US3272568A - Guiding devices - Google Patents

Guiding devices Download PDF

Info

Publication number
US3272568A
US3272568A US295282A US29528263A US3272568A US 3272568 A US3272568 A US 3272568A US 295282 A US295282 A US 295282A US 29528263 A US29528263 A US 29528263A US 3272568 A US3272568 A US 3272568A
Authority
US
United States
Prior art keywords
guide
magnets
path
guiding
guide member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US295282A
Other languages
English (en)
Inventor
Koorneef Jacob
Duinker Simon
Walther George Ludwig
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
US Philips Corp
North American Philips Co Inc
Original Assignee
US Philips Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by US Philips Corp filed Critical US Philips Corp
Application granted granted Critical
Publication of US3272568A publication Critical patent/US3272568A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/03—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using magnetic or electromagnetic means
    • F16F15/035—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using magnetic or electromagnetic means by use of eddy or induced-current damping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
    • B23Q1/385—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports in which the thickness of the fluid-layer is adjustable
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/02—Sliding-contact bearings
    • F16C29/025—Hydrostatic or aerostatic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/12—Arrangements for adjusting play
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0662—Details of hydrostatic bearings independent of fluid supply or direction of load
    • F16C32/067—Details of hydrostatic bearings independent of fluid supply or direction of load of bearings adjustable for aligning, positioning, wear or play
    • F16C32/0674—Details of hydrostatic bearings independent of fluid supply or direction of load of bearings adjustable for aligning, positioning, wear or play by means of pre-load on the fluid bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2322/00—Apparatus used in shaping articles
    • F16C2322/39—General buildup of machine tools, e.g. spindles, slides, actuators

