FR1391083A - Dispositif de présentation et de dégagement du porte-objet dans un micro-analyseurélectronique - Google Patents

Dispositif de présentation et de dégagement du porte-objet dans un micro-analyseurélectronique

Info

Publication number
FR1391083A
FR1391083A FR960995A FR960995A FR1391083A FR 1391083 A FR1391083 A FR 1391083A FR 960995 A FR960995 A FR 960995A FR 960995 A FR960995 A FR 960995A FR 1391083 A FR1391083 A FR 1391083A
Authority
FR
France
Prior art keywords
presenting
releasing
specimen holder
electronic microanalyzer
microanalyzer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR960995A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CIE D APPLIC MECANIQUES A L EL
Original Assignee
CIE D APPLIC MECANIQUES A L EL
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to GB1052542D priority Critical patent/GB1052542A/en
Application filed by CIE D APPLIC MECANIQUES A L EL filed Critical CIE D APPLIC MECANIQUES A L EL
Priority to FR960995A priority patent/FR1391083A/fr
Priority to US426588A priority patent/US3426193A/en
Priority to DE19651598194 priority patent/DE1598194A1/de
Application granted granted Critical
Publication of FR1391083A publication Critical patent/FR1391083A/fr
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
    • F16B39/00—Locking of screws, bolts or nuts
    • F16B39/22—Locking of screws, bolts or nuts in which the locking takes place during screwing down or tightening
    • F16B39/28—Locking of screws, bolts or nuts in which the locking takes place during screwing down or tightening by special members on, or shape of, the nut or bolt
    • F16B39/34—Locking by deformable inserts or like parts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Investigating Or Analysing Biological Materials (AREA)
FR960995A 1964-01-21 1964-01-21 Dispositif de présentation et de dégagement du porte-objet dans un micro-analyseurélectronique Expired FR1391083A (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
GB1052542D GB1052542A (fr) 1964-01-21
FR960995A FR1391083A (fr) 1964-01-21 1964-01-21 Dispositif de présentation et de dégagement du porte-objet dans un micro-analyseurélectronique
US426588A US3426193A (en) 1964-01-21 1965-01-19 Apparatus for inserting a constantly oriented specimen chamber in a microanalyser
DE19651598194 DE1598194A1 (de) 1964-01-21 1965-01-20 Vorrichtung zum Einbringen eines Objekttraegers in einem elektronischen Mikroanalysator und zum Loesen eines Objekttraegers von einem elektronischen Mikroanalysator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR960995A FR1391083A (fr) 1964-01-21 1964-01-21 Dispositif de présentation et de dégagement du porte-objet dans un micro-analyseurélectronique

Publications (1)

Publication Number Publication Date
FR1391083A true FR1391083A (fr) 1965-03-05

Family

ID=8821350

Family Applications (1)

Application Number Title Priority Date Filing Date
FR960995A Expired FR1391083A (fr) 1964-01-21 1964-01-21 Dispositif de présentation et de dégagement du porte-objet dans un micro-analyseurélectronique

Country Status (4)

Country Link
US (1) US3426193A (fr)
DE (1) DE1598194A1 (fr)
FR (1) FR1391083A (fr)
GB (1) GB1052542A (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4024402A (en) * 1970-09-18 1977-05-17 Siemens Aktiengesellschaft Specimen cartridge for a particle beam device
DE2310355C3 (de) * 1973-02-27 1975-11-13 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verstelleinrichtung für Korpuskularstrahlgeräte, insbesondere Elektronenmikroskope
US3958124A (en) * 1973-09-17 1976-05-18 Etec Corporation Method and apparatus for sem specimen coating and transfer
US4782236A (en) * 1987-02-17 1988-11-01 Anwar Chitayat Means for locking a workpiece to a beam-generating apparatus
US5260577A (en) * 1992-11-09 1993-11-09 International Business Machines Corp. Sample carriage for scanning probe microscope
JPH0719554B2 (ja) * 1993-03-25 1995-03-06 工業技術院長 荷電ビーム装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3107297A (en) * 1960-08-29 1963-10-15 Applied Res Lab Inc Electron probe X-ray analyzer wherein the emitted X-radiation passes through the objective lens
US3191028A (en) * 1963-04-22 1965-06-22 Albert V Crewe Scanning electron microscope

Also Published As

Publication number Publication date
DE1598194A1 (de) 1969-05-29
GB1052542A (fr)
US3426193A (en) 1969-02-04

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