US3110637A - Method of producing semi-conductive electrode systems - Google Patents
Method of producing semi-conductive electrode systems Download PDFInfo
- Publication number
- US3110637A US3110637A US785374A US78537459A US3110637A US 3110637 A US3110637 A US 3110637A US 785374 A US785374 A US 785374A US 78537459 A US78537459 A US 78537459A US 3110637 A US3110637 A US 3110637A
- Authority
- US
- United States
- Prior art keywords
- aluminum
- electrode
- mass
- layer
- alloyed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 title claims description 9
- 229910052782 aluminium Inorganic materials 0.000 claims description 28
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 28
- 239000004065 semiconductor Substances 0.000 claims description 9
- 239000007787 solid Substances 0.000 claims description 7
- 239000006185 dispersion Substances 0.000 claims description 6
- 229910052732 germanium Inorganic materials 0.000 claims description 5
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 5
- 238000005275 alloying Methods 0.000 claims description 4
- 238000001035 drying Methods 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 238000010422 painting Methods 0.000 claims description 3
- 235000010210 aluminium Nutrition 0.000 description 24
- 229910045601 alloy Inorganic materials 0.000 description 8
- 239000000956 alloy Substances 0.000 description 8
- 238000001816 cooling Methods 0.000 description 5
- 239000011230 binding agent Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000008188 pellet Substances 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/24—Alloying of impurity materials, e.g. doping materials, electrode materials, with a semiconductor body
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/04—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion materials in the liquid state
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
Definitions
- This invention relates to a method of producing semiconductive electrode-systems, such as transistors and crystal diodes, which contain a semi-conductive body, which may, for example, consist of germanium or silicon, to which at least one electrode is alloyed which consists of an alloy of aluminum and at least one other component.
- the invention is based on the recognition of the fact that aluminum or an alloy containing aluminum can be more readily caused to fuse with a metal or an alloy which has already been alloyed to a semi-conductor body than with the semi-conductor bodies themselves.
- another component of the electrode finally to be produced is alloyed to the semiconductor body after which aluminum is placed on this alloyed component and finally is fused therewith.
- the aluminum can be applied either as a pure metal or in the form of an alloy with another element.
- the amount of aluminum or aluminum-alloy added in this manner can be small so that the proportion of aluminum of the finally produced electrode is less than 5%.
- the aluminum or the alloy containing alu minum is added to the alloyed component as a fine powder dispersed in a binder.
- This component preferably is in the solid state when the aluminum is applied.
- a semi-conductor body 1 consisting of n-type germanium having a specific resistivity of 3 ohm-cm. and a thickness of 150 microns there is placed a pellet 2 of lead (FIG. 1).
- the two members are fused to one another in a jig (not shown) at 600 C. so that an alloyed body 3 is formed (FIG. 2).
- This body consists of lead which has absorbed a small amount of germanium.
- a small amount of a dispersion 4 of 40 gms. of powdered aluminum in a solution of 20 gms. of methacrylate in cos. of Xylene is applied to both bodies (FIG. 4).
- the applied amount of the dispersion is not critical.
- the assembly is again heated to 750 C. so that fusion recurrs. After cooling it is found that the electrodes 5 produced (FIG. 5) have absorbed an amount of aluminum such that they form rectifying contacts having a high emitter efiiciency.
- a base contact 6 consisting of a nickel wire can be applied to the body 1 in the usual manner with the aid of tin solder '7.
- a similar method can be used in which there is substituted for the powdered aluminum in the dispersion a powder consisting of 28% of aluminum and 72% of silver. This melts at about 560 C., and can be fused with the already alloyed component 3 at a temperature slightly higher than this melting point, for example 600 C.
- a method of forming a p-type region in a body of semiconductor material comprising fusing and alloying to said body a mass of metal, cooling the fused mass to form a solid alloyed electrode on the body, thereafter painting said solid alloyed electrode with finely-divided aluminum dispersed in a liquid binder to form a layer thereon, thereafter drying the layer, refusing the mass and layer to incorporate the aluminum into the electrode and into an underlying portion of the body, and thereafter cooling the mass to solidify same in contact with the body.
- a method of forming a rectifying contact to an n-type body portion of germanium semiconductor material comprising fusing and alloying to said body portion a mass of lead, cooling the fused mass to form a solid alloyed electrode on the body, thereafter painting said solid alloyed electrode with finely divided aluminum dispersed in a liquid binder to form a layer thereon, wherein the dispersion contains an amount of aluminum at which the final electrode contains more than zero but less than 5% of aluminum, thereafter drying the layer, refusing the mass and layer to incorporate the aluminum into the electrode and into an adjacent region of the body, and thereafter cooling the mass to solidify same in contact with the body forming a rectifying contact thereto having a high emitter efficiency.