Definitions

  • FIGA A first figure.
  • the invention relates to a guiding means comprising a fixed guide member and a guided body adapted to move relative thereto, and means for maintaining an air or gas cushion between the opposed surfaces of the fixed and movable parts.
  • a guiding means comprising a fixed guide member and a guided body adapted to move relative thereto, and means for maintaining an air or gas cushion between the opposed surfaces of the fixed and movable parts.
  • the guide surfaces are separated from each other by a gas cushion, so that the frictional forces existing between such surfaces are practically negligible.
  • the parts of such a guiding device are therefore readily movable relatively to each other.
  • the gas cushion an eificient thickness of which may be 10 microns, has the further adgiantage that it is unnecessary to lubricate the guide suraces.
  • the thickness of the gas cushion be as constant as possible.
  • the guide member is horizontally arranged, the body which is movable with respect to the guide member and supported on the air cushion can be loaded with a given weight so that the gas cushion is, so to say, biased and the cushion thickness maintained constant.
  • a heavy total weight bearing on the gas cushion with respect to the load imposed by the cutting tool said constancy can be achieved to a reasonable extent. In practice, this requires fairly heavy weights. For example, a bias weight on the gas cushion of 100 kgs. is required for maintaining a reasonable constant thickness of the gas cushion with a variation of 1 kg. in the tool load.
  • Prestressing the gas cushion by means of a weight has the disadvantage that the weight required may give rise to undesirable bending of the guide member.
  • a further disadvantage of prestressinga gas cushion by weights is that this is only possible, with substantially horizontal disposed guiding surfaces. Consequently, if the guide surfaces are in a position deviating markedly from the horizontal, said solution is ineffective.
  • a further disadvantage is that heavy weights for prestressing the gas cushion give rise to comparatively great inertial forces with rapidly reciprocating parts.
  • the guiding device is characterized in that at least one of the relatively movable parts is provided with one or more magnets for drawing this part and an, at least partially ferromagnetic, opposite part of the guiding device towards each other thereby prestressing the gas cushion separating the parts. It is thus possible, in spite of the low natural weight of the magnets, to obtain a bias force of the required value. With such a guiding system, operation is independent of the physical disposition of the guide member, i.e. horizontal or vertical position, since irrespective of the position of the guide surfaces the magnets can constantly draw the relatively movable parts of the device towards each other.
  • the magnets provide rapid damping of oscillations in the device by virtue of the eddy currents produced by the magnets.
  • a further advantage of the use of magnets for obtaining 3,2725% Patented Sept. 13, 1966 the required bias force on the gas cushion is provided in that comparatively light-weight structures may be utilized. Additionally, these structures may be compact, so that they may be employed advantageously with those precision tools, in which space plays an important part,
  • the system briefly described above may be applied to many types of guiding devices. Examples thereof are the guiding devices in which the guide surfaces are relatively rotatable or slidable along a rectilinear or curved path.
  • the guide surfaces themselves may be curved or flat.
  • two guide surfaces are arranged at an angle to each other on one part in cooperation with two corresponding guide surfaces arranged at the same angle on an opposite part and magnets are provided in at least one of the relatively movable parts, which act on each of the adjacent angularly related guide surfaces.
  • magnets are provided in at least one of the relatively movable parts, which act on each of the adjacent angularly related guide surfaces.
  • the two guide surfaces arranged at an angle to each other are formed by a pair of horizontal guide surfaces and a pair of vertical guide surfaces, and having magnetic attraction forces acting there-between no further measures are required to maintain operative relationship between the parts.
  • magnets which may be permanent or electro-magnets, may be arranged in one or in both relatively movable guide parts of the device, it is preferred,
  • FIG. 1 the main parts of a known guiding device are diagrammatically illustrated, in which a gas cushion is maintained between the guide surfaces.
  • FIG. 2 shows an arrangement similar to that of FIG. 1, but provided with magnets in accordance with the invention.
  • FIGS. 3 and 4 are a plan view and a sectional view respectively taken on the line IVIV in FIG. 3, of a rectilinear guide system according to the invention.
  • FIG. 5 shows a variant of the arrangement of FIG. 3, comprising a curved guide path.
  • FIGS. 6 and 7 illustrate theease with which the rectilinear guide shown in FIGS. 3 and 4 is manufactured.
  • FIGS. 8 and 9 show a rectilinear guide system in which a long sledge or bed of a machine is adapted to slide along two separate supporting and guiding parts; FIG. 8 being a diagrammatical plan view and FIG. 9 a section view taken on the line IVIV in FIG. 8.
