US3156811A - Gaseous sealing means in an apparatus for working materials by a beam of charged particles - Google Patents

Gaseous sealing means in an apparatus for working materials by a beam of charged particles Download PDF

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US3156811A
US3156811A US235214A US23521462A US3156811A US 3156811 A US3156811 A US 3156811A US 235214 A US235214 A US 235214A US 23521462 A US23521462 A US 23521462A US 3156811 A US3156811 A US 3156811A
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gas
vessel
opening
pressure
stream
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US235214A
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Frank W Barry
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RTX Corp
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United Aircraft Corp
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Priority to NL299874D priority Critical patent/NL299874A/xx
Priority to BE638949D priority patent/BE638949A/xx
Application filed by United Aircraft Corp filed Critical United Aircraft Corp
Priority to US235214A priority patent/US3156811A/en
Priority to DEU10209A priority patent/DE1298850B/de
Priority to FR951928A priority patent/FR1417120A/fr
Priority to GB42758/63A priority patent/GB1069791A/en
Priority to CH1342263A priority patent/CH433526A/de
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Publication of US3156811A publication Critical patent/US3156811A/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/301—Arrangements enabling beams to pass between regions of different pressure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00—Electron-beam welding or cutting
    • B23K15/10—Non-vacuum electron beam-welding or cutting
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S164/00—Metal founding
    • Y10S164/05—Electron beam

