US3218457A - Specimen holder for electron microscope - Google Patents

Specimen holder for electron microscope Download PDF

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Publication number
US3218457A
US3218457A US298764A US29876463A US3218457A US 3218457 A US3218457 A US 3218457A US 298764 A US298764 A US 298764A US 29876463 A US29876463 A US 29876463A US 3218457 A US3218457 A US 3218457A
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US
United States
Prior art keywords
disc
specimen
housing
specimen holder
semi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US298764A
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English (en)
Inventor
Adrianus Cornelis Van Dorsten
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
US Philips Corp
North American Philips Co Inc
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US Philips Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by US Philips Corp filed Critical US Philips Corp
Application granted granted Critical
Publication of US3218457A publication Critical patent/US3218457A/en
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Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Definitions

  • My invention relates to an electron microscope and in particular to a specimen holder for an electron microscope which can be moved in all directions at right angles to the beam of rays and, to prevent movements of the object during the investigation, can be clamped in an axial direction against a rigidly provided component part of the microscope.
  • Specimen holders for electron microscopes which can be rigidly held in position are disclosed, for instance, in Swiss patent specification 241,102 and German patent specification 756,834. In either case the clamping of the specimen holder is effected by means of springs. The pressure exerted by springs does not prevent the specimen from being moved sideways by means of focusing devices, but, naturally, it does hinder this movement.
  • the specimen holder is constructed as a flat disc which engages a partition wall of the microscope housing. This wall comprises an annular recess which is closed by the specimen holder and which is sealed by rings clamped between the holder and the bottom of the recess in the partition.
  • This construction has the drawback that when the pressure for clamping is removed the object stage can be lifted somewhat by the sealing rings. If the pressure is recovered, the specimen holder will be displaced in an axial direction.
  • a further object of my invention is to provide a speciment support for an electron microscope which after being clamped in place is not subject to lateral or axial movement.
  • At least one body of semiconductive material is provided which engages the speci- 3,218,457 Patented Nov. 16, 1965 men holder, and the clamping of the object stage is effected by applying an electric potential between the body of semi-conductive material and the partition wall of the microscope housing which supports the object stage.
  • Suitable semi-conductor materials are slate, marble, agate and certain ceramic synthetic materials having a resistivity of approximately 10 ohm-cm.
  • the magnet coils 1 and 2 energize the pole pieces 3 and 4, each provided with a channel 5 for the passage of an electron beam, provided on either side of a chamber in which a specimen to be irradiated by the electron beam is mounted. Between pole pieces 3 and 4 which are spaced from each other, a specimen holder 6 is provided. It has the shape of a flat disc with a bore 7 for the passage of an electron beam in the center opposite the channel 5 in pole pieces 3 and 4.
  • the specimen In this bore the specimen is mounted of which a magnified image is to be formed by means of the electron beam on a screen or a photographic plate or film not shown in the drawing.
  • the object 8 is mounted on a thin rod 9 extending through a radial bore of the flat disc 6.
  • a knob 10 is provided for positioning the specimen 8 in the aperture of disc 6 or removed out of the aperture and replaced by another.
  • the specimen is displaced and the flat disc is moved at right angles to the direction of the beam of rays.
  • To that end disc 6 is supported by a partition 11 of the housing 13 which is supported in a groove 12.
  • the diameter of the disc 6 is smaller than the inside diameter of the housing, so that in a plane at right angles to the axis of the beam the disc 6 is free to move laterally in all directions.
  • the devices for sliding the flat disc are known per se and the radial rod 14 shown in the drawing is intended only to demonstrate that the disc can be moved externally of the housing of the microscope.
  • the sealing rings 15 and 16 are provided and do not hinder the movement of the disc 6.
  • the disc 6 On either side of the chamber which contains the specimen the disc 6 comprises central recesses 17 and 18 in which the conical ends of the pole pieces 3 and 4 extend. These recesses are wider than the conical ends of the pole pieces so that the required freedom of movement of the disc is maintained.
  • the partition 11 is constituted of an electrically conductive non-magnetic material.
  • the side of the wall facing the flat disc 6 serves as a supporting face and is provided with a truly smooth surface.
  • the flat disc 6 engages this surface with the interposition of one or more blocks 19 consisting of a semi-conductive material.
  • An annular block for example of agate, may rigidly be connected in an annular groove 20 of the flat disc 6 with the interposition of a coating of insulating material 21.
  • On the lower side of the disc the block projects somewhat to the exterior in which it engages the partition 11 and thus supports the flat disc 6. The disc 6 can now easily be moved up and down along the surface of the partition.
  • an electric potential is applied between the body of semi-conductive material 19 and partition 11 to clamp together the disc 6 and the partition 11 of the housing of the microscope.
  • This electric potential is applied between the housing and an electrically conductive adhering layer 22 which covers the surface of body 19 and consists, for example, of a vapor-deposited silver coating through a conductor 23 which passes (in an insulating manner) through the disc 6 and connects the conductive surface 22 to a lead-in contact 24 which is provided in an insulating manner in the wall 13 of the housing of the microscope.
  • current supply wires 25 and 26 connect the wall 13 and the lead-in contact 24 to a DC. source 27 in which one of these wires comprises a switching contact 28 with which the current circuit may be closed and opened respectively.
  • a specimen holder for an electron microscope comprising a disc-like member movable within and supported by a wall of a housing for the microscope, said disc-like member having an aperture therein for the passage of an electron beam therethrough, means to mount a specimen in said aperture of said member, a body of semi-conductive material supported by a transverse wall in said housing and engageably contacting a portion of one surface of said member, and means to apply a potential between said body of semi-conductive material and said transverse wall for rigidly fixing the position of said member within said housing whereby said specimen is fixedly positioned in said aperture relative to said beam of electrons.
  • a specimen holder for an electron microscope comprising a disc-like conductive member movable within and supported by a wall of a housing for the microscope, said disc-like member having an aperture therein for the passage of an electron beam therethrough, means to mount a specimen in said aperture of said disc-like member, a body of semi-conductive material supported by a transverse wall in said housing and engageably contacting a portion of one surface of said disc-like member, a conductive layer on a surface of said body of semi-conductive material remote from said transverse wall, and means to apply a potential between said conductive layer on the surface of said body of semi-conductive material and said transverse wall for rigidly fixing the position of said disclike member within said housing whereby said specimen is fixedly positioned in said aperture relative to said beam of electrons.
  • a specimen holder for an electron microscope comprising a disc-like conductive member movable Within and supported by a wall of a housing for the microscope, said disc-like member having an aperture therein for the passage of an electron beam therethrough, means to mount a specimen in said aperture of said disc-like member, a body of semi-conductive material supported by a transverse wall of said housing, a conductive layer on a surface of said body of semi-conductive material remote from the transverse wall of the housing, a layer of insulating material separating said conductive layer and said disc-like member, means to apply a potential between said conductive layer on the surface of said body of semiconductive material and said transverse wall for rigidly fixing the position of said disc-like member within said housing whereby said specimen is fixed positioned in said aperture relative to said beam of electrons.
  • a specimen holder for an electron microscope comprising a disc-like conductive member movable within and supported by a wall of a housing for the microscope, said disc-like member having an aperture therein for the passage of an electron beam therethrough, a rod-like member extending through a bore in said disc-like member for mounting a specimen in said aperture of said disc-like member, a body of semi-conductive material supported by a transverse wall of said housing, a conductive layer on a surface of said body of semi-conductive material remote from the transverse wall of the housing, a layer of insulating material separating said conductive layer and said disc-like member, and means to apply a potential between said body of semi-conductive material and said transverse wall for rigidly fixing the position of said disc-like member within said housing whereby said specimen is fixedly positioned in said aperture relative tosaid beam of electrons.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Electron Sources, Ion Sources (AREA)
US298764A 1962-08-29 1963-07-30 Specimen holder for electron microscope Expired - Lifetime US3218457A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL282644A NL282644A (en, 2012) 1962-08-29 1962-08-29