  • FIG. 10 is a sectional view similar to that of FIG. 4, but turned through in the plane of the drawing.
  • FIG. 11 shows schematically an embodiment comprising an electro-magnet, the energizing current of which is controllable.
  • FIG. 12 is a diagrammatic view of a control member suitable for use in the arrangement according to FIG. 11.
  • FIG. 13 is a partial view of a laminated electromagnet particularly suitable for use in the arrangement of FIG. 11.
  • the stationary guide of a guiding system is designated by 1 having a body 3 adapted to move relatively thereto.
  • the relatively movable parts have opposite guide surfaces and 7 which are, of course, preferably flat.
  • the body 3, which may be the tool holder of a machine tool is given translational movement by known means and, is provided with a number of channels 11, communicating with a supply of a gas 9, for example, compressed air. Through these channels 11, which open out in the guide surface 7, an air stream can be maintained between the guide surfaces 5 and 7; this stream can escape in the direction of the arrows 15 and 17.
  • the arrangement is such that the guide surfaces are separated from each other by a hydrostatic gas cushion (the air cushion is not generated by relative movement of the bodies) and that the body 3 bears on said gas cushion in which a practical value of the thickness of the cushion may be about microns.
  • the weight of the body 3 which may, if necessary, be provided with an additional weight, is chosen such that the thickness of the gas cushion remains constant with expected variations in the value of the tool force P.
  • the gas cushion may be prestressed by a mass of 100 kgs. in order to keep the thickness of the gas cushion substantially constant with a variation of 1 kg. as noted above.
  • the body 3 must be provided with a heavy weight giving rise to the above noted disadvantages.
  • a body 23 is provided with gas ducts in the known manner and according to the invention if made from non-magnetic material, and provided with a plurality of magnets 25.
  • the guide 27 is made from ferromagnetic material. The magnets supply the magnetic force between the opposite guide surfaces to draw the bodies towards each other.
  • the magnets which may be permanent magnets or electromagnets, have a structure providing great magnetic force between the guide surfaces. Since the structure of such magnets are well known, it will not be described herein in detail.
  • the bias force is derived from magnets the invention may be carried out successfully in cases in which the guide surfaces are not horizontal. Irrespective of the positions of the guide surfaces the magnets can exert the required biasing forces on the gas cushion.
  • the invention is particularly suitable for guiding a movable body along an accurately fixed path.
  • An example of such a guide is shown in FIGS. 3 and 4.
  • It comprises a guide path 31 of ferromagnetic material and a body 33, adapted to reciprocate along said path.
  • the body 33 is made of non-magnetic material and contains magnets 35 and 37 and a number of ducts opening out towards the guide path 31. Said ducts communicating in any known or suitable manner with a compressed-air supply.
  • the body 33 has two guide surfaces 41 and 43, arranged at a given angle to each other, said surfaces cooperating with fixed guide surfaces 45 and 47, arranged at this same angle to each other.
  • a biassed air cushion Between the surfaces 41 and 45 and between the surfaces 43 and 47 there is provided a biassed air cushion.
  • a rectilinear guide is obtained, which in contrast to the known dovetail guides for precision guiding requires only two guide surfaces arranged at an angle to each other.
  • the magnets hold the body 33 in place and in its path while the air cushion between the two sets of guide surfaces is maintained under a suitable biasing force.
  • Said path is in this case rectilinear, but it may also be curved as illustrated in FIG. 5.
  • the rectilinear guide shown in FIGS. 3 and 4 can be manufactured in a particularly simple manner (see FIGS. 6 and 7).
  • a body 53, ground to flatness on one side and provided with magnets 51, 52 is held by magnetic agency to a block 55 of ferromagnetic material, also ground appropriately.
  • the surfaces 57 and 59 are then ground to flatness in a single operation, in which it is not necessary to take special measures to provide that the angle a (FIG. 7) should be 90.
  • a part 61 is secured to the block 55, which part is also ground on its upper or guiding side.
  • FIGS. 8 and 9 show a rectilinear guide, in which the guide path is formed by two stationary angular parts 63 and 65, which together guide an elongated sledge 67.
  • Each of the parts or guides 63 and 65 are provided with magnets 68 and 69 (FIG. 9) and with ducts for the compressed air supply in the direction of the broken arrows 71.
  • the sledge 67 is made of ferromagnetic material. The sledge 67 is not consequently provided with magnets.
  • the angular guide path 31 forms, partly at least, the lower stationary part of a guiding device.
  • This arrangement may be inverted, however, so that the position seen of FIG. 10 is obtained.