Definitions

  • FIG. 2 GASEOUS SEALING MEANS IN AN APPARATUS FOR WORKING MATERIALS BY A BEAM OF CHARGED PARTICLES Filed Nov. 5, 1962 4 Sheets-Sheet 2 FIG. 2
  • the work may be enclosed in an inert atmosphere to minimize vaporization of the material being worked. It will be apparent however, that any environmental gas will cause attenuation of the electron beam in proportion to the pressure of the gas. To minimize such attenuation, two devices have been utilized in the past.
  • the work chamber has been sealed oil. from the evacuated vessel which contains the electron beam.
  • This approach necessitates the provision of a window in the path of the beam which window is nonporous to an environmental gas at roughly atmospheric pressure but which is transparent with respect to the electron beam. It has been found that a window material meeting the former requirement will so attenuate the beam as to require an economically prohibitive power input to operate the beam generator. Moreover, the window material itself will vaporize on contact with the beam at the power levels required to work materials.
  • a second device which has been utilized to minimize beam attenuation comprises a so-called dynamic pressure stage-stretch.
  • a small diameter bore is provided interconnecting an evacuated beam chamber and a work chamber and the pressure stage stretch minimizes attenuation of the beam in passage through the bore.
  • the stretch includes a system of pressure cascade chambers of increasmg gas pressures which are arranged in series in the direction of beam and also includes fine aligned apertures so that only a fraction of the total pressure difference will be effective to cause the work chamber gas to enter each successive chamber.
  • the electron beam can be conducted through these apertures and thus, stage by stage, from that portion of the evacuated chamber containing the beam generator into chambers of progressively higher gas pressure and finally into the work chamber.
  • This approach has been used in the art of electron microscopy but like the electron beam window approach, it causes excessive attenuation of the beam at the relatively high energy concentrations required for working materials. Further,
  • the general object of the present invention is to prevent gas adjacent a workpiece from flowing into an evacuated beam vessel or chamber by means of a stream of sealing gas discharged adjacent the vessel or chamber opening.
  • Another object is to so direct a stream of sealing gas that a stream of relatively low total pressure can be used to prevent workpiece environmental gas from flowing into an evacuated beam vessel, thus minimizing leakage of the sealing gas into said vessel.
  • Another object is to achieve a pressure gradient across a stream of sealing gas by turning the same just prior to discharge from a supply passageway, thus further minimizing the leakage of sealing gas into the vessel.
  • Still another object is to achieve a more pronounced pressure gradient across a stream of sealing gas by the use of a convergent-divergent nozzle to achieve supersonic flow adjacent a vacuum vessel opening thus realizing a lower pressure in that region of the sealing gas stream and thus minimizing still further the leakage of sealing gas into the vessel.
  • Still another and a more specific object is to provide a gaseous seal across an evacuated vessel opening by directing a stream of sealing gas across a beam, the attenuation of the beam due to the sealing gas being minimized by the low total pressure of the gas and the short path of the beam in traversing the gas stream.
  • Still another specific object is to provide a gaseous seal around the periphery of a vessel opening by directing a stream of sealing gas generally radially outwardly with respect to the beam and adjacent a workpiece.
  • Still another specific object is to provide a mechanical seal around the periphery of a gaseously sealed vessel opening whereby to reduce still further the leakage of sealing gas into the vessel.
  • FIG. 1 is a schematic cross sectional view of one embodiment of my invention wherein a two dimensional rectangular passageway directs a supersonic stream of sealing gas into a beam chamber generally transversely with respect to the beam and which stream is shown recaptured in a supersonic diffuser.
  • FIG. 2 is a schematic cross sectional view of a second embodiment of my invention wherein an annular passageway directs the sealing gas int-o a beam chamber generally obliquely with respect to the beam, said sealing gas being ultimately discharged into the environmental gas surrounding the workpiece.
  • FIG. 3 is a schematic cross sectional view of a third embodiment of my invention wherein an annular passageway directs the supersonic stream of sealing gas generally radially outwardly with respect to the beam directly into the environmental gas.
  • FIG. 4 is a schematic cross sectional view of a fourth embodiment of my invention, similar to that depicted in FIG. 3 but also including a mechanical seal around the beam.
  • FIG. 1 Gaseous Seal Across Beam, Closed Loop System
  • a beam generator 10 emitting a beam along an axis 12, which beam is concentrated by a focusing means 14, 14 to be passed through a small vessel opening 16 into a beam chamber 18 and thence through a second opening 20, aligned with the vessel opening 16, to impinge on a workpiece 50 supported on a table or other work supporting or holding means 51.
  • beam generator is shown schematically.
  • US. Patent No. 2,987,610 issued June 6, 1961, to K. H. Steigerwald.
  • the focusing means shown comprises a magnetic lens
  • any suitable focusing means may be employed.
  • a series of electric lenses comprising an electrostatic focusing system is also within the scope of this invention.
  • That part of the beam generator 10 from which the beam emanates is contained in an evacuated vessel 22 connected by piping means 24 to a high vacuum pump 26.
  • the pump 26 is capable of maintaining a pressure on the order of 10- Torr in the evacuated vessel 22.
  • the vessel opening 16 is shown in the evacuated vessel 22 said opening may be defined in the last chamber in a pressure stage stretch if both this invention and a stretch were to be combined in one apparatus.
  • a housing means 30 Interposed between the workpiece 50 and the evacuated vessel 22, and attached to the latter in the schematic view of FIG. 1 is a housing means 30 comprising internally opposed wall surfaces 32 and 34.
  • the surfaces 32 and 34 are arranged in inner to outer order with respect to the vessel opening 16 and at least partially define a gas supply passageway 33.
  • An inlet end of the passageway 33 is connected by piping to a pressurized source of sealing gas 28 and the outlet end 17 thereof is connected to and communicates with the beam chamber 18.
  • Said housing means also comprises the internally opposed wall surfaces 42 and 44 arranged in inner to outer order with respect to the vessel opening 16.
  • the surfaces 42 and 44 at least partially define a return passageway 43 for the sealing gas, the inlet end 19 of the return passageway outlet communicating with the opposite side of the beam chamber 18.
  • the outlet end of the return passageway 43 may be connected to the source 28 by piping means 46 as illustrated.
  • the housing 30 is subadjacent the evacuated vessel 22 but this arrangement is intended to be merely exemplary and the vessel 22 should be taken as representative of any chamber or series of chambers the outermost of which is in communication with the workpiece environment through an opening such as 16 and which is at some pressure less than that of the workpiece environmental gas.
  • the supply passageway 33 may take various forms but is shown as being generally rectangular whereby conveniently to illustrate two dimensionally the flow of sealing gas therein. As shown in FIG. 1 the supply passageway 33 turns the stream of sealing gas generally toward the vessel opening 16 by means of the generally concave outer wall surface 34. In turning the stream a pressure gradient is achieved thereacross, the lower pressure resulting in that part of the discharged stream adjacent the vessel opening 16.
