US3045642A - Vacuum pumps of the getter type - Google Patents

Vacuum pumps of the getter type Download PDF

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Publication number
US3045642A
US3045642A US747475A US74747558A US3045642A US 3045642 A US3045642 A US 3045642A US 747475 A US747475 A US 747475A US 74747558 A US74747558 A US 74747558A US 3045642 A US3045642 A US 3045642A
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US
United States
Prior art keywords
chamber
vacuum
casing
vacuum chamber
wire
Prior art date
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Expired - Lifetime
Application number
US747475A
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English (en)
Inventor
Auzolle Robert
Chaumette Paul
Garin Paul
Prugne Pierre
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
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Commissariat a lEnergie Atomique CEA
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps

Definitions

  • the present invention relates to apparatus in which successive portions of a wire (this term being taken in its broadest meaning and including all elongated elements, either in the form of wires of rounded section or in the form of fiat bands or strips) are vaporized in a vacuum chamber by heating means located in such a chamber, so as to obtain, by condensation of the metal vapor on the wall of the chamber, what is known as a getter effect, said successive wire portions being supplied in said chamber by a feed mechanism generally constituted by a spool from which said wire is unwound by suitable driving means.
  • the object of the present invention is to provide an apparatus of this kind which is better adapted to meet the requirements of practice than those known at the present time.
  • the feed mechanism in particular the spool from which the getter metal wire is unwound, is located inside the vacuum chamber.
  • Such apparatus have some drawbacks.
  • the feed mechanism which is located close to the heating means (since both are located in the vacuum chamber) is brought to relatively high temperature (several hundreds of degree C.) which, in addition to the difliculty of achieving a good lubrication in a vacuum, tends to produce jamming of the getter metal wire in its guiding means.
  • the feed mechanism is placed in a gastight casing located on the outside of the vacuum chamber but in communication therewith, the getter metal wire being guided by suitable means from said mechanism to the inside of the vacuum chamber, where it is vaporized by the heating means.
  • FIG. 1 is a partly diagrammatic vertical section of a vacuum pump made according to the invention.
  • FIG. la is a sectional view on line I-I of FIG. 1.
  • FIG. 2 is another vertical sectional view of the lower portion of the apparatus taken in a plane at right angles to the section plane of FIG. 1.
  • FIG. 3 is a plan view of said apparatus.
  • FIG. 4 is a sectional view on the line IV-IV of FIG. 2, this sectional view being made on an enlarged scale.
  • the apparatus shown by the drawing which is a vacuum pump, includes a gastight vacuum chamber the bottom plate of which, for instance made of steel, is shown at 1.
  • An auxiliary gastight casing 2 is fixed by any suitable means under said plate 1, the upper wall of said casing 2 being in gastight contact with the under surface of plate 1, with the interposition of sealing means such as 3.
  • This casing 2 communicates with the inside of the vacuum chamber located above plate 1 through a passage 4 3,045,642 Patented July 24, 1962 located in the upper Wall of casing 2 and a passage 5 located in plate 1.
  • the lower end of casing 2 is closed by a plate such as 6 fixed at 7 with the interposition of sealing means 8.
  • the feed mechanism mounted in said casing 2, and for instance supported by a plate 6, includes the following elements:
  • means for propelling wire 14 for instance step by step, said means including two rollers 11 and 12 (the respective cooperating surfaces of which are serrated), at least one of said rollers being driven step by step through means which will be hereinafter described, a spring device 13 being arranged to apply said rollers against each other.
  • the Whole is carried by a frame 14 fixed by supports 15 on plate 6.
  • Wire 10 When leaving rollers 11 and 12, Wire 10 is engaged in guiding means which extend through passages 4 and 5 and which convey the end of the wire into contact with a crucible 6t) heated in any suitable manner, for instance by electron bombardment, as diagrammatically shown on FIG. 1.
  • crucible 60 is carried by a high voltage electrode 61 and it is surrounded by an electron emitting filament 63 supported by two low voltage electrodes 64 and 65 by means of which it is heated by Joule effect.
  • the above mentioned electrodes pass through plate 1 with the interposition of insulating elements 62, 66 and 67.
  • the above mentioned guiding means include a rectilinear portion including several tubes such as 16, 17, 18, 19, adapted to be easily assembled together, said tubes being for instance made of steel.
  • One of these tubes 18 is provided with external screw-threads and carries two nuts 20 and 21 by means of which it is possible to adjust, both in height and in direction, the wire guiding means with respect to the support of the pump.
  • the curvilinear portion of the guiding means which follows tube 19 is constituted by two shell sections 22, 23 at least one of which is made of graphite or any other self-lubricating material, these two sections 22 and 23 being connected together by springs such as 24.
  • Another graphite tube 25 is fixed to the end of this curved portion 22, 23.
  • the feed mechanism and its casing 14 must be electrically insulated from the metallic portions of the apparatus constituted by the Wall of the vacuum chamber and that of casing 2, this in view of the high electric voltage which generally exists between the end of the wire that is being unwound and the electrode 61 which supports crucible 60.
  • the supports 15 of frame 14 are made from the outside. I
  • a rod 27 extends through plate 6 with the interposition of gastight bellows 29.
  • Rod 27 which is for instance made of tin bronze, is guided with respect to plate 6 by three ball bearings 28 disposed at to one another and having their axes at right angles to that of rod 27.
  • the top portion of rod 27 is mounted inside bellows 29, said bellows being soldered to plate 6 at 30 and to rod 27 at 31.
  • the lower portion of rod 27 carries two ball bearings 32, 33 between which is interposed, in a hold 34 provided in rod 27, an eccentric 35 the spindle 36 of which, controlled from the outside at 37, rotates in bearings 38, 39 mounted in a guiding sleeve 40. Shaft 37, when rotated, therefore produces reciprocating displacements of rod 27.
  • the upper end of rod 27 carries a piece 41 made of an insulating material and the top end of which is turn carries a piece 42 which acts, through two pawl 43 and 44 acting in opposition, to drive, under the effect of the reciprocating movements of rod 27, a ratchet wheel 45 mounted on the spindle 46 of roller 11.
  • Rollers 11 and 12 are operatively connected by pinions 47 and 48.
  • the various spindles are mounted on ball bearings 49, 50, 51, 52 (FIG. 3).
  • a vacuum chamber a second chamber 'adjoining a wall of said vacuum chamber, registering holes in the adjoining walls of said two chambers to establish a communicating vacuum in both chambers on evacuation, heating means in said vacuum chamber to vaporize the metal strip, a supply of said metal strip and strip advancing means in said second chamber, means guiding said strip from said strip advancing means through said registering holes into the vacuum chamber, a protecting bafile in said vacuum chamber surrounding said guiding means above said holes, said baflle preventing condensation of vaporized metal in said second chamber, and means actuating said strip advancing means, said actuating means passing through a seal from said second chamber to the outside.

