US3426193A - Apparatus for inserting a constantly oriented specimen chamber in a microanalyser - Google Patents

Apparatus for inserting a constantly oriented specimen chamber in a microanalyser Download PDF

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Publication number
US3426193A
US3426193A US426588A US3426193DA US3426193A US 3426193 A US3426193 A US 3426193A US 426588 A US426588 A US 426588A US 3426193D A US3426193D A US 3426193DA US 3426193 A US3426193 A US 3426193A
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United States
Prior art keywords
arm
axis
microanalyser
chamber
enclosure
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Expired - Lifetime
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US426588A
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English (en)
Inventor
Jacques Guernet
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Cameca SAS
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Cameca SAS
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Publication date
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
    • F16B39/00—Locking of screws, bolts or nuts
    • F16B39/22—Locking of screws, bolts or nuts in which the locking takes place during screwing down or tightening
    • F16B39/28—Locking of screws, bolts or nuts in which the locking takes place during screwing down or tightening by special members on, or shape of, the nut or bolt
    • F16B39/34—Locking by deformable inserts or like parts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Definitions

  • the present invention relates to microanalysers and more particularly to an arrangement for inserting in or removing from a microanalyser the specimen chamber, i.e. the enclosure in which the specimen is located.
  • microanalysers the surface of a sample is scanned by an electron beam. This operation takes place in vacuum and it is advantageous to provide a removable specimen chamber which can be, as a whole, inserted in, or removed from the microanalysisr.
  • the arrangement has to meet a number of requirements: it has to be easy to handle, it must provide easy access to the sample and to the body of the analyser, it has to be provided with a closing system which ensures a seal for the vacuum, and it must permit easy and accurate positioning of the chamber in a horizontal plane.
  • an arrangement for inserting a specimen chamber in, or removing it from an electron optical analyser comprising a support supporting said chamber, said support being mounted for pivoting about and being translated along an axis parallel to the axis of said analyser, means being provided for keeping contsant the orientation of said chamber in a plane while it is being pivoted.
  • FIG. 1 is a schematic view in partial section of one embodiment of the invention
  • FIG. 2 shows, at an enlarged scale and in section in a plane different from that of FIG. 1, a detail of the embodiment shown in that figure;
  • FIG. 3 is a partially exploded view of the same arrangement.
  • FIG. 1 shows the table or stage 1 of a microanalyser on which the specimen to be analysed is mounted.
  • the table is placed in a metal enclosure or specimen chamber 2, which is kept under vacuum during use.
  • Chamber 'ice 2 can be separated from the body 3 of the microanalyser.
  • Chamber 2 includes, as shown in FIG. 2, a ring joint 4 and two cylindro-conical guiding fingers 20, which engage corresponding cavities in body 3 as shown in FIG. 2.
  • Body 3 of the analyser is supported by four columns 6 which rest on a sole 7.
  • a console 5 is, by means of a sleeve incorporated in its end, slidably mounted on one of columns 6 and can swing'about it.
  • the free end of console 5 is built as a cylindrical sleeve 23 into which is mounted a coaxial slider 12.
  • a pivot 9, solid with a plate 8, is pivotally mounted in slider 12.
  • the orientation of plate 8 in a horizontal plane is kept constant by means of a finger 21, which engages a hole, formed in plate 8, and whose opposite end pivots in one end of a rod 10, whose other end is pivotally mounted on a pivot 11 fixed to sole 7.
  • the arm of console 5 and rod 10 form the two opposite sides of a parallelogram, the axes of column 6, of pivot 11, of finger 21 and of plate 8 defining, in the horizontal plane defined by these sides, the four corners of the parallelogram.
  • the top side of plate 8 carries three projections 25 for supporting enclosure 2 in a horizontal plane.
  • it is provided with an axial centring finger with a frustoconical end which engages a central bore 19 in the base of enclosure 2, and a further finger 18 which fixes the orientation of enclosure 2 with substantial accuracy.
  • Sleeve 23 is provided with two vertical, symmetrical slots through which extends a pin 13 fixed to slider 12.
  • the ends of pin 13 cooperate with camming surfaces 22, shaped as portions of a helix, formed in a sleeve 14 surrounding the lower part of sleeve 23.
  • Sleeve 14 carries a lever 15, which can be actuated by the operator.
  • Sleeve 14 rests on an elastic metal washer 17, carried by sleeve 23, and designed to limit the vertical stress that can be applied to plate 8 through the camming surfaces 22, pin 13 and slider 12, when lever 15 is being actuated.
  • console 5 rests on sole 7 and sleeve 23 is clear with respect to said sole.
  • console 5 In this position, the sleeve of console 5 rests on sole 7 and carries the whole of the mobile system.
  • Pin 13 rests on the lower end of surfaces 22.
  • Enclosure 2 rests on the three projections 25 of plate 8 and its position in the horizontal plane is defined by pivot 9 and finger 18.
  • the rotary displacement of the mobile assembly is so limited by the contact of console 5 with rod 10, that the axis of sleeve 23 substantially coincides with the analyser axis.
  • Admitting air in the analyser allows enclosure 2 to be lowered on plate 8 due to its own weight and the action of the ring joint 4.
  • Rotating lever 15 lowers slider 12 and plate 8, while seal 4 becomes completely clear of body 3 and positioning fingers 20 disengage therefrom.
  • the specimen chamber arrangement according to the invention possesses several advantages.
  • An arrangement for inserting a specimen chamber in or removing it from an electron beam microanalyser system having an axis comprising: an arm having a first and a second end; first means for supporting said arm, at said first end, pivotally about and slidably along a further axis, parallel to said axis and at a distance from said axis equal to the length of said arm; a support for supporting said chamber; second means for mounting said support at said second end of said arm slidably along a direction parallel to said axes; third means for keeping constant the orientation of said support in a plane normal to said axes during the rota tion of said arm; and fourth means for pivoting said arm about said further axis and for displacing said arm and said support in a direction parallel to said axes; said third means comprising a further arm having a first and a second end and the same length as said arm, fifth means for supporting said further arm, at said first end thereof, pivotally about an axis parallel to said axes and
  • said support is a table
  • said second means comprise a slider slidably mounted at said second end of said arm, said slider having a first and a second end, said first r end of said slider engaging said table
  • said fourth means comprise camming means associated with said second end of said slider for the displacement of said slider and said arm parallel to said axes and a lever associated with said camming means for pivoting said arm about said further axis and for controlling said camming means.
  • said first means comprise: a base; and a first column mounted on said base, said column extending along said further axis and said first end of said arm being pivotally and slidably mounted on said first column.
  • An arrangement for inserting a specimem chamber in or removing it from an electron beam micronanalyser system said system having an opening, said opening having an axis
  • said arrangement comprising: a base; a first column mounted on said base, said column being parallel to said axis and at a predetermined distance from said axis; an arm having two ends and a length equal to said predetermined distance, one of said ends being pivotally and slidably mounted on said first column; a table supporting said chamber; a slider mounted in said second end of said arm slidably along a direction parallel to said axis, said slider having a first and a second end, said first end engaging said table; camming means associated with said second end of said slider for the displacement thereof parallel to said axis; a lever associated with said camming means for pivoting said arm about said first column and for controlling said camming means; .a further column parallel to said first column and mounted on said base; a further arm having a first and a second end and the same length as said arm,