  • a nozzle is preferably employed to increase the velocity of the stream.
  • a supersonic nozzle means is utilized, the wall surfaces 32 and 34 cooperating to define convergent and divergent sections and a throat therebetween.
  • the pressurized source of sealing gas 28 is effective to provide for supersonic flow at least in the divergent passageway section downstream of the throat 40 and across the beam chamber 18.
  • the discharged stream is oriented generally transversely with respect to the beam to provide a gaseous seal across the vessel opening 16 and thus to prevent leakage of environmental gas into the vessel.
  • the curved supersonic stream of gas permits very low pressures to be achieved in the flow adjacent the vessel opening 16 it is a necessary adjunct to such flow that compression and expansion waves will appear therein. These waves, or pressure disturbances, will be propagated across the stream and some of the beneficial effects of the high speed low pressure supersonic flow will be lost if any compression waves cross the stream upstream of the vessel opening 16.
  • the compression waves are formed only downstream of a junction 35 on the outer wall surface 34.
  • the compression Waves necessarily formed on the generally concave turning surface 34 are postponed by means of an upstream part of said surface which is substantially straight and which is located between the throat 40 and the junction 35.
  • the surface 34 Downstream of the junction, the surface 34 is arcuate so as to facilitate the formation of compression waves thereon, the initial such wave being formed at the junction 35.
  • the initial compression Wave will be propagated from the junction 35 and will form a known angle with the surface 34.
  • the junction 35 can be and is located such that the initial compression wave passes downstream of the vessel opening 16.
  • the initial such Wave is indicated generally in FIG. 1 by the broken line 37 originating at 35 and extending angularly downstream therefrom.
  • the inner wall surface 32 is preferably convex from the throat 40 to the outlet 17 of the supply passageway 33 as shown in FIG. 1.
  • a plurality of expansion waves will be formed defining areas of successively decreasing pressure. The net effect of all of said expansion waves is to further accentuate the pressure gradient across the sealing gas in the beam chamber 18.
  • the inlet 19 of the return passageway 43 is preferably of slightly larger cross section than 'the outlet 17 of the supply passageway 33 and is preferably stepped inwardly with respect to said outlet 17 as shown in FIG. 1. In this manner use is made of the additional expansion at the edge 38 and the pressure of the sealing gas adjacent the vessel opening 16 is further reduced.
  • the pressure at the second opening 20 can be made approximately equal to the pressure of the workpiece environmental gas thus minimizing mixing of said environmental and sealing gas.
  • the supersonic stream of sealing gas will thus block any flow of environmental gas into the evacuated vessel while the pressure gradient across the said stream permits leakage of sealing gas into the evacuated vessel to be minimized and the capacity of the high vacuum pump 26 to be substantially reduced.
  • the flow cross section along the beam axis 12 will be as follows:
  • the expansion waves emanating from the surface 32 and particularly from adjacent the upstream lip 38 of opening 16 provide a continually decreasing pressure region in a downstream direction (right to left in FIGURE 1).
  • the beam initially penetrates the cross flow in an area which is at a pressure not substantially higher than that existing in the area 16, which, as stated above, is maintained at a relatively low pressure by a vacuum pump 26.
  • the return passageway 43 preferably comprises a supersonic diffuser means adapted to reduce the speed of the sealing gas and to thus reduce the pressure losses in conveying the gas back to the pressure source 28 through the piping means 46. This minimizes the task of the pumping means 28 and permits the use of a comparatively small pump or other pressurizing means.
  • the diffuser is formed by the opposing wall surfaces 42 and 44 of said housing 30 and preferably has an upstream convergent section and a downstream divergent section defining a throat 45 therebetween.
  • the inlet 19 of the return passageway 43 comprises the inlet of the convergent section and an inner edge 39 of said inlet 19 is stepped inwardly as mentioned.
  • FIGURE 1 has been described as a closed loop system, as will be obvious from the explanation of the embodiments of FIGURES 2 through 4 below, the sealing gas flowing in the cross-flow system may be dumped into the atmosphere downstream of the beam axis. That is, it may in some cases be desirable to eliminate the supersonic diffuser and dump the sealing gas into the atmosphere at some point downstream of the trailing edge of opening 20. The foregoing might be done, for example, when an inexpensive gas is utilized.
  • a beam generator emitting a beam of charged particles or the like along an axis 112. That part of the beam generator from which the beam emanates is contained in an evacuated vessel 122, which vessel is connected by means of a pipe 124 to a high vacuum pump 126 capable of maintaining a pressure on the order of 10- Torr in said vessel 122.
  • the beam is concentrated by a focusing means 114 to be passed through a small vessel opening 116 and thence through a beam chamber 118 and through a second opening 120 to impinge on a workpiece 150.
  • the beam chamber 118 is defined by a housing means attached to the vessels exterior and adjacent said vessel opening 116, said chamber being in communication with the vessel opening at its inner end and with the second opening 120 at its outer end.
  • the housing means 130 may be attached to the exterior of vessel 122 as shown and is disposed between the vessel opening 116 and the workpiece 150.
  • Opposing wall surfaces 132 and 134 arranged in inner to outer order with respect to the vessel opening 116 at least partially define a passageway 133.
  • the said passageway is represented in FIG. 2 as being annular in cross sectional shape but may take various other forms so long as the outlet thereof is peripherally arranged around at least a portion of the beam chamber 118.
  • annular passageway 133 is connected by means of an annular plenum 113 and a pipe 115 to a pressurized source of sealing gas 128, and the other end, defining an annular outlet 117, is connected to and communicates peripherally with the cylindrical beam chamber 118.
  • the passageway 133 turns a stream of sealing gas generally towards the vessel opening 116 by means of a generally concave downstream portion of the outer wall surface 134.
  • a pressure gradient is achieved thereacross as previously mentioned, the lower pressure occurring in that part of the discharged stream adjacent the vessel opening 116.
  • a supersonic nozzle is preferably employed to increase the velocity of the stream.
  • the annular wall surfaces 132 and 134 cooperate to define convergent and divergent sec tions in the direction of flow and an annular throat therebetween.
  • the source of sealing gas 128 is at a pressure high enough to achieve supersonic flow at least in the divergent passageway section and in the beam chamber.
  • the discharged stream of sealing gas is directed generally obliquely with respect to the beam axis so as to have a component generally transverse with respect to the beam and a component directed outwardly through the second opening 120.
  • this embodiment requires a continuous source of sealing gas, this stream of said gas being ultimately discharged from the beam chamber through the second opening and into the workpiece environment gas as shown.
  • the pressure rise due to obstruction of the flow of sealing gas by the environmental gas is utilized to prevent leakage of the environmental gas into the evacuated vessel.