Publications (1)

Publication Number Publication Date
US3218457A true US3218457A (en) 1965-11-16

Family

ID=19754071

Family Applications (1)

Application Number Title Priority Date Filing Date
US298764A Expired - Lifetime US3218457A (en) 1962-08-29 1963-07-30 Specimen holder for electron microscope

Country Status (6)

Country Link
US (1) US3218457A (en, 2012)
BE (1) BE636666A (en, 2012)
CH (1) CH401286A (en, 2012)
DK (1) DK106237C (en, 2012)
GB (1) GB981447A (en, 2012)
NL (1) NL282644A (en, 2012)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3660657A (en) * 1968-11-26 1972-05-02 Ass Elect Ind Electron microscope with multi-focusing electron lens
US4310764A (en) * 1979-06-12 1982-01-12 Fujitsu Limited Electron beam irradiation apparatus
US4596934A (en) * 1982-03-30 1986-06-24 International Precision Inc. Electron beam apparatus with improved specimen holder

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58161235A (ja) * 1982-03-19 1983-09-24 Internatl Precision Inc 走査型電子線装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2939955A (en) * 1957-04-09 1960-06-07 Philips Corp Electron microscope
US2953970A (en) * 1957-09-26 1960-09-27 Indiana General Corp Mount for optical system component

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2939955A (en) * 1957-04-09 1960-06-07 Philips Corp Electron microscope
US2953970A (en) * 1957-09-26 1960-09-27 Indiana General Corp Mount for optical system component

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3660657A (en) * 1968-11-26 1972-05-02 Ass Elect Ind Electron microscope with multi-focusing electron lens
US4310764A (en) * 1979-06-12 1982-01-12 Fujitsu Limited Electron beam irradiation apparatus
US4596934A (en) * 1982-03-30 1986-06-24 International Precision Inc. Electron beam apparatus with improved specimen holder

Also Published As

Publication number Publication date
NL282644A (en, 2012) 1964-12-28
GB981447A (en) 1965-01-27
CH401286A (de) 1965-10-31
DK106237C (da) 1967-01-09
BE636666A (en, 2012) 1964-02-27

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