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
US747475A 1957-07-12 1958-07-09 Vacuum pumps of the getter type Expired - Lifetime US3045642A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1099689X 1957-07-12

Publications (1)

Publication Number Publication Date
US3045642A true US3045642A (en) 1962-07-24

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ID=9619939

Family Applications (1)

Application Number Title Priority Date Filing Date
US747475A Expired - Lifetime US3045642A (en) 1957-07-12 1958-07-09 Vacuum pumps of the getter type

Country Status (8)

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US (1) US3045642A (et)
BE (1) BE568835A (et)
CH (1) CH346618A (et)
DE (1) DE1099689B (et)
FR (1) FR1178844A (et)
GB (1) GB859515A (et)
LU (1) LU36203A1 (et)
NL (1) NL268802A (et)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3336898A (en) * 1962-11-16 1967-08-22 Burroughs Corp Vapor deposition apparatus
US3407783A (en) * 1964-08-31 1968-10-29 Emil R. Capita Vapor deposition apparatus
US3690291A (en) * 1971-04-28 1972-09-12 Nasa Deposition apparatus
US9759485B2 (en) * 2010-10-29 2017-09-12 Ulvac, Inc. Vacuum freeze-drying apparatus and frozen particle manufacturing method

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB551220A (en) * 1941-09-16 1943-02-12 Paul Alexander Improvements in or relating to the thermal deposition of metals in a vacuum
US2402269A (en) * 1941-09-03 1946-06-18 Vapco Ltd Deposition of metals
US2554902A (en) * 1948-03-25 1951-05-29 Nat Res Corp Thermionic discharge device control
GB654228A (en) * 1948-11-29 1951-06-13 Edwards & Co London Ltd W Improvements in or relating to vacuum evaporation of metals
DE878884C (de) * 1944-02-10 1953-06-08 Bosch Gmbh Robert Vorrichtung zum Einfuehren von Draehten in evakuierte Raeume
US2664853A (en) * 1952-05-12 1954-01-05 Nat Res Corp Apparatus for vapor coating
FR1051247A (fr) * 1950-09-06 1954-01-14 Pollopas Patents Ltd Perfectionnements apportés aux procédés et dispositifs pour revêtir un support en une matière non-magnétique d'une couche métallique magnétisable
US2812270A (en) * 1954-01-28 1957-11-05 Continental Can Co Method and apparatus for depositing metal coatings on metal bases

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE764927C (de) * 1939-02-22 1951-08-06 Bosch Gmbh Robert Verfahren zur Verdampfung im Vakuum
US2665229A (en) * 1951-11-05 1954-01-05 Nat Res Corp Method of coating by vapor deposition

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2402269A (en) * 1941-09-03 1946-06-18 Vapco Ltd Deposition of metals
GB551220A (en) * 1941-09-16 1943-02-12 Paul Alexander Improvements in or relating to the thermal deposition of metals in a vacuum
DE878884C (de) * 1944-02-10 1953-06-08 Bosch Gmbh Robert Vorrichtung zum Einfuehren von Draehten in evakuierte Raeume
US2554902A (en) * 1948-03-25 1951-05-29 Nat Res Corp Thermionic discharge device control
GB654228A (en) * 1948-11-29 1951-06-13 Edwards & Co London Ltd W Improvements in or relating to vacuum evaporation of metals
FR1051247A (fr) * 1950-09-06 1954-01-14 Pollopas Patents Ltd Perfectionnements apportés aux procédés et dispositifs pour revêtir un support en une matière non-magnétique d'une couche métallique magnétisable
US2664853A (en) * 1952-05-12 1954-01-05 Nat Res Corp Apparatus for vapor coating
US2812270A (en) * 1954-01-28 1957-11-05 Continental Can Co Method and apparatus for depositing metal coatings on metal bases

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3336898A (en) * 1962-11-16 1967-08-22 Burroughs Corp Vapor deposition apparatus
US3407783A (en) * 1964-08-31 1968-10-29 Emil R. Capita Vapor deposition apparatus
US3690291A (en) * 1971-04-28 1972-09-12 Nasa Deposition apparatus
US9759485B2 (en) * 2010-10-29 2017-09-12 Ulvac, Inc. Vacuum freeze-drying apparatus and frozen particle manufacturing method

Also Published As

Publication number Publication date
FR1178844A (fr) 1959-05-15
LU36203A1 (et)
NL268802A (et)
GB859515A (en) 1961-01-25
CH346618A (fr) 1960-05-31
DE1099689B (de) 1961-02-16
BE568835A (et)

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