  • the compression waves are preferably formed only at and downstream of a junction 135 on the outer wall surface 134.
  • the compression waves necessarily formed on the generally concave wall surface 134 are delayed by means of an upstream substantially straight part of said wall surface between the throat 140 and the junction 135.
  • the wall surface 134 Downstream of said junction the wall surface 134 is arcuate so as to facilitate the formation of compression waves thereon.
  • the initial compression wave will leave the surface 134 at a known angle therewith and the junction 135 is so located that said initial compression wave passes downstream of the vessel opening 116.
  • Such a wave is indicated generally in FIG. 2 by the broken line 137 originating at the junction 135.
  • Successive compression waves formed on the arcuate part of the wall surface 134 define areas of successively increasing pressure and thus tend to further accentuate the pressure gradient across the sealing gas discharged into the beam chamber 118.
  • Such a succession of oblique compression waves is to be preferred over a single normal shock at the opening 120 because of the low pressure recovery characteristic of the latter.
  • the inner wall surface 132 in the divergent section of the passageway 133 is of convex curvature so that expansion waves will be formed thereon.
  • the said inner wall surface is preferably convex from the throat 140 to the outlet 117 as shown.
  • a plurality of expansion waves will necessarily be formed each of which defines an area of successively decreasing pressure. The net effect of all of said expansion waves is to further accentuate the pressure gradient across the sealing gas discharged into the beam chamber 118.
  • a beam generator 210 is shown emitting a beam of charged particles or the like along an axis 212.
  • the part of the beam generator from which the beam emanates is contained in an evacuated vessel 222, which vessel is connected by means of a pipe 224 to a high vacuum pump 226 capable of maintaining a pressure on the order of Torr in said vessel 222.
  • the beam is concentrated by a focusing means 214 to be passed through a small vessel opening 216 to impinge on a workpiece 250 which workpiece is held in closely spaced relationship to said vessel opening by a table 251 or the like.
  • an inner annular housing member 218 Attached to the vessel 222 an forming a part thereof which defines the vessel opening 216 is an inner annular housing member 218. Said member has a cylindrical bore forming the opening 216 and includes an inner wall surface 232. An outer annular housing member 220 defines an outer wall surface 234 of a gas supply passageway 233.
  • One end of the annular passageway 233 is connected to a pressurized source of sealing gas 228 by the piping 215 and the other end, comprising an outlet 217, is defined by a downstream edge 236 of the outer wall surface 234 and a downstream edge 238 of the inner surface 232.
  • Said outlet 217 is adapted to discharge sealing gas around the periphery of the beam and radially outwardly with respect thereto adjacent a workpiece 250.
  • this embodiment operates not unlike an ejector in that the discharged gas creates a low pressure about the periphery of the opening 216 and in the space between said opening and the workpiece without crossing the beam itself.
  • This embodiment like that of FIG. 2,
  • the outer wall surface 234 is preferably concave at a downstream portion to turn the stream of sealing gas generally towards the vessel opening 216 and to thereby achieve a pressure gradient across the discharged stream at the outlet 217.
  • the lower presure results in that part of the stream closest to the vessel opening 216, the space between said vessel opening and the workpiece 250 providing a means for communication between said stream and opening.
  • a nozzle is preferably employed to increase the velocity of the stream.
  • the presently preferred practice is to use a supersonic nozzle means, the wall surfaces 232 and 234 cooperating to define convergent and divergent sections and a throat 240 therebetween.
  • the source of sealing gas 228 is at a high enough prsesure to achieve supersonic flow downstream of the throat 240 in the divergent passageway section and downstream of the outlet 217 into the space between the workpiece 250 and the lower end portion of the outer annular member 220, both of which elements cooperate to form a continuation of the passageway 233.
  • This space or passageway continuation is not unlike the beam chamber 218 in the previous embodiment, FIG.
  • the stream of discharged gas being oriented generally obliquely as it enters said space and then discharged outwardly into the environmental gas as it leaves the space.
  • the device is similar to the previous embodiment in that a pressure rise is achieved in obstruction of the flow of sealing gas by the workpiece environmental gas. Unlike the previous device, however, this embodiment does not require the stream to cross the beam and so avoids all beam attenuation due to the sealing gas stream.
  • the curved supersonic stream of sealing gas permits very low pressures to be achieved in the area of flow which is in communication with the vessel opening, it is a necessary adjunct to such a stream that compression and expansion waves will appear therein. These waves, or pressure disturbances, are propagated across the stream and some of the beneficial effects of the high speed low pressure supersonic flow will be lost if any compression waves cross the stream upstream of that part of the flow which is in communication with the vessel opening 216. Therefore, in the present embodiment, as in the previously mentioned devices, the compression waves are preferably formed only downstream of a junction 235 on the outer wall surface 234.
  • the compression waves necessarily formed on the generally concave surface 234 are delayed by means of an up stream part of the wall surface which is substantially straight and which extends between the throat 240* and the junction 235. Downstream of said junction the outer Wall surface 234 is arcuate os as to facilitate the formation of compression waves thereon.
  • the initial compression wave leaves the wall surface 234 at a known angle therewith and the junction 235 is so located that said wave passes downstream of the area of said sealing gas stream which is in communication with the vessel opening 216.
  • the broken line 237 originating at 235 and extending across the stream to the workpiece 250 represents such an initial wave.
  • Successive compression waves formed on said arcuate part of the wall surface 234 define areas of successively increasing pressure as mentioned and thus tend to further accentuate the pressure gradient across the sealing gas discharged into the space between the workpiece 250 and the member 220.
  • the inner wall surface 232 in the divergent section of the passageway 233 is of convex curvature so that expansion waves will be formed thereon.
  • a plurality of expansion waves will necessarily be formed each of which defines an area of successively decreasing pressure. The net efiect of this wave pattern will further accentuate the pressure gradient across the sealing gas discharged into the space between the workpiece and the annular housing member 220.
  • FIG. 4 shows an apparatus for working materials by means of a beam of charged particles or the like similar in most respects to that illustrated in FIG. 3, a gaseous seal being provided around the beam.
  • a mechanical seal 252 is also provided around the beam and is disposed between the gaseous seal and the beam.
  • the mechanical seal is of resilient material and takes an annular shape with a center hole 254 of slightly larger size than the vessel opening 216.
  • An outer circumference 256 of the seal is of roughly the same diameter as the circular edge 238a of the inner wall surface 232a.
  • the said seal 252 is or may be fixedly attached, adjacent its center hole, to the lower end portion of the inner annular member 218a.