  • the body 33 tends to fall out of the guide path 31 in this position owing to its natural Weight, but the magnets in the body 33 overcome this and in addition furnish the force required for biasing the gas cushion between the guide surfaces.
  • the magnets and the ducts opening out towards the guide surfaces are preferably arranged in the smaller of the cooperating guide elements, since this ensures very stable guiding. If the magnets are arranged in the larger of the cooperating guide surfaces, a reasonable stability could only be obtained by providing the guide path with a larger number of equidistant magnets having identical magnetic properties, which can be realized in practice only with difficulty. However, in some other arrangements such as a fixed sleeve and rotatable shaft arrangement (drill press) such an arrangement is practical.
  • FIG. 12 A control member such as illustrated in FIG. 12 is provided for measuring the instantaneous thickness d of the air cushion, while a part of the guide surfaces operate as components of a variable capacitor.
  • the control-member 81 the measured difference in the thickness of the air cushion is converted into a variation in the energizing current of the electro-magnet 75.
  • a laminated electromagnet according to FIG. 13 is preferable in the arrangement according to FIG. 11.
  • the ferromagnetic guide is indicated by 100 and a laminated electromagnet by reference numerals 101 and 102.
  • the parts 101 being constituted of Ferroxdur material and the parts 102 are made of soft steel.
  • a system for guiding a part movable in a path relative to a supporting part comprising, a translationally movable body of relatively low mass having a substantially flat surface, a guide member having a substantially flat surface opposite the flat surface of said body for supporting said body, hydrostatic pneumatic means having openings in at least one of said surfaces for separating said body and said guide member throughout said path, and magnetic means urging said flat surfaces of said body and said guide member toward each other throughout said path for maintaining a given spaced relation therebetween, said given spaced relation being substantially equal to a similar space relation by a similar body having a significantly greater mass than the said body of low mass; said magnetic means comprising a composite body of soft steel portions separated by portions of ferromagnetic material.
  • a system according to claim 1 with the addition of capacitor means for measuring the said spaced relation, and a capacitor bridge means and associated circuit means coupled with said capacitor means and said magnetic means for varying the magnetic force of said magnetic means.
  • a system for guiding a part movable in a path relative to a supporting part comprising, a translationally movable body of relatively low mass having a substantially flat surface, a guide member having a substantially flat surface opposite the flat surface of said body for supporting said body, hydrostatic pneumatic means having openings in at least one of said surfaces for separating said body and said guide member throughout said path, and magnetic means urging said fiat surfaces of said body and said guide member toward each other throughout said path for maintaining a given spaced relation therebetween, said given spaced relation being substantially equal to a similar space relation by a similar body having a significantly greater mass than. the said body of low mass.
  • said magnetic means comprises at least one electromagnet, means for measuring the said spaced relation, means for energizing said electromagnet and means coupled with said energizing means and said measuring means for varying the magnetic force of said electromagnet proportional to variations of said space.
  • said magnetic means comprises at least one permanent magnet secured in said movable body adjacent the supporting surface of said guide member and said pneumatic means is operatively connected with said body including duct means opening between said body and said supporting surface and closely adjacent said magnetic means.
  • a system for guiding a part movable in a fixed path relative to a supporting part comprising a translationally movable body of relatively low mass, a guide member for supporting said body, said guide member having a pair of angularly related guiding surfaces and said body having a corresponding angularly related pair of surfaces adjacent said pair of guiding surfaces, hydrostatic pneumatic means having openings in at least one of said surfaces for maintaining said body and guide member in spaced relation, and magnetic means for biasing said body and said guide member toward each other to maintain said spaced relation substantially equal to a similar space relation determined by another body having a significantly greater mass than said body of low mass.
  • said magnetic means comprises at least one electromagnet, means for measuring the said space relation, means for energizing said electromagnet and means coupled with said energizing means and said measuring means for varying the magnetic force of said electromagnet proportioned to variations of said space.
  • said magnetic means comprises at least one electromagnet in said body flush with each said angularly related surface and said pneumatic means is operatively connected with said body including duct means opening at each said angularly related surface for supporting said body on Said guide member.