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Investigating Or Analysing Biological Materials (AREA)
US426588A 1964-01-21 1965-01-19 Apparatus for inserting a constantly oriented specimen chamber in a microanalyser Expired - Lifetime US3426193A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR960995A FR1391083A (fr) 1964-01-21 1964-01-21 Dispositif de présentation et de dégagement du porte-objet dans un micro-analyseurélectronique

Publications (1)

Publication Number Publication Date
US3426193A true US3426193A (en) 1969-02-04

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US426588A Expired - Lifetime US3426193A (en) 1964-01-21 1965-01-19 Apparatus for inserting a constantly oriented specimen chamber in a microanalyser

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US (1) US3426193A (ru)
DE (1) DE1598194A1 (ru)
FR (1) FR1391083A (ru)
GB (1) GB1052542A (ru)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3909611A (en) * 1973-02-27 1975-09-30 Siemens Ag Adjustment mechanism for charged particle beam apparatus
US3958124A (en) * 1973-09-17 1976-05-18 Etec Corporation Method and apparatus for sem specimen coating and transfer
US4024402A (en) * 1970-09-18 1977-05-17 Siemens Aktiengesellschaft Specimen cartridge for a particle beam device
US4782236A (en) * 1987-02-17 1988-11-01 Anwar Chitayat Means for locking a workpiece to a beam-generating apparatus
US5260577A (en) * 1992-11-09 1993-11-09 International Business Machines Corp. Sample carriage for scanning probe microscope
US5493125A (en) * 1993-03-25 1996-02-20 Agency Of Industrial Science And Technology Charged beam apparatus

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3107297A (en) * 1960-08-29 1963-10-15 Applied Res Lab Inc Electron probe X-ray analyzer wherein the emitted X-radiation passes through the objective lens
US3191028A (en) * 1963-04-22 1965-06-22 Albert V Crewe Scanning electron microscope

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3107297A (en) * 1960-08-29 1963-10-15 Applied Res Lab Inc Electron probe X-ray analyzer wherein the emitted X-radiation passes through the objective lens
US3191028A (en) * 1963-04-22 1965-06-22 Albert V Crewe Scanning electron microscope

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4024402A (en) * 1970-09-18 1977-05-17 Siemens Aktiengesellschaft Specimen cartridge for a particle beam device
US3909611A (en) * 1973-02-27 1975-09-30 Siemens Ag Adjustment mechanism for charged particle beam apparatus
US3958124A (en) * 1973-09-17 1976-05-18 Etec Corporation Method and apparatus for sem specimen coating and transfer
US4782236A (en) * 1987-02-17 1988-11-01 Anwar Chitayat Means for locking a workpiece to a beam-generating apparatus
US5260577A (en) * 1992-11-09 1993-11-09 International Business Machines Corp. Sample carriage for scanning probe microscope
US5493125A (en) * 1993-03-25 1996-02-20 Agency Of Industrial Science And Technology Charged beam apparatus

Also Published As

Publication number Publication date
DE1598194A1 (de) 1969-05-29
FR1391083A (fr) 1965-03-05
GB1052542A (ru)

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