  • the outer circumference 256 of the seal rests on the upper face of the workpiece 250 and being resilient is well adapted to conform to any uneveness in the face of the workpiece.
  • the seal is held in contact with the workpiece at least partly by reason of the difference in pressure across said seal, the static pressure of the sealing gas stream past the seal necessarily exceeding the very low pressure in the evacuated vessel 222.
  • biasing means are provided which hold the inner and outer members 218a and 220a in a relatively fixed relationship to the workpiece 250.
  • the biasing means comprise a spring 258 acting between the exterior of the vessel 222 and an upper end portion 221a of the outer member 220a, which member is fixedly attached to the inner member 218a.
  • the use of the spring 258 makes the positioning of the workpiece 250 with respect to the beam generating apparatus 200 less critical. The operator merely sets the workpiece close to the apparatus and the spring 258 will position the outer and inner members 220a and 218a in the optimum position for efficiently sealing the opening 216 from both the environmental gas and the sealing gas.
  • a second mechanical seal 260 is required because of the movable connection between the vessel 222 and the outer annular member 220a.
  • the inner annular member 218a in conjunction with the vessel 222, defines the beam opening 216, which opening is at very low pressure and therefore requires sealing at any connection where inward gas leakage is likely to occur.
  • the slidable connection between the vessel 222 and the member 220a is therefore fitted with a bellows type seal 260 as shown in FIG. 4.
  • Apparatus for working materials by means of a beam of charged particles comprising:
  • a vessel containing at least a portion of said beam generating means, said vessel defining an opening for transmission of said beam;
  • means defining a gas supply conduit having a throat therein for acceleration of gas flowing therethrough to supersonic velocity, said conduit being connected at one end to said pressurized source of gas and having an outlet portion arranged to discharge a supersonic stream of gas adjacent said vessel opening.
  • housing means defining a first opening adjacent said vessel opening and a second opening spaced outwardly from said vessel opening and aligned there- With for passage of the beam therethrough, said housing means serving also to define a beam chamber between said first and said second openings and gas supply and exit passageways communicating respectively at their outlet and inlet ends with said beam chamber.
  • said gas supply passageway comprises:
  • said supply passageway extending upstream from said beam chamber in generally angular relationship with respect to the axis of a beam passing through said aligned openings, said inner and outer wall surfaces further serving to define said throat therebetween.
  • said inner wall surface of said supply passageway downstream of said throat comprises:
  • exit passageway comprises:
  • gas supply conduit defining means comprises:
  • housing means defining a first opening adjacent said vessel opening and a second opening spaced outwardly from said vessel opening and aligned therewith for passage of the beam therethrough, said housing means serving also to define a beam chamber between said first and second openings and a gas supply passageway communicating with said beam chamber, said passageway being arranged to extend upstream from said beam chamber in a direction generally oblique with respect to the axis of a beam passing through said aligned openings.
  • said gas supply passageway comprises:
  • opposed inner and outer wall surfaces defining a passageway which is annular in cross section and has its outlet end disposed about said beam chamber to communicate peripherally therewith, said inner and outer wall surfaces further serving to define said throat therebetween.
  • the outer wall surface of said passageway comprises:
  • said inner wall surface of said supply conduit downstream of said throat comprises:
  • said convex inner wall surface further comprises:
  • gas supply conduit defining means comprises:
  • housing means defining a gas supply passageway connected with said pressurized source of gas and having an outlet portion arranged to establish a flow of gas which circumscribes a beam of charged particles passing through said vessel opening, said gas flow extending outwardly to the surface of the material to be worked thereby inhibiting flow of environmental gas to the region between said vessel opening and the area to be worked.
  • a mechanical seal afiixed to housing means at a point between said vessel opening and the outlet end of said supply passageway and extending from said housing means to the surface of a material to be worked with the beam whereby said seal serves to isolate said vessel opening from said sealing gas thereby further minimizing leakage of said gas into said vessel.
  • said seal comprises a flexible annular member, wherein said housing means is adapted for movement toward and away from the material to be worked, and wherein a biasing means is provided for urging said housing means toward the material to be worked thereby maintaining the seal in effective sealing engagement between the housing means and the material being worked.
  • opposed inner and outer wall surfaces defining a passageway arranged to discharge gas radially outwardly with respect to the axis of the beam, said inner and outer wall surfaces further serving to define said throat therebetween.
  • a pair of oppositely disposed wall surfaces being arranged in inner and outer order with respect to said vessel opening and being generally convex and concave respectively for the formation of expansion and compression waves in the gas discharge from said passageway.
  • Apparatus for transmitting a beam of electrons from a low pressure to a gaseous environment without material attenuation thereof comprising:
  • a vessel containing at least a portion of said beam generating means, said vessel defining an opening for transmission of said beam;
  • housing means abutting said vessel and defining a first opening adjacent said vessel opening and a second opening spaced outwardly from said vessel opening and aligned therewith for passage of the beam there- 13 through, said housing means serving also to define a beam chamber between said first and second openings and a gas supply orifice in the wall of said chamber;
  • means defining a gas supply passageway having its inlet end connected to said pressurized source of gas and having its outlet end connected to said supply orifice, said passageway having a throat therein for acceleration of gas flowing therethrough from said source to supersonic velocity, said passageway further being contoured downstream of said throat so as to impart a change in direction to the supersonic stream of gas and thereby generate compression and expansion Waves and establish a pressure gradient across the gas in the beam chamber, the lower pressure being adjacent said first opening.
  • Apparatus for Working materials by means of a beam of charged particles comprising:
  • a vessel containing at least a portion of said beam generating means, said vessel defining an opening for transmission of said beam;
  • means defining a gas supply passageway having a throat therein for acceleration of gas flowing therethrough to supersonic velocity, said passageway having its inlet end connected to said pressurized source of gas and having its outlet end arranged to discharge said supersonic passageway gas adjacent said vessel opening in such a manner that it circumscribes a beam passing through said vessel opening and impinging upon the material to be worked, said gas flowing outwardly to the surface of the material to be worked and having a pressure gradient thereacross whereby a low pressure region circumscribed by said gas is created between said vessel opening and the desired point of beam impingement on the material to be Worked.