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Acoustics & Sound (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
  • Fluid-Damping Devices (AREA)
US295282A 1962-03-28 1963-07-09 Guiding devices Expired - Lifetime US3272568A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL276532 1962-03-28

Publications (1)

Publication Number Publication Date
US3272568A true US3272568A (en) 1966-09-13

Family

ID=19753713

Family Applications (1)

Application Number Title Priority Date Filing Date
US295282A Expired - Lifetime US3272568A (en) 1962-03-28 1963-07-09 Guiding devices

Country Status (6)

Country Link
US (1) US3272568A (en, 2012)
BE (1) BE630212A (en, 2012)
CH (1) CH411481A (en, 2012)
DE (1) DE1258671B (en, 2012)
GB (1) GB994530A (en, 2012)
NL (1) NL276532A (en, 2012)

Cited By (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3367230A (en) * 1963-12-04 1968-02-06 Welch Scient Company Light density scanning device
US3393602A (en) * 1963-11-22 1968-07-23 David S. Stouffer Light density scanning device
US3410176A (en) * 1965-02-02 1968-11-12 Jean Auguste Christophe Van Straaten Movable bench for machine tool
US3428387A (en) * 1963-04-10 1969-02-18 Watson W & Sons Ltd Friction driven microscope stages
US3511544A (en) * 1967-08-11 1970-05-12 Garrett Corp Linear self-acting bearing with conformable surface
US3527542A (en) * 1966-06-15 1970-09-08 Beckman Instruments Inc Cardiac output apparatus
FR2500671A1 (fr) * 1981-02-26 1982-08-27 Wtz Holzverarbeitende Ind Dispositif pour reduire le bruit dans des machines-outils
FR2516241A1 (fr) * 1981-11-06 1983-05-13 Leitz Ernst Gmbh Microtome a glissiere
US4606587A (en) * 1985-01-08 1986-08-19 Automated Quality Technologies, Inc. Precision air slide
EP0196711A1 (en) * 1985-03-29 1986-10-08 Koninklijke Philips Electronics N.V. A positioning device comprising pre-stressed contactless bearings
US4798478A (en) * 1988-02-16 1989-01-17 Nicolet Instrument Corporation Self-aligning fluid bearing
US4817930A (en) * 1987-05-13 1989-04-04 U.S. Philips Corporation Guiding device
EP0445605A3 (en) * 1990-03-05 1992-02-26 Firma Carl Zeiss Device for preloading a guided machine part
US5228358A (en) * 1990-02-21 1993-07-20 Canon Kabushiki Kaisha Motion guiding device
GB2314937A (en) * 1996-07-02 1998-01-14 Gerber Systems Corp Motion system for an imaging device
US5828501A (en) * 1996-07-02 1998-10-27 Barco Gerber Systems Apparatus and method for positioning a lens to expand an optical beam of an imaging system
US5841567A (en) * 1996-07-02 1998-11-24 Barco Gerber Systems Method and apparatus for imaging at a plurality of wavelengths
US5912458A (en) * 1997-04-18 1999-06-15 Gerber Systems Corporation Multiple beam scanning system for an imaging device
US5938187A (en) * 1997-04-18 1999-08-17 Gerber Systems Corporation Media feed apparatus for an imaging device
US6042101A (en) * 1997-06-03 2000-03-28 Gerber Systems Corporation Automated media transport device and method of using the same
EP1557237A3 (de) * 2004-01-20 2005-09-14 Index-Werke Gmbh & Co. Kg Hahn & Tessky Werkzeugmaschine mit einem hydrostatischen Gleitfilm
WO2007024031A1 (en) 2005-08-23 2007-03-01 Korea Institute Of Machinery & Materials Static bearing conveying apparatus having magnetically preloading and motional error correcting functions
WO2012134616A1 (en) * 2011-04-01 2012-10-04 The Boeing Company Methods and systems for marking an airframe skin
US20150063730A1 (en) * 2013-09-02 2015-03-05 Mitutoyo Corporation Slide guide device
DE102023127135B3 (de) 2023-10-05 2024-10-10 Jenaer Antriebstechnik Gmbh Lageranordnung, Linearachssystem mit dieser Lageranordnung sowie Anlage mit diesem Linearachssystem

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5836725B2 (ja) * 1978-07-27 1983-08-11 株式会社三豊製作所 光学式変位測定装置
DE3336002C2 (de) * 1983-10-04 1985-11-07 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Führungsvorrichtung
JPS61290231A (ja) * 1985-06-19 1986-12-20 Nippon Seiko Kk 静圧案内軸受
DE10209776B3 (de) * 2002-02-28 2004-04-29 Carl Zeiss Fluid-Drehlager und Koordinaten-Messgerät
DE102004012204B3 (de) * 2004-03-12 2005-05-25 Siemens Ag Winkelluftlager mit linear zueinander verschiebbaren länglichen Führungsteilen
TWI631289B (zh) * 2015-12-04 2018-08-01 財團法人金屬工業研究發展中心 氣靜壓平台及其間隙調整方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1046637B (de) * 1957-05-03 1958-12-18 Sulzer Ag Verfahren fuer den Betrieb einer hochtourigen Turbine und Turbine zur Durchfuehrung des Verfahrens
US2942385A (en) * 1956-01-31 1960-06-28 Licencia Talalmanyokat Apparatus for moving parts of machinery on a support

