface and sufficient complexing agent used to prevent precipitation of copper in alkaline solution during storage and use.
  • Strength is measured by removing a copper plate, having an area measuring 1 inch by 6 inches, from the substrate, and clamping the plate to a rigid support over a rectangular opening therein 1 inch by 4 inches in area, the opening being covered by a rubber diaphragm. Air pressure is applied outwardly against the diaphragm and the copper plate slowly in stepwise increments of onehalf p.s.i., each step being held from 1 to 2 seconds, until rupture occurs.
  • Such test is believed to measure a combination of shear and tension and to include a measure of the ductility of the sample. Due to difl-iculty of obtaining standardized samples for conventional measurement, ductility is additionally measured empirically by bending the sample upon itself 180 and creasing the resulting apex of bend. If the plate can be creased without fracture one or more times, it is considered to be excellent in ductility. A combination of both strength and ductility is normally required for applications subjected to mechanical or thermal stress.
  • Example 2 is repeated with substitution of various silicone fluids with results as follows:
  • the advantages obtained from the use of silicon compounds in electroless copper bath include improvement in grain structure, minimizing gas entrapment and observable blistering in the copper plate, especially in plate obtained with relatively rapid plating baths; plating at a more constant rate during use, e.g., up to 60% of the copper originally present can be plated at a rate which is within 10 to 15% of the rate originally obtained with the copper at concentration; stability 'of the electroless solution is improved, permitting greater variations in operating temperature and concentration of active ingredients; strength and ductility of the products are substantially improved; and with polysiloxanes there is substantial improvement in appearance, the deposit being finer grained with improved light reflection.
  • a basic aqueous electroless copper plating composition containing a source of cupric ions, free hydroxide suflicient to provide required pH, reducing agent to reduce copper ions in the presence of a catalytic surface, and sufficient complexing agent to render cupric ion soluble in alkaline solution
  • the improvement comprising the addition of an organic silicon compound in an amount suflicient to improve the copper plate obtained from the bath and insufficient to prevent deposition.

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  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemically Coating (AREA)
US695860A 1968-01-05 1968-01-05 Electroless copper plating Expired - Lifetime US3475186A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US69586068A 1968-01-05 1968-01-05

Publications (1)

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US3475186A true US3475186A (en) 1969-10-28

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US695860A Expired - Lifetime US3475186A (en) 1968-01-05 1968-01-05 Electroless copper plating

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US (1) US3475186A (da)
BE (1) BE726182A (da)
DE (1) DE1900442B2 (da)
FR (1) FR1599501A (da)
GB (1) GB1195330A (da)
NL (1) NL139095B (da)
SE (1) SE345144B (da)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3615733A (en) * 1968-08-13 1971-10-26 Shipley Co Electroless copper plating
US3615735A (en) * 1968-08-13 1971-10-26 Shipley Co Electroless copper plating
US3765936A (en) * 1968-08-13 1973-10-16 Shipley Co Electroless copper plate
US3978252A (en) * 1973-03-23 1976-08-31 Macdermid Incorporated Method of improving the adhesion between a molded resin substrate and a metal film deposited thereon
US4167601A (en) * 1976-11-15 1979-09-11 Western Electric Company, Inc. Method of depositing a stress-free electroless copper deposit
US4228213A (en) * 1979-08-13 1980-10-14 Western Electric Company, Inc. Method of depositing a stress-free electroless copper deposit
US4969842A (en) * 1989-11-30 1990-11-13 Amp Incorporated Molded electrical connector having integral spring contact beams
US20090206526A1 (en) * 2008-02-18 2009-08-20 Huntsman Petrochemical Corporation Sintering aids

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4563217A (en) * 1983-07-25 1986-01-07 Hitachi, Ltd. Electroless copper plating solution

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3361580A (en) * 1963-06-18 1968-01-02 Day Company Electroless copper plating
US3415666A (en) * 1965-06-19 1968-12-10 Asahi Dow Ltd Electroless copper plating bath

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3361580A (en) * 1963-06-18 1968-01-02 Day Company Electroless copper plating
US3415666A (en) * 1965-06-19 1968-12-10 Asahi Dow Ltd Electroless copper plating bath

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3615733A (en) * 1968-08-13 1971-10-26 Shipley Co Electroless copper plating
US3615735A (en) * 1968-08-13 1971-10-26 Shipley Co Electroless copper plating
US3765936A (en) * 1968-08-13 1973-10-16 Shipley Co Electroless copper plate
US3978252A (en) * 1973-03-23 1976-08-31 Macdermid Incorporated Method of improving the adhesion between a molded resin substrate and a metal film deposited thereon
US4167601A (en) * 1976-11-15 1979-09-11 Western Electric Company, Inc. Method of depositing a stress-free electroless copper deposit
US4228213A (en) * 1979-08-13 1980-10-14 Western Electric Company, Inc. Method of depositing a stress-free electroless copper deposit
US4969842A (en) * 1989-11-30 1990-11-13 Amp Incorporated Molded electrical connector having integral spring contact beams
US20090206526A1 (en) * 2008-02-18 2009-08-20 Huntsman Petrochemical Corporation Sintering aids
US8282878B2 (en) 2008-02-18 2012-10-09 Huntsman Petrochemical Llc Sintering aids

Also Published As

Publication number Publication date
DE1900442A1 (de) 1969-11-20
GB1195330A (en) 1970-06-17
NL139095B (nl) 1973-06-15
NL6900088A (da) 1969-07-08
SE345144B (da) 1972-05-15
FR1599501A (da) 1970-07-15
BE726182A (da) 1969-06-27
DE1900442B2 (de) 1971-09-09

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