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
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  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
US235214A 1962-11-05 1962-11-05 Gaseous sealing means in an apparatus for working materials by a beam of charged particles Expired - Lifetime US3156811A (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
NL299874D NL299874A (enrdf_load_stackoverflow) 1962-11-05
BE638949D BE638949A (enrdf_load_stackoverflow) 1962-11-05
US235214A US3156811A (en) 1962-11-05 1962-11-05 Gaseous sealing means in an apparatus for working materials by a beam of charged particles
DEU10209A DE1298850B (de) 1962-11-05 1963-10-18 Verfahren zur Bearbeitung von Materialien mittels eines Strahles geladener Partikel
FR951928A FR1417120A (fr) 1962-11-05 1963-10-26 Méthode d'obturation gazeuse dans un appareil pour travailler des matières au moyen d'un faisceau de particules chargées
GB42758/63A GB1069791A (en) 1962-11-05 1963-10-30 Gaseous sealing means in an apparatus for working materials by a beam of charged particules
CH1342263A CH433526A (de) 1962-11-05 1963-11-01 Verfahren zur Bearbeitung von Materialien in atmosphärischer Umgebung mit Hilfe eines Ladungsträgerstrahls

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US235214A US3156811A (en) 1962-11-05 1962-11-05 Gaseous sealing means in an apparatus for working materials by a beam of charged particles