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH331637A (de) * 1954-01-07 1958-07-31 Vyzk Ustav Obrabecich Stroju Einrichtung zum gegenseitigen Abstützen von zwei einander gegenüberliegenden Führungsbahnen
DE1008966B (de) * 1954-07-20 1957-05-23 Kurt Konrad Loewenfeld Dipl In Vorrichtung zur Feineinstellung von Maschinenteilen, welche auf Gerad- oder Rundfuehrungen bewegt werden
DE1072141B (en, 2012) * 1956-01-31

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2942385A (en) * 1956-01-31 1960-06-28 Licencia Talalmanyokat Apparatus for moving parts of machinery on a support
DE1046637B (de) * 1957-05-03 1958-12-18 Sulzer Ag Verfahren fuer den Betrieb einer hochtourigen Turbine und Turbine zur Durchfuehrung des Verfahrens

Cited By (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3428387A (en) * 1963-04-10 1969-02-18 Watson W & Sons Ltd Friction driven microscope stages
US3393602A (en) * 1963-11-22 1968-07-23 David S. Stouffer Light density scanning device
US3367230A (en) * 1963-12-04 1968-02-06 Welch Scient Company Light density scanning device
US3410176A (en) * 1965-02-02 1968-11-12 Jean Auguste Christophe Van Straaten Movable bench for machine tool
US3527542A (en) * 1966-06-15 1970-09-08 Beckman Instruments Inc Cardiac output apparatus
US3511544A (en) * 1967-08-11 1970-05-12 Garrett Corp Linear self-acting bearing with conformable surface
FR2500671A1 (fr) * 1981-02-26 1982-08-27 Wtz Holzverarbeitende Ind Dispositif pour reduire le bruit dans des machines-outils
FR2516241A1 (fr) * 1981-11-06 1983-05-13 Leitz Ernst Gmbh Microtome a glissiere
US4606587A (en) * 1985-01-08 1986-08-19 Automated Quality Technologies, Inc. Precision air slide
EP0196711A1 (en) * 1985-03-29 1986-10-08 Koninklijke Philips Electronics N.V. A positioning device comprising pre-stressed contactless bearings
US4817930A (en) * 1987-05-13 1989-04-04 U.S. Philips Corporation Guiding device
US4798478A (en) * 1988-02-16 1989-01-17 Nicolet Instrument Corporation Self-aligning fluid bearing
US5228358A (en) * 1990-02-21 1993-07-20 Canon Kabushiki Kaisha Motion guiding device
EP0445605A3 (en) * 1990-03-05 1992-02-26 Firma Carl Zeiss Device for preloading a guided machine part
US5828501A (en) * 1996-07-02 1998-10-27 Barco Gerber Systems Apparatus and method for positioning a lens to expand an optical beam of an imaging system
US5821981A (en) * 1996-07-02 1998-10-13 Gerber Systems Corporation Magnetically preloaded air bearing motion system for an imaging device
GB2314937A (en) * 1996-07-02 1998-01-14 Gerber Systems Corp Motion system for an imaging device
US5841567A (en) * 1996-07-02 1998-11-24 Barco Gerber Systems Method and apparatus for imaging at a plurality of wavelengths
DE19728233C2 (de) * 1996-07-02 2000-01-20 Gerber Systems Corp Magnetisch beaufschlagte Luftlager-Bewegungseinrichtung für eine Abbildungseinrichtung
US5912458A (en) * 1997-04-18 1999-06-15 Gerber Systems Corporation Multiple beam scanning system for an imaging device
US5938187A (en) * 1997-04-18 1999-08-17 Gerber Systems Corporation Media feed apparatus for an imaging device
US6042101A (en) * 1997-06-03 2000-03-28 Gerber Systems Corporation Automated media transport device and method of using the same
EP1557237A3 (de) * 2004-01-20 2005-09-14 Index-Werke Gmbh & Co. Kg Hahn & Tessky Werkzeugmaschine mit einem hydrostatischen Gleitfilm
WO2007024031A1 (en) 2005-08-23 2007-03-01 Korea Institute Of Machinery & Materials Static bearing conveying apparatus having magnetically preloading and motional error correcting functions
EP1917447A4 (en) * 2005-08-23 2011-11-23 Korea Mach & Materials Inst CONVEYOR DEVICE FOR STATIC BEARINGS WITH MAGNETIC PRELOAD AND MOTION ERROR CORRECTION FUNCTIONS
WO2012134616A1 (en) * 2011-04-01 2012-10-04 The Boeing Company Methods and systems for marking an airframe skin
US8525856B2 (en) 2011-04-01 2013-09-03 The Boeing Company Methods and systems for marking an airframe skin
US20150063730A1 (en) * 2013-09-02 2015-03-05 Mitutoyo Corporation Slide guide device
CN104421332A (zh) * 2013-09-02 2015-03-18 株式会社三丰 滑动导向装置
US9316472B2 (en) * 2013-09-02 2016-04-19 Mitutoyo Corporation Slide guide device
CN104421332B (zh) * 2013-09-02 2018-04-06 株式会社三丰 滑动导向装置
DE102023127135B3 (de) 2023-10-05 2024-10-10 Jenaer Antriebstechnik Gmbh Lageranordnung, Linearachssystem mit dieser Lageranordnung sowie Anlage mit diesem Linearachssystem
WO2025073473A1 (de) 2023-10-05 2025-04-10 Jenaer Antriebstechnik Gmbh Lageranordnung, linearachssystem mit dieser lageranordnung sowie anlage mit diesem linearachssystem