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Ceramic Engineering (AREA)
- Conductive Materials (AREA)
- Powder Metallurgy (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL224040 | 1958-01-14 |
Publications (1)
Publication Number | Publication Date |
---|---|
US3110637A true US3110637A (en) | 1963-11-12 |
Family
ID=19751094
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US785374A Expired - Lifetime US3110637A (en) | 1958-01-14 | 1959-01-07 | Method of producing semi-conductive electrode systems |
Country Status (6)
Country | Link |
---|---|
US (1) | US3110637A (de) |
CH (1) | CH367569A (de) |
DE (1) | DE1098616B (de) |
FR (1) | FR1213288A (de) |
GB (1) | GB906938A (de) |
NL (2) | NL108504C (de) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1332736A (fr) * | 1962-06-08 | 1963-07-19 | Radiotechnique | Appareil pour le dépôt sur des grains d'alliages d'un métal pulvérulent en suspension dans un liquide |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2701326A (en) * | 1949-11-30 | 1955-02-01 | Bell Telephone Labor Inc | Semiconductor translating device |
US2781481A (en) * | 1952-06-02 | 1957-02-12 | Rca Corp | Semiconductors and methods of making same |
US2816850A (en) * | 1953-12-30 | 1957-12-17 | Bell Telephone Labor Inc | Semiconductive translator |
US2833678A (en) * | 1955-09-27 | 1958-05-06 | Rca Corp | Methods of surface alloying with aluminum-containing solder |
US2862840A (en) * | 1956-09-26 | 1958-12-02 | Gen Electric | Semiconductor devices |
US2931743A (en) * | 1955-05-02 | 1960-04-05 | Philco Corp | Method of fusing metal body to another body |
US2932594A (en) * | 1956-09-17 | 1960-04-12 | Rca Corp | Method of making surface alloy junctions in semiconductor bodies |
US2937961A (en) * | 1955-11-15 | 1960-05-24 | Sumner P Wolsky | Method of making junction semiconductor devices |
-
0
- NL NL224040D patent/NL224040A/xx unknown
- NL NL108504D patent/NL108504C/xx active
-
1959
- 1959-01-07 US US785374A patent/US3110637A/en not_active Expired - Lifetime
- 1959-01-09 GB GB891/59A patent/GB906938A/en not_active Expired
- 1959-01-10 DE DEN16103A patent/DE1098616B/de active Pending
- 1959-01-12 CH CH6820759A patent/CH367569A/de unknown
- 1959-01-12 FR FR1213288D patent/FR1213288A/fr not_active Expired
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2701326A (en) * | 1949-11-30 | 1955-02-01 | Bell Telephone Labor Inc | Semiconductor translating device |
US2781481A (en) * | 1952-06-02 | 1957-02-12 | Rca Corp | Semiconductors and methods of making same |
US2816850A (en) * | 1953-12-30 | 1957-12-17 | Bell Telephone Labor Inc | Semiconductive translator |
US2931743A (en) * | 1955-05-02 | 1960-04-05 | Philco Corp | Method of fusing metal body to another body |
US2833678A (en) * | 1955-09-27 | 1958-05-06 | Rca Corp | Methods of surface alloying with aluminum-containing solder |
US2937961A (en) * | 1955-11-15 | 1960-05-24 | Sumner P Wolsky | Method of making junction semiconductor devices |
US2932594A (en) * | 1956-09-17 | 1960-04-12 | Rca Corp | Method of making surface alloy junctions in semiconductor bodies |
US2862840A (en) * | 1956-09-26 | 1958-12-02 | Gen Electric | Semiconductor devices |
Also Published As
Publication number | Publication date |
---|---|
NL108504C (de) | |
NL224040A (de) | |
DE1098616B (de) | 1961-02-02 |
GB906938A (en) | 1962-09-26 |
FR1213288A (fr) | 1960-03-30 |
CH367569A (de) | 1963-02-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US2990502A (en) | Method of alloying a rectifying connection to a semi-conductive member, and semi-conductive devices made by said method | |
US2894862A (en) | Method of fabricating p-n type junction devices | |
US2805968A (en) | Semiconductor devices and method of making same | |
US3078397A (en) | Transistor | |
US3200490A (en) | Method of forming ohmic bonds to a germanium-coated silicon body with eutectic alloyforming materials | |
US3050667A (en) | Method for producing an electric semiconductor device of silicon | |
US2964830A (en) | Silicon semiconductor devices | |
US2994018A (en) | Asymmetrically conductive device and method of making the same | |
US2909453A (en) | Process for producing semiconductor devices | |
US3409809A (en) | Semiconductor or write tri-layered metal contact | |
US3298093A (en) | Bonding process | |
US3665594A (en) | Method of joining a body of semiconductor material to a contact or support member | |
US2979428A (en) | Semiconductor devices and methods of making them | |
US2956217A (en) | Semiconductor devices and methods of making them | |
US3121829A (en) | Silicon carbide semiconductor device | |
US3002135A (en) | Semiconductor device | |
US3110637A (en) | Method of producing semi-conductive electrode systems | |
US2865794A (en) | Semi-conductor device with telluride containing ohmic contact and method of forming the same | |
US3266137A (en) | Metal ball connection to crystals | |
US3241011A (en) | Silicon bonding technology | |
US3280392A (en) | Electronic semiconductor device of the four-layer junction type | |
US3537174A (en) | Process for forming tungsten barrier electrical connection | |
US3227933A (en) | Diode and contact structure | |
US3043726A (en) | Method of producing semi-conductor electrode systems | |
US2964431A (en) | Jig alloying of semiconductor devices |