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US3156811A true US3156811A (en) 1964-11-10

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US235214A Expired - Lifetime US3156811A (en) 1962-11-05 1962-11-05 Gaseous sealing means in an apparatus for working materials by a beam of charged particles

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US (1) US3156811A (enrdf_load_stackoverflow)
BE (1) BE638949A (enrdf_load_stackoverflow)
CH (1) CH433526A (enrdf_load_stackoverflow)
DE (1) DE1298850B (enrdf_load_stackoverflow)
GB (1) GB1069791A (enrdf_load_stackoverflow)
NL (1) NL299874A (enrdf_load_stackoverflow)

Cited By (17)

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Publication number Priority date Publication date Assignee Title
US3271556A (en) * 1963-10-31 1966-09-06 Lockheed Aircraft Corp Atmospheric charged particle beam welding
US3388235A (en) * 1965-12-01 1968-06-11 United Aircraft Corp Vortex pressure control device
US3389240A (en) * 1964-09-25 1968-06-18 Welding Research Inc Electron beam welding apparatus
US3393289A (en) * 1964-11-12 1968-07-16 United Aircraft Corp Self-cleaning electron beam exit orifice
US3444350A (en) * 1965-10-23 1969-05-13 United Aircraft Corp Jet diffuser plate for electron beam device
US3585349A (en) * 1963-04-15 1971-06-15 Rohr Corp Nonvacuum environmentally controlled electron beam
US3622741A (en) * 1969-08-06 1971-11-23 Steigerwald Karl Heinz Electron-beam-processing machine having means for deflecting impurities from the path of the electron beam
US3725633A (en) * 1971-01-08 1973-04-03 Westinghouse Electric Corp Corpuscular beam in the atmosphere
US4304979A (en) * 1978-10-24 1981-12-08 Leybold-Heraeus Gmbh Method and apparatus for electron beam welding at elevated pressures
US4524261A (en) * 1983-09-19 1985-06-18 Varian Associates, Inc. Localized vacuum processing apparatus
US4528451A (en) * 1982-10-19 1985-07-09 Varian Associates, Inc. Gap control system for localized vacuum processing
US4584479A (en) * 1982-10-19 1986-04-22 Varian Associates, Inc. Envelope apparatus for localized vacuum processing
US4607167A (en) * 1982-10-19 1986-08-19 Varian Associates, Inc. Charged particle beam lithography machine incorporating localized vacuum envelope
WO2009068904A1 (en) * 2007-11-29 2009-06-04 Sheffield Hallam University Particle beam apparatus
JP2010153278A (ja) * 2008-12-26 2010-07-08 Hitachi High-Technologies Corp 荷電粒子線加工装置
EP2442346A1 (en) 2010-10-14 2012-04-18 Carl Zeiss NTS Limited Improvements in and relating to charged particle beam devices
JP2022011073A (ja) * 2020-06-29 2022-01-17 株式会社ブイ・テクノロジー 差動排気装置および集束エネルギービーム装置

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US2554236A (en) * 1949-03-02 1951-05-22 Arthur A Bernard Arc welding torch and electrode
US2587331A (en) * 1947-08-08 1952-02-26 Gen Electric High-frequency electrical heating method and apparatus
US2590084A (en) * 1945-08-06 1952-03-25 Nat Cylinder Gas Co Shielded arc welding method and gas confining means
US2686860A (en) * 1952-11-19 1954-08-17 Int Nickel Co Inert gas-shielded arc welding torch
US2769079A (en) * 1954-09-21 1956-10-30 Amalgamated Growth Ind Inc High-temperature electric torch
US2771568A (en) * 1951-01-31 1956-11-20 Zeiss Carl Utilizing electron energy for physically and chemically changing members
US2806124A (en) * 1955-07-26 1957-09-10 Union Carbide Corp Arc torch and process
US2824232A (en) * 1955-10-29 1958-02-18 Zeiss Carl Method and device for the transmission of high speed radiation, particularly corpuscular radiation, between spaces of different pressure
US2899556A (en) * 1952-10-17 1959-08-11 Apparatus for the treatment of substances
US2907704A (en) * 1957-07-19 1959-10-06 High Voltage Engineering Corp Electron irradiation
US2922869A (en) * 1958-07-07 1960-01-26 Plasmadyne Corp Plasma stream apparatus and methods