Also Published As

Publication number Publication date
NL276532A (en, 2012)
DE1258671B (de) 1968-01-11
CH411481A (de) 1966-04-15
BE630212A (en, 2012)
GB994530A (en) 1965-06-10

Similar Documents

Publication Publication Date Title
US3272568A (en) Guiding devices
US3155383A (en) Precision positioning apparatus
US4455910A (en) Traversing microtome with air bearings
US3935486A (en) Finely adjustable table assembly
US3464283A (en) Gimballing means for a movable carriage
US3679272A (en) Automatic alignment bearings for guiding in translational or rotational motion
US6682217B1 (en) Magnetically stabilized precision table and load-carrying bearings
CN107306099A (zh) 磁悬浮导向装置及其控制方法
US3037156A (en) Control device for the setting in exact postition of a movable member
US11846609B2 (en) Electric actuator
CN107306098A (zh) 磁悬浮导向装置及其控制系统和控制方法
US3074269A (en) Wide range electrodynamic actuator
US6118200A (en) Magnetic bearing
CN103062285A (zh) 共面气浮正交解耦与柔性膜角度解耦的零刚度隔振器
US3318593A (en) Micropositioning mechanism
EP0484303A1 (en) A sanding machine for timber boards
Barnett New researches on magnetization by rotation and the gyromagnetic ratios of ferromagnetic substances
US3645001A (en) Carriage and rail assembly for a high-resolution mechanical positioner
JP2000170767A (ja) 静圧直線案内装置
US3218108A (en) Precision positioning apparatus
CN103062314A (zh) 双层气浮正交解耦与柔性膜角度解耦的电涡流阻尼隔振器
US3393554A (en) Vibration table with self-adjusting gas bearing
GB802410A (en) Improvements in or relating to vibration-absorbing mountings
SU684282A1 (ru) Координатна измерительна машина
CN103047354B (zh) 双层气浮正交解耦与柔性膜角度解耦的电磁阻尼隔振器