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US2811828A (en) * 1950-12-02 1957-11-05 United Aircraft Corp Bleed means for confined supersonic flow
NL248568A (enrdf_load_stackoverflow) * 1959-02-20
DE1849774U (de) * 1961-10-03 1962-04-12 Heraeus Gmbh W C Vorrichtung zum schweissen von metallen und nichtmetallen bei normaldruck.

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2590084A (en) * 1945-08-06 1952-03-25 Nat Cylinder Gas Co Shielded arc welding method and gas confining means
US2587331A (en) * 1947-08-08 1952-02-26 Gen Electric High-frequency electrical heating method and apparatus
US2554236A (en) * 1949-03-02 1951-05-22 Arthur A Bernard Arc welding torch and electrode
US2771568A (en) * 1951-01-31 1956-11-20 Zeiss Carl Utilizing electron energy for physically and chemically changing members
US2899556A (en) * 1952-10-17 1959-08-11 Apparatus for the treatment of substances
US2686860A (en) * 1952-11-19 1954-08-17 Int Nickel Co Inert gas-shielded arc welding torch
US2769079A (en) * 1954-09-21 1956-10-30 Amalgamated Growth Ind Inc High-temperature electric torch
US2806124A (en) * 1955-07-26 1957-09-10 Union Carbide Corp Arc torch and process
US2824232A (en) * 1955-10-29 1958-02-18 Zeiss Carl Method and device for the transmission of high speed radiation, particularly corpuscular radiation, between spaces of different pressure
US2907704A (en) * 1957-07-19 1959-10-06 High Voltage Engineering Corp Electron irradiation
US2922869A (en) * 1958-07-07 1960-01-26 Plasmadyne Corp Plasma stream apparatus and methods

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3585349A (en) * 1963-04-15 1971-06-15 Rohr Corp Nonvacuum environmentally controlled electron beam
US3271556A (en) * 1963-10-31 1966-09-06 Lockheed Aircraft Corp Atmospheric charged particle beam welding
US3389240A (en) * 1964-09-25 1968-06-18 Welding Research Inc Electron beam welding apparatus
US3393289A (en) * 1964-11-12 1968-07-16 United Aircraft Corp Self-cleaning electron beam exit orifice
US3444350A (en) * 1965-10-23 1969-05-13 United Aircraft Corp Jet diffuser plate for electron beam device
US3388235A (en) * 1965-12-01 1968-06-11 United Aircraft Corp Vortex pressure control device
US3622741A (en) * 1969-08-06 1971-11-23 Steigerwald Karl Heinz Electron-beam-processing machine having means for deflecting impurities from the path of the electron beam
US3725633A (en) * 1971-01-08 1973-04-03 Westinghouse Electric Corp Corpuscular beam in the atmosphere
US4304979A (en) * 1978-10-24 1981-12-08 Leybold-Heraeus Gmbh Method and apparatus for electron beam welding at elevated pressures
US4528451A (en) * 1982-10-19 1985-07-09 Varian Associates, Inc. Gap control system for localized vacuum processing
US4584479A (en) * 1982-10-19 1986-04-22 Varian Associates, Inc. Envelope apparatus for localized vacuum processing
US4607167A (en) * 1982-10-19 1986-08-19 Varian Associates, Inc. Charged particle beam lithography machine incorporating localized vacuum envelope
US4524261A (en) * 1983-09-19 1985-06-18 Varian Associates, Inc. Localized vacuum processing apparatus
WO2009068904A1 (en) * 2007-11-29 2009-06-04 Sheffield Hallam University Particle beam apparatus
JP2010153278A (ja) * 2008-12-26 2010-07-08 Hitachi High-Technologies Corp 荷電粒子線加工装置
EP2442346A1 (en) 2010-10-14 2012-04-18 Carl Zeiss NTS Limited Improvements in and relating to charged particle beam devices
US8859992B2 (en) 2010-10-14 2014-10-14 Carl Zeiss Nts Limited Charged particle beam devices
JP2022011073A (ja) * 2020-06-29 2022-01-17 株式会社ブイ・テクノロジー 差動排気装置および集束エネルギービーム装置

Also Published As

Publication number Publication date
DE1298850B (de) 1969-07-03
NL299874A (enrdf_load_stackoverflow)
BE638949A (enrdf_load_stackoverflow)
GB1069791A (en) 1967-05-24
CH433526A (de) 1967